CN205718823U - Displacement measurement sensor - Google Patents
Displacement measurement sensor Download PDFInfo
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- CN205718823U CN205718823U CN201620387343.2U CN201620387343U CN205718823U CN 205718823 U CN205718823 U CN 205718823U CN 201620387343 U CN201620387343 U CN 201620387343U CN 205718823 U CN205718823 U CN 205718823U
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- magnetic
- displacement measurement
- coding module
- transducing unit
- measurement sensor
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Abstract
nullThis utility model relates to displacement measuring technology field，Particularly relate to a kind of displacement measurement sensor，Including magnetic transducing unit group and coding module，Described coding module comprises hard magnetic material，Magnetic transducing unit group includes the magnetic transducing unit that the magnetic-field-sensitive direction of more than three is identical，Described magnetic transducing unit forms a line along the moving direction of coding module，During measurement，Coding module is connected with determinand，When coding module moves，Multiple magnetic transducing unit measure the magnetic signal of coding module，Multiple magnetic transducing element output signals can control work schedule by enumerator，Final output signal can be converted into series analog memory output，Owing to the magnetic signal of coding module is unique and only relevant to the absolute position of coding module，Therefore the moving displacement of coding module can be drawn according to the output signal of multiple magnetic transducing unit，And then the moving displacement of determinand can be drawn，This displacement measurement sensor precision is higher、Good stability、Low cost.
Description
Technical field
This utility model relates to displacement measuring technology field, particularly relates to a kind of displacement measurement sensor.
Background technology
Encoder is widely used in measuring displacement or angular displacement, encoder be one can angular displacement or
Straight-line displacement is converted into the sensor of the signal of telecommunication, and it is widely used in motor speed measurement, machine location
The industrial circles such as control, precision instrument control.
The encoder of main flow is optical-electricity encoder at present, and optical-electricity encoder is high to environmental requirement, meeting
Affected by factors such as bubble, high light, dirt and infiltrations, therefore its poor anti jamming capability, surveyed
Accuracy of measurement is low.It addition, divide according to operation principle, encoder can be divided into increment type and absolute type two
Class.Incremental encoder is that displacement is converted into the periodic signal of telecommunication, then this signal of telecommunication is changed
Become count pulse, represent the size of displacement by the number of pulse；Each position of absolute type encoder
A corresponding digital code determined, therefore its indicating value is only relevant with the initial and final position measured,
And unrelated with the pilot process measured, the precision of absolute type encoder outclass incremental encoder.
At present, more absolute type encoder is applied to be mainly optical-electricity encoder, due to the most conventional
Magnetic sensor element Hall element sensitivity low, precision is low, and needs extra magnetism gathering rings, because of
This volume is big, and the coding unit semaphore of the code-disc of absolute displacement transducer or yardstick is low and intensive,
And need that sensing unit volume is sufficiently small to be desirably integrated in equipment, therefore use the magnetic of prior art
Property absolute displacement encoder is difficult to.It addition, existing magnetic encoder uses silicon steel as coding
Module, the most precision machined silicon steel is the prime cost of encoder, due to requirement on machining accuracy Gao Yin
This is expensive.
Utility model content
The purpose of this utility model is the defect overcoming prior art to exist, it is provided that a kind of precision is higher,
Good stability, the displacement measurement sensor of low cost.
This utility model solves its technical problem and be the technical scheme is that a kind of displacement measurement sensing
Device, including magnetic transducing unit group and coding module, described coding module comprises hard magnetic material, and magnetic passes
Sense unit group includes the magnetic transducing unit that the magnetic-field-sensitive direction of more than three is identical, described magnetic transducing list
Unit forms a line along the moving direction of coding module.
During measurement, coding module is connected with determinand, when coding module moves, and multiple magnetic transducings
Unit measures the magnetic signal of coding module, and multiple magnetic transducing element output signals can be come by enumerator
Controlling work schedule, final output signal is converted into series analog memory output, it is also possible to by specific electricity
Road module converter be serial digital output, due to the magnetic signal of coding module be unique and only with coding mould
Being correlated with in the absolute position of block, therefore can draw coding mould according to the output signal of multiple magnetic transducing unit
The moving displacement of block, because coding module is connected with determinand, and then can draw the mobile position of determinand
Move.
Beneficial effect: owing to using magnetic transducing unit, it is to avoid the light-sensitive element of prior art is easy
Dirty defect, improves stability；Due to use absolute displacement encoder structure, meanwhile, by
Measure the magnetic signal of coding module in multiple magnetic transducing unit, therefore its certainty of measurement is high, owing to adopting
With the coding module comprising hard magnetic material, it is not necessary to use silicon steel to make coding module, therefore reduce
Cost.
Second aspect, this utility model additionally provides a kind of displacement measurement sensor, including magnetic transducing
Unit group, coding module and magnet, described coding module comprises magnetic material and its surface has magnetic
Pattern, the corresponding different coding of the shape of magnetic pattern, magnetic transducing unit group includes the magnetic of more than three
The magnetic transducing unit that field sensitive direction is identical, described magnetic transducing unit is along the movement of coding module
Direction forms a line.Its operation principle is identical with upper displacement measurement sensor.
Beneficial effect: owing to using magnetic transducing unit, it is to avoid the light-sensitive element of prior art is easy
Dirty defect, improves stability；Due to use absolute displacement encoder structure, meanwhile, by
Measure the magnetic signal of coding module in multiple magnetic transducing unit, therefore its certainty of measurement is high, meanwhile,
Its certainty of measurement can be improved by the number arranging magnetic transducing unit, it is not necessary to comprising magnetic material
The coding module of material carries out polish, therefore reduces cost.
Accompanying drawing explanation
In order to be illustrated more clearly that embodiment of the present utility model or technical scheme of the prior art, under
Face is by being briefly described the accompanying drawing used required in embodiment or description of the prior art, aobvious and easy
Insight, the accompanying drawing in describing below is only embodiments more of the present utility model, general for this area
From the point of view of logical technical staff, on the premise of not paying creative work, it is also possible to according to these accompanying drawings
Obtain other accompanying drawing.
Fig. 1 is the structural representation of embodiment one correspondence of the present utility model；
Fig. 2 is the structural representation of this utility model embodiment two correspondence；
Fig. 3 is the curve chart that the resistance of linear magneto-electric resistance element changes with external magnetic field；
Fig. 4 is the curve chart that the resistance of V-type magnetoresistive element changes with external magnetic field；
Fig. 5 is numeral output waveform figure；
Fig. 6 is original output waveform figure.
Detailed description of the invention
Below in conjunction with the accompanying drawing in this utility model embodiment, to the skill in this utility model embodiment
Art scheme is clearly and completely described, it is clear that described embodiment is only this utility model
A part of embodiment rather than whole embodiments.Based on the embodiment in this utility model, ability
The every other embodiment that territory those of ordinary skill is obtained under not making creative work premise,
Broadly fall into the scope of this utility model protection.
Below in conjunction with Fig. 1-Fig. 6, the utility model will be further described.
Embodiment one
A kind of displacement measurement sensor, including magnetic transducing unit group 10 and coding module 20, institute
Stating coding module 20 and comprise hard magnetic material, magnetic transducing unit group 10 includes that the magnetic field of more than three is quick
The magnetic transducing unit that sense direction is identical, described magnetic transducing unit is along the movement of coding module 20
Direction forms a line.As it is shown in figure 1, in order to make it easy to understand, we are first by magnetic transducing unit group
Magnetic transducing unit the most named 10a, 10b, 10c in 10 ... 10n, by coding module 20
It is divided into multiple coding unit 20.1,20.2,20.3 ... 20.n, the magnetic of each coding unit 20.n
The magnetic transducing unit group 10 that signal correspondence is made up of multiple magnetic transducing unit 10a-10n, coding
Module 20 is connected with determinand.When coding module 20 moves, multiple magnetic transducing unit 10a-10n
Measure the magnetic signal of coding unit 20.n corresponding to coding module 20, multiple magnetic transducing unit
The output signal of 10a-10n can control work schedule by enumerator, and final output signal converts
Export for series analog memory, it is also possible to be converted into serial digital by specific circuit module and export.Due to
The magnetic signal of each coding unit 20.n is unique and only relevant to the position of coding module 20, therefore
The mobile position of coding module 20 can be drawn according to the output signal of multiple magnetic transducing unit 10a-10n
Move, because coding module 20 is connected with determinand, and then the moving displacement of determinand can be drawn.Whole
The certainty of measurement of individual structure is higher.
Wherein, the material composition of coding module 20 can have multiple.Described coding module 20 is by Hard Magnetic
Material is constituted；Or the surface of described coding module 20 is hard magnetic material, or described coding module 20
The mixture that surface is hard magnetic material and soft magnetic materials.I.e. coding module 20 can be simple by firmly
Magnetic material is constituted, it is also possible to only the surface-coated at coding module 20 (or uses plating, physics vapour
Deposit mutually, chemical gaseous phase deposition, fixing connect, patch permanent magnet blocks, weld, the mode such as inlay) hard
Magnetic material or hard magnetic material and the mixture of soft magnetic materials, to ensure that coding module 20 has stable magnetic
?.The magnetic signal of coding module 20 can be applied magnetic field by write head to coding module 20 and be previously written,
Or, magnetic code module 20 has rough magnetic pattern, magnetizes in advance.It addition,
Described coding module 20 is to measure the yardstick of straight-line displacement or measure the code-disc of angular displacement.
Embodiment two
A kind of displacement measurement sensor, including magnetic transducing unit group 10, coding module 20 and magnetic
Body 30, described coding module 20 comprises magnetic material and has rough magnetic pattern, concavo-convex not
The corresponding different coding of flat magnetic pattern, magnetic transducing unit group 10 includes that the magnetic field of more than three is quick
The magnetic transducing unit that sense direction is identical, described magnetic transducing unit is along the movement of coding module 20
Direction forms a line.As in figure 2 it is shown, magnet 30 is in order to apply magnetic field to coding module 20, coding
The corresponding different coding of the magnetic pattern of module 20 surface irregularity, its Distribution of Magnetic Field and pattern form
Relevant, the characteristic signal of this Distribution of Magnetic Field is also unique, the most relevant to the position of coding module 20,
Measuring principle is as described in embodiment one.
The uneven of coding module 20 surface refers in particular to magnetic pattern, and such as one concave-convex surface is not
Flat coding module 20 surface comprising magnetic material alloy scribbles nonmagnetic substance makes its surface put down
Whole, we still think that it has rough magnetic pattern.
What i.e. coding module 20 can be simple is made up of magnetic material, it is also possible to be by comprising magnetic material
The nonmetallic materials of material are constituted, it is also possible to be that nonmagnetic substance is constituted, nonmagnetic substance coding module
The surface-coated of 20 (or use plating, physical vapor deposition, chemical gaseous phase deposition, fixing connection,
Patch piece of magnetic material, weld, the mode such as inlay) magnetic material.Rough magnetic pattern can be by
Etching, reverse sputtering, photoetching, hole, the mode such as cutting is formed.To ensure that coding module 20 is at magnetic
Specific magnetic signal is had under the magnetic field that body 30 applies.
Further, described magnet 30 is electric magnet or permanent magnet.
In upper displacement sensors, its table with magnetic signal is refered in particular on " surface " of coding module 20
Face, if being coated with other nonmagnetic substances on coding module 20, we still think its " surface "
Having feature magnetic signal or magnetic pattern, it is equal to scheme of the present utility model.
In upper displacement measurement sensor, magnetic transducing unit is provided operating current by rear end, and it is preferred
Scheme is, described magnetic transducing unit is made up of magneto-resistor, and described magneto-resistor is by one or more
Magnetic sensor elements constitute, more than said two magnetic sensor elements series connection and/or in parallel.
The beneficial effect of the series connection of plural magnetic sensor elements and/or parallel connection be can be by pre-
The number of magnetic sensor elements is first set to solve magnetic sensor elements in nanometer processing or micro Process
Concordance (Uniformity) problem, the electronics tunnel of magnetic sensor elements can also be reduced simultaneously
Probability, improves its antistatic capacity.
Further, described magnetic sensor elements is anisotropic magnetoresistance element, giant magnetoresistance element
Or magnetic tunnel junction element.It is little that these three magnetic sensor elements has high accuracy, high sensitivity and volume
Advantage, can accurately measure the Overlapped Spectrum Signals of coding module, and can be highly integrated.
Preferably, described magnetic transducing unit is single electric resistance structure, and single electric resistance structure includes a magnetoelectricity
Resistance.
Or described magnetic transducing unit is half-bridge structure, half-bridge structure includes two magnetoelectricities connected
Resistance.
Or described magnetic transducing unit is full bridge structure, full bridge structure includes two half-bridge in parallel knots
Structure, half-bridge structure includes two magneto-resistors connected.
Above-mentioned half-bridge or full bridge structure can be the gradient half-bridges or gradient full-bridge knot that capacity of resisting disturbance is high
Structure.Two magneto-resistors of gradient half-bridge are positioned at the diverse location of the magnetic field gradient of coding module, and gradient is complete
In four magneto-resistors of bridge, refer to four magnetoelectricities respectively with first, second, third, fourth magneto-resistor
Resistance, wherein the first, the 4th magneto-resistor is in same position along the direction of external magnetic field gradient, its resistance
Identical；Second, third magneto-resistor is in same position along the direction of external magnetic field gradient, its resistance phase
With；And the first magneto-resistor (the 4th magneto-resistor) and the second magneto-resistor (the 3rd magneto-resistor) are along outer magnetic
The direction of field gradient is in diverse location, and its resistance is different.Gradient half-bridge or gradient full-bridge are to gradient magnetic
, i.e. in this utility model, the magnetic signal of coding module is sensitive, and for uniform field, i.e. interference field is unwise
Sense, therefore capacity of resisting disturbance is strong.It is open that the operation principle of gradient half-bridge and gradient full-bridge refers to China
The patent of number CN105136349A: a kind of magnetic pressure transducer.
With giant magnetoresistance element and magnetic tunnel junction element, the magnetoresistive element as representative is a kind of in work
Make under magnetic field its resistance with external magnetic field linear change or the sensor element of V-shaped change, its resistance R
With external magnetic field H change as shown in Figure 3 and Figure 4.
As it is shown on figure 3, when the absolute value of external magnetic field H is less than the absolute value of saturation magnetic field HS, magnetic
The resistance R of resistive element is along with external magnetic field H linear change, and this magnetoresistive element is referred to as " linear magnetic
Resistive element "；As shown in Figure 4, it is less than the absolute value of saturation magnetic field HS when the absolute value of external magnetic field H
Time, the resistance of magnetoresistive element is inverted " V " type curve along with the change curve of external magnetic field, is referred to as
For " V-type magnetoresistive element ".Magnet 30 is included in embodiment two of the present utility model, due to
The factor such as the error of magnet 30 and the relative position of magnetoresistive element and the mismachining tolerance of magnet 30
Impact, there may be a certain size magnetic field on the magnetic-field-sensitive direction of magnetoresistive element, but should
Within magnetic field all can be controlled in the operation interval of magnetoresistive element.For linear magneto-electric resistance element,
Make the location arrangements that magnet 30 is symmetrical relative to magnetoresistive element, so that the work of magnetoresistive element
Make interval near zero magnetic field；For V-type magnetoresistive element, can suitably adjust magnet 30 relative to
The asymmetry of the position of magnetoresistive element, the operation interval adjusting magnetoresistive element is positioned at positive flux field district
Between or negative fluxfield interval.
In upper displacement measurement sensor, in order to back-end processing is convenient, institute's displacement measurement sensor is also
Including enumerator, described enumerator electrically connects with described magnetic transducing unit group 10, described enumerator
Control work schedule, the analog output signal of magnetic transducing unit 10a-10n is converted into serial mould
Intend signal output.Owing to enumerator can be arranged on rear end, the displacement measurement that the utility model proposes passes
As long as sensor provides is available for the output signal that rear end uses, therefore enumerator is not necessary knot
Structure.
In upper displacement measurement sensor, in order to back-end processing is convenient, institute's displacement measurement sensor is also
Including analog-to-digital conversion circuit, described analog-to-digital conversion circuit electrically connects with described magnetic transducing unit group 10,
Or, electrically connect with enumerator, the output signal of magnetic transducing unit 10a-10n is converted into numeral letter
Number, waveform is as it is shown in figure 5, owing to using the magnetic of giant magnetoresistance element or magnetic tunnel junction element to pass
Sense unit has enough output accuracies and semaphore, and therefore the analogue signal of its original output is (original
Analog signal waveform figure is as shown in Figure 6) be also available, be converted into digital signal it is not necessary to,
A simply optimal way, the therefore dispensable structure of analog-to-digital conversion circuit.
Should be appreciated that specific embodiment described above is only used for explaining this utility model, and need not
In limiting this utility model.The obvious change extended out by spirit of the present utility model or change
Move among still in protection domain of the present utility model.
Claims (21)
1. a displacement measurement sensor, it is characterised in that: include magnetic transducing unit group (10) and compile
Code module (20), described coding module (20) comprises hard magnetic material, and magnetic transducing unit group (10) wraps
Including the magnetic transducing unit that the magnetic-field-sensitive direction of more than three is identical, described magnetic transducing unit is along coding
The moving direction of module (20) forms a line.
Displacement measurement sensor the most according to claim 1, it is characterised in that: described coding module (20)
It is made up of hard magnetic material.
Displacement measurement sensor the most according to claim 1, it is characterised in that: described coding module (20)
Surface there is hard magnetic material, or the surface of described coding module (20) has hard magnetic material and soft magnetic materials
Mixture.
4. according to the displacement measurement sensor described in any one of claim 1-3, it is characterised in that: described magnetic
Property sensing unit is made up of magneto-resistor, and described magneto-resistor is made up of one or more magnetic sensor elements,
Magnetic sensor elements series connection more than said two and/or parallel connection.
Displacement measurement sensor the most according to claim 4, it is characterised in that: described magnetic transducing unit
Part is anisotropic magnetoresistance element, giant magnetoresistance element or magnetic tunnel junction element.
Displacement measurement sensor the most according to claim 4, it is characterised in that: described magnetic transducing list
Unit is single electric resistance structure, and single electric resistance structure includes a magneto-resistor.
Displacement measurement sensor the most according to claim 4, it is characterised in that: described magnetic transducing list
Unit is half-bridge structure, and half-bridge structure includes two magneto-resistors connected.
Displacement measurement sensor the most according to claim 4, it is characterised in that: described magnetic transducing list
Unit is full bridge structure, full bridge structure includes two half-bridge structures in parallel, and half-bridge structure includes that two are connected
Magneto-resistor.
9. according to the displacement measurement sensor described in any one of claim 1-3, it is characterised in that: institute's rheme
Measurement sensor also includes that enumerator, described enumerator electrically connect with described magnetic transducing unit group (10).
10. according to the displacement measurement sensor described in any one of claim 1-3, it is characterised in that: described
Displacement measurement sensor also includes analog-to-digital conversion circuit, described analog-to-digital conversion circuit and described magnetic transducing unit
Group (10) electrically connects.
11. 1 kinds of displacement measurement sensors, it is characterised in that: include magnetic transducing unit group (10), compile
Code module (20) and magnet (30), described coding module (20) comprises magnetic material and it has magnetic
Pattern, the corresponding different coding of the shape of magnetic pattern, magnetic transducing unit group (10) includes more than three
The magnetic transducing unit that magnetic-field-sensitive direction is identical, described magnetic transducing unit is along coding module (20)
Moving direction forms a line.
12. displacement measurement sensors according to claim 11, it is characterised in that: described magnet (30)
For electric magnet or permanent magnet.
13. displacement measurement sensors according to claim 11, it is characterised in that: described coding module
(20) it is made up of magnetic material.
14. displacement measurement sensors according to claim 11, it is characterised in that: described coding module
(20) surface has magnetic material.
15. according to the displacement measurement sensor described in any one of claim 11-14, it is characterised in that: institute
Stating magnetic transducing unit to be made up of magneto-resistor, described magneto-resistor is by one or more magnetic sensor elements
Constitute, magnetic sensor elements series connection more than said two and/or parallel connection.
16. displacement measurement sensors according to claim 15, it is characterised in that: described magnetic transducing
Element is anisotropic magnetoresistance element, giant magnetoresistance element or magnetic tunnel junction element.
17. displacement measurement sensors according to claim 15, it is characterised in that: described magnetic transducing
Unit is single electric resistance structure, and single electric resistance structure includes a magneto-resistor.
18. displacement measurement sensors according to claim 15, it is characterised in that: described magnetic transducing
Unit is half-bridge structure, and half-bridge structure includes two magneto-resistors connected.
19. displacement measurement sensors according to claim 15, it is characterised in that: described magnetic transducing
Unit is full bridge structure, and full bridge structure includes two half-bridge structures in parallel, and half-bridge structure includes two series connection
Magneto-resistor.
20. according to the displacement measurement sensor described in any one of claim 11-14, it is characterised in that: institute
Displacement measurement sensor also includes enumerator, described enumerator and described magnetic transducing unit group (10) electricity
Connect.
21. according to the displacement measurement sensor described in any one of claim 11-14, it is characterised in that: institute
Displacement measurement sensor also includes analog-to-digital conversion circuit, described analog-to-digital conversion circuit and described magnetic transducing list
Tuple (10) electrically connects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620387343.2U CN205718823U (en) | 2016-04-29 | 2016-04-29 | Displacement measurement sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620387343.2U CN205718823U (en) | 2016-04-29 | 2016-04-29 | Displacement measurement sensor |
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| CN205718823U true CN205718823U (en) | 2016-11-23 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105783691A (en) * | 2016-04-29 | 2016-07-20 | 无锡乐尔科技有限公司 | Displacement measurement sensor |
| CN107421432A (en) * | 2017-06-16 | 2017-12-01 | 上海同驭汽车科技有限公司 | A kind of Novel Non-Contact Type Hall Displacement Sensor |
-
2016
- 2016-04-29 CN CN201620387343.2U patent/CN205718823U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105783691A (en) * | 2016-04-29 | 2016-07-20 | 无锡乐尔科技有限公司 | Displacement measurement sensor |
| CN107421432A (en) * | 2017-06-16 | 2017-12-01 | 上海同驭汽车科技有限公司 | A kind of Novel Non-Contact Type Hall Displacement Sensor |
| CN107421432B (en) * | 2017-06-16 | 2023-12-01 | 上海同驭汽车科技有限公司 | Non-contact Hall displacement sensor |
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