CN205691573U - A kind of polycrystalline silicon production system quality evaluation device - Google Patents
A kind of polycrystalline silicon production system quality evaluation device Download PDFInfo
- Publication number
- CN205691573U CN205691573U CN201620579033.0U CN201620579033U CN205691573U CN 205691573 U CN205691573 U CN 205691573U CN 201620579033 U CN201620579033 U CN 201620579033U CN 205691573 U CN205691573 U CN 205691573U
- Authority
- CN
- China
- Prior art keywords
- pair
- rod
- stove
- polycrystalline silicon
- silicon production
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Silicon Compounds (AREA)
Abstract
The utility model discloses a kind of polycrystalline silicon production system quality evaluation device, stove, feed control module, gaseous mixture electrical heating module, power-supply system, pre-heating system and drive system is evaluated including a pair rod, Siemens Method is used to produce in a pair rod product rapid and convenient detection polycrystalline silicon production system particularly electronic-grade polycrystalline silicon production system the mass parameters such as material purity, automatization level is high, workable, can overlap more in batches in the production procedure of production of polysilicon enterprise, be effectively improved production efficiency.
Description
Technical field
This utility model relates to production of polysilicon and manufactures field, particularly relates to a kind of polycrystalline silicon production system quality evaluation dress
Put.
Background technology
Polysilicon is particularly important intermediate products in silicon product industrial chain, is to manufacture monocrystal silicon, solar-electricity
Pond and the primary raw material of HIGH-PURITY SILICON goods, thus become information industry and the most basic raw material of New Energy Industry.According to purity
Difference, polysilicon be generally divided into metallurgical-grade polysilicon (industrial silicon), solar-grade polysilicon (abbreviation solar energy level silicon) with electricity
Sub-level polysilicon (abbreviation electronic-grade silicon), the purity requirement of solar energy level silicon is more than 99.9999% (6 9), electronic-grade silicon
Purity requirement is 99.999999999% (11 9).
At present, the main technique technology producing polysilicon both at home and abroad is improved Siemens, profit under certain temperature and pressure
Occur chemical vapour deposition reaction to generate polysilicon in evaluating stove with trichlorosilane and hydrogen, generate simultaneously four silicon oxides, two
The by-products such as chlorine dihydro silicon, hydrogen chloride.Wherein the purity of raw material directly determines the purity of polysilicon product.Therefore raw at polysilicon
It is generally required to the composition of detection raw material especially trichlorosilane in the production of product system particularly electronic-grade polycrystalline silicon, pure to it
Degree, C, O, P, B, tenor etc. are analyzed, and need a kind of QA system and method.
Generally, the purity of trichlorosilane after rectification uses gas chromatography to be analyzed, and accuracy of detection is low；And C,
O, P, B, metal content analysis use plasma mass spectrometry, and cycle length, precision are low, and trichlorosilane raw material is dangerous materials, operation
Require height.
Patent CN103454377B proposes a kind of electron level purity of trichlorosilane evaluation methodology and device, its principal character
Being the evaluation stove using a pair rod, pair of electrodes uses tantalum wire to connect, and this utility model device the most clearly operates and control method
And process system, use a pair tantalum wire to connect evaluation simultaneously and the polysilicon of electron level is easily brought secondary pollution, have certain
Defect.
Utility model content
Ask to solve quick, safety, the Assessment of material purity in polysilicon particularly electron level production process
Topic, the utility model proposes a kind of polycrystalline silicon production system quality evaluation device, particularly to electronic-grade polycrystalline silicon production system
Quality evaluation device.
For reaching above-mentioned purpose, embodiment of the present utility model adopts the following technical scheme that
A kind of polycrystalline silicon production system quality evaluation device, evaluates stove, feed control module, mixing pneumoelectric including a pair rod
Heating module, power-supply system, pre-heating system and drive system；The input of described feed control module connects from polysilicon
The trichlorosilane of tank field and hydrogen in production system, the outfan of described feed control module connects described gaseous mixture electrical heating mould
The input of block, the outfan of described gaseous mixture electrical heating module connects the pair of rod and evaluates the reacting gas escape pipe of stove
Mouthful, the reacting gas that stove evaluated by the pair of rod mouth of pipe of giving vent to anger connects exhaust gas recovery system or exhaust gas cleaning system, described power supply
System connects described gaseous mixture electrical heating module and the pair of electrodes of the pair of rod evaluation stove, and described pre-heating system is arranged on
Furnace roof portion evaluated by the pair of rod, and described drive system connects described pre-heating system and stove evaluated by the pair of rod.
According to an aspect of the present utility model, the pair of rod is evaluated stove and is included with on the cooling chassis of water, chassis
The bell jar with cooling water jecket, be placed in chassis and be connected with the pair of electrodes of power supply, the pair of electrode is connected with high a pair
Pure silicon core, the outside of the pair of electrode is respectively equipped with the reacting gas air inlet mouth of pipe and reacting gas the is given vent to anger mouth of pipe, described reaction
The gas inlet mouth of pipe and reacting gas give vent to anger the mouth of pipe through the described chassis with cooling water with described with cooling water jecket
Bell jar body of heater communicates；The described bell jar side with cooling water jecket is with showing on trial and stopping means.
According to an aspect of the present utility model, described pre-heating system includes quartz ampoule and quartz ampoule stopping means, described
Quartz ampoule stretches into the pair of rod and evaluates in stove, and described quartz ampoule stopping means is arranged on the described bell jar with cooling water jecket
Top.
According to an aspect of the present utility model, the pair of rod is evaluated in the stove of stove and a pair HIGH-PURITY SILICON core medium contact
High-temperature region is silver Ag99.99.
According to an aspect of the present utility model, also including structural framing and integrated control panel, the pair of rod is commented
Valency stove, feed control module, gaseous mixture electrical heating module, power-supply system, pre-heating system, drive system and integrated chain of command
Plate is installed in described structural framing.
The advantage that this utility model is implemented:
This utility model uses Siemens Method to produce a pair rod product rapid and convenient detection polycrystalline silicon production system particularly
The mass parameter such as material purity in electronic-grade polycrystalline silicon production system, automatization level is high, workable.Batch can be overlapped more
In the production procedure of production of polysilicon enterprise, it is effectively improved production efficiency.Compared with prior art have the advantage that
The 1 furnace high-temperature district contacted with silicon core medium is silver Ag99.99, can avoid polluting；
2, HIGH-PURITY SILICON core is used, by infrared quartz heating, it is possible to avoid tantalum metal impurities further；
3, Full automatic feed is used, it is to avoid artificial disturbance.
Accompanying drawing explanation
In order to be illustrated more clearly that the technical scheme in this utility model embodiment, will make required in embodiment below
Accompanying drawing be briefly described, it should be apparent that, below describe in accompanying drawing be only embodiments more of the present utility model,
For those of ordinary skill in the art, on the premise of not paying creative work, it is also possible to obtain according to these accompanying drawings
Other accompanying drawing.
Fig. 1 is showing of a kind of polycrystalline silicon production system quality evaluation device according to this utility model one better embodiment
It is intended to.
Fig. 2 is to evaluate furnace structure schematic diagram according to a kind of of this utility model one better embodiment.
Fig. 3 is a kind of evaluating apparatus system integration module schematic diagram according to this utility model one better embodiment.
Description of reference numerals: 1, stove evaluated by a pair rod；2, feed control module；3, gaseous mixture electrical heating module；4, power supply
System；5, pre-heating system；6, drive system；7, structural framing；8, integrated control panel；1-1, chassis；1-2, bell jar；1-3、
Pair of electrodes；1-4, a pair HIGH-PURITY SILICON core；1-5, the reacting gas air inlet mouth of pipe；1-6, reacting gas are given vent to anger the mouth of pipe；1-7, show on trial；
1-8, stopping means；5-1, quartz ampoule；5-2, quartz ampoule stopping means.
Detailed description of the invention
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of this utility model rather than whole
Embodiment.Based on the embodiment in this utility model, those of ordinary skill in the art are not under making creative work premise
The every other embodiment obtained, broadly falls into the scope of this utility model protection.
As it is shown in figure 1, a kind of polycrystalline silicon production system quality evaluation device, evaluate stove 1, feed control mould including a pair rod
Block 2, gaseous mixture electrical heating module 3, power-supply system 4, pre-heating system 5, drive system 6.Connected mode between each module is: enter
The input of material control module 2 connects from the trichlorosilane of tank field in polycrystalline silicon production system and hydrogen, feed control module 2
Outfan connect gaseous mixture electrical heating module 3 input, the outfan of gaseous mixture electrical heating module 3 connects a pair rod evaluation
The reacting gas of stove 1 is given vent to anger the mouth of pipe, and the reacting gas that stove 1 evaluated by a pair rod mouth of pipe of giving vent to anger connects exhaust gas recovery system or waste gas is washed
Washing system, power-supply system 4 connects gaseous mixture electrical heating module 3 and a pair rod evaluates the pair of electrodes in stove 1, pre-heating system 5
Being arranged on the top of a pair rod evaluation stove 1, drive system 6 connects pre-heating system 5 and stove 1 evaluated by a pair rod.Whole device is adopted
With modularized design and manufacture, level of integrated system is high, and device is compact.
Refer to Fig. 1, the flow process carrying out quality evaluation with said apparatus is: first pass through N2 to the pipeline in system, one
Rod is evaluated stove 1 etc. and carries out gas displacement, by power-supply system 4, pre-heating system 5 is heated, be preheating to a pair rod and start temperature
Switch power-supply system 4 after degree to a pair rod electrified regulation, in polycrystalline silicon production system tank field trichlorosilane (SiHCl3,
Be abbreviated as TCS) and hydrogen (H2) by being mixed into gaseous mixture electrical heating module 3 after feed control module 2 measure control, pass through
Gaseous mixture electrical heating module 3 is vaporized, and the mixed gas after vaporization enters a pair rod and evaluates stove 1, evaluates in stove 1 at a pair rod
A pair rod surface carries out chemical vapour deposition reaction, generates polycrystalline silicon rod, and the polycrystalline silicon rod that carries out over time is gradually grown thick,
Reaching the size of requirement eventually, after having reacted, close power supply, feed control module 2 stops mixed gas charging, is passed through hydrogen simultaneously
Gas cools down, and reacted tail gas enters exhaust gas recovery system or exhaust gas cleaning system.In course of reaction, observe and evaluate dress
Put the growing state of interior polycrystalline silicon rod.After having reacted, automatically opened up with cooling water and the clock of chuck by drive system 6
Cover, is taken out polycrystalline silicon rod and carries out assay, be analyzed by composition each to polycrystalline silicon rod, semiconducting behavior, obtain former
Expect the purity of particularly trichlorosilane.
As in figure 2 it is shown, the structure that stove 1 evaluated by a pair rod in evaluating apparatus is: include the chassis 1-1 with cooling water,
The bell jar 1-2 with cooling water jecket on the 1-1 of chassis, it is placed in chassis and is connected with pair of electrodes 1-3 of power supply, pair of electrodes 1-
Being connected with a pair HIGH-PURITY SILICON core 1-4 on 3, the outside of pair of electrodes 1-3 is respectively equipped with reacting gas air inlet mouth of pipe 1-5 and reacting gas
Give vent to anger mouth of pipe 1-6, reacting gas air inlet mouth of pipe 1-5 and reacting gas give vent to anger mouth of pipe 1-6 through with cooling water chassis 1-1 with
Bell jar 1-2 body of heater with cooling water jecket communicates；Bell jar 1-2 top with cooling water jecket is provided with pre-heating system 5, with
The bell jar 1-2 side of cooling water jecket with the 1-7 that shows on trial, stopping means 1-8, pre-heating system 5 carried out by drive system 6 on
Under, horizontal movement, the bell jar 1-2 with cooling water jecket is moved up and down.
Feed control module 2 is by measure control supplied materials mixed gas, and described mixed gas is purity 99.99999%
Hydrogen and trichlorosilane.By the trichlorosilane of liquid and 99.99999% hydrogen after gaseous mixture heating module 3 vaporizes mixing
The chassis 1-1 with cooling water is delivered to anti-with what the bell jar 1-2 with cooling water jecket formed by reacting gas air inlet mouth of pipe 1-5
In answering cavity, pair of electrodes 1-3 a pair HIGH-PURITY SILICON core 1-4 electrified regulation, the temperature on a pair HIGH-PURITY SILICON core 1-4 surface are reached
About 1100 DEG C, there is chemical vapour deposition reaction on a pair HIGH-PURITY SILICON core 1-4 surface in trichlorosilane and hydrogen, generates polysilicon
Rod.
The furnace high-temperature district of bell jar 1-2 and a pair HIGH-PURITY SILICON core 1-4 medium contact is silver Ag99.99, can avoid polluting.
As in figure 2 it is shown, pre-heating system 5 uses quartz ampoule 5-1 to carry out Infrared Heating, it is to avoid secondary pollution.Pre-heating system 5 is also
With quartz ampoule stopping means 5-2.
Drive system 6 uses band auto-lock function frequency conversion motor+synchronization to bring driving pre-heating system 5, spacing according to quartz ampoule
Device 5-2 carries out exactitude position, the work of automatic control pre-heating system 5 and off working state.Horizontal movement therein controls
A pair is moved to owing to the pre-hot pin of pre-heating system 5 preheats after the off working state after terminating needs to be risen by drive system 6
The position, side of stove 1 evaluated by rod, is not to face bell jar 1-2.
Drive system 6 uses band auto-lock function frequency conversion motor+screw mandrel to bring driving bell jar 1-2, enters according to stopping means 1-8
Row exactitude position, automatically controls the work of bell jar 1-2 and the up and down motion of off working state.
As it is shown on figure 3, whole evaluating apparatus uses modularized design and manufacture, level of integrated system is high, and device is compact.Each
Modular system is arranged in structural framing 7.Use Full automatic feed, it is to avoid artificial disturbance；Control system includes integrated control
Panel 8；Economizer bank and bell jar run all guidance panels on right side and operate, simple and fast.
The above, detailed description of the invention the most of the present utility model, but protection domain of the present utility model does not limit to
In this, any those skilled in the art in technical scope disclosed in this utility model, the change that can readily occur in
Change or replace, all should contain within protection domain of the present utility model.Therefore, protection domain of the present utility model should be with described
Scope of the claims is as the criterion.
Claims (5)
1. a polycrystalline silicon production system quality evaluation device, it is characterised in that include that a pair rod evaluates stove, feed control mould
Block, gaseous mixture electrical heating module, power-supply system, pre-heating system and drive system；The input of described feed control module is even
Fetching trichlorosilane and the hydrogen of tank field in polycrystalline silicon production system, the outfan of described feed control module connects described mixed
Closing the input of pneumoelectric heating module, the outfan of described gaseous mixture electrical heating module connects the pair of rod and evaluates the reaction of stove
Gas is given vent to anger the mouth of pipe, and the reacting gas that stove evaluated by the pair of rod mouth of pipe of giving vent to anger connects exhaust gas recovery system or waste gas washing system
System, described power-supply system connects described gaseous mixture electrical heating module and the pair of electrodes of the pair of rod evaluation stove, described pre-
Hot systems is arranged on the pair of rod and evaluates furnace roof portion, and described drive system connects described pre-heating system and the pair of rod is commented
Valency stove.
Polycrystalline silicon production system quality evaluation device the most according to claim 1, it is characterised in that the pair of rod is evaluated
Stove includes with the bell jar with cooling water jecket on the cooling chassis of water, chassis, is placed in chassis and is connected with a pair of power supply
Electrode, the pair of electrode is connected with a pair HIGH-PURITY SILICON core, and the outside of the pair of electrode is respectively equipped with reacting gas air inlet pipe
Mouthful and reacting gas give vent to anger the mouth of pipe, the described reacting gas air inlet mouth of pipe and reacting gas give vent to anger the mouth of pipe through described with cooling water
Chassis communicate with the described bell jar body of heater with cooling water jecket；The described bell jar side with cooling water jecket is with showing on trial
And stopping means.
Polycrystalline silicon production system quality evaluation device the most according to claim 2, it is characterised in that described pre-heating system bag
Including quartz ampoule and quartz ampoule stopping means, described quartz ampoule stretches into the pair of rod and evaluates in stove, described quartz ampoule stopping means
It is arranged on the described bell jar top with cooling water jecket.
Polycrystalline silicon production system quality evaluation device the most according to claim 1, it is characterised in that the pair of rod is evaluated
The furnace high-temperature district of stove and a pair HIGH-PURITY SILICON core medium contact is silver Ag99.99.
Polycrystalline silicon production system quality evaluation device the most according to claim 1, it is characterised in that also include structural framing
With integrated control panel, the pair of rod evaluates stove, feed control module, gaseous mixture electrical heating module, power-supply system, preheating
System, drive system and integrated control panel are installed in described structural framing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620579033.0U CN205691573U (en) | 2016-06-15 | 2016-06-15 | A kind of polycrystalline silicon production system quality evaluation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620579033.0U CN205691573U (en) | 2016-06-15 | 2016-06-15 | A kind of polycrystalline silicon production system quality evaluation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205691573U true CN205691573U (en) | 2016-11-16 |
Family
ID=57427471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620579033.0U Active CN205691573U (en) | 2016-06-15 | 2016-06-15 | A kind of polycrystalline silicon production system quality evaluation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205691573U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106568854A (en) * | 2016-10-14 | 2017-04-19 | 内蒙古神舟硅业有限责任公司 | Method and apparatus for detecting content of silane in polysilicon tail gas |
| CN107515274A (en) * | 2016-06-15 | 2017-12-26 | 上海韵申新能源科技有限公司 | A kind of polycrystalline silicon production system quality evaluating method and device |
| CN108217656A (en) * | 2017-04-01 | 2018-06-29 | 上海韵申新能源科技有限公司 | A kind of efficient polycrystalline silicon reduction furnace heat recovery system and reduction production |
| CN108557824A (en) * | 2017-04-01 | 2018-09-21 | 上海韵申新能源科技有限公司 | A kind of gas phase controllable type polycrystalline silicon reducing furnace |
-
2016
- 2016-06-15 CN CN201620579033.0U patent/CN205691573U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107515274A (en) * | 2016-06-15 | 2017-12-26 | 上海韵申新能源科技有限公司 | A kind of polycrystalline silicon production system quality evaluating method and device |
| CN106568854A (en) * | 2016-10-14 | 2017-04-19 | 内蒙古神舟硅业有限责任公司 | Method and apparatus for detecting content of silane in polysilicon tail gas |
| CN106568854B (en) * | 2016-10-14 | 2019-05-21 | 内蒙古神舟硅业有限责任公司 | The measuring method and device of silane contents in a kind of polysilicon tail gas |
| CN108217656A (en) * | 2017-04-01 | 2018-06-29 | 上海韵申新能源科技有限公司 | A kind of efficient polycrystalline silicon reduction furnace heat recovery system and reduction production |
| CN108557824A (en) * | 2017-04-01 | 2018-09-21 | 上海韵申新能源科技有限公司 | A kind of gas phase controllable type polycrystalline silicon reducing furnace |
| CN108557824B (en) * | 2017-04-01 | 2024-03-29 | 上海韵申新能源科技有限公司 | Gas-phase controllable polysilicon reduction furnace |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN205691573U (en) | A kind of polycrystalline silicon production system quality evaluation device | |
| CN103420345A (en) | Graphite crucible, heating furnace and preparation method for cadmium telluride | |
| CN105728401A (en) | Oil stain removal and heating recovery device for waste plastics | |
| CN103276373A (en) | PECVD device | |
| CN201473329U (en) | Polysilicon reducing furnace | |
| CN107515274A (en) | A kind of polycrystalline silicon production system quality evaluating method and device | |
| CN102515167B (en) | Periodical alternatively operating polycrystalline silicon reduction furnace equipped with inner heat-insulating barrel and operation method | |
| CN201214631Y (en) | Polysilicon reduction furnace | |
| CN101723370B (en) | Polysilicon production method without silicon tetrachloride emission | |
| CN103253703A (en) | Preparation method and equipment of high-purity arsenic oxide | |
| CN103508457B (en) | Production equipment containing multiple stage polycrystalline silicon decomposing furnace and working method | |
| CN104556054A (en) | Method and device for recycling light components in trichlorosilane synthetic compost | |
| CN202144453U (en) | Polysilicon reduction and ingot casting joint production device | |
| CN202272744U (en) | Equipment for preparing polycrystalline silicon by using silane decomposition method | |
| CN102351194B (en) | Polysilicon reduction and ingot casting combined production device and production method | |
| CN104609425B (en) | The equipment that a kind of silane thermal decomposition process prepares polysilicon | |
| CN203264705U (en) | Microwave high-temperature chemical reaction system | |
| CN102021608A (en) | Device for manufacturing zinc by ZnCl2 molten salt electrolysis | |
| CN102674361B (en) | Top structure of inner container of energy-saving type polysilicon reduction furnace and implementation method for top structure | |
| CN201485518U (en) | ZnCl2 fusion electrolysis zinc production device | |
| CN210954745U (en) | Optical fiber silicon tetrachloride product production control device | |
| CN101413066A (en) | Vacuum decomposing method for separating gallium arsenide as metal gallium and metal arsenic | |
| CN203625055U (en) | Equipment for controlling temperature of hydrogenation furnace tail gas | |
| CN102321916B (en) | Polysilicon production method and apparatus thereof | |
| CN202369401U (en) | Polysilicon production device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |