CN105758841B - A kind of laser induced breakdown spectroscopy analyzer - Google Patents
A kind of laser induced breakdown spectroscopy analyzer Download PDFInfo
- Publication number
- CN105758841B CN105758841B CN201610217164.9A CN201610217164A CN105758841B CN 105758841 B CN105758841 B CN 105758841B CN 201610217164 A CN201610217164 A CN 201610217164A CN 105758841 B CN105758841 B CN 105758841B
- Authority
- CN
- China
- Prior art keywords
- light
- face
- filter element
- laser induced
- breakdown spectroscopy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Landscapes
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Engineering & Computer Science (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The present invention relates to a kind of laser induced breakdown spectroscopy analyzers, can be carried out at the same time the detection and analysis of the characteristic spectral line of at least one ingredient, including a filtering system, be detached to the light of multi-wavelength complex spectrum, filtering system includes：First lens group, diffraction grating and filter element, filter element is that there are five with the prism of upper surface for tool, there is the surface of reflection function including at least the plane of incidence, the first exit facet, the second exit facet and two, after the filtered element of light of required wavelength in incident ray, it is received by the light separate terminal adjacent with the first exit facet, the light of commplementary wave length is emitted from the surface different from the first exit facet from filter element, is not entered corresponding light separate terminal and is formed interference.
Description
Technical field
The invention belongs to spectral measurement and technical field of imaging, are related to a kind of laser induced breakdown spectroscopy analyzer, especially
It is that multispectral separation and high-resolution imaging are realized based on optical element combination.
Background technology
Laser induced breakdown spectroscopy analyzer needs the complex spectrum generated to laser induced plasma to be divided, inspection
The peak intensity for surveying different-waveband carries out qualitative elementary and quantitative analysis, and light-splitting method mostly uses greatly grating and adds in spectrum detection process entirely
CCD modes carry out light splitting detection to all band spectrum, however under certain specific applications, without detecting all band spectral intensity,
It only needs to detect that the spectral intensity of certain several specific wavelength, mostly uses filtering mode greatly in this case and remove invalid spectrum,
However traditional filtering system is filtered beam splitting using filter mirror and speculum, effect is bad, leads to laser induced plasma
The light band of light separation that body generates is unclear, is impacted to result of detection.Meanwhile the wave band to have ensured divides in the prior art
It from effect, needs to use a large amount of optical element, cost is caused to improve, multiple optical elements also propose assembly higher
It is required that.It should be noted that the interference light in separation process can also have an impact test result, do not have in previous technology
It proposes light to be filtered out being guided out acquisition light path, thoroughly removes the solution of interference light.
Laser induced breakdown spectroscopy analyzer proposed by the present invention can overcome the above problem in the prior art.
Invention content
The laser induced breakdown spectroscopy analyzer of the present invention, can be carried out at the same time the inspection of the characteristic spectral line of at least one ingredient
It surveys and analyzes, including：Laser source system sends out high energy pulse laser and passes through lens focus to sample surfaces；Sample stage,
Sample to be tested is carried, ablated sample forms laser induced plasma, emits the light of multi-wavelength complex spectrum around；
Ray-collecting terminal, the light of the multi-wavelength complex spectrum for collecting the transmitting, and it is all guided to filtering system；
Light separate terminal for acquiring the light through the filtered required wavelength of the filtering system, and directs it to photoelectricity inspection
Survey device；It is characterized in that：The filtering system detaches the light of the multi-wavelength complex spectrum of the transmitting, filtering system
System includes：First lens group, diffraction grating and filter element, filter element are tool there are five with the prism of upper surface, at least
There is the surface of reflection function, the required wave in incident ray including the plane of incidence, the first exit facet, the second exit facet and two
After the filtered element of long light, received by the light separate terminal adjacent with the first exit facet, the light of commplementary wave length
It is emitted from the surface different from the first exit facet from filter element, does not enter corresponding light separate terminal and form interference.
Preferably, the first lens group has negative diopter, includes at least the first lens with positive diopter and with bearing
Second lens of diopter.
Preferably, further include the second lens group, between diffraction grating and filter element, and with positive diopter and non-
Spherical face, the second lens group include at least a compound lens.
Preferably, filter element includes at least following surface：First face is the plane of incidence, and the second face is with controllable controlling angle
Battle array mirror, third face are the second exit facet, and fourth face is covered with mirror surface, and the 5th face is the first exit facet.
Preferably, the first face is attached with optical filter or is coated with filter coating.
Preferably, after incident ray enters filter element, the mirror surface through fourth face reflexes to the second face, and battle array mirror is controlled
System receives light at a certain angle, and the light of required wavelength is reflected the 5th face, the light of required wavelength by with the 5th face
Adjacent light separate terminal is received.
Preferably, after incident ray enters filter element, the mirror surface through fourth face reflexes to the second face, adjustment second
The angle of the battle array mirror in face, from the part of third face or fourth face not covered with mirror surface after making the light beam of its commplementary wave length be reflected
The light beam for projecting filter element or its commplementary wave length directly projects filter element from the second face.
Preferably, light separate terminal is multiple, the corresponding light for collecting different wave length.
Preferably, the first lens object side in first lens group is to the last one lens in the first lens group
The distance D1 of image side surface is 0.15 with filtering system total length L ratio<D1/L<0.3.
Preferably, the ratio of the focal length ︱ F2 ︱ of the focal length ︱ F1 ︱ and compound lens of first lens group meets：0.65<︱
F1 ︱/︱ F2 ︱<0.72.
Beneficial effects of the present invention：Laser induced breakdown spectroscopy analyzer proposed by the present invention can overcome in the prior art
Filter effect is bad, wave band detaches unclear technical problem, while wavelength to be filtered out being enable to be projected from multiple faces, and control is more
It is flexibly simple.
Description of the drawings
Fig. 1 is laser induced breakdown spectroscopy analyzer overall construction drawing.
Fig. 2 is the filtering system composition figure of laser induced breakdown spectroscopy analyzer.
Specific implementation mode
Fig. 1 is laser induced breakdown spectroscopy analyzer overall construction drawing.High energy pulse laser passes through lens focus to sample
Product surface carries out calcination to sample, and ablated sample forms laser induced plasma, emits multi-wavelength complex light around
Spectrum.The light of transmitting is collected by the ray-collecting terminal of light detectors, is directed to filtering system, to further acquire
The light of required wavelength carries out subsequent analysis.Fig. 2 is the filtering system of laser induced breakdown spectroscopy analyzer, including：Have
First lens group 1 of negative diopter, the first lens group 1 include at least the first lens L11 with positive diopter and are bent with negative
Second lens L12 of luminosity；The multi-wavelength complex spectrum light that ray-collecting terminal is collected forms entirety by the first lens group 1
Beam shaping, wherein light beam is integrally collapsed with the first lens L11 of positive diopter, then via with negative diopter
Second lens L12 shapings are spread.Light reaches diffraction grating 2, light of the diffraction grating 2 to different wave length through the second lens L12
With different angle of diffraction, therefore the light of different wave length is dispersed.It the defects of aberration will be brought due to diffraction phenomena, makes
At focusing and the problems such as light spot shape defect, the second of chromatic aberration defect is eliminated in the preferred design of diffraction grating rear thoroughly in the present invention
Microscope group, the second lens group include at least a compound lens 3.Compound lens at least have one side be it is aspherical, thus can also be into
One step corrects outskirt aberration well, compared with without aspherical situation, even if light can if very big by lens bending
Aberration is distorted in enough good amendments, so as to realize the simplification of system using less optical lens, to LIBS filtering systems
Further realize optimization.The angle that compound lens 3 disperses the light of different wave length is all guided to the filter element at rear
4.Compound lens 3 preferably combines the compound lens with positive light coke formed with a convex lens by a concavees lens.Filter element
4 be to have there are five with the prism of upper surface, is had including at least the plane of incidence, the first exit facet, the second exit facet and two
The surface of reflection function, after the filtered element of light of the required wavelength in incident ray, by adjacent with the first exit facet
Light separate terminal is received, and the light of commplementary wave length is emitted from the surface different from the first exit facet from filter element, not into
Enter corresponding light separate terminal and forms interference.Filter element includes at least following surface：First face 41 is the plane of incidence, the second face
42 have the battle array mirror 6 of controllable controlling angle, and third face 43 is the second exit facet, and fourth face 44 is partially covered with mirror surface 7, and the 5th
Face 45 is the first exit facet.The light projected from compound lens 3 is incident to filter element 4 with phase co-wavelength to be a branch of.Incident light
After line enters filter element 4, the mirror surface 7 through fourth face 44 reflexes to the second face 42, and the battle array mirror 6 in the second face 42 is controlled to
Certain angle receives light, and the light of required wavelength is reflected the first exit facet 41, and the light of required wavelength is by with first
The adjacent light separate terminal of exit facet 41 is received, and is guide further to photoelectric detector.Farthest to avoid filtering
The light beam of wavelength such as λ 2, λ 3 to be filtered out are reflected into the light separate terminal of required wavelength in optical element 4, can adjust battle array mirror 6
Angle, after so that the light beam of its commplementary wave length is reflected from the second exit facet 43 or fourth face 44 part not covered with mirror surface
The light beam for projecting filter element or its commplementary wave length directly projects filter element from the second face 42.To which interference light is by maximum journey
The guiding of degree is gone out.It is preferably formed as an at least light separate terminal, the corresponding light for collecting different wave length, on the plane of incidence preferably
It is attached with optical filter 5 or is coated with filter coating, to filter out unwanted interference light.
Wherein, in first lens group 1 first lens L11 objects side to the image side surface of the second lens L12 distance D1,
It is preferably 0.15 with filtering system total length L ratio<D1/L<0.3, filtering system can be made excessive if it is less than the lower limit, if
More than the upper limit value, the incident angle that light is incident on the filter element plane of incidence can be caused too small, influence modulation range.Meanwhile
The ratio of the focal length ︱ F1 ︱ of first lens group 1 and the focal length ︱ F2 ︱ of compound lens 3 meet：0.65<︱ F1 ︱/︱ F2 ︱<
0.72, it can get more good incident distribution in the range.
The foregoing is merely present pre-ferred embodiments, are not intended to limit the practical range of the present invention, all according to this hair
The same variation and modification that bright the scope of the claims is made, fall within the range that patent of the present invention covers.
Claims (9)
1. a kind of laser induced breakdown spectroscopy analyzer can be carried out at the same time the detection of the characteristic spectral line of at least one ingredient and divide
Analysis, including：Laser source system sends out high energy pulse laser and passes through lens focus to sample surfaces；Sample stage, carrying wait for
Sample, ablated sample form laser induced plasma, emit the light of multi-wavelength complex spectrum around；Light is received
Collect terminal, the light of the multi-wavelength complex spectrum for collecting the transmitting, and it is all guided to filtering system；Light point
From terminal, for acquiring the light through the filtered required wavelength of the filtering system, and photoelectric detector is directed it to；Its
It is characterized in that：The filtering system detaches the light of the multi-wavelength complex spectrum of the transmitting, and filtering system includes：
First lens group, diffraction grating and filter element, it is that there are five with upper table for tool that the first lens group, which has negative diopter, filter element,
The prism in face includes at least the plane of incidence, the first exit facet, the second exit facet and two surfaces with reflection function, enters
After penetrating the filtered element of light of the required wavelength in light, connect by the light separate terminal adjacent with the first exit facet
It receives, the light of commplementary wave length is emitted from the surface different from the first exit facet from filter element, does not enter corresponding light separation
Terminal forms interference.
2. laser induced breakdown spectroscopy analyzer according to claim 1 further includes the second lens group, it is located at diffraction grating
Between filter element, and there is positive diopter and non-spherical surface, the second lens group includes at least a compound lens.
3. laser induced breakdown spectroscopy analyzer according to claim 1, filter element includes at least following surface：First
Face is the plane of incidence, and the second face has the battle array mirror of controllable controlling angle, and third face is the second exit facet, and fourth face is covered with speculum
Face, the 5th face are the first exit facet.
4. laser induced breakdown spectroscopy analyzer according to claim 3, the plane of incidence is attached with optical filter or coated with filter
Light film.
5. laser induced breakdown spectroscopy analyzer according to claim 3 or 4, incident ray enters filtering member through the first face
After part, the mirror surface through fourth face reflexes to the second face, and the battle array mirror in the second face is controlled to certain angle and receives light, and will
The light of required wavelength reflects the 5th face, and the light of required wavelength is received by the light separate terminal adjacent with the 5th face.
6. laser induced breakdown spectroscopy analyzer according to claim 5, after incident ray enters filter element, through the 4th
The mirror surface in face reflexes to the second face, adjusts the angle of the battle array mirror in the second face, from the after making the light beam of its commplementary wave length be reflected
The light beam of filter element or its commplementary wave length is projected directly from the second face in the part of three faces or fourth face not covered with mirror surface
Project filter element.
7. laser induced breakdown spectroscopy analyzer according to claim 1, light separate terminal is multiple, corresponding collection institute
The light of the different wave length needed.
8. laser induced breakdown spectroscopy analyzer according to claim 1, the first lens object in first lens group
Side is 0.15 with filtering system total length L ratio to the distance D1 of the image side surface of the last one lens in the first lens group<
D1/L<0.3。
9. laser induced breakdown spectroscopy analyzer according to claim 2, the focal length ︱ F1 ︱ of first lens group with it is multiple
The ratio of the focal length ︱ F2 ︱ of lens is closed, is met：0.65<︱ F1 ︱/︱ F2 ︱<0.72.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610217164.9A CN105758841B (en) | 2016-04-08 | 2016-04-08 | A kind of laser induced breakdown spectroscopy analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610217164.9A CN105758841B (en) | 2016-04-08 | 2016-04-08 | A kind of laser induced breakdown spectroscopy analyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105758841A CN105758841A (en) | 2016-07-13 |
| CN105758841B true CN105758841B (en) | 2018-10-19 |
Family
ID=56334449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610217164.9A Active CN105758841B (en) | 2016-04-08 | 2016-04-08 | A kind of laser induced breakdown spectroscopy analyzer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105758841B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI765286B (en) * | 2020-06-23 | 2022-05-21 | 長庚大學 | Spectral analysis device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202916196U (en) * | 2012-11-27 | 2013-05-01 | 四川大学 | Laser-induced breakdown spectrum analyzing device based on single light beam splitting |
| CN103308492A (en) * | 2013-06-13 | 2013-09-18 | 吉林大学 | Synchronous machine applied to laser-induced breakdown spectroscopy |
| EP2677301A1 (en) * | 2011-02-18 | 2013-12-25 | Tsinghua University | Method and system for improving precision of element measurement based on laser-induced breakdown spectroscopy |
| CN103743718A (en) * | 2013-12-11 | 2014-04-23 | 中国科学院西安光学精密机械研究所 | Laser spectrum analyzer combining confocal micro-Raman spectrometer with laser-induced breakdown spectrometer |
| CN204214783U (en) * | 2014-11-17 | 2015-03-18 | 浙江大学 | One is adjustable heats double-pulse laser induced breakdown spectral device again |
| CN205656134U (en) * | 2016-04-08 | 2016-10-19 | 苏州启翔仪器科技有限公司 | Laser induction punctures spectral analysis appearance |
-
2016
- 2016-04-08 CN CN201610217164.9A patent/CN105758841B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2677301A1 (en) * | 2011-02-18 | 2013-12-25 | Tsinghua University | Method and system for improving precision of element measurement based on laser-induced breakdown spectroscopy |
| CN202916196U (en) * | 2012-11-27 | 2013-05-01 | 四川大学 | Laser-induced breakdown spectrum analyzing device based on single light beam splitting |
| CN103308492A (en) * | 2013-06-13 | 2013-09-18 | 吉林大学 | Synchronous machine applied to laser-induced breakdown spectroscopy |
| CN103743718A (en) * | 2013-12-11 | 2014-04-23 | 中国科学院西安光学精密机械研究所 | Laser spectrum analyzer combining confocal micro-Raman spectrometer with laser-induced breakdown spectrometer |
| CN204214783U (en) * | 2014-11-17 | 2015-03-18 | 浙江大学 | One is adjustable heats double-pulse laser induced breakdown spectral device again |
| CN205656134U (en) * | 2016-04-08 | 2016-10-19 | 苏州启翔仪器科技有限公司 | Laser induction punctures spectral analysis appearance |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105758841A (en) | 2016-07-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10983305B2 (en) | Methods for correctly orienting a substrate in a microscope | |
| DE102009000528B4 (en) | Inspection device and method for the optical examination of object surfaces, in particular of wafer surfaces | |
| TWI245114B (en) | Apparatus for measuring imaging spectrograph | |
| CN103743720A (en) | Confocal microscopic Raman spectrometer with angle resolution capacity | |
| JP2008509400A (en) | Color display type monochromatic light absorption determination method for light absorption in stained samples | |
| CN104698068B (en) | High-spatial resolution laser biaxial differential confocal spectrum-mass spectrometry microimaging method and device | |
| CN111879239B (en) | Spectrum confocal measuring device and measuring method | |
| JP2022541364A (en) | Spectral confocal measurement device and measurement method | |
| CN104697967B (en) | High-space resolution laser twin shaft confocal spectroscopic mass spectrum micro imaging method and device | |
| KR20170052256A (en) | Apparatus and method for measuring concentration of material | |
| CN115307569A (en) | Dual-band detection-based dual-axis spectral line confocal sensor | |
| CN105758842B (en) | A kind of filtering system of laser induced breakdown spectroscopy analyzer | |
| KR20150116999A (en) | Micro Raman and photo-luminescence spectral analysis apparatus for multi-channel excitation laser source switching | |
| CN105758841B (en) | A kind of laser induced breakdown spectroscopy analyzer | |
| KR101632672B1 (en) | Confocal spectrogram microscope | |
| US11486828B2 (en) | Fluorescence photometer and observation method | |
| CN205656134U (en) | Laser induction punctures spectral analysis appearance | |
| CN209894701U (en) | Laser-induced fluorescence spectrum detection device based on automatic focusing of liquid lens | |
| US10823948B2 (en) | Microscope for imaging an object | |
| CN205665169U (en) | Laser induction punctures spectral analysis appearance | |
| CN105842207B (en) | A kind of laser induced breakdown spectroscopy analyzer | |
| WO2018128146A1 (en) | Spectral measurement method and spectral measurement device | |
| CN205656135U (en) | Laser induction punctures spectral analysis appearance | |
| CN108489613B (en) | A kind of volume holographic grating type space heterodyne Raman spectroscopy instrument light channel structure | |
| CN105823761B (en) | A kind of filtering system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |