CN205582894U - Wet process manufacturing equipment with gas circulation device - Google Patents
Wet process manufacturing equipment with gas circulation device Download PDFInfo
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- CN205582894U CN205582894U CN201620283668.6U CN201620283668U CN205582894U CN 205582894 U CN205582894 U CN 205582894U CN 201620283668 U CN201620283668 U CN 201620283668U CN 205582894 U CN205582894 U CN 205582894U
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- gas
- process cavity
- processing device
- wet processing
- unit
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- Treating Waste Gases (AREA)
Abstract
The utility model provides a wet process manufacturing equipment with gas circulation device contains: the process chamber body, containing respectively, the position is in a first exhaust hole and a first inlet port of the relative both sides wall of the process chamber body, and a gas circulation device, include: the unit of bleeding sets up and is in outside the process chamber body, and a transmission pipeline, with the unit connection of bleeding, and with first exhaust hole with first inlet port intercommunication, wherein the unit of bleeding will the internal gas of process chamber passes through take out into in first exhaust hole transmission pipeline, and gas passes through first inlet port loopbacks extremely the internal portion of process chamber.
Description
Technical field
This utility model relates to a kind of wet processing device, particularly relates to a kind of have gas-recycling plant
Wet processing device.
Background technology
Along with the development of science and technology, the technology of wet process has tended to maturation and has made wet processing device in various systems
Make and be already widely used.But, traditional wet processing device still exists problems and needs to be changed
Kind, such as: due to the poorly designed relation of part body cause personnel's maintenance difficult, equipment consumption liquid measure big
The problem that production cost is high, equipment is susceptible to leakage is caused to cause part impaired ... etc..Furthermore,
Owing to being the technique placing a substrate in and carrying out multiple tracks chemical in airtight process cavity in wet process, because of
Process environments within this process cavity is the key affecting wet process, if process environments variation will be led
Cause substrate and produce the problem that quality is unstable.
Typically air-extractor can be provided above at process cavity, in order to will in traditional wet processing device
In technique, produced gas is extracted out outside cavity.But, due to the position, local of process cavity after gas is extracted out
Put and can present negative pressure state, cause operation pressure to be affected so that be difficult to inside process cavity maintain surely
Fixed process environments.
On the other hand, the condition of high temperature would generally be used in order to improve process efficiency, protect internal for process cavity
Hold under conditions of a high temperature to promote the speed of various chemical reactions.But, due to the lifting of process efficiency,
Make within the unit interval produced gas flow in technique also relative to increase, and then increase the weight of air-extractor
Burden.Additionally, in order to maintain the internal pressure of process cavity to balance, when gas be drawn out of process cavity outer after
Identical gas flow can be filled up again to inside described process cavity.But, owing to the gas filled up is usually one
Plant low temperature or the gas of room temperature, easily cause the temperature within process cavity and decline so that be positioned at journey chamber
The heater in internal portion must be commonly used and/or be maintained at high-power state, causes wet processing device
Power consumption shorten big and heater service life.
In view of this, it is necessary to provide a kind of wet processing device, to solve the problem existing for prior art.
Utility model content
For solving above-mentioned technical problem, the purpose of this utility model is to provide a kind of wet processing device, tool
There is gas-recycling plant, and described gas-recycling plant connects with described process cavity, for by described work
Inside the vapor return extracted out in skill cavity extremely described process cavity, thus can be effectively by described process cavity
Internal temperature and pressure all maintain stable state.
For reaching above-mentioned purpose, this utility model provides a kind of wet processing with gas-recycling plant to set
Standby, comprise: a process cavity, comprise a difference position first row in the two lateral walls of described process cavity
Pore and one first air inlet；And a gas-recycling plant, including: a pumping cells, it is arranged on described
Outside process cavity；And a transfer conduit, be connected with described pumping cells, and with described first row pore
Connecting with described first air inlet, the gas in described process cavity is passed through institute by wherein said pumping cells
State first row pore and be pumped into described transfer conduit, and described gas is recycled to institute by described first air inlet
State inside process cavity.
In one of them preferred embodiment of this utility model, the described transfer conduit of described gas-recycling plant
Including one first pipeline and one second pipeline, the two ends of wherein said first pipeline respectively with described first row
Pore connects with described pumping cells, and the two ends of described second pipeline respectively with described pumping cells and institute
State the first air inlet connection.
In one of them preferred embodiment of this utility model, described wet processing device also comprises one for passing
Sending the delivery unit of a substrate, be arranged on inside described process cavity, wherein said first row pore position is in institute
State on delivery unit, and described first air inlet position is under described delivery unit.
In one of them preferred embodiment of this utility model, it is provided with a liquid in described process cavity and sprays
Unit, for spray a process liquid, wherein said first row pore position on described liquid spray unit,
And described first air inlet position is under described liquid spray unit.
In one of them preferred embodiment of this utility model, described process cavity also comprises a second exhaust
Hole, connects with an air processing unit, for allowing the described gas in described process cavity drain into described gas
Processing unit.
In one of them preferred embodiment of this utility model, described second row pore is positioned at described process cavity
A upper wall and away from the position of described first row pore, described upper wall is described relative with described process cavity
Two side connects.
In one of them preferred embodiment of this utility model, described wet processing device also comprises a gas-liquid and divides
From unit, it is connected between described process cavity and described air processing unit, including: an air inlet pipeline,
For the high humility gas in described process cavity is inputted in described gas-liquid separation unit；One reaction tube
Road, is used for housing a filter element so that be separated into one by the described high humility gas of described filter element
Chemical liquid and a waste gas；And one gas exhaust piping extend through described second row pore, at described gas
Reason unit connection, for entering described air processing unit by described waste gas.
In one of them preferred embodiment of this utility model, the described air inlet pipeline of described gas-liquid separation unit
With the inside that described reaction pipeline is arranged on described process cavity.
In one of them preferred embodiment of this utility model, described wet processing device also comprises one for passing
Send the delivery unit of a substrate, be arranged on inside described process cavity, the institute of wherein said gas-liquid separation unit
State the direct of travel inclination extension approximately along described substrate of the reaction pipeline.
In one of them preferred embodiment of this utility model, described gas-liquid separation unit is with described substrate apart
One lateral separation.
In one of them preferred embodiment of this utility model, described gas-liquid separation unit is about in one "
Y " shape of shape, wherein said reaction pipeline has central authorities and the most described central authorities in two ends downward-sloping, and
The one section connection relative with described air inlet pipeline respectively of described two ends, and described gas exhaust piping and described reaction
The described central authorities of pipeline connect and upwardly extend from described central authorities.
Accompanying drawing explanation
Fig. 1 and Fig. 2 shows the first of the wet processing device of the first preferred embodiment of the present utility model respectively
View and the second view；And
Fig. 3 and Fig. 4 shows the first of the wet processing device of the second preferred embodiment of the present utility model respectively
View and the second view.
Detailed description of the invention
In order to above-mentioned and other purpose of the present utility model, feature, advantage can be become apparent, hereafter will
Especially exemplified by this utility model preferred embodiment, and coordinate accompanying drawing, be described in detail below.
Refer to Fig. 1 and Fig. 2, it shows that the wet processing of the first preferred embodiment of the present utility model sets respectively
First view of standby 10 and the second view.Described wet processing device 10 comprises process cavity 100, gas follows
Loop device 200, delivery unit 300, liquid spray unit 400 and air processing unit 500.Described technique
Cavity 100 comprises relative the first side wall 102 and the second sidewall 104, and with described the first side wall 102 and institute
State the upper wall 106 that the second sidewall 104 connects.The is formed on the described the first side wall 102 of described process cavity 100
One steam vent 110, described second sidewall 104 is formed the first air inlet 130, and shape on described upper wall 106
Become second row pore 120.It is internal that described delivery unit 300 is arranged on described process cavity 100, is used for transmitting
Substrate 310.It is internal that described liquid spray unit 400 is similarly disposed at described process cavity 100, is used for spraying
Process liquid so that described substrate 310 is carried out wet processed, such as, etches.Described substrate 310 can be that half is led
Structure base board, seems a thin film transistor base (thin film transistor substrate).Also,
Described air processing unit 500 connects with the described second row pore 120 of described process cavity 100, is used for locating
Produced gas 610 after reason wet process.Described gas 610 is a high humility gas, is contained within chemical liquids
Body microgranule (droplets).
As depicted in figs. 1 and 2, described gas-recycling plant 200 is positioned at the outside of described process cavity 100, and
And comprising pumping cells 210 and transfer conduit 220, wherein said transfer conduit 220 includes the first pipeline 221 He
Second pipeline 222.The two ends of described first pipeline 221 of described transfer conduit 220 respectively with described process cavity
The described first row pore 110 of body 100 connects with described pumping cells 210, and described transfer conduit 220
The two ends of described second pipeline 222 respectively with described first air inlet 130 of described process cavity 100 with described
Pumping cells 210 connects.During running, the described pumping cells 210 of described gas-recycling plant 200 provides one
Gas 610 in described process cavity 100 is pumped into described transfer tube by described first row pore 110 by power
In described first pipeline 221 on road 220.The most described gas 610 is transferred to institute by described pumping cells 210
State in the second pipeline 222.Last described gas 610 is recycled to described technique by described first air inlet 130
Cavity 100 is internal.
As depicted in figs. 1 and 2, the described preferred status of first row pore 110 is at described delivery unit 300 and described
The top position of liquid spray unit 400, and the described first preferred status of air inlet 130 is single in described transmission
Unit 300 and the lower position of described liquid spray unit 400.Further, described first row pore 110 and described
Second row pore 120 be arranged in described process cavity 100 substantially relative to both sides.More particularly, described
First row pore 110 is the position described the first side wall 102 at described process cavity 100, and described second row
Pore 120 be position at described upper wall 106 adjacent to the side of described second sidewall 104 of described process cavity 100
On.Therefore, described second row pore 120 is away from described first row pore 110.Thereby, when first row pore
110 and described second row pore 120 simultaneously when bleeding, the air pressure balance of described process cavity 100 both sides,
The problem that monolateral pressure is higher will not be produced.Further, by described gas-recycling plant 200 by described gas
610 lower sections being recycled to described process cavity 100 so that the air pressure balance of described process cavity 100 upper and lower sides,
And then maintain stable process environments by internal for described process cavity 100.On the other hand, in order to maintain
State the internal pressure balance of process cavity 100, when described gas 610 is taken out by described second row pore 120
The process gas extremely described process cavity of identical tolerance can be filled up again after entering described air processing unit 500
100 is internal.But, owing to described gas-recycling plant 200 of the present utility model can be by vapor return to described
Process cavity 100 is internal, thus can effectively reduce the usage amount of process gas.Furthermore, owing to passing through
State temperature and the process cavity of the described gas 610 that gas-recycling plant 200 is recycled in described process cavity 100
Temperature within body 100 is suitable, thus can avoid because the substantial amounts of process gas of importing causes reducing described technique
The problem of cavity 100 interior environment temperature, therefore the heater within described process cavity 100 can be effectively reduced
The use time and/or power, to improve the service life of described heater.
Refer to Fig. 3 and Fig. 4, it shows that the wet processing of the second preferred embodiment of the present utility model sets respectively
First view of standby 20 and the second view.The wet processing device 20 of the second preferred embodiment of the present utility model
Similar in appearance to the described wet processing device 10 of first embodiment of the present utility model, comprise process cavity equally
100, gas-recycling plant 200, delivery unit 300, liquid spray unit 400 and air processing unit 500,
Therefore not in this to go forth.Compared to the described wet processing device 10 of first embodiment of the present utility model,
The wet processing device 20 of the second preferred embodiment also comprises gas-liquid separation unit 700.Described gas-liquid separation list
Unit 700 is connected between described process cavity 100 and described air processing unit 500, for by described technique
The gas 610 produced after wet process in cavity 100 carries out gas-liquid separation.Described air processing unit 500
Waste gas 630 after processing gas-liquid separation.Described delivery unit 300 is arranged in described process cavity 100
Portion, is used for substrate 310 towards Y-direction transmission.
As it is shown on figure 3, described gas-liquid separation unit 700 comprise a pair air inlet pipeline 720, reaction pipeline 730,
One gas exhaust piping 740 and be arranged on the filter element 710 in described reaction pipeline 730, wherein said to entering
Air pipe 720, described reaction pipeline 730 and described gas exhaust piping 740 are along a longitudinal direction (Z-direction)
Sequentially upwardly extend so that described gas exhaust piping 740 is positioned at an of a relatively high position and described to air inlet
Pipeline 720 is positioned at a relatively low position.It addition, described reaction pipeline 730 is approximately along described substrate 310
Direct of travel Y tilts to extend.So, described gas-liquid separation unit 700 has the shape of substantially " Y " shape
Shape.
As it is shown on figure 3, the described two ends that air inlet pipeline 720 is arranged on described reaction pipeline 730, Yi Jisuo
State gas exhaust piping 740 be arranged on the central authorities of described reaction pipeline 730 and upwardly extend.Described reaction pipeline 730
Two ends from its central authorities towards leaving the downward-sloping extension in direction each other.Described be used for air inlet pipeline 720 will
The gas 610 that described process cavity 100 produces inputs the described reaction pipeline of described gas-liquid separation unit 700
In 730.Described gas 610 is a high humility gas, is contained within chemical liquid microgranule (droplets).Institute
Stating reaction pipeline 730 is for housing described filter element 710.When described gas 610 crosses filtering element by described
During part 710, the chemical liquid microgranule in described gas 610 can condense and be attached on described filter element 710,
Thereby described gas 610 is separated into chemical liquid 620 and waste gas 630.Described gas exhaust piping 740 exists through position
Second row pore 120 above described process cavity 100 extends to the outside of described process cavity 100, with
Described waste gas 630 after gas-liquid separation is entered in the described air processing unit 500 communicated therewith.
As it is shown on figure 3, described gas-liquid separation unit 700 is described to air inlet pipeline 720 and described reaction pipeline
730 inside being all arranged on described process cavity 100.Furthermore, described reaction pipeline 730 is designed as both sides phase
The structure that one horizontal plane (i.e. X/Y plane) is tilted, i.e. the central authorities of described reaction pipeline 730 are relative to it
Two ends are arranged on higher position so that the described chemical liquid 620 after gas-liquid separation can be along the pipe tilted
Wall, flows back into the end of described process cavity 100 by position leakage fluid dram 722 below described air inlet pipeline 720
Portion；The liquid recovery unit then passing through a bottom being communicated to described process cavity 100 (is not illustrated in figure
In) collect described chemical liquid 620 to carry out recycling, and then reduce production cost.On the other hand,
Owing to gas-liquid separation of the present utility model reaction is to complete inside described process cavity 100 so that gas-liquid is divided
Described chemical liquid 620 after from will not flow to the outside of described process cavity 100, and then avoids causing described
The damage of process cavity 100 and jeopardize the safety of operator.Additionally, due to described gas-liquid separation list
Most of element of unit 700 is provided in the inside of described process cavity 100 so that personnel are in maintenance and maintenance
During described gas-liquid separation unit 700 more convenient.
As shown in Figure 4, regard from side time, described gas-liquid separation unit 700 is protected respectively with described substrate 310
Hold in the position at a distance of lateral separation L1 so that from the described chemistry of described gas-liquid separation unit 700 drippage
Liquid 620 does not interferes with the carrying out of wet processing, thus avoids described chemical liquid 620 to described substrate
The reaction liquid of 310 pollutes.
In sum, this utility model circulates by arranging the described gas connected with described process cavity 100
Device 200 so that described process cavity 100 is internal can maintain stable operation pressure.Furthermore, due to logical
Cross temperature and the work of the described gas 610 that described gas-recycling plant 200 is recycled in described process cavity 100
Temperature within skill cavity 100 is suitable, thus can effectively reduce the heater within described process cavity 100
The use time and/or power, to improve the service life of described heater.On the other hand, this practicality is new
Type by being arranged on the inside of described process cavity 100 by a part for described gas-liquid separation unit 700 so that
Gas-liquid separation reaction is to complete inside described process cavity 100.Therefore, the described chemistry after gas-liquid separation
Liquid 620 will not flow to the outside of described process cavity 100, and then avoids causing described process cavity 100
Damage and jeopardize the safety of operator.
Although this utility model is disclosed above with preferred embodiment, so it is not limited to this practicality newly
Type, has usually intellectual, without departing from spirit of the present utility model in this utility model art
With in scope, when being used for a variety of modifications and variations, protection domain the most of the present utility model is when regarding appended
As defined in claim is as the criterion.
Claims (11)
1. a wet processing device with gas-recycling plant, it is characterised in that described wet processing device
Comprise:
One process cavity, comprise respectively position at a first row pore of the two lateral walls of described process cavity and
One first air inlet；And
One gas-recycling plant, including:
One pumping cells, is arranged on outside described process cavity；And
One transfer conduit, is connected with described pumping cells, and with described first row pore and described first
Air inlet connects, and the gas in described process cavity is passed through described first by wherein said pumping cells
Steam vent is pumped into described transfer conduit, and described gas is recycled to described by described first air inlet
Inside process cavity.
There is the wet processing device of gas-recycling plant the most as claimed in claim 1, it is characterised in that institute
The described transfer conduit stating gas-recycling plant includes: one first pipeline and one second pipeline, Qi Zhongsuo
The two ends stating the first pipeline connect with described first row pore and described pumping cells respectively, and described
The two ends of the second pipeline connect with described pumping cells and described first air inlet respectively.
There is the wet processing device of gas-recycling plant the most as claimed in claim 1, it is characterised in that institute
State wet processing device and also comprise one for transmitting the delivery unit of a substrate, be arranged on described process cavity
Internal portion, wherein said first row pore position is on described delivery unit, and described first air inlet
Position, hole is under described delivery unit.
There is the wet processing device of gas-recycling plant the most as claimed in claim 1, it is characterised in that institute
A liquid spray unit it is provided with in stating process cavity, for spraying a process liquid, wherein said the
One steam vent position is on described liquid spray unit, and described first air inlet position is at described liquid
Under spray unit.
There is the wet processing device of gas-recycling plant the most as claimed in claim 1, it is characterised in that institute
State process cavity and also comprise a second row pore, connect with an air processing unit, be used for allowing described work
Described gas in skill cavity drains into described air processing unit.
There is the wet processing device of gas-recycling plant the most as claimed in claim 5, it is characterised in that institute
State second row pore and be positioned at a upper wall of described process cavity and away from the position of described first row pore,
Described upper wall is connected with the described two lateral walls of described process cavity.
There is the wet processing device of gas-recycling plant the most as claimed in claim 5, it is characterised in that institute
State wet processing device and also comprise a gas-liquid separation unit, be connected to described process cavity and described gas
Between processing unit, including:
One air inlet pipeline, for inputting described gas-liquid separation list by the high humility gas in described process cavity
In unit；
One reaction pipeline, is used for housing a filter element so that by the described high humility of described filter element
Gas is separated into a chemical liquid and a waste gas；And
One gas exhaust piping, extends through described second row pore, connects with described air processing unit, be used for
Described waste gas is entered described air processing unit.
There is the wet processing device of gas-recycling plant the most as claimed in claim 7, it is characterised in that institute
The described air inlet pipeline stating gas-liquid separation unit is arranged on the interior of described process cavity with described reaction pipeline
Portion.
There is the wet processing device of gas-recycling plant the most as claimed in claim 7, it is characterised in that institute
State wet processing device and also comprise one for transmitting the delivery unit of a substrate, be arranged on described process cavity
Internal portion, the described reaction pipeline of wherein said gas-liquid separation unit is approximately along the traveling of described substrate
Direction tilts to extend.
There is the wet processing device of gas-recycling plant the most as claimed in claim 9, it is characterised in that institute
State gas-liquid separation unit with described substrate at a distance of a lateral separation.
11. wet processing devices as claimed in claim 7 with gas-recycling plant, it is characterised in that institute
State gas-liquid separation unit about in the shape of one " Y " shape, wherein said reaction pipeline have one central authorities and
The most described central authorities in two ends are downward-sloping, and relative with described air inlet pipeline one section respectively of described two ends
Connect, and the described central authorities of described gas exhaust piping and described reaction pipeline connect and from described mediad
Upper extension.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620283668.6U CN205582894U (en) | 2016-04-07 | 2016-04-07 | Wet process manufacturing equipment with gas circulation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620283668.6U CN205582894U (en) | 2016-04-07 | 2016-04-07 | Wet process manufacturing equipment with gas circulation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205582894U true CN205582894U (en) | 2016-09-14 |
Family
ID=56865107
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620283668.6U Expired - Fee Related CN205582894U (en) | 2016-04-07 | 2016-04-07 | Wet process manufacturing equipment with gas circulation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205582894U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107275247A (en) * | 2016-04-07 | 2017-10-20 | 盟立自动化股份有限公司 | Wet processing device with gas-recycling plant |
-
2016
- 2016-04-07 CN CN201620283668.6U patent/CN205582894U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107275247A (en) * | 2016-04-07 | 2017-10-20 | 盟立自动化股份有限公司 | Wet processing device with gas-recycling plant |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160914 Termination date: 20180407 |
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| CF01 | Termination of patent right due to non-payment of annual fee |