CN205665169U - Laser induction punctures spectral analysis appearance - Google Patents
Laser induction punctures spectral analysis appearance Download PDFInfo
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- CN205665169U CN205665169U CN201620290604.9U CN201620290604U CN205665169U CN 205665169 U CN205665169 U CN 205665169U CN 201620290604 U CN201620290604 U CN 201620290604U CN 205665169 U CN205665169 U CN 205665169U
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Abstract
The utility model provides a laser induction punctures spectral analysis appearance can carry out the detection and the analysis of the characteristic spectral line of at least one composition simultaneously includes a filtering system, separates the light of multi -wavelength complex spectrum, and filtering system includes: first battery of lens, diffraction grating and filter element, filter element include an incident / emitting face and two surfaces that have the reflection function at least, and the light of the required wavelength in the incident beam is behind filter element, and the quilt light separation terminal mutually spaced apart with the light collection device terminal is received, and the light of all the other wavelength is guided out filter element and do not get into corresponding light separation terminal formation to disturb.
Description
Technical field
This utility model belongs to spectral measurement and technical field of imaging, relates to a kind of LIBS analyser,
It is based especially on optical element combination and realizes multispectral separation and high-resolution imaging.
Background technology
LIBS analyser needs the complex spectrum producing laser induced plasma to carry out light splitting, inspection
The peak surveying different-waveband carries out by force qualitative elementary and quantitative analysis, and during full spectrum detection, light-splitting method uses grating to add mostly
CCD mode, carries out light splitting detection to all band spectrum, but under some application-specific, it is not necessary to detection all band spectral intensity,
Only need to detect that the spectral intensity of certain several specific wavelength, the most mostly use filtering mode to remove invalid spectrum,
But traditional filtering system uses filter mirror and reflecting mirror to be filtered beam splitting, effect is bad, causes laser induced plasma
The light band of light that body produces separates unclear, impacts result of detection.Meanwhile, prior art is the wave band ensured divides
From effect, needing to use substantial amounts of optical element, cause cost to improve, assembly is also proposed higher by multiple optical elements
Requirement.It should be noted that the interference light in separation process also can produce impact to test result, conventional technology does not has
Propose light to be filtered is guided out collection light path, thoroughly remove the solution of interference light.
The LIBS analyser that the utility model proposes can overcome the problems referred to above of the prior art.
Utility model content
LIBS analyser of the present utility model, it is possible to simultaneously carry out the characteristic spectral line of at least one composition
Detection and analysis, including laser source system, it sends high energy pulse laser by lens focus to sample surfaces；Sample
Sample platform, carries testing sample, and ablated sample forms laser induced plasma, launches multi-wavelength complex spectrum to surrounding
Light；Ray-collecting terminal, for collecting the light of the multi-wavelength complex spectrum of described transmitting, and all guides it to filtering
System；Light separate terminal, for gathering the light through the filtered required wavelength of described filtering system, and directs it to light
Photodetector；It is characterized in that: described filtering system, the light of the multi-wavelength complex spectrum of described transmitting is separated, filter
Wave system system includes: the first battery of lens, diffraction grating and filter element, filter element at least includes an incidence/exit facet and two
The individual surface with reflection function, after the light element after filtering of the required wavelength in incident ray, by with ray-collecting end
The light separate terminal that son is separated at intervals is received, the light of its commplementary wave length from be different from the surface of described incidence/exit facet from
Filter element outgoing, does not enter corresponding light separate terminal and forms interference.
Preferably, the first battery of lens has negative diopter, at least includes first lens with positive diopter and has negative
Dioptric second lens.
Preferably, also include the second battery of lens, between diffraction grating and filter element, and there is positive diopter and non-
Spherical face, the second battery of lens at least includes a compound lens.
Preferably, filter element is prism, preferably triangular prism.
Preferably, filter element at least includes with lower surface: first as incidence/exit facet, second with can control
The battle array mirror of angle, the 3rd the battle array mirror with controlled controlling angle.
Preferably, incidence/exit facet is attached with light filter or is coated with filter coating.
Preferably, light enters inside filter element through first, reflexes to the 3rd through the battle array mirror of second, the 3rd
Battle array mirror be controlled to certain angle and receive light, and the light of required wavelength is reflected first, the light of required wavelength
Received by the light separate terminal being separated at intervals with ray-collecting terminal.
Preferably, after incident ray enters filter element, reflex to the 3rd through the battle array mirror of second, adjust second and third
The angle of the battle array mirror in face so that it is the light beam of commplementary wave length forms total internal reflection at first after being reflected, and from second injection filter
Ripple element.
Preferably, after incident ray enters filter element, reflex to the 3rd through the battle array mirror of second, adjust second and third
The angle of the battle array mirror in face so that it is the light of commplementary wave length is from second and/or the 3rd injection filter element.
Preferably, last lens in the first lens thing side to the first battery of lens in described first battery of lens
Distance D1 of image side surface, is 0.15 < D1/L < 0.3 with filtering system total length L ratio.
The beneficial effects of the utility model: the LIBS analyser that the utility model proposes can overcome existing
There is the technical problem that filter effect in technology is the best, wave band separation is unclear.
Accompanying drawing explanation
Fig. 1 is LIBS analyser overall construction drawing.
Fig. 2 is the filtering system composition diagram of LIBS analyser.
Fig. 3 is the filter element figure of LIBS analyser.
Detailed description of the invention
Fig. 1 is LIBS analyser overall construction drawing.High energy pulse laser passes through lens focus to sample
Product surface, carries out calcination to sample, and ablated sample forms laser induced plasma, launches multi-wavelength to surrounding and is combined
Spectrum.The light launched is collected by the ray-collecting terminal of fiber-optical probe, is directed to filtering system, thus adopts further
The light of the required wavelength of collection, carries out follow-up analysis.Fig. 2 is the filtering system of LIBS analyser, including: tool
Having negative dioptric first battery of lens 1, the first battery of lens 1 at least includes the first lens L11 with positive diopter and has negative
Dioptric second lens L12；The multi-wavelength complex spectrum light that ray-collecting terminal is collected is formed whole by the first battery of lens 1
The beam shaping of body, wherein, light beam entirety is drawn in by the first lens L11 with positive diopter, then via having negative diopter
Second lens L12 shaping diffusion.Light arrives diffraction grating 2, the diffraction grating 2 light to different wave length through the second lens L12
Line has different angle of diffraction, and therefore the light of different wave length be dispersed.Owing to diffraction will bring the defects such as aberration,
Cause the problems such as focusing and light spot shape defect, in diffraction grating rear decision design color difference eliminating defect in this utility model
Second battery of lens, the second battery of lens at least includes a compound lens 3.It is aspheric surface that compound lens at least has one side, thus also
Outskirt aberration can be revised the most well, compared with not there is aspheric situation, even if light bends very through lens
Greatly, it is also possible to aberration is distorted in good correction such that it is able to utilize less optical lens to realize the simplification of system, LIBS is filtered
Wave system system realizes optimizing further.The light of different wave length is all guided the filter to rear with scattered angle by compound lens 3
Ripple element 4.Compound lens 3, is preferably combined, by concavees lens and a convex lens, the compound lens with positive light coke formed.Filter
Ripple element 4 is prismatic, preferably triangular prism, and first is incident and exit facet, and the second face is partially covered with mirror surface 7,
3rd the battle array mirror 6 with controlled controlling angle.From compound lens 3 injection light with phase co-wavelength be a branch of be incident to filtering unit
Part 4.After incident ray enters filter element 4, reflexing to the 3rd through the mirror surface 7 of second, now, battle array mirror 6 is controlled
Receiving the light beam of required wavelength such as λ 1 at a certain angle, and required wavelength light beam is reflected first, the wavelength being shot up is λ
The light beam of 1 through optical system, is received by the light separate terminal being separated at intervals with ray-collecting terminal, then is drawn further
It is directed at photoelectric detector.For farthest avoiding wavelength to be filtered such as λ 2, the light beam of λ 3 in filter element 4 to be reflected into institute
Need the light separate terminal of wavelength, the angle of adjustable battle array mirror, by after the light beam filtering wavelength is reflected first formation
Total internal reflection, and the part injection filter element of mirror surface is not formed from the second face；Selectively, the battle array mirror of the 3rd is adjusted
Angle, make directly not formed from the second face the part of mirror surface after filtering the light beam of the wavelength battle array mirror by the 3rd and reflecting
Injection filter element, or by controlling the angle of battle array mirror, make the light beam of wavelength to be filtered from the 3rd direct injection.Thus,
Interference light is farthest guided away.It is preferably formed as at least one light separate terminal, corresponding collection different wave length
Light, incidence/exit facet is preferably attached with light filter 5 or is coated with filter coating, to filter unwanted interference light.
In another embodiment, as it is shown on figure 3, the mirror surface of second replaces with the battle array mirror with controlled controlling angle
8, it is a branch of filter element 4 that is incident to from the light of compound lens 3 injection with phase co-wavelength, incident ray enters filter element 4
After, reflex to the 3rd through the battle array mirror 8 of second, now, the battle array mirror of the 3rd is controlled to certain angle and receives required wavelength
Such as the light beam of λ 1, and required wavelength light beam being reflected first, the wavelength being shot up is that the light beam of λ 1 is through optical system, quilt
The light separate terminal being separated at intervals with ray-collecting terminal is received, then is guide further to photoelectric detector.For maximum
Wavelength to be filtered such as λ 2 in filter element, the light beam of λ 3 is avoided to degree to be reflected into the light separate terminal of required wavelength,
The angle of the battle array mirror of second and the 3rd is individually controlled and cooperates, by the light beam of wavelength to be filtered by the battle array of the 3rd
Total internal reflection is formed at first after mirror 6 reflection, and from second injection filter element；Selectively, the battle array of the 3rd is adjusted
The angle of mirror, makes directly from second injection filter element after the light beam filtering wavelength is reflected by the battle array mirror of the 3rd, or
By controlling the angle of the 3rd battle array mirror 6, make the light beam of wavelength to be filtered from the 3rd direct injection.Thus, disturb light quilt
Farthest guide away.It is preferably formed as at least one light separate terminal, the corresponding light collecting different wave length, the plane of incidence
On be preferably attached with light filter 5 or be coated with filter coating, to filter unwanted interference light.
Wherein, in described first battery of lens 1, the first lens L11 thing side is to distance D1 of the image side surface of the second lens L12,
It is preferably 0.15 < D1/L < 0.3 with filtering system total length L ratio, filtering system can be made excessive if less than this lower limit, if
Exceed this higher limit, light can be caused too small to the incident angle of the filter element plane of incidence, affect modulation range.Meanwhile,
The ratio of the focal length F1 of described first the battery of lens 1 and focal length F2 of compound lens 3, meets: 0.65 < F1/F2 <
0.72, better incident distribution can be obtained within the range.
The foregoing is only this utility model preferred embodiment, be not intended to limit practical range of the present utility model, all
The equal change made according to this utility model the scope of the claims and modification, fall within the scope that this utility model patent contains.
Claims (10)
1. a LIBS analyser, it is possible to carry out the detection of the characteristic spectral line of at least one composition simultaneously and divide
Analysis, including: laser source system, it sends high energy pulse laser by lens focus to sample surfaces；Sample stage, carrying is treated
Test sample product, ablated sample forms laser induced plasma, launches the light of multi-wavelength complex spectrum to surrounding；Light is received
Collection terminal, for collecting the light of the multi-wavelength complex spectrum of described transmitting, and all guides it to filtering system；Light divides
From terminal, for gathering the light through the filtered required wavelength of described filtering system, and direct it to photoelectric detector；Its
Being characterised by: described filtering system, separating the light of the multi-wavelength complex spectrum of described transmitting, filtering system includes:
First battery of lens, diffraction grating and filter element, filter element at least include an incidence/exit facet and two there is reflection merit
Can surface, after the light element after filtering of the required wavelength in incident ray, be separated at intervals with ray-collecting terminal
Light separate terminal is received, the light of its commplementary wave length from being different from the surface of described incidence/exit facet from filter element outgoing,
And do not enter the formation interference of corresponding light separate terminal.
LIBS analyser the most according to claim 1, the first battery of lens has negative diopter, at least wraps
Include and there are the first lens of positive diopter and there are negative dioptric second lens.
LIBS analyser the most according to claim 1, also includes the second battery of lens, is positioned at diffraction grating
And between filter element, and there is positive diopter and non-spherical surface, the second battery of lens at least includes a compound lens.
LIBS analyser the most according to claim 1, filter element is tri-prismoid.
LIBS analyser the most according to claim 4, filter element at least includes with lower surface: first
Face is incidence/exit facet, second battle array mirror with controlled controlling angle, the 3rd the battle array mirror with controlled controlling angle.
LIBS analyser the most according to claim 5, incidence/exit facet is attached with light filter or coating
There is filter coating.
7., according to the LIBS analyser described in claim 5 or 6, light enters in filter element through first
Portion, reflexes to the 3rd through the battle array mirror of second, and the battle array mirror of the 3rd is controlled to certain angle and receives light, and by required ripple
Long light reflects first, and the light of required wavelength is connect by the light separate terminal being separated at intervals with ray-collecting terminal
Receive.
LIBS analyser the most according to claim 7, after incident ray enters filter element, through second
The battle array mirror in face reflexes to the 3rd, adjusts the angle of the battle array mirror of the 3rd so that it is the light beam of commplementary wave length is anti-by the battle array mirror of the 3rd
Total internal reflection is formed at first after penetrating, and from second injection filter element.
LIBS analyser the most according to claim 7, after incident ray enters filter element, through second
The battle array mirror in face reflexes to the 3rd, adjusts the angle of the battle array mirror of the 3rd so that it is the light of commplementary wave length is from second and/or the 3rd
Face injection filter element.
LIBS analyser the most according to claim 2, the first lens thing in described first battery of lens
Side to distance D1 of the image side surface of last lens in the first battery of lens, with filtering system total length L ratio be 0.15 <
D1/L<0.3。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620290604.9U CN205665169U (en) | 2016-04-08 | 2016-04-08 | Laser induction punctures spectral analysis appearance |
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| CN201620290604.9U CN205665169U (en) | 2016-04-08 | 2016-04-08 | Laser induction punctures spectral analysis appearance |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105758842A (en) * | 2016-04-08 | 2016-07-13 | 苏州启翔仪器科技有限公司 | Filtering system of laser-induced breakdown spectrum analyzer |
-
2016
- 2016-04-08 CN CN201620290604.9U patent/CN205665169U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105758842A (en) * | 2016-04-08 | 2016-07-13 | 苏州启翔仪器科技有限公司 | Filtering system of laser-induced breakdown spectrum analyzer |
| CN105758842B (en) * | 2016-04-08 | 2018-10-19 | 苏州启翔仪器科技有限公司 | A kind of filtering system of laser induced breakdown spectroscopy analyzer |
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