CN205719248U - The laser far field focal spot Dynamic High-accuracy diagnostic equipment - Google Patents
The laser far field focal spot Dynamic High-accuracy diagnostic equipment Download PDFInfo
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- CN205719248U CN205719248U CN201620296331.9U CN201620296331U CN205719248U CN 205719248 U CN205719248 U CN 205719248U CN 201620296331 U CN201620296331 U CN 201620296331U CN 205719248 U CN205719248 U CN 205719248U
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- laser
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Abstract
This utility model provides a kind of laser far field focal spot Dynamic High-accuracy diagnostic equipment, it is intended to solve the drawback that prior art resolution is low, error is big.Single mode fiber laser that this utility model includes being successively set in same light path, collimating mirror, iris, beam splitter, sampling mirror, contracting bundle/beam-expanding system, reflecting mirror, multichannel binary optical elements, ccd detector；Also include the reference Integrating Sphere Laser Power being arranged on beam splitter reflected light path, the measurement Integrating Sphere Laser Power being arranged on reflecting mirror reflected light path, and the control computer being simultaneously connected with reference Integrating Sphere Laser Power, measurement Integrating Sphere Laser Power and ccd detector.This utility model can realize the far-field focus diagnosis of the laser beam to different caliber size, has precision height, measurement result confidence level height, the advantage of good stability.
Description
Technical field
This utility model belongs to optical field, relates to a kind of laser far field focal spot Dynamic High-accuracy diagnostic equipment.
Background technology
Laser far field focal spot intensity distribution is an important indicator of laser beam quality, is also table in high energy laser system
Levy laser beam and enter the major parameter of hole ability.The far-field distribution of laser determine light beam can focus level, the most indirectly reflect
Wavefront situation.Accurately measuring for the such as laser beam quality such as beam quality β factor, energy circle rate parameter of far-field focus
Correct assessment most important.Superlaser far-field focus is measured mainly two difficult points: (1) laser focal spot intensity distributions has
High dynamic range, the intensity difference of main secondary lobe is very big (more than 4 magnitudes of dynamic range)；(2) uncertainty of wavefront distortion
Cause the uncertain of the actual far-field position of laser beam so that be difficult to during kinetic measurement estimate defocusing amount.Owing to the disturbance of wavefront is
Exponential term, relative to amplitude disturbances, it is bigger to laser far field distribution influence, therefore solves the side of superlaser far field reconstruct difficult point
Method is to obtain high accuracy, the distribution of high-resolution wavefront.
High accuracy, the commonly used interferometric method of high-resolution wavefront phase measurement at present, it is mutually the most frequently used that interferometric method measures position
It it is phase shift method.Due to device of high power laser output is the near-infrared pulse of nanosecond (ns) even psec (ps) magnitude, utilizes
Conventional Phaseshifting interferometry can not obtain multi-frame interferometry figure information, in the case of system Complete Synchronization, also can only gather one
Width interferogram.Using the Shack-Hartmann wavefront sensor can be dynamically before Laser Measurement near field wave, its operation principle be by calculating
Distorted wavefront G-bar in each sub-aperture of microlens array segmentation, thus reconstruct the distribution of tested wavefront.Meanwhile, according to
The intensity distributions of the sub-aperture spot array that Shack-Hartmann wavefront sensor obtains, available laser light field intensity distributions, so
Rear reconstruct laser far field focal spot intensity distribution.The shortcoming of the method is: (1) wavefront slope calculates and uses first-order linear approximation, i.e.
Sin θ ≈ tan θ ≈ θ, wavefront measurement precision is affected；(2) it is distorted wavefront G-bar in sub-aperture due to measure, therefore
Thinking that tested wavefront is made up of the plane-wave approximation in many sub-aperture, the distorted wavefront detailed information in sub-aperture is left in the basket
, wavefront measurement resolution is the highest；(3) the laser near-field light intensity utilizing Shack-Hartmann wavefront sensor to get is distributed also
Being limited by microlens array number, resolution is the highest；(4) laser far field focal spot reconstruction accuracy is passed by Shack-Hartmann wavefront
The impact of sensor systematic error.
Conventional phase recovery technology can realize high-resolution wavefront measurement, but needs to measure laser near-field intensity at entrance pupil
Distribution and far-field intensity distribution or need to measure two or more out of focus position far-field intensity distribution to recover Laser Near field wave
Before.Unstability, environmental perturbation and the detector of laser output moves the wavefront error of introducing and cannot deduct.Meanwhile, with light intensity
It is measured as known conditions to carry out the algorithm of phase recovery and mathematically belong to inversion problem.Although it is generally acknowledged phase recovery
Solution is unique, but accuracy, the convergence rate of solution will be produced a very large impact by different algorithms.
Utility model content
Based on background above, the utility model proposes a kind of laser far field focal spot Dynamic High-accuracy diagnostic equipment.
Laser far field focal spot diagnosis major concern in high energy laser system is far-field energy concentration degree, generally uses ring
Enclose energy amount ratio curve and describe the energy concentration status of laser beam far-field focus comprehensively.Energy circle rate is defined as far field and gives
The laser power that size is surrounded accounts for the percentage ratio of general power.
This utility model utilizes multichannel binary optical elements can obtain the light under measured laser light beam difference out of focus simultaneously
Field intensity is distributed, then is obtained amplitude and the PHASE DISTRIBUTION of measured laser near-field beam by phase retrieval method, finally utilizes laser
Far-field focus diagnosis algorithm completes the distribution reconstruct of measured laser far field beam spot intensity and the calculating of energy circle rate curve.
The technical solution of the utility model is:
The laser far field focal spot Dynamic High-accuracy diagnostic equipment includes single mode fiber laser, collimating mirror, iris, beam splitting
Mirror, contracting bundle/beam-expanding system, reflecting mirror, ccd detector and control computer；It is characterized in that and also includes sampling mirror, ginseng
Examine Integrating Sphere Laser Power, measure Integrating Sphere Laser Power, multichannel binary optical elements；Described collimating mirror, iris, beam splitting
Mirror, sampling mirror, contracting bundle/beam-expanding system, reflecting mirror, multichannel binary optical elements and ccd detector are successively set on single mode
On the output light path of optical fiber laser；Described reference Integrating Sphere Laser Power is arranged on the reflected light path of described beam splitter；Described
Measure Integrating Sphere Laser Power to be arranged on the reflected light path of described reflecting mirror；With reference integrating sphere merit while of described control computer
Rate meter, measurement Integrating Sphere Laser Power and ccd detector are connected；The fiber end face of described single mode fiber laser is placed in collimating mirror
Focal point, optical fiber core diameter be less than 2.44 λ f/d, wherein λ is the wavelength of single mode fiber laser Output of laser, and f is described collimation
The focal length of mirror, d is the emergent pupil size of described collimating mirror；Described multichannel binary optical elements is positioned at described contracting bundle/beam-expanding system
Exit pupil position, for by contracting bundle/beam-expanding system entrance pupil at laser beam near field be divided into a series of sub-aperture region.
The wave aberration of above-mentioned contracting bundle/beam-expanding system is less than the 1/3 of measured laser Beam Wave-Front PHASE DISTRIBUTION peak-to-valley value.
Above-mentioned multichannel binary optical elements includes the micro-structured component that multiple bore is rectangle, the plurality of micro structure unit
Part combination in any in the same plane is arranged, and the focal length of adjacent two micro-structured components is different.
Above-mentioned multichannel binary optical elements is arranged alternately by the micro-structured component that two kinds of focal lengths are different and forms.
Above-mentioned multichannel binary optical elements is that multichannel calculates hologram sheet or microlens array；Multichannel calculates holography
The micro-structured component of sheet is Fresnel Lenses, and the micro-structured component of microlens array is lenticule.
Above-mentioned contracting bundle/beam-expanding system is Kepler's structure, is made up of object lens and eyepiece, and uses doubly telecentric light path.
This utility model has the advantages that
1, precision is high: it is burnt that this utility model achieves laser far field based on multichannel binary optical elements and phase retrieval method
The Dynamic High-accuracy diagnosis of speckle, compensate for the shortcoming that traditional diagnosis method precision is the highest and resolution is low.
2, measurement result confidence level is high: this utility model, by demarcating laser contracting bundle/beam-expanding system in advance, makes laser remote
Field focal spot diagnostic result is not affected by its error.
3, good stability: this utility model is not exported energy by external environment (air draught disturbance, vibration etc.) and laser
Instable impact.
4, this utility model simple in construction, reproducible, the far field that can realize laser beam to different caliber size is burnt
Speckle diagnoses.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the structural representation of multichannel binary optical elements；
Fig. 3 is the operation principle schematic diagram of multichannel binary optical elements；
In figure, 1-single mode fiber laser, 2-collimating mirror, 3-iris, 4-beam splitter, 5-is with reference to integrating sphere power
Meter, 6-sampling mirror, 7-contracting bundle/beam-expanding system, 71-object lens, 72-eyepiece, 8-reflecting mirror, 9-measures Integrating Sphere Laser Power, and 10-is many
Passage binary optical elements, 11-CCD detector, 12-controls computer, 13-measured laser light beam.
Detailed description of the invention
As it is shown in figure 1, the laser far field focal spot Dynamic High-accuracy diagnostic equipment provided by the utility model includes setting successively
Put the collimating mirror 2 in single mode fiber laser 1 Output of laser light path, (diaphragm bore is according to measured laser light beam for iris 3
The beam size of 13 is chosen), beam splitter 4, contracting bundle/beam-expanding system 7, reflecting mirror 8, multichannel binary optical elements 10, CCD detection
Device 11, and arrange with reference to Integrating Sphere Laser Power 5 on the reflected light path of beam splitter 4, the reflected light path of reflecting mirror 8 is arranged
Measure Integrating Sphere Laser Power 9；This utility model also include simultaneously with reference to Integrating Sphere Laser Power 5, measure Integrating Sphere Laser Power 9,
The control computer 12 that ccd detector 11 is connected.
The fiber end face of single mode fiber laser 1 is placed in the focal point of collimating mirror 2, and optical fiber core diameter is less than 2.44 λ f/d, its
Middle λ is the wavelength of single mode fiber laser 1 Output of laser, and f is the focal length of collimating mirror 2, and d is the emergent pupil size of collimating mirror 2.
Contracting bundle/beam-expanding system 7 is Kepler's structure, is made up of object lens 71 and eyepiece 72, uses doubly telecentric light path, and carries out
Achromat-design, to ensure that the wide spectrum of the diagnostic equipment works and eliminates the site error of ccd detector 11 to measurement result
Impact；The contracting of contracting bundle/beam-expanding system 7 is restrainted/is expanded than the size according to ccd detector 11 target surface and the light of measured laser light beam 13
Bundle bore determines；The wave aberration of contracting bundle/beam-expanding system 7 is less than the 1/3 of measured laser Beam Wave-Front PHASE DISTRIBUTION peak-to-valley value, to enter
One step improves certainty of measurement.
Multichannel binary optical elements 10 is positioned at the exit pupil position of contracting bundle/beam-expanding system 7, for by contracting bundle/beam-expanding system 7
Laser beam near field at entrance pupil is divided into a series of sub-aperture region, and is implemented in combination with measured laser light with ccd detector 11
Obtain while distribution of light intensity distribution under Shu Butong out of focus；Multichannel binary optical elements 10 is by any group in the same plane
Closing multiple micro-structured components composition of arrangement, micro-structured component bore is rectangle, and the focal length of adjacent microstructures element is different；Fig. 2
For a kind of version of multichannel binary optical elements 10, it is replaced in the same plane by the micro-structured component of two kinds of forms
Arrangement composition.The multichannel binary optical elements 10 of the present embodiment uses multichannel to calculate hologram sheet or microlens array, many
The micro-structured component of path computation hologram sheet is Fresnel Lenses, and the micro-structured component of microlens array is lenticule.
Specific works process of the present utility model and operation principle be:
(1) contracting bundle/beam-expanding system 7 is demarcated (timing signal, sampling mirror 6 cuts out optical path)
The demarcation of contracting bundle/beam-expanding system 7 is included the contracting transmitance of bundle/beam-expanding system 7 and the demarcation of wave aberration:
After the collimated mirror of laser 2 of single mode fiber laser 1 output and iris 3, beam splitter 4 it is divided into two-beam,
Wherein reflection light enters with reference to Integrating Sphere Laser Power 5, and recording laser power value is I0；Transmission light is by contracting bundle/beam-expanding system 7
After, it is reflected mirror 8 and is reflected into measuring Integrating Sphere Laser Power 9, recording laser power value is I1；Survey by controlling computer acquisition
Measure data, and absorbance β being calculated contracting bundle/beam-expanding system 7 be:
β=I1/(I0ηγ) (1)
In formula, η is the splitting ratio of beam splitter, and γ is the surface reflectivity of reflecting mirror；
Beam splitter 4 and reflecting mirror 8 cut out optical path, and the light of collimating mirror 2 output is restrainted by iris 3 and contracting/is expanded
After beam system 7, through multichannel binary optical elements 10, the laser beam near field at contracting bundle/beam-expanding system 7 entrance pupil is divided into one
Series sub-aperture region, under ccd detector 11 detects described a series of sub-aperture regions inner laser light beam difference out of focus simultaneously
Distribution of light intensity distribution, recycling phase retrieval method be calculated contracting bundle/beam-expanding system 7 wave aberration Φ1(x,y)；
(2) laser far field focal spot diagnosis
Sampling mirror 6 is cut optical path, and the sampled mirror of measured laser 6 reflects, after entering laser contracting bundle/beam-expanding system 7,
Through multichannel binary optical elements 10, laser beam near field at 7 entrance pupils is restrainted/expanded in laser contracting and be divided into a series of sub-aperture district
Territory, realizes ccd detector 11 detect measured laser light beam in described a series of sub-aperture region simultaneously by controlling computer 12
Distribution of light intensity distribution under different out of focus, and utilize phase retrieval method to carry out phase recovery calculating, obtain measured laser light beam and exist
Contracting bundle/beam-expanding system 7 exit pupil position at Wave-front phase distribution Φ (x, y) with distribution of amplitudes A (x, y), then measured laser light
Near-field optical field PHASE DISTRIBUTION Φ of bundle0(x, y) is represented by:
Φ0(x, y)=Φ (x, y)-Φ1(x,y) (2)
Near-field optical field distribution of amplitudes A of measured laser light beam0(x, y) is represented by:
The Near-field optical field of measured laser light beam is distributed as:
According to scalar diffraction theory, laser near-field optical field distribution meets Fourier's relation with far field distribution, logical
Cross and can be calculated measured laser far field and be distributed as:
Uf(u, v)=F{P (x, y) U0(x, y) } and=F{P (x, y) } * F{U0(x,y)} (5)
In formula, F{} is Fourier transformation operator；(x, y) is pupil function to P, when the aperture of measured laser light beam 13 is rectangle
During aperture, (x, Fourier transformation y) is sinc function to P；When the aperture of measured laser light beam 13 is circular aperture, and P (x, y)
Fourier transformation be first-order bessel function.
Measured laser far-field focus intensity distributions is:
I (u, v)=Uf(u,v)·Uf(u, v) *=| Uf(u,v)|2 (6)
In formula, Uf(u, v) * is Uf(u, conjugation v)；
Formula (6) is integrated, available energy circle rate curve.
Claims (6)
1. the laser far field focal spot Dynamic High-accuracy diagnostic equipment, including single mode fiber laser, collimating mirror, iris, beam splitting
Mirror, contracting bundle/beam-expanding system, reflecting mirror, ccd detector and control computer；It is characterized in that: also include sampling mirror, with reference to long-pending
Bulb separation energy meter, measurement Integrating Sphere Laser Power, multichannel binary optical elements；
Described collimating mirror, iris, beam splitter, sampling mirror, contracting bundle/beam-expanding system, reflecting mirror, multichannel binary optical elements
And ccd detector is successively set on the output light path of single mode fiber laser；Described reference Integrating Sphere Laser Power is arranged on
On the reflected light path of described beam splitter；Described measurement Integrating Sphere Laser Power is arranged on the reflected light path of described reflecting mirror；Described
Control computer to be connected with reference to Integrating Sphere Laser Power, measurement Integrating Sphere Laser Power and ccd detector simultaneously；
The fiber end face of described single mode fiber laser is placed in the focal point of collimating mirror, and optical fiber core diameter is less than 2.44 λ f/d, wherein λ
For the wavelength of single mode fiber laser Output of laser, f is the focal length of described collimating mirror, and d is the emergent pupil size of described collimating mirror；
Described multichannel binary optical elements is positioned at the exit pupil position of described contracting bundle/beam-expanding system, for by contracting bundle/beam-expanding system
Laser beam near field at entrance pupil is divided into a series of sub-aperture region.
The laser far field focal spot Dynamic High-accuracy diagnostic equipment the most according to claim 1, it is characterised in that: described contracting bundle/
The wave aberration of beam-expanding system is less than the 1/3 of measured laser Beam Wave-Front PHASE DISTRIBUTION peak-to-valley value.
The laser far field focal spot Dynamic High-accuracy diagnostic equipment the most according to claim 2, it is characterised in that: described multichannel
Binary optical elements includes the micro-structured component that multiple bore is rectangle, and the plurality of micro-structured component is the most any
Combination arrangement, the focal length of adjacent two micro-structured components is different.
The laser far field focal spot Dynamic High-accuracy diagnostic equipment the most according to claim 3, it is characterised in that: described multichannel
Binary optical elements is arranged alternately by the micro-structured component that two kinds of focal lengths are different and forms.
5. according to the laser far field focal spot Dynamic High-accuracy diagnostic equipment described in claim 3 or 4, it is characterised in that: described many
Passage binary optical elements is that multichannel calculates hologram sheet or microlens array；Multichannel calculates the micro-structured component of hologram sheet
For Fresnel Lenses, the micro-structured component of microlens array is lenticule.
The laser far field focal spot Dynamic High-accuracy diagnostic equipment the most according to claim 5, it is characterised in that: described contracting bundle/
Beam-expanding system is Kepler's structure, is made up of object lens and eyepiece, and uses doubly telecentric light path.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201620296331.9U CN205719248U (en) | 2016-04-11 | 2016-04-11 | The laser far field focal spot Dynamic High-accuracy diagnostic equipment |
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| CN201620296331.9U CN205719248U (en) | 2016-04-11 | 2016-04-11 | The laser far field focal spot Dynamic High-accuracy diagnostic equipment |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105806479A (en) * | 2016-04-11 | 2016-07-27 | 中国科学院西安光学精密机械研究所 | Laser far-field focal spot high-precision dynamic diagnosis device and method |
| CN108594373A (en) * | 2018-05-02 | 2018-09-28 | 中国人民解放军国防科技大学 | Plug-in type high-power optical fiber laser beam combining system |
| CN111751012A (en) * | 2020-06-03 | 2020-10-09 | 中国科学院西安光学精密机械研究所 | Dynamic high-resolution optical wavefront phase measuring device and measuring method |
-
2016
- 2016-04-11 CN CN201620296331.9U patent/CN205719248U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105806479A (en) * | 2016-04-11 | 2016-07-27 | 中国科学院西安光学精密机械研究所 | Laser far-field focal spot high-precision dynamic diagnosis device and method |
| CN108594373A (en) * | 2018-05-02 | 2018-09-28 | 中国人民解放军国防科技大学 | Plug-in type high-power optical fiber laser beam combining system |
| CN111751012A (en) * | 2020-06-03 | 2020-10-09 | 中国科学院西安光学精密机械研究所 | Dynamic high-resolution optical wavefront phase measuring device and measuring method |
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Granted publication date: 20161123 Effective date of abandoning: 20180529 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20161123 Effective date of abandoning: 20180529 |
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| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |