CN205723581U - The making herbs into wool cell piece efficient automatic clearing apparatus of porous surface silicon - Google Patents
The making herbs into wool cell piece efficient automatic clearing apparatus of porous surface silicon Download PDFInfo
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- CN205723581U CN205723581U CN201620196736.5U CN201620196736U CN205723581U CN 205723581 U CN205723581 U CN 205723581U CN 201620196736 U CN201620196736 U CN 201620196736U CN 205723581 U CN205723581 U CN 205723581U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
nullThis utility model relates to a kind of making herbs into wool cell piece efficient automatic clearing apparatus of porous surface silicon: include medicine-chest，Pure water tank，Lye tank，Remove porous silicon liquid work pool，Standby liquid pool，Pure water clear water reserviors，Remove porous silicon solution filtration processing tank，Medicinal liquid pre-heater，Medicine gas、Liquid preparation automatic controller，Pure water pre-heater，Pure water adds automatic controller，Remove porous silicon liquid filtration processing tank，Alkali liquor pre-heater，Alkali liquid compounding automatic controller，Standby liquid thermostatic heater，Standby liquid constant temperature cooler，Remove porous silicon work pool liquid level self-controller，Remove porous silicon pond solution concentration automatic controller，Remove porous silicon work pool liquid inventory automatic controller，Mechanical hand，Porous silicon is gone to embathe time controller，Pure water cleans spray head，Pure water cleans nozzle，Pure water constant voltage thermostat，Remove porous silicon work pool overfall，Running parameter display screen，Operating board，Change liquid flow-guiding mouth，Useless pure water drainage port，Give up and remove porous silicon solution pool，Useless pure water pond.
Description
Technical field
This utility model relates to a kind of making herbs into wool cell piece efficient automatic clearing apparatus of porous surface silicon, particularly relates to one and automatically controls degree height, and high efficiency is thoroughly removed the automaton of polycrystalline silicon texturing rear surface porous silicon, belonged to solar-photovoltaic technology field.
Background technology
China's crystal silicon solar energy battery industrial technology is the most highly developed at present, wherein matte preparation and to clean be very important Technology operation in crystal silicon solar cell sheet production process, directly affects important unit for electrical property parameters and the outward appearance such as Uoc.lsc of cell piece.When using cleaning equipment after the making herbs into wool of routine, all use Artificial Control and at normal temperatures KOH solution remove the porous silicon that polysilicon chip surface produces after making herbs into wool.Owing to all devices is not provided with any to control the devices such as pharmaceutical quantities, concentration of lye, rinse liquid temperature, pressure, flow and multiplexing liquid filtration treatment liquid circulation, thus each item data of cleanout fluid changes along with manual operation and the change of environment, all working key element is in uncontrolled or artificial free controlled state, thus seriously constrains the processing procedure control ability of this procedure technology technology.Due to the change of drug solution preparing bubble, the change of concentration of lotion, and the change of cleaning fluid pressure, flow circulation, particularly rinse liquid temperature along with the change etc. of environment a series of nonstandard, uncertain factor causes solution chemistry activity and reaction rate is relatively low and activity often changes instability, ultimately cause removal porous silicon poor effect, instability, inefficiency, yield poorly, quality is unstable, fragment rate is high, relatively costly, and operation staff labor intensity is big, poor working environment, dangerous.When cleaning porous silicon equipment after using the making herbs into wool of routine, good for guaranteeing the removal effect of porous surface silicon, good aluminum back surface field can be formed after making cell piece sintering, obtain higher Uoc and Lsc, traditional clean room temperature and without any automatically controlling in the case of can only use the artificial concocting method of KOH solution, necessarily increase solution concentration and the prolongation time of embathing improves cleaning performance, but still the porous silicon of matte depths can not be made thoroughly to remove totally, too increase the wafer debris rate of this process simultaneously, not only increase cost, and inefficiency, yield carries the highest, quality does not ensures, working environment and labor intensity and safety in production is also had to be difficult to improve.
Utility model content
Technical problem to be solved in the utility model be provide one can be arranged to automatically control by standard for above-mentioned prior art, high efficiency, low cost, thoroughly remove crystal silicon chip making herbs into wool rear surface porous silicon removal device, thus improve porous surface silicon clearance, electrical performance of cell, cell piece presentation quality, reduce and clean fragment rate, work efficiency is greatly improved, improve production yields, reduce labor intensity, improve working environment, improve operating safety factor, reduce production cost, improve and stable cell sheet indices quality.This utility model improves nearly 5 times of efficiency after implementing, every streamline is saved employee 5, improved yield 5 times, reduces medicament and with the costs such as alkali more than 40%, reduces fragment rate 1.3%, and the on-the-spot air of operation greatly improves, and operational hazards coefficient greatly reduces.
The technical scheme in the invention for solving the above technical problem is: a kind of making herbs into wool cell piece efficient automatic clearing apparatus of porous surface silicon, it mainly includes medicine-chest, pure water tank, lye tank, remove porous silicon work liquid pool, standby liquid pool, pure water service sink, mixed liquid pool, pure water cleans spray head, pure water cleans shower, remove porous silicon pond overfall, give up and go to porous silicon liquid pool and useless pure water pond, medicinal liquid preheater and medicine gas-liquid preparation automatic controller it is provided with between described medicine-chest and mixed liquid pool, pure water pre-heater is set between described pure water tank and mixed liquid pool and pure water adds automatic controller, alkali liquor pre-heater and Alkali liquid compounding automatic controller are set between described lye tank and mixed liquid pool, standby liquid thermostatic heater and standby liquid constant temperature cooler it is provided with in the middle of described standby liquid pool；And standby liquid pool and go be provided with porous silicon work pool liquid level self-controller between porous silicon liquid pool and remove porous silicon work pool solution concentration automatic controller and remove porous silicon work pool liquid inventory automatic controller, by going porous silicon pit level, concentration, flow digital display meter to automatically control porous silicon work pool liquid level, mechanical hand keeps 5cm under plane when grabbing the wafer gaily decorated basket and placing in pond, alkali concn 9.15%, gas-liquid flow 0.35-0.75m3/h；Guarantee that embathing the porous silicon time under said temperature, concentration, flow and liquid level standard is 28 seconds, it is provided with pure water constant temperature and pressure device between described pure water tank and pure water service sink and pure water cleans shower, clean at described pure water and on shower, be provided with some groups of pure water cleaning spray heads, carry out temperature, pressure by automatic digital display thermometer, piezometer automatically to control by constant temperature, constant voltage standard-required, wherein temperature sets 60 DEG C, and pressure sets 0.5MPa；By constant temperature 60 DEG C, the constant voltage 0.5MPa pure water cleaning showers time is 95 seconds, arrange first in the described bottom removing porous silicon liquid work pool and change liquid flow-guiding mouth, arrange second in the bottom of described standby liquid pool and change liquid flow-guiding mouth, and above-mentioned two flow-guiding mouths all go porous silicon liquid pool to be connected with useless, drain tube is set bottom described pure water service sink and is connected with useless pure water pond.
Described go to arrange between porous silicon work liquid pool and standby liquid pool to remove porous silicon liquid filtration processing tank, described go porous silicon work liquid pool side be provided with porous silicon pond overfall, flowed out by overfall by the silicon liquid that goes going porous silicon work liquid pool to overflow, and after past porous silicon liquid filtration processing tank, flow into standby liquid pool recycling.
Go porous silicon work liquid pool that mechanical hand is set among pure water service sink described.
Described medicine gas-liquid prepares automatic controller, pure water adds automatic controller Alkali liquid compounding automatic controller, remove porous silicon work pool liquid level self-controller, remove porous silicon work pool solution concentration automatic controller, standby liquid pool thermostatical automatic controller and go porous silicon work pool liquid inventory automatic controller to be connected with operating board respectively, state modulator is carried out by operating board, and on operating board, it is provided with running parameter display screen and goes porous silicon to embathe time controller, being respectively intended to show that the time is embathed in the parameter state of each controller and control.
Multiple filtration net and quartz sand layer is set in described porous silicon liquid filtration processing tank.
Compared with prior art, the utility model has the advantage of:
This utility model is respectively at medicine-chest, pure water tank and lye tank are provided with amount of preparation automaton and pre-heater between connecting with mixed liquid pool, thus can be according to the pharmaceutical quantities of Scientific Establishment, alkali liquor amount and pure water amount matching criterion ratio automatically control preparation, medicament 0.83% can be saved, alkali 1.85%, cost-saved more than 40%, time of compounding 2 hours are saved in per tour, less manpower 5, and process for preparation is in closed state, it is therefore prevented that waste gas excessive and pollute workplace air, it is therefore prevented that artificial preparation imprudence medicament, alkali liquor are hindered human body situation and are occurred；Also can enter mixed liquid pool after respectively medicinal liquid, alkali liquor and pure water being carried out automatic heating according to design temperature.The porous silicon cleaning solution that goes in standby liquid pool is sufficiently mixed through mixed liquid pool and produces chemical reaction, thermostats are overlapped in heated and cooling two, 48 DEG C of temperature index making porous silicon cleaning solution not only conform to most to adapt to but also conform to every proportioning index and 9.15% concentration, become and there is high chemism, high chemical reaction rate remove porous silicon cleaning solution, reaching the time of embathing was reduced to 28 seconds from original 45 seconds, and removing porous silicon is promoted to 99.7% from original clearance rate 95%, and owing to the time is short and reduce fragment rate 1.3%, reach 0.2%.Standby pool connection goes to be respectively provided with porous silicon work pool liquid level controller in the middle of porous silicon work pool, concentration and auto flow controller, according to setting bubbling liquid throughput 0.35-0.75m3/ h, pure water flow 5-8L/min, crystal silicon chip blade face is submerged to 5cm liquid level, concentration 9.15%, 48 DEG C of grades of temperature the most rationally adapt to standard, it is no longer necessary to manually go to levelling and midway to shut down interpolation process, mechanical hand is arranged to automatic control velocity and scavenging period, wherein chemical liquid embathed the time of setting as 28 seconds, within 45 seconds, save 17 seconds than prior art, pure water tank connects with pure water cleaning showers pond, centre arranges constant temperature and pressure automaton and some spray heads, spray head correspondence position of manipulator, pure water design temperature 60 DEG C, change conventional room temperature state, pressure 0.5MPa, 95 seconds time, within 125 seconds, save 30 seconds than prior art, cleaning efficiency is improve due to warm water, decrease scavenging period, and save pure water amount more than 23%；Go porous silicon work liquid pool to arrange in connecting with standby liquid pool and remove porous silicon liquid filtration processing tank; porous silicon gas-liquid is made to recycle by entering back into standby liquid pool after contaminant filter and liquid-gas disposal; improve liquid gas utilization rate more than 60%; considerably reduce cost; prolongation utilizes the time to reach 16 hours and changes liquid once; extend time less than prior art 10 6 little time, per tour reduces because changing average 1 hour of downtime of liquid.This utility model makes porous silicon clearing process process by the setting that a series of innovations rationally adapt to, in being in most adapting to reasonably automatically control, not only increase removing porous silicon effect 4.7% and improve work efficiency 5 times, save employee 5 (every set), also a saving this process cost more than 40%, reduce fragment rate 2.3%, separate unit set output increased 5 times, also mitigate labor intensity simultaneously, improve working environment, improve work safety guarantee, and do not damage the service life of plant equipment.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model
Wherein:
Medicine-chest 1
Pure water tank 2
Lye tank 3
Remove porous silicon liquid work pool 4
Standby liquid pool 5
Pure water service sink 6
Remove porous silicon liquid filtration processing tank 7
Medicinal liquid preheats 8
Drug solution preparing automatic controller 9
Pure water pre-heater 10
Pure water adds automatic controller 11
Mixed liquid pool 12
Alkali liquor pre-heater 13
Alkali liquor configuration automatic controller 14
Standby liquid thermostatic heater 15
Standby liquid constant temperature cooler 16
Remove porous silicon work pool liquid level self-controller 17
Remove porous silicon working solution concentration automatic controller 18
Remove porous silicon working solution auto flow controller 19
Mechanical hand 20
Porous silicon is gone to embathe automatic timing device 21
Pure water cleans spray head 22
Pure water cleans shower 23
Pure water constant voltage thermostat 24
Remove porous silicon work pool overfall 25
Operational data display screen 26
Operating board 27
First changes liquid flow-guiding mouth 28
Second changes liquid flow-guiding mouth 29
Useless pure water drainage port 30
Give up and remove porous silicon liquid pool 31
Useless pure water pond 32.
Detailed description of the invention
Below in conjunction with accompanying drawing embodiment, this utility model is described in further detail.
This utility model relates to a kind of making herbs into wool cell piece efficient automatic clearing apparatus of porous surface silicon, mainly includes medicine-chest 1, pure water tank 2, lye tank 3, remove porous silicon work liquid pool 4, standby liquid pool 5, pure water service sink 6, mixed liquid pool 12, mechanical hand 20, pure water cleans spray head 22, and pure water cleans shower 23, remove porous silicon pond overfall 25, give up and go to porous silicon liquid pool 31 and useless pure water pond 32.
Medicinal liquid preheater 8 and medicine gas-liquid preparation automatic controller 9 it is provided with between described medicine-chest 1 and mixed liquid pool 12, by digital display automatic heating meter and effusion meter A.T.C and flow, make drug solution preparing automatically can prepare in optimal reasonable adaptation ratio and pre-heating reaches 45 DEG C.
Pure water pre-heater 10 is set between described pure water tank 2 and mixed liquid pool 12 and pure water adds automatic controller 11, by digital display automatic heating meter and effusion meter A.T.C and flow, make porous silicon solution pure water can be automatically added to by optimal adaptation rational proportion and pre-heating reaches 45 DEG C.
Alkali liquor pre-heater 13 and Alkali liquid compounding automatic controller 14 are set between described lye tank 3 and mixed liquid pool 12, by digital display automatic heating meter and effusion meter A.T.C and flow, make the porous silicon solution alkali concn can be by 9.15%, optimal adaptation rational proportion automatically controls addition, and pre-heating reaches 45 DEG C.
Standby liquid thermostatic heater 15 and standby liquid constant temperature cooler 16 it is provided with in the middle of described standby liquid pool 5；And standby liquid pool 5 and go be provided with porous silicon work pool liquid level self-controller 17 between porous silicon liquid pool and remove porous silicon work pool solution concentration automatic controller 18 and remove porous silicon work pool liquid inventory automatic controller 19, by digital display automatic heating meter, cooling meter automatically controls standby pool and goes porous silicon solution to reach constant temperature 48 DEG C, and porous silicon temperature is gone in this optimal adaptation；5cm under plane, alkali concn 9.15%, gas-liquid flow 0.35-0.75m is kept when the gripper of manipulator wafer gaily decorated basket is placed in pond by going porous silicon pit level, concentration, flow digital display meter to automatically control porous silicon work pool liquid level3/h；Guarantee that embathing the porous silicon time under said temperature, concentration, flow and liquid level standard is 28 seconds, save 17 seconds, porous silicon rate is gone to reach 99.7%, improve 4.7%, fragment rate reduces by 1.3%, reaches 0.2%, and saves pharmaceutical quantities 0.83%, save alkali liquor 1.85%, be no longer necessary to artificially ceaselessly to carry out in work way adding medicine, add alkali, the levelling such as add water.
It is provided with pure water constant temperature and pressure device 24 between described pure water tank 2 and pure water service sink 6 and pure water cleans shower 23, clean at described pure water and on shower 23, be provided with some groups of pure water cleaning spray heads 22, carry out temperature, pressure by automatic digital display thermometer, piezometer automatically to control by constant temperature, constant voltage standard-required, wherein temperature sets 60 DEG C, and pressure sets 0.5MPa；By constant temperature 60 DEG C, the constant voltage 0.5MPa pure water cleaning showers time is 95 seconds, saves 30 seconds, saves pure water more than 23%.
Described go to arrange between porous silicon work liquid pool 4 and standby liquid pool 5 to remove porous silicon liquid filtration processing tank 7, described go porous silicon work liquid pool 4 side be provided with porous silicon pond overfall 25, flowed out by overfall by the silicon liquid that goes going porous silicon work liquid pool 4 to overflow, and the standby liquid pool 5 of inflow recycles after past porous silicon liquid filtration processing tank 7, set multiple filtration net and quartz sand layer in removing porous silicon liquid filtration processing tank 7, used by the porous silicon recycling solution that goes after filtration treatment.Can extend the use time changed liquid once to 16 hours, than original 10 little time change liquid once extend the use time 6 little time, improve utilization rate 60%, decrease because changing liquid class's downtime equal 1 hour.
Arranging mechanical hand 20 described going between porous silicon work liquid pool 4 and pure water service sink 6, for automatically capturing cell piece, can improve the safety of operation, arranging first in the described bottom removing porous silicon liquid work pool 4 changes liquid flow-guiding mouth 28 simultaneously.
Arrange second in the bottom of described standby liquid pool 5 and change liquid flow-guiding mouth 29, and above-mentioned two flow-guiding mouths all go porous silicon liquid pool 31 to be connected with useless, arrange drain tube 30 and be connected with useless pure water pond 32 bottom described pure water service sink 6.
Described medicine gas-liquid preparation automatic controller 9, pure water adds automatic controller 11, Alkali liquid compounding automatic controller 14, remove porous silicon work pool liquid level self-controller 17, remove porous silicon work pool solution concentration automatic controller 18, standby liquid thermostatic heater 15, standby liquid constant temperature cooler 16 and go porous silicon work pool liquid inventory automatic controller 19 to be connected with operating board 27 respectively, state modulator is carried out by operating board 27, and on operating board 27, it is provided with running parameter display screen 26 and goes porous silicon to embathe time controller 21, it is respectively intended to show that the time is embathed in the parameter state of each controller and control.
To sum up described in several respects, this utility model is by the setting of the scientific and reasonable adaptation of a series of innovations, the whole flow process of this operation is made to be in reasonable automatic control, controlled by the most adaptive key element, improve process flow automaticity, single complete equipment saves to employee 5, improves yield 5 times；By heating, the automatic adaptive control of temperature control, flow, pressure, concentration, liquid level, improve chemism and the chemical reaction rate of porous silicon solution to greatest extent, the efficiency not only increasing removal porous silicon reaches 99.7%, fragment rate is down to 0.2%, ensure that the height of cell piece, stabilised quality, and save this operation production cost cost of raw material more than 40%；Alleviate staff labor intensity simultaneously, improve working environment quality, it is ensured that safety in production, it is ensured that the lifting of product quality and the decline of totle drilling cost.
In addition to the implementation, this utility model also includes the technical scheme that other embodiments, all employing equivalents or equivalence substitute mode are formed, within all should falling into this utility model scope of the claims.
Claims (5)
- null1. the making herbs into wool cell piece efficient automatic clearing apparatus of porous surface silicon，It is characterized in that: it mainly includes medicine-chest (1)，Pure water tank (2)，Lye tank (3)，Remove porous silicon liquid work pool (4)，Standby liquid pool (5)，Pure water service sink (6)，Mixed liquid pool (12)，Pure water cleans spray head (22)，Pure water cleans shower (23)，Go to porous silicon pond overfall (25)，Give up and go to porous silicon liquid pool (31) and useless pure water pond (32)，Medicinal liquid preheater (8) and medicine gas-liquid preparation automatic controller (9) it is provided with between described medicine-chest (1) and mixed liquid pool (12)，Pure water pre-heater (10) is set between described pure water tank (2) and mixed liquid pool (12) and pure water adds automatic controller (11)，Alkali liquor pre-heater (13) and Alkali liquid compounding automatic controller (14) are set between described lye tank (3) and mixed liquid pool (12)，Standby liquid thermostatic heater (15) and standby liquid constant temperature cooler (16) it is provided with in the middle of described standby liquid pool (5)；And standby liquid pool (5) and go be provided with porous silicon work pool liquid level self-controller (17) between porous silicon liquid pool and remove porous silicon work pool solution concentration automatic controller (18) and remove porous silicon work pool liquid inventory automatic controller (19)；Described go porous silicon liquid work pool (4) is arranged to grab wafer gaily decorated basket mechanical hand (20), can regularly and automatically clean, it is provided with pure water constant temperature and pressure device (24) between described pure water tank (2) and pure water service sink (6) and pure water cleans shower (23), clean at described pure water and on shower (23), be provided with some groups of pure water cleaning spray head (22), arrange first in the described bottom removing porous silicon liquid work pool (4) and change liquid flow-guiding mouth (28), arrange second in the bottom of described standby liquid pool (5) and change liquid flow-guiding mouth (29), and above-mentioned two flow-guiding mouths all go porous silicon liquid pool (31) to be connected with useless, arrange drain tube (30) in described pure water service sink (6) bottom to be connected with useless pure water pond (32).
- A kind of making herbs into wool cell piece efficient automatic clearing apparatus of porous surface silicon the most according to claim 1, it is characterized in that: described in go to arrange between porous silicon liquid work pool (4) and standby liquid pool (5) to remove porous silicon liquid filtration processing tank (7), described porous silicon liquid work pool (4) side is gone to be provided with porous silicon pond overfall (25), flowed out by overfall by the silicon liquid going porous silicon liquid work pool (4) to overflow, and after past porous silicon liquid filtration processing tank (7), flow into standby liquid pool (5) recycling.
- A kind of making herbs into wool cell piece efficient automatic clearing apparatus of porous surface silicon the most according to claim 1, it is characterised in that: described going, among porous silicon liquid work pool (4) and pure water service sink (6), mechanical hand (20) is set.
- A kind of making herbs into wool cell piece efficient automatic clearing apparatus of porous surface silicon the most according to claim 1, it is characterized in that: described medicine gas-liquid preparation automatic controller (9), pure water adds automatic controller (11), Alkali liquid compounding automatic controller (14), remove porous silicon work pool liquid level self-controller (17), remove porous silicon work pool solution concentration automatic controller (18) and go porous silicon work pool liquid inventory automatic controller (19) to be connected with operating board (27) respectively, state modulator is carried out by operating board (27), and on operating board (27), it is provided with running parameter display screen (26) and goes porous silicon to embathe time controller (21), it is respectively intended to show that the time is embathed in the parameter state of each controller and control.
- A kind of making herbs into wool cell piece efficient automatic clearing apparatus of porous surface silicon the most according to claim 2, it is characterised in that: set multiple filtration net and quartz sand layer in described porous silicon liquid filtration processing tank (7).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620196736.5U CN205723581U (en) | 2016-03-15 | 2016-03-15 | The making herbs into wool cell piece efficient automatic clearing apparatus of porous surface silicon |
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| CN201620196736.5U CN205723581U (en) | 2016-03-15 | 2016-03-15 | The making herbs into wool cell piece efficient automatic clearing apparatus of porous surface silicon |
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| CN205723581U true CN205723581U (en) | 2016-11-23 |
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| CN201620196736.5U Expired - Fee Related CN205723581U (en) | 2016-03-15 | 2016-03-15 | The making herbs into wool cell piece efficient automatic clearing apparatus of porous surface silicon |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107083567A (en) * | 2017-06-29 | 2017-08-22 | 昊诚光电（太仓）有限公司 | A kind of texturing slot spent acid conveying device |
| WO2021248469A1 (en) * | 2020-06-12 | 2021-12-16 | 永嘉县麦通机械有限公司 | Environment-friendly texturing apparatus for processing solar battery cells |
-
2016
- 2016-03-15 CN CN201620196736.5U patent/CN205723581U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107083567A (en) * | 2017-06-29 | 2017-08-22 | 昊诚光电（太仓）有限公司 | A kind of texturing slot spent acid conveying device |
| WO2021248469A1 (en) * | 2020-06-12 | 2021-12-16 | 永嘉县麦通机械有限公司 | Environment-friendly texturing apparatus for processing solar battery cells |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161123 Termination date: 20210315 |