CN205635371U - Seven sections air feeder of integral type - Google Patents
Seven sections air feeder of integral type Download PDFInfo
- Publication number
- CN205635371U CN205635371U CN201620230359.2U CN201620230359U CN205635371U CN 205635371 U CN205635371 U CN 205635371U CN 201620230359 U CN201620230359 U CN 201620230359U CN 205635371 U CN205635371 U CN 205635371U
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- CN
- China
- Prior art keywords
- gas
- sections
- deflector
- connecting plate
- integral type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a seven sections air feeder of integral type, the required segmentation portion gas device of coating process in in particular to glass coating film industry, include the connecting plate, guide plate, the closing plate that connect gradually the setting through the bolt, gaseous through the air inlet on the connecting plate to guide plate carrier gas, the milling flutes of guide plate through seven sections examinations is to sputtering environment carrier gas. The utility model is used for the regulation of coated glass homogeneity improves production efficiency in the solution production process, improves product quality.
Description
Technical field
This utility model belongs to technical field of vacuum plating, and particularly one can change sputtering zone
Territory gas distribution situation thus regulate the integral type seven sections supply of the uniformity of sputtering sedimentation thickness
Device.
Background technology
Known magnetron sputtering plating refers to that under vacuum, electronics is under the effect of electric field, fly to several
Collide with ar atmo during sheet so that it is ionization produces Ar cation and new electricity
Son；New electronics flies to substrate, and Ar ion accelerates to fly to cathode target under the effect of electric field, and
Bombarding target surface with high-energy, make target sputter, deposition forms thin film on a glass substrate.
Known effect coating film on glass sedimentation rate because have three powers, magnetic field intensity,
Process gas environment.And relate to the only magnetic field intensity of imposite glass film forming thickness uniformity with
Process gas environment two.Owing to the regulation of magnetic field intensity to be carried out, for plated film under air
Glass production extreme influence.
The quality of glass is played vital effect by the uniformity of known coated glass.And
The regulation a great problem that always puzzlement produces of uniformity in process of production.
Utility model content
Solving in this utility model of task is to provide a kind of seven sections of feeders of integral type, makes
The distribution of gas under coated glass scalable magnetic-control sputtering ring border in process of production, thus regulate
The uniformity of deposition film forming.
For solving the problems referred to above, this utility model realizes in the following manner: integral type seven sections
Feeder, is sequentially connected with the connecting plate of setting, deflector, sealing plate including by bolt；
Gas carries gas, described deflector by the air inlet on described connecting plate to described deflector
By the groove milling of seven sections of section examinations to sputtering environment conveying gas；Described connecting plate connects seven sections of supply
With negative electrode cover plate.
Good effect of the present utility model is: in coated glass production process, can effectively regulate
Gas distribution under magnetron sputtering environment, thus play and control the uniform, especially of deposition film forming
Being to produce big plate face coated glass, not broken sky directly completes uniformity under vacuum production environment
Regulation, not only increases production efficiency and more improves the quality of product.
Accompanying drawing explanation
Fig. 1 is the structural representation of seven sections of feeders of integral type described in the utility model.
Fig. 2 is the fundamental diagram of seven sections of feeders of integral type described in the utility model.
Detailed description of the invention
Below in conjunction with the accompanying drawings operation principle of the present utility model is described in further detail.
Seven sections of feeders of integral type as shown in Figure 1, including connecting plate 1, deflector 2,
Sealing plate 3.Connecting plate 1 connects seven sections of supply and negative electrode cover plate, is that seven sections of feeders realize
Function connector.Sealing plate 3 covers above deflector 2, plays finally sealed effect.Water conservancy diversion
Plate 2, above connecting plate, is the core of whole device, by the water conservancy diversion on deflector 2
The distribution of passage subregion is used for realizing the purpose of this utility model: in magnetron sputtering process, pass through
Profile adjustment to process gas realizes the regulation of coated glass uniformity.
Specific works principle (as shown in Figure 2):
Process gas deliver to be connected with negative electrode cover plate by seven gas flowmeters respectively seven
Seven air inlets of section supply, seven sections of supply seal gas piping by sealing ring, pass through spiral shell
Bolt is connected with cavity cover plate；Gas arrives connecting plate and flows to deflector respectively by air inlet,
Flow to specify position by the internal groove milling guiding gas of deflector；Last deflector overlying is covered close
Shrouding, is connected with deflector with bolt.When process requirements Far Left needs more process gas
When body, only need to regulate corresponding leftmost gas flowmeter, equally, when thinking regulation
During the process gas of which position, it is only necessary to regulate corresponding gas flowmeter.Thus realize
Coated glass uniformity regulation in process of production.
Claims (2)
1. seven sections of feeders of integral type, it is characterised in that include being sequentially connected with by bolt setting
The connecting plate put, deflector, sealing plate；Gas passes through the air inlet on described connecting plate to institute
Stating deflector conveying gas, described deflector is carried to sputtering environment by the groove milling of seven sections of section examinations
Gas；Described connecting plate connects seven sections of supply and negative electrode cover plate.
Seven sections of feeders of integral type the most according to claim 1, it is characterised in that work
Process gases delivers to the seven sections of supply being connected with negative electrode cover plate respectively by seven gas flowmeters
Seven air inlets, seven sections of supply seal gas piping by sealing ring, by bolt and chamber
Body cover plate is connected；Gas arrives connecting plate and flows to deflector respectively, by leading by air inlet
Stream intralaminar part groove milling guiding gas flows to specify position；Last deflector overlying covers sealing plate,
It is connected with deflector with bolt；When wanting the process gas regulating a certain position, it is only necessary to adjust
Save corresponding gas flowmeter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620230359.2U CN205635371U (en) | 2016-03-23 | 2016-03-23 | Seven sections air feeder of integral type |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620230359.2U CN205635371U (en) | 2016-03-23 | 2016-03-23 | Seven sections air feeder of integral type |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205635371U true CN205635371U (en) | 2016-10-12 |
Family
ID=57075271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620230359.2U Expired - Fee Related CN205635371U (en) | 2016-03-23 | 2016-03-23 | Seven sections air feeder of integral type |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205635371U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105837049A (en) * | 2016-03-23 | 2016-08-10 | 河北物华天宝镀膜科技有限公司 | Integrated seven-segment gas supply apparatus |
-
2016
- 2016-03-23 CN CN201620230359.2U patent/CN205635371U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105837049A (en) * | 2016-03-23 | 2016-08-10 | 河北物华天宝镀膜科技有限公司 | Integrated seven-segment gas supply apparatus |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161012 Termination date: 20210323 |