CN205594128U - Automatic limit ware is sought to LED probe station of control Z axle motion - Google Patents
Automatic limit ware is sought to LED probe station of control Z axle motion Download PDFInfo
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- CN205594128U CN205594128U CN201620294694.9U CN201620294694U CN205594128U CN 205594128 U CN205594128 U CN 205594128U CN 201620294694 U CN201620294694 U CN 201620294694U CN 205594128 U CN205594128 U CN 205594128U
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Abstract
The utility model provides an automatic limit ware is sought to LED probe station of control Z axle motion, belongs to LED chip spot measurement equipment technical field, sets up fixed bolster and lower fixed bolster in the frame, connects the probe at the front end of last fixed bolster through visiting the needle holder seat, sets up pressure sensors on the lower fixed bolster of last fixed bolster below, arrange below the probe and hold the piece platform that holding the lower extreme center of piece platform and being connected with the output of Z axle motor through the Z axle, the signal output part of the work control end at Z axle motor, Z axle PC control center's an input connection pressure inductor is connected to Z axle PC control center's an output. The utility model discloses can effectively avoid after the Z axle moves the pressure contact continuing rising 1~15 mu m's distance has solved that some chaining pin trace quality is poor, probe life lacks, the shortcomings such as degree of accuracy reduction of test result.
Description
Technical field
This utility model belongs to LED chip point measurement equipment technical field, is specifically related to the control technology that Z axis is moved by LED point measurement machine seeking border (edge sensor).
Background technology
Along with the progress of semiconductor LED technology, the lifting to LED production capacity, for improving profit margin, industry is to the some degree of testing the speed of LED chip, pin trace quality has higher requirement after point is surveyed；Point measurement machine used by LED industry realizes the motor control to Z axis (the edge sensor of passive type controls) to the induced signal of the control model Main Basis vicarious edge sensor of Z axis at present.
The pattern that this kind of control Z axis rises has following characteristics: after the chip on the wafer-supporting platform (CHUCK dish) of its motor process carrying LED chip contacts with probe, Z axis continues to rise, along with Z axis lifting height increases, open circuit is formed after reaching seeking border pressure contact, pressure sensitive contact lamp is bright and sends the stopping signal that slows down to Z axis motor simultaneously, Z axis motor slows down after receiving signal, then rises Z axis motor stop motion after a segment distance, and Z axis stops.In Z axis motor process, when pressure sensitive contact lamp is bright, Z axis just carries out retarded motion, can rise the height of 1～15 μm from decelerating to stop Z axis, then probe penetrates the chip electrode degree of depth increases by 1～15 μm.This motor pattern has the disadvantage in that
1. a chaining pin trace (degree of depth, size, shape are unstable) of poor quality；
2. probe service life short (alloy needle 300～4,000,000 times, beryllium copper pin 100～2,000,000 times)；
3. the accuracy of test result is low.
Utility model content
For the problem of the pattern existence that Z axis is controlled by existing point measurement machine, this utility model purpose is that proposition is a kind of improves a LED probe station seeking border automatically controlling Z axis motion surveying quality.
This utility model arranges fixed support and lower fixed support in frame, fixed support and under support bracket fastened rear end be mutually permanently connected, in upper support bracket fastened front end by probe holder linking probe, the lower fixed support below upper fixed support arranges pressure inductor；At probe arranged beneath wafer-supporting platform, the lower center of described wafer-supporting platform connects Z axis, Z axis is connected to the outfan of the Z axis motor being fixed in frame, frame is also connected with Z axis PC control centre, one outfan of described Z axis PC control centre is connected to the job control end of Z axis motor, and an input of Z axis PC control centre connects the signal output part of pressure inductor.
During work, wafer-supporting platform is placed with chip.Z axis motor precise motion can accurately be controlled with Z axis PC programme-control by this utility model by highly sensitive pressure inductor, can set the distance risen after probe contacts with chip；After the chip on wafer-supporting platform contacts with probe, pressure inductor just senses certain pressure, converts the pressure to the electric signal amplified, and electric signal is converted into the distance that Z axis rises by Z axis PC program.The distance risen after being contacted with chip by setting probe, Z axis PC program can calculate and control the distance of Z axis motor movement according to real-time amplification electric signal, and determine that deceleration is until stopping after moving to setting height under certain altitude.The method can be prevented effectively from after Z axis moves to pressure contact the distance continuing to rise 1～15 μm, solves that a chaining pin trace is of poor quality, the shortcoming such as probe service life is short, the accuracy of test result.
Feature of the present utility model is；
1, high sensibility pressure transducer, the contact pressure to 1～20g senses sensitive.
2, the amplification electric signal that Z axis PC program can simulate micron order move distance, pressure history is corresponding with pressure history, and by this curve input Z axis PC control program；When Z axis rises, and after chip contacts with probe on wafer-supporting platform, pressure inductor senses when pressure changes, amplify the corresponding relation of electric signal and distance according to pressure change in simulation curve, and can accurately control the motion of Z axis.
3, after on setting wafer-supporting platform, chip contacts with probe, the distance that wafer-supporting platform rises.
This utility model can use high sensibility pressure transducer to be ceramic pressure sensor, pressure acts directly on the front surface of the ceramic diaphragm of pressure transducer, diaphragm is made to produce small deformation, thick-film resistor is printed on the back side of ceramic diaphragm, connect into a Wheatstone bridge (closing bridge), piezoresistive effect due to varistor, making electric bridge produce the voltage signal that a highly linear being directly proportional to the pressure also is directly proportional to driving voltage, the signal of standard is demarcated as 2.0/3.0/3.3 mV/V etc. according to the difference of pressure range.By laser calibration, sensor has very high pressure measuring accuracy.
Micron order contact distance in Z axis PC control centre and contact pressure change curve, it is by through repeatedly, lot of experimental data and combine practical situation simulation calculated, micron order contact distance is accurately simulated with contact pressure change curve and is calculated micron order and contact the functional relationship of distance and contact pressure, and writes in Z axis PC control program.During to Z axis motor control, calculate Z axis current location according to the piezometer that Z axis is current, then according to contact distance and the curve of pressure and set Z axis moving height, the distance between two positions is the distance that the deceleration of Z axis motor stops.
Accompanying drawing explanation
Fig. 1 is a kind of structural representation of the present utility model.
Detailed description of the invention
As it is shown in figure 1, be provided with fixed support 201 and lower fixed support 202 in frame 200, the rear end wherein going up fixed support 201 and lower fixed support 202 is mutually permanently connected, and fixes with frame 200 respectively.In the front end of upper fixed support 201 by probe holder 204 linking probe 205, lower fixed support 202 front end below upper fixed support 201 arranges pressure inductor 203.
Wafer-supporting platform 102 is had in probe 205 arranged beneath.The lower center of wafer-supporting platform 102 connects Z axis 101, and Z axis 101 is connected to the outfan of the Z axis motor 100 being fixed in frame 200.
Being also connected with Z axis PC control centre 206 in frame 200, an outfan of Z axis PC control centre 206 is connected to the job control end of Z axis motor 100, and an input of Z axis PC control centre 206 connects the signal output part of pressure inductor 203.
In Fig. 1 103 are to be arranged in the chip above wafer-supporting platform 102.
Z axis motor 100 rises, the chip 103 on the CHUCK dish 102 of Z axis 101 upper end is driven to rise, after chip 103 touches probe 205, in the scope that contact pressure is the least, pressure inductor 203 can sense that contact pressure changes delicately, and now PC control centre 206 calculates this position to the distance between pressure sensitive contact position according to contact distance and pressure history, and control Z axis motor 100 and reduce speed now, when arriving pressure sensitive contact distance, Z axis motor 100 stops.
Claims (1)
1. the LED probe station seeking border automatically controlling Z axis motion, it is characterized in that: fixed support and lower fixed support are set in frame, fixed support and under support bracket fastened rear end be mutually permanently connected, in upper support bracket fastened front end by probe holder linking probe, the lower fixed support below upper fixed support arranges pressure inductor；At probe arranged beneath wafer-supporting platform, the lower center of described wafer-supporting platform connects Z axis, Z axis is connected to the outfan of the Z axis motor being fixed in frame, frame is also connected with Z axis PC control centre, one outfan of described Z axis PC control centre is connected to the job control end of Z axis motor, and an input of Z axis PC control centre connects the signal output part of pressure inductor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620294694.9U CN205594128U (en) | 2016-04-11 | 2016-04-11 | Automatic limit ware is sought to LED probe station of control Z axle motion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620294694.9U CN205594128U (en) | 2016-04-11 | 2016-04-11 | Automatic limit ware is sought to LED probe station of control Z axle motion |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205594128U true CN205594128U (en) | 2016-09-21 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620294694.9U Active CN205594128U (en) | 2016-04-11 | 2016-04-11 | Automatic limit ware is sought to LED probe station of control Z axle motion |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205594128U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105842603A (en) * | 2016-04-11 | 2016-08-10 | 扬州乾照光电有限公司 | LED probe-station edge sensor for automatic control of Z shaft movement |
-
2016
- 2016-04-11 CN CN201620294694.9U patent/CN205594128U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105842603A (en) * | 2016-04-11 | 2016-08-10 | 扬州乾照光电有限公司 | LED probe-station edge sensor for automatic control of Z shaft movement |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |