CN205749284U - The incoherent lamination diffraction imaging system that multi-wavelength illuminates simultaneously - Google Patents

The incoherent lamination diffraction imaging system that multi-wavelength illuminates simultaneously Download PDF

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CN205749284U
CN205749284U CN201620117718.3U CN201620117718U CN205749284U CN 205749284 U CN205749284 U CN 205749284U CN 201620117718 U CN201620117718 U CN 201620117718U CN 205749284 U CN205749284 U CN 205749284U
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probe
testing sample
wavelength
incoherent
complex amplitude
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韩洋
何俊华
闫亚东
韦明智
潘安
万能
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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Abstract

This utility model provides the incoherent lamination diffraction imaging system that a kind of multi-wavelength illuminates simultaneously, including the double broadbands Amici prism, spatial filter, apochromat, probe and the imaging detector that set gradually along light path;Testing sample is between probe and imaging detector.Also including laser instrument, the emergent light of described laser instrument vertically injects double broadbands Amici prism by reflecting mirror of enjoying a double blessing.Multiplexing iterative algorithm based on lamination scanning, recovers the COMPLEX AMPLITUDE of testing sample, the COMPLEX AMPLITUDE of probe and spectral weight.Imaging scheme of the present utility model and corresponding algorithm, can not only recover under different-waveband corresponding complex amplitude testing sample, also can recover the COMPLEX AMPLITUDE of illuminator probe corresponding under the spectral weight of different-waveband and different-waveband simultaneously.

Description

The incoherent lamination diffraction imaging system that multi-wavelength illuminates simultaneously
Technical field
This utility model belongs to lamination diffraction imaging technology (Ptychography) field, is specifically related to a kind of incoherent lamination diffraction imaging scheme simultaneously illuminated by testing sample multi-wavelength to be measured, proposes the lamination diffraction imaging algorithm of multiplexing.
Background technology
In the fields such as biology and material science, traditional optical image technology using lens cannot meet the demand of the most growing high-resolution imaging.The resolution of these imaging techniques is primarily limited to the numerical aperture size of lens, and especially in X-ray field, the lens of large-numerical aperture are extremely hard to manufacture.Therefore, lamination Imaging just receives more and more attention as a kind of emerging lensless imaging technique.
Lamination imaging technique is a kind of lensless scanning coherent diffraction imaging technology, by controlling illuminating bundle or testing sample, and the diverse location on illumination testing sample, and then be iterated recovering testing sample image with a series of diffraction patterns obtained.See (Ultramicroscopy 10 (3): 187~198,1987).Lamination iterative algorithm substantially belongs to a kind of Phase Retrieve Algorithm, but it is different with traditional Phase Retrieve Algorithm again, retrained when the Diffraction fringe distribution of each position is carried out phase recovery, eliminate the ambiguity understood, therefore relative to traditional Phase Retrieve Algorithm, convergence rate improves, and can recover sample image information faster.
Traditional lamination imaging technique often uses Single wavelength to illuminate, even if using multi-wavelength illumination to promote Quality of recovery is also to use the mode illuminated successively, see (Acta Phys.Sin.Vol.65, No.1 (2016) 014204), complex operation, processes the cycle longer;Simultaneously the highest to the coherence requirement of light, illumination of incoherent light is not considered conducive to diffraction imaging always, sees (Dong S Y, Shiradkar R, Nanda P, Zheng G A2014Biomed.Opt.Express5 1757)
Utility model content
The purpose of this utility model is to provide the Fresnel territory incoherent lamination diffraction imaging technology that a kind of multi-wavelength illuminates simultaneously, the complex amplitude information of corresponding testing sample can be recovered under different-waveband, also can recover the COMPLEX AMPLITUDE of different illuminator probes corresponding under the spectral weight of different-waveband and different-waveband simultaneously.
Technical solution of the present utility model is:
The incoherent lamination diffraction imaging system that a kind of multi-wavelength illuminates simultaneously, it is particular in that: include along double broadbands Amici prism, spatial filter, apochromat, probe and the imaging detector that light path sets gradually;Testing sample is between probe and imaging detector.Also including laser instrument, the emergent light of described laser instrument vertically injects double broadbands Amici prism by reflecting mirror of enjoying a double blessing.
Above-mentioned laser instrument is three, respectively red laser, green (light) laser and blue laser.
Use for convenience, use aperture diaphragm as probe.
Above-mentioned imaging detector is area array CCD, and model is Cool snap EZ type, and single Pixel Dimensions is 6.45um × 6.45um, and window size is 1392pixels × 1040pixels.
Above-mentioned probe distance testing sample d=28mm, testing sample is diffracted into distance D=100mm of imaging detector.
This utility model also provides for the incoherent lamination diffraction imaging method that a kind of multi-wavelength illuminates simultaneously, and it is particular in that: imaging process includes procedure below:
1) the various lasers illumination that at least one is above is used;
2) light is adjusted to level injection by double broadbands Amici prism conjunction bundle by the laser of outgoing respectively through reflecting mirror of enjoying a double blessing accordingly;
3) light after closing bundle expands through spatial filter, then gets on probe after apochromat collimates;
4) probe realizes the scanning of fixed step size by precision optical machinery translation stage, and testing sample is carried out lamination scanning;During adjacent twice sweep, irradiation part has overlapping;Use the strength information of the diffraction image of imaging detector record each probe scanning position;
5) by step 4) the diffraction image strength information that records substitutes into multiplexing iterative algorithm based on lamination scanning, recovers the COMPLEX AMPLITUDE of testing sample, the COMPLEX AMPLITUDE of probe and spectral weight.
Above-mentioned multiplexing iterative algorithm detailed step based on lamination scanning is as follows:
Step 5.1 sets the COMPLEX AMPLITUDE of testing sample as Om[r (x, y)], the COMPLEX AMPLITUDE of probe is Pm[r (x, y)], spectral weight is Sc,m, wherein (x y) is the coordinate corresponding to object plane cartesian coordinate system to r;Probe scanning step-length is Rc=(Rx,c,Ry,c), c=1,2 ..., n, wherein c is probe number, and m is wavelength number;Coordinate corresponding to image plane cartesian coordinate system be u (x, y);
Use testing sample COMPLEX AMPLITUDE O corresponding under the assessment mode stochastic appraisal different wave length respectively of all 1's matrixm[r (x, y)], COMPLEX AMPLITUDE P of probem[r (x, y)] and spectral weight Sc,m
Spectral weight S of step 5.2 integrating step 5.1 assessmentc,m, testing sample COMPLEX AMPLITUDE Om[r (x, y)] and COMPLEX AMPLITUDE P of probem[r (x, y)], the COMPLEX AMPLITUDE of outgoing wave obtained after simultaneously illuminating testing sample according to formula (1) calculating multi-wavelength:
Step 5.3 makes the outgoing wave of step 5.2 be diffracted into image planes according to formula (2), obtains the COMPLEX AMPLITUDE of the diffraction pattern of testing sample:
Ec,m[u (x, y)]=ofrt [Ec,m[r(x,y)]] (2)
Step 5.4 retains the diffraction pattern phase information of testing sample in step 5.3, utilizes the amplitude information of the diffraction pattern updating testing sample, the COMPLEX AMPLITUDE of the diffraction pattern after being updated:
I in formulac[u (x, y)] is the intensity level of the lower corresponding testing sample of each probe illumination received by imaging detector;
The diffraction pattern of the renewal that step 5.4 is obtained by step 5.5 according to formula (4) does inverse fresnel diffraction to object plane;Multi-wavelength after being updated illuminates the COMPLEX AMPLITUDE of the outgoing wave after testing sample simultaneously:
Ec,m[r ' (x, y)]=iofrt [E 'c,m[u(x,y)]] (4)
Wherein, ofrt and iofrt is respectively defined as fresnel diffraction and inverse fresnel diffraction;
The E that step 5.6 obtains according to step 5.2c,mThe E that [r (x, y)] and step 5.5 obtainc,m[r ' (x, y) formula (5) and formula (6)] are utilized, and use the newer of ePIE algorithm, see (Maiden A M, Rodenburg J M2009Ultramicroscopy1091256), update under different wave length COMPLEX AMPLITUDE and the COMPLEX AMPLITUDE of probe of corresponding testing sample:
α in formula, β correspond respectively to the step-size in search of algorithm, make α, β be 1, and * represents complex conjugate and calculates, and
The COMPLEX AMPLITUDE of the probe that step 5.7 obtains according to step 5.6 updates the spectral weight that different wave length is corresponding:
Sc,m=∑x , y|Pm[r(x,y)]|2 (8)
Repeat step 5.2-5.7 until each probe illuminates the strength information i.e. I of the diffraction pattern that lower imaging detector is receivedcAfter [u (x, y)] is all used up, it is considered as completing an iteration;After successive ignition, as the E ' that corresponding step 5.4 obtainsc,mThe E that [u (x, y)] obtains with step 5.3c,mWhen the mean square error of [u (x, y)] is less than 0.01, this algorithm reaches convergence;The i.e. mean square error extent of condition of convergence is depending on real needs, and 0.03 here is through repeatedly attempting the empirical value selected.The computing formula of mean square error is:
After algorithm reaches to restrain, extract the COMPLEX AMPLITUDE of lower obtained each wave band corresponding to testing sample of multi-wavelength illumination, carry out coloud coding and can realize the true color recovery of testing sample, image quality can also be improved simultaneously;Using the coded system of TSC-system, coding formula is accordingly
In experiment, mean square error MSE is used to evaluate the quality restored;MSE value is the least, represents that the quality restored is the best;Calculate two pictures f (x, y) and g (x, mean square error computing formula y) is as follows:
Wherein, M, N are the number of pixels in x, y direction respectively.
Above-mentioned probe diameter is 3.0mm, and probe displacement is 0.5mm, and overlapping rate is 83.3%.
The beneficial effects of the utility model are:
1, imaging scheme of the present utility model and corresponding algorithm, can not only recover under different-waveband corresponding complex amplitude testing sample, also can recover the COMPLEX AMPLITUDE of illuminator probe corresponding under the spectral weight of different-waveband and different-waveband simultaneously;
2, the diffraction pattern under this utility model can illuminate by obtaining multiband simultaneously, recovers testing sample corresponding under different-waveband, the i.e. spectral response of testing sample, has multichannel and multispectral advantage that traditional lamination diffraction imaging does not has;
3, this utility model is by the way of color image encoding, it is achieved the true color of testing sample is recovered and the enhancing of picture quality.
Accompanying drawing explanation
Fig. 1 is the imaging optical path figure of the Fresnel territory incoherent lamination diffraction imaging that formation method of the present utility model illuminates with three wavelength simultaneously.
Fig. 2 is the multiplexing algorithm flow chart of lamination diffraction imaging of the present utility model.
Reference in figure: 1-red laser;2-green (light) laser;3-blue laser;4-enjoys a double blessing reflecting mirror I;5-enjoys a double blessing reflecting mirror II;6-enjoys a double blessing reflecting mirror III;The double broadband Amici prism I of 7-;8-spatial filter;9-apochromat;10-CCD;The double broadband Amici prism II of 11-.
Detailed description of the invention
Below in conjunction with the accompanying drawings this utility model is further described, uses three kinds of different laser illumination, respectively HONGGUANG He-Ne laser instrument 1, green light semiconductor 2 and blue semiconductor laser 3 in the present embodiment.
As it is shown in figure 1, imaging process of the present utility model is:
Initially with three of the above laser illumination;Light is adjusted to level injection by double broadband Amici prism I7 and double broadband Amici prism II11 conjunction bundle by the three beams of laser of outgoing respectively through corresponding three reflecting mirrors of enjoying a double blessing;Closing the light after bundle to expand through spatial filter 8, then collimate through apochromat 9, recycling aperture diaphragm is as probe;Make laser be radiated on testing sample by probe, realized the scanning of fixed step size by the precision optical machinery translation stage of mobile band probe, testing sample is carried out lamination scanning;Utilize imaging detector record diffraction image intensity;Multiplexing iterative algorithm based on lamination scanning is used to recover the COMPLEX AMPLITUDE of testing sample, the COMPLEX AMPLITUDE of probe and spectrum ratio.
Probe displacement ensures to irradiate during adjacent twice translation part overlapping by certain area.In the present embodiment, probe diameter used is 3.0mm, and probe displacement is 0.5mm, and overlapping rate is 83.3%;Probe distance testing sample d=28mm, testing sample is diffracted into distance D=100mm of imaging detector.Imaging detector is area array CCD (Cool snap EZ type), and single Pixel Dimensions is 6.45um × 6.45um, and window size is 1392pixels × 1040pixels.
As in figure 2 it is shown, be the multiplexing algorithm flow chart of lamination diffraction imaging of the present utility model, detailed step is as follows:
Step 1 sets the COMPLEX AMPLITUDE of testing sample as Om[r (x, y)], the COMPLEX AMPLITUDE of probe is Pm[r (x, y)], spectral weight is Sc,m, wherein (x y) is the coordinate corresponding to object plane cartesian coordinate system to r;Probe scanning step-length is Rc=(Rx,c,Ry,c), c=1,2 ..., n, wherein c is probe number, and m is wavelength number;Coordinate corresponding to image plane cartesian coordinate system be u (x, y);
Use testing sample COMPLEX AMPLITUDE O corresponding under the assessment mode stochastic appraisal different wave length respectively of all 1's matrixm[r (x, y)], COMPLEX AMPLITUDE P of probem[r (x, y)] and spectral weight Sc,m
Spectral weight S of step 2 integrating step 1 assessmentc,m, testing sample COMPLEX AMPLITUDE Om[r (x, y)] and COMPLEX AMPLITUDE P of probem[r (x, y)], the COMPLEX AMPLITUDE of outgoing wave obtained after simultaneously illuminating testing sample according to formula (1) calculating multi-wavelength:
Step 3 makes the outgoing wave of step 2 be diffracted into image planes according to formula (2), obtains the COMPLEX AMPLITUDE of the diffraction pattern of testing sample:
Ec,m[u (x, y)]=ofrt [Ec,m[r(x,y)]] (2)
Step 4 retains the diffraction pattern phase information of testing sample in step 3, utilizes the amplitude information of the diffraction pattern updating testing sample, the COMPLEX AMPLITUDE of the diffraction pattern after being updated:
I in formulac[u (x, y)] is the intensity level of the lower corresponding testing sample of each probe illumination received by imaging detector;
The diffraction pattern of the renewal that step 4 is obtained by step 5 according to formula (4) does inverse fresnel diffraction to object plane;Multi-wavelength after being updated illuminates the COMPLEX AMPLITUDE of the outgoing wave after testing sample simultaneously:
Ec,m[r ' (x, y)]=iofrt [E 'c,m[u(x,y)]] (4)
Wherein, ofrt and iofrt is respectively defined as fresnel diffraction and inverse fresnel diffraction;
The E that step 6 obtains according to step 2c,mThe E that [r (x, y)] and step 5 obtainc,m[r ' (x, y) formula (5) and formula (6)] are utilized, and use the newer of ePIE algorithm, see (Maiden A M, Rodenburg J M 2009Ultramicroscopy1091256), update under different wave length COMPLEX AMPLITUDE and the COMPLEX AMPLITUDE of probe of corresponding testing sample:
α in formula, β correspond respectively to the step-size in search of algorithm, make α, β be 1, and * represents complex conjugate and calculates, and
The COMPLEX AMPLITUDE of the probe that step 7 obtains according to step 6 updates the spectral weight that different wave length is corresponding:
Sc,m=∑x,y|Pm[r(x,y)]|2 (8)
Repeat step 2-7 until each probe illuminates the strength information i.e. I of the diffraction pattern that lower imaging detector is receivedcAfter [u (x, y)] is all used up, it is considered as completing an iteration;After successive ignition, as the E ' that corresponding step 4 obtainsc,mThe E that [u (x, y)] obtains with step 3c,mWhen the mean square error of [u (x, y)] is less than 0.01, this algorithm reaches convergence;The i.e. mean square error extent of condition of convergence is depending on real needs, and 0.03 here is through repeatedly attempting the empirical value selected.The computing formula of mean square error is:
After algorithm reaches to restrain, extract the COMPLEX AMPLITUDE of lower obtained each wave band corresponding to testing sample of multi-wavelength illumination, carry out coloud coding and can realize the true color recovery of testing sample, image quality can also be improved simultaneously;Using the coded system of TSC-system, coding formula is accordingly
In experiment, mean square error MSE is used to evaluate the quality restored;MSE value is the least, represents that the quality restored is the best;Calculate two pictures f (x, y) and g (x, mean square error computing formula y) is as follows:
Wherein, M, N are the number of pixels in x, y direction respectively.
Use axis transecting patient tissue as sample.Intuitively three beams of laser is adjusted to the mixing of about equal proportion, the diffraction pattern that CCD receives, it is to be formed by the diffraction pattern non-coherent addition that RGB three wave band is corresponding respectively, obtains respectively only with diffraction pattern corresponding when HONGGUANG, green glow and blue illumination by blocking other two-beam.It can be seen that non-coherent addition, the three mixed diffraction patterns of wave band do not have the diffraction pattern that each wave band is corresponding clear, but the information that three wave bands are each comprised remains wherein.
The multiplexing iterative algorithm proposed by use, restoration result after iteration 300 times.Experiment recover spectrum ratio be 1:1.04:0.93, be similar to equal proportion, with above-mentioned design intuitively roughly the same.Actually RGB three wave band restoration result is the spectral response that this testing sample is corresponding, it can be seen that outside the careful joint of a good appetite suddenly appearing in a serious disease is slightly different, this testing sample is unanimous on the whole to the spectral response of RGB three wavelength.The true color image definition obtained by coloud coding is higher than the restoration result that three wave bands are corresponding, it was demonstrated that coloud coding can actually promote the Quality of recovery of image.Thus we can not only recover the true color complex amplitude image of testing sample well, it also is able to obtain the spectral response under different-waveband simultaneously, this as excavated testing sample details, distinguishes that testing sample provides more probability to processing testing sample further.
Experiment has recovered the complex amplitude probe of each wave band the most simultaneously, can be seen that each probe and differ, this is due to illuminating bundle after probe of the light beam of different wave length and to differ, this also illustrates this algorithm and can not only recover testing sample, also be able to recover the complex amplitude probe that different-waveband is the most corresponding simultaneously.
In verifying the imaging technique and corresponding algorithmic procedure that this utility model is proposed, we have carried out further checking also by emulation to this utility model not only by experiment, owing to emulation does not exist error, and be the known quantity be given at simulation process middle probe and spectral weight, so this testing sample correspondence amplitude and phase information under the true color pattern of testing sample and each wavelength are only recovered by we.The detailed description of the invention of emulation part is as follows:
True color testing sample used in emulation, the parameter that emulation uses is as follows: illuminating bundle uses 632.8nm, tri-kinds of wavelength of 532nm, 473nm, the three wavelength complete equal proportion i.e. spectral weight of mixing is 1:1:1, probe scanning uses the array of 10 × 10, and probe displacement is 12pixels, and probe diameter is 40pixels, overlapping rate is 70%, on diffraction surfaces, effective sampling points is 128pixels × 128pixels, and probe is close to object and is placed, and object is 50mm away from CCD.By matlab 2013 software, the device corresponding to above-mentioned parameter is emulated, the COMPLEX AMPLITUDE i.e. pattern not output that different wave length obtained under each probe is corresponding, it is directly substituted into the algorithm that this utility model proposed to be iterated, and obtains final restoration result.
At the restoration result after algorithm iteration 300 times, wherein testing sample recovers the COMPLEX AMPLITUDE corresponding to each wavelength after three wavelength illuminate and with this algorithm simultaneously.
The mean square error of table 1 restoration result
The mean square error of restoration result is as shown in table 1, it can be seen that maximum of which mean square error is only 0.0218, meets the condition of convergence, and the spectral response picture quality that each wave band recovers is the best.The quality of phase image is significantly better than amplitude image picture, amplitude pattern has a little partially dark, and the amplitude information in the COMPLEX AMPLITUDE of mixing, mainly due in data handling, is normalized by this, so that the amplitude of each wavelength is less than normal, thus image can be partially dark.
This utility model illuminates the feasibility of incoherent lamination diffraction imaging scheme by testing and emulate mutual authentication multi-wavelength simultaneously.Demonstrate the program and there is multichannel and multispectral advantage.Meanwhile, by the way of color image encoding, it is possible to the true color realizing testing sample is restored and the enhancing of picture quality, and these are not available for traditional lamination diffraction imaging.The result of study that this utility model is proposed is that lamination diffraction imaging technology presents more probability in fields such as visible domain, electronics wave band, X-ray.

Claims (5)

1. the incoherent lamination diffraction imaging system that a multi-wavelength illuminates simultaneously, it is characterised in that: include edge Double broadbands Amici prism, spatial filter, apochromat, probe and imaging that light path sets gradually are visited Survey device;Also including laser instrument, the emergent light of described laser instrument is vertically injected double broadband by reflecting mirror of enjoying a double blessing and is divided Light prism;Testing sample is between probe and imaging detector.
The incoherent lamination diffraction imaging system that a kind of multi-wavelength the most according to claim 1 illuminates simultaneously, It is characterized in that: described laser instrument is three, respectively red laser, green (light) laser and blue laser Device.
The incoherent lamination diffraction imaging system that multi-wavelength the most according to claim 1 and 2 illuminates simultaneously, It is characterized in that: use aperture diaphragm as probe.
The incoherent lamination diffraction imaging system that multi-wavelength the most according to claim 1 and 2 illuminates simultaneously, It is characterized in that: described imaging detector is area array CCD, model is Cool snap EZ type, single pixel chi Very little for 6.45um × 6.45um, window size is 1392pixels × 1040pixels.
The incoherent lamination diffraction imaging system that multi-wavelength the most according to claim 1 illuminates simultaneously, its It is characterised by: described probe distance testing sample d=28mm, testing sample is diffracted into the distance of imaging detector D=100mm.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105717070A (en) * 2016-02-05 2016-06-29 中国科学院西安光学精密机械研究所 Incoherent laminated diffraction imaging system and imaging method achieving simultaneous multi-wavelength illumination
CN107655405A (en) * 2017-08-29 2018-02-02 南京理工大学 The method that axial range error between object and CCD is eliminated using self-focusing iterative algorithm
CN111290108A (en) * 2020-03-07 2020-06-16 上海科技大学 Reflection scanning coherent diffraction microscopic imaging device based on broadband light source and application

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105717070A (en) * 2016-02-05 2016-06-29 中国科学院西安光学精密机械研究所 Incoherent laminated diffraction imaging system and imaging method achieving simultaneous multi-wavelength illumination
CN105717070B (en) * 2016-02-05 2019-04-02 中国科学院西安光学精密机械研究所 The incoherent lamination diffraction imaging method that multi-wavelength illuminates simultaneously
CN107655405A (en) * 2017-08-29 2018-02-02 南京理工大学 The method that axial range error between object and CCD is eliminated using self-focusing iterative algorithm
CN107655405B (en) * 2017-08-29 2020-01-24 南京理工大学 Method for eliminating axial distance error between object and CCD by using self-focusing iterative algorithm
CN111290108A (en) * 2020-03-07 2020-06-16 上海科技大学 Reflection scanning coherent diffraction microscopic imaging device based on broadband light source and application
CN111290108B (en) * 2020-03-07 2022-08-02 上海科技大学 Reflection scanning coherent diffraction microscopic imaging device based on broadband light source and application

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