CN205686674U - A kind of novel blue film machine - Google Patents
A kind of novel blue film machine Download PDFInfo
- Publication number
- CN205686674U CN205686674U CN201620610578.3U CN201620610578U CN205686674U CN 205686674 U CN205686674 U CN 205686674U CN 201620610578 U CN201620610578 U CN 201620610578U CN 205686674 U CN205686674 U CN 205686674U
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- CN
- China
- Prior art keywords
- rustless steel
- sucker
- pad pasting
- blue film
- basal disc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
This utility model relates to a kind of novel blue film machine; including cabinet, elastic supporting mechanism, pad pasting dish, pad pasting dish protection cap, cutting mechanism, glued membrane roller mechanism and silica gel roller wheel mechanism; it is characterized in that: described pad pasting dish is made up of rustless steel basal disc and rustless steel sucker; stainless steel-based disk center is shaped with vacuum vent holes, and this vacuum vent holes passes through the external vacuum pump of pipeline；The upper surface of rustless steel basal disc is shaped with the shallow slot of setting-in rustless steel sucker, and rustless steel sucker is uniformly shaped with sucker, uses the alignment pin fixed installation of circle spacing layout in rustless steel sucker is flush-mounted in described shallow slot and with rustless steel basal disc.This novel blue film machine, its pad pasting dish uses rustless steel basal disc and rustless steel sucker, and suction is big and uniform, it is easy to processing, and high temperature resistant, corrosion-resistant, service life is long, it is ensured that pad pasting flatness, improves equipment serviceability.
Description
Technical field
This utility model belongs to silicon wafer production apparatus field, a kind of novel blue film machine.
Background technology
The smoothness requirements of wafer surface is high, but is limited to the material of wafer and wafer surface coating is relatively thin, the table of wafer
Face is easily scratched；And, in wafer processing, need wafer scribe, easily produce silicon chip during machining and eject, cause damage
Affect electrical property.Therefore, at the complete wafer of processed in the process of circulation, the surface of wafer needs to cover one layer and plays protection
The blue film of effect.Usually use full manual method that wafer surface is pasted blue film to process.Efficiency is low, and blue film laminating is smooth
Spend not good enough.At present, also having the manual blue film machine of employing to carry out the blue film of wafer patch, it includes sucker system, diced system, glued membrane roller
And silica gel running roller etc. is constituted.The sucker system of the blue film machine of existing patch uses resilient support pad and the ceramic sucker on top mostly
Constitute.There is the problem that manufacture difficulty is big, cost is high, frangible in its pottery sucker.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art, it is provided that a kind of novel blue film machine, uses rustless steel
Sucker, has absorption affinity uniform, it is ensured that the advantage of pad pasting flatness.
This utility model solves its technical problem and is achieved through the following technical solutions:
A kind of novel blue film machine, including cabinet, elastic supporting mechanism, pad pasting dish, pad pasting dish protection cap, cutting mechanism, glue
Film roller mechanism and silica gel roller wheel mechanism, install described elastic supporting mechanism in cabinet, installs patch on this elastic supporting mechanism
Membranous disc, installs pad pasting dish protection cap on cabinet, installs cutting mechanism in pad pasting dish protection cap, installs glue in one end of cabinet
Film roller mechanism, is arranged on the silica gel roller wheel mechanism that pad pasting dish upper surface moves horizontally on cabinet, it is characterised in that: described pad pasting
Dish is made up of rustless steel basal disc and rustless steel sucker, and stainless steel-based disk center is shaped with vacuum vent holes, and this vacuum vent holes is passed through
The external vacuum pump of pipeline；The upper surface of rustless steel basal disc is shaped with the shallow slot of setting-in rustless steel sucker, and rustless steel sucker is uniformly made
The fixing peace of alignment pin of circle spacing layout is used in having sucker, rustless steel sucker to be flush-mounted in described shallow slot and with rustless steel basal disc
Dress.
And, sucker made on described rustless steel sucker is laser boring, and each sucker is by near rustless steel sucker
The coarse pore section in front and the pore section of close rustless steel sucking disc back side are constituted.
And, a diameter of 1.2mm of coarse pore section of described sucker, a diameter of 0.4mm of pore section.
And, the described a diameter of 150-160mm of rustless steel sucker, sucker quantity is 1390-1400.
And, the upper surface of described rustless steel basal disc is carved with the groove of multiple tracks parallel arrangement, this groove with described not
Vacuum air channel is formed between the back side of rust steel sucker.
And, the surrounding of described rustless steel basal disc is shaped with installing hole.
And, the lower surface of described rustless steel basal disc is shaped with 1-3 road sealing ring.
And, the outer weekly interval of described rustless steel basal disc is embedded with Magnet.
And, described cutting mechanism includes that being positioned in pad pasting dish protection cap the straight line near glued membrane roller mechanism side cuts
Cutter, and the round cutter of corresponding described pad pasting dish.
Advantage of the present utility model and having the beneficial effect that
1, this novel blue film machine, its pad pasting dish uses rustless steel basal disc and rustless steel sucker, and suction is big and uniform, it is easy to add
Work, high temperature resistant, corrosion-resistant, service life is long, it is ensured that pad pasting flatness, improves equipment serviceability.
2, this novel blue film machine, uses rustless steel base steel dish to be embedded in rustless steel sucker, and stainless steel has easily
In the advantage of processing, rustless steel sucker use laser boring process sucker so that it is to have high density, in high precision, absorption
Reliable for effect.
3, this novel blue film machine, a diameter of 150-160mm of rustless steel sucker, sucker quantity is 1390-1400, and diameter is big
Being applicable to the processing detection of large-area silicon wafer, sucker quantity is many, and absorption dynamics is uniform.
4, this novel blue film machine, rustless steel basal disc inner surface is shaped with the groove of parallel arrangement, this groove and described rustless steel
Form the uniform arrangement of vacuum air channel, beneficially gas between the lower surface of sucker, improve the uniformity of absorption affinity.
5, this novel blue film machine, the surrounding of rustless steel basal disc is shaped with installing hole, and the lower surface of rustless steel basal disc is shaped with 1-3 road
Sealing ring, the outer weekly interval of rustless steel basal disc is embedded with Magnet, beneficially rustless steel basal disc and the metal gasket of elastic supporting mechanism
Sheet is fixed installation.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model (vertical view)；
Fig. 2 is structural representation of the present utility model (opening pad pasting dish protection cap)；
Fig. 3 is the structural representation of the rustless steel basal disc of pad pasting dish of the present utility model；
Fig. 4 is the rearview of Fig. 3；
Fig. 5 is the A-A direction view of Fig. 3；
Fig. 6 is the front view of rustless steel sucker of the present utility model；
Fig. 7 is the B-B direction view of Fig. 6；
Fig. 8 is the C portion enlarged drawing of Fig. 7.
Accompanying drawing mark explanation:
1-cabinet, 2-pad pasting dish protection cap, 3-round cutter, 4-straight line cutting knife, 5-glued membrane guide rod, 6-glued membrane roller are installed
Case, 7-glued membrane roller mechanism, 8-glued membrane protection cap, 9-sliding seat, 10-silica gel roller wheel mechanism, 11-pad pasting stretching bar, 12-rustless steel
Basal disc, 13-rustless steel sucker, 14-shallow slot, 15-groove, 16-vacuum vent holes, 17-dowel hole, 18-installing hole, 19-magnetic
Ferrum, 20-sucker, 21-coarse pore section, 22-pore section, 23-sealing ring.
Detailed description of the invention
Below by specific embodiment, the utility model is described in further detail, and following example are illustrative, no
It is determinate, it is impossible to limit protection domain of the present utility model with this.
A kind of novel blue film machine, including cabinet 1, elastic supporting mechanism, pad pasting dish, pad pasting dish protection cap 2, cutting mechanism,
Glued membrane roller mechanism 7 and silica gel roller wheel mechanism 10, install elastic supporting mechanism in cabinet, installs patch on this elastic supporting mechanism
Membranous disc, installs pad pasting dish protection cap on cabinet, installs cutting mechanism, at the glued membrane of one end of cabinet in pad pasting dish protection cap
Roller installs glued membrane roller mechanism in installing case 6, and glued membrane roller is installed and is provided with glued membrane protection cap 8 on case.Glued membrane roller installs case near patch
The side of membranous disc is provided with the glued membrane guide rod 5 parallel with glued membrane roller mechanism.Cabinet is arranged on pad pasting dish upper surface level move
Dynamic silica gel roller wheel mechanism, silica gel roller wheel mechanism is installed on the slide rail of cabinet both sides by the sliding seat 9 at its two ends.At pad pasting
Pad pasting stretching bar 11 it is provided with on the cabinet platform of dish both sides.
Its innovation is: it is made up of rustless steel basal disc 12 and rustless steel sucker 13, and stainless steel-based disk center is shaped with
Vacuum vent holes 16, this vacuum vent holes passes through the external vacuum pump of pipeline；The upper surface of rustless steel basal disc is shaped with setting-in rustless steel
The shallow slot 14 of sucker, rustless steel sucker is uniformly shaped with sucker 20, rustless steel sucker is shaped with dowel hole 17.Rustless steel sucker
The alignment pin fixed installation of circle spacing layout is used in being flush-mounted in shallow slot and with rustless steel basal disc.
Sucker made on rustless steel sucker is laser boring, and each sucker is by the coarse pore section near rustless steel sucker front
21 and constitute near the pore section 22 of rustless steel sucking disc back side.The a diameter of 1.2mm of coarse pore section of sucker, pore section is a diameter of
0.4mm.The a diameter of 150-160mm of rustless steel sucker, sucker quantity is 1390-1400.
The upper surface of rustless steel basal disc is carved with the groove 15 of multiple tracks parallel arrangement, this groove and described rustless steel sucker
Vacuum air channel is formed between the back side.The surrounding of rustless steel basal disc is shaped with installing hole 18.The lower surface of rustless steel basal disc is shaped with
1-3 road sealing ring 23.The outer weekly interval of rustless steel basal disc is embedded with Magnet 19.Be conducive to the metallic gasket with elastic supporting mechanism
It is fixed installation.
Using rustless steel base steel dish to be embedded in rustless steel sucker, stainless steel has the advantage being prone to processing,
Laser boring is used to process sucker on rustless steel sucker so that it is having high density, in high precision, adsorption effect is reliable.
Cutting mechanism includes being positioned in pad pasting dish protection cap the straight line cutting knife 4 near glued membrane roller mechanism side, and corresponding
The round cutter 3 of pad pasting dish.
The operation principle of this novel blue film machine is:
Lifting pad pasting dish protection cap the most gently, (there is absorption strong magnetic inside then pad pasting dish to be put in operating platform
Ferrum) above and block with alignment pin.
2. wafer/substrate front side is put on pad pasting dish and makes it position limit down overlap, so with pad pasting dish location line
Wafer/substrate is held by the vacuum valve on rear unlatching board front panel.
3. both hands uniformly pull attachment glued membrane and make it parallel on stretching bar, and the most parallel promotion pad pasting running roller is light
Return to home position after gently pressing through pad pasting stretching bar and wafer/substrate and put jail.
4. close pad pasting dish protection cap, press straight line cutting knife handle and expose after the knife edge cuts off attachment glued membrane straight line cutting knife is multiple
Position.
5. press round cutter handle expose round cutter neat cut away unnecessary attachment glued membrane after reset and (be careful not to
Too much rotation round cutter, otherwise has the broken silk of glued membrane and produces and be attached on glued membrane framework, thus wafer behaviour in road after impact
Make being smoothed out of operation).
Lift pad pasting dish protection cap the most gently and make its back against main body limited post, taking off unnecessary glued membrane, closing
Pick up the glued membrane framework (containing wafer/substrate) that pad pasting completes after falling vacuum switch gently, complete the operation of wafer pad pasting.
Although disclosing embodiment of the present utility model and accompanying drawing for the purpose of illustration, but those skilled in the art being permissible
Understanding: without departing from this utility model and spirit and scope of the appended claims, various replacements, to change and modifications be all can
Can, therefore, scope of the present utility model is not limited to embodiment and accompanying drawing disclosure of that.
Claims (9)
1. a novel blue film machine, including cabinet, elastic supporting mechanism, pad pasting dish, pad pasting dish protection cap, cutting mechanism, glued membrane
Roller mechanism and silica gel roller wheel mechanism, install described elastic supporting mechanism in cabinet, installs pad pasting on this elastic supporting mechanism
Dish, installs pad pasting dish protection cap on cabinet, installs cutting mechanism in pad pasting dish protection cap, installs glued membrane in one end of cabinet
Roller mechanism, is arranged on the silica gel roller wheel mechanism that pad pasting dish upper surface moves horizontally on cabinet, it is characterised in that: described pad pasting dish
Being made up of rustless steel basal disc and rustless steel sucker, stainless steel-based disk center is shaped with vacuum vent holes, and this vacuum vent holes is by pipe
The external vacuum pump in road；The upper surface of rustless steel basal disc is shaped with the shallow slot of setting-in rustless steel sucker, and rustless steel sucker is uniformly shaped with
Sucker, uses the fixing peace of alignment pin of circle spacing layout in rustless steel sucker is flush-mounted in described shallow slot and with rustless steel basal disc
Dress.
The novel blue film machine of one the most according to claim 1, it is characterised in that: suction made on described rustless steel sucker
Hole is laser boring, and each sucker is by the coarse pore section near rustless steel sucker front and the pore section near rustless steel sucking disc back side
Constitute.
The novel blue film machine of one the most according to claim 2, it is characterised in that: the coarse pore section of described sucker is a diameter of
1.2mm, a diameter of 0.4mm of pore section.
The novel blue film machine of one the most according to claim 1, it is characterised in that: the described a diameter of 150-of rustless steel sucker
160mm, sucker quantity is 1390-1400.
The novel blue film machine of one the most according to claim 1, it is characterised in that: the upper surface of described rustless steel basal disc is carved
It is shaped with the groove of multiple tracks parallel arrangement, between the back side of this groove and described rustless steel sucker, forms vacuum air channel.
The novel blue film machine of one the most according to claim 1, it is characterised in that: the surrounding of described rustless steel basal disc is shaped with
Installing hole.
The novel blue film machine of one the most according to claim 1, it is characterised in that: the lower surface system of described rustless steel basal disc
There is 1-3 road sealing ring.
The novel blue film machine of one the most according to claim 1, it is characterised in that: the outer weekly interval of described rustless steel basal disc
It is embedded with Magnet.
The novel blue film machine of one the most according to claim 1, it is characterised in that: described cutting mechanism includes being positioned at pad pasting
The straight line cutting knife of close glued membrane roller mechanism side in dish protection cap, and the round cutter of corresponding described pad pasting dish.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620610578.3U CN205686674U (en) | 2016-06-17 | 2016-06-17 | A kind of novel blue film machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620610578.3U CN205686674U (en) | 2016-06-17 | 2016-06-17 | A kind of novel blue film machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205686674U true CN205686674U (en) | 2016-11-16 |
Family
ID=57415523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620610578.3U Expired - Fee Related CN205686674U (en) | 2016-06-17 | 2016-06-17 | A kind of novel blue film machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205686674U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109309026A (en) * | 2017-07-28 | 2019-02-05 | 无锡华润华晶微电子有限公司 | Wafer method for adhering film and jig |
| CN111489988A (en) * | 2020-03-27 | 2020-08-04 | 南通通富微电子有限公司 | Wafer transfer device |
| CN114523433A (en) * | 2021-09-27 | 2022-05-24 | 杭州大和江东新材料科技有限公司 | Processing method of convex point type sucking disc |
| CN115285420A (en) * | 2022-08-30 | 2022-11-04 | 华天科技（西安）有限公司 | Automatic film sticking machine |
-
2016
- 2016-06-17 CN CN201620610578.3U patent/CN205686674U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109309026A (en) * | 2017-07-28 | 2019-02-05 | 无锡华润华晶微电子有限公司 | Wafer method for adhering film and jig |
| CN109309026B (en) * | 2017-07-28 | 2021-03-23 | 无锡华润华晶微电子有限公司 | Method and tool for sticking film on wafer |
| CN111489988A (en) * | 2020-03-27 | 2020-08-04 | 南通通富微电子有限公司 | Wafer transfer device |
| CN114523433A (en) * | 2021-09-27 | 2022-05-24 | 杭州大和江东新材料科技有限公司 | Processing method of convex point type sucking disc |
| CN114523433B (en) * | 2021-09-27 | 2023-10-24 | 杭州大和江东新材料科技有限公司 | Processing method of convex point type sucker |
| CN115285420A (en) * | 2022-08-30 | 2022-11-04 | 华天科技（西安）有限公司 | Automatic film sticking machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161116 Termination date: 20200617 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |