CN205542899U - Semiconductor refrigeration components - Google Patents

Semiconductor refrigeration components Download PDF

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CN205542899U
CN205542899U CN201620123081.9U CN201620123081U CN205542899U CN 205542899 U CN205542899 U CN 205542899U CN 201620123081 U CN201620123081 U CN 201620123081U CN 205542899 U CN205542899 U CN 205542899U
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liquid
cooling
metal
substrate
semiconductor
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高俊岭
关庆乐
罗嘉恒
刘用生
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GUANGDONG FUXIN ELECTRONIC TECHNOLOGY Co Ltd
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GUANGDONG FUXIN ELECTRONIC TECHNOLOGY Co Ltd
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Abstract

本实用新型提供一种半导体制冷组件,包括:半导体电偶对、与半导体电偶对冷端相连的冷端基板、与半导体电偶对热端相连的热端基板、以及液体冷却器件;其中,所述热端基板包括金属基板、以及连接在金属基板与半导体电偶对之间的导热绝缘层;所述液体冷却器件包括:与金属基板相连的液体冷却基体,所述液体冷却基体与金属基板相连的安装面上开设置液槽,所述置液槽与金属基板之间设有流动的冷却液体。本实用新型提供的半导体制冷组件能够提高半导体电偶对热端的散热速率,能够实现大功率制冷。

The utility model provides a semiconductor refrigeration assembly, comprising: a semiconductor electric couple pair, a cold end substrate connected to the cold end of the semiconductor electric couple pair, a hot end substrate connected to the hot end of the semiconductor electric couple pair, and a liquid cooling device; wherein, The hot end substrate includes a metal substrate, and a thermally conductive insulating layer connected between the metal substrate and the pair of semiconductor couples; the liquid cooling device includes: a liquid cooling base connected to the metal base, and the liquid cooling base and the metal base A liquid tank is provided on the connected mounting surface, and a flowing cooling liquid is provided between the liquid tank and the metal substrate. The semiconductor refrigeration assembly provided by the utility model can improve the heat dissipation rate of the semiconductor couple to the hot end, and can realize high-power refrigeration.

Description

半导体制冷组件Semiconductor refrigeration components

技术领域technical field

本实用新型涉及半导体制冷技术,尤其涉及一种半导体制冷组件。The utility model relates to semiconductor refrigeration technology, in particular to a semiconductor refrigeration assembly.

背景技术Background technique

半导体制冷芯片(TEC,Thermoelectric Cooler)是利用珀尔贴(Peltier)效应制成的一种制冷器件,其主要的结构为半导体电偶对(也称为P-N电偶对),当向半导体电偶对加设一定的电压之后,半导体电偶对的冷端和热端会产生一定的温差。当其热端的热量被散发出去后,其冷端会产生一定的冷量,实现制冷。Thermoelectric Cooler (TEC, Thermoelectric Cooler) is a cooling device made using the Peltier effect. Its main structure is a pair of semiconductor galvanic couples (also called P-N galvanic couples). After a certain voltage is applied to the pair, there will be a certain temperature difference between the cold end and the hot end of the semiconductor couple. When the heat at the hot end is dissipated, the cold end will generate a certain amount of cold to achieve refrigeration.

图1为现有的一种半导体制冷组件的结构示意图。如图1所示,现有的一种利用半导体制冷芯片制成的制冷组件包括冷端基板11、半导体电偶对12和热端基板13,其中,半导体电偶对12的冷端通过冷端电极14与冷端基板11连接,半导体电偶对12的热端通过热端电极15与热端基板13的一侧表面连接,具体通过焊接的方式进行连接。热端基板13的另一侧表面焊接有散热结构,该散热结构包括散热基板16和翅片17,其中,散热基板16焊接在热端基板13上。半导体电偶对12热端的热量经过焊料先传导至热端基板13,再通过散热基板16传导至翅片17,通过翅片17与周围的空气进行热交换,降半导体电偶对12热端的热量。FIG. 1 is a schematic structural diagram of a conventional semiconductor refrigeration assembly. As shown in Figure 1, an existing cooling assembly made of a semiconductor refrigeration chip includes a cold end substrate 11, a semiconductor couple pair 12 and a hot end substrate 13, wherein the cold end of the semiconductor couple pair 12 passes through the cold end The electrode 14 is connected to the cold end substrate 11, and the hot end of the semiconductor couple pair 12 is connected to one side surface of the hot end substrate 13 through the hot end electrode 15, specifically by welding. A heat dissipation structure is welded on the other side surface of the hot end substrate 13 , and the heat dissipation structure includes a heat dissipation substrate 16 and fins 17 , wherein the heat dissipation substrate 16 is welded on the hot end substrate 13 . The heat of the hot end of the semiconductor pair 12 is first conducted to the hot end substrate 13 through the solder, and then transferred to the fin 17 through the heat dissipation substrate 16, and the heat exchange with the surrounding air is carried out through the fin 17 to reduce the heat of the hot end of the semiconductor pair 12. .

上述制冷组件中,由于热端基板13与散热基板16是通过焊接的方式固定的,半导体电偶对12热端的热量依次经过热端基板13、焊料和散热基板16进行传导,除去热端基板13和散热基板16自身所具有的热阻之外,二者之间的焊料也存在较大的热阻,严重影响了热量的传导速率。并且,翅片与周围空气进行热交换的速率也非常低,也在很大程度上影响了半导体电偶对12热端热量的散发。因此,受焊料具有较大热阻和翅片与空气进行热交换速度较慢的影响,现有的半导体制冷组件只适用于小功率制冷,而无法实现大功率制冷。In the above refrigeration assembly, since the hot end substrate 13 and the heat dissipation substrate 16 are fixed by welding, the heat of the hot end of the semiconductor couple pair 12 is conducted through the hot end substrate 13, the solder and the heat dissipation substrate 16 successively, and the hot end substrate 13 is removed. In addition to the thermal resistance of the heat dissipation substrate 16 itself, the solder between the two also has a large thermal resistance, which seriously affects the heat conduction rate. Moreover, the rate of heat exchange between the fins and the surrounding air is also very low, which also greatly affects the dissipation of heat from the semiconductor couple to the 12 hot ends. Therefore, due to the large thermal resistance of the solder and the slow heat exchange speed between the fins and the air, the existing semiconductor refrigeration components are only suitable for low-power cooling, but cannot achieve high-power cooling.

实用新型内容Utility model content

本实用新型提供一种半导体制冷组件,用于提高半导体电偶对热端的散热速率,能够实现大功率制冷。The utility model provides a semiconductor refrigeration component, which is used for improving the heat dissipation rate of a semiconductor couple to a hot end, and can realize high-power refrigeration.

本实用新型提供一种半导体制冷组件,包括:半导体电偶对、与半导体电偶对冷端相连的冷端基板、与半导体电偶对热端相连的热端基板、以及液体冷却器件;其中,所述热端基板包括金属基板、以及连接在金属基板与半导体电偶对之间的导热绝缘层;The utility model provides a semiconductor refrigeration assembly, comprising: a semiconductor electric couple pair, a cold end substrate connected to the cold end of the semiconductor electric couple pair, a hot end substrate connected to the hot end of the semiconductor electric couple pair, and a liquid cooling device; wherein, The hot end substrate includes a metal substrate and a thermally conductive insulating layer connected between the metal substrate and the pair of semiconductor couples;

所述液体冷却器件包括:与金属基板相连的液体冷却基体,所述液体冷却基体与金属基板相连的安装面上开设置液槽,所述置液槽与金属基板之间设有流动的冷却液体。The liquid cooling device includes: a liquid cooling substrate connected to the metal substrate, a liquid tank is provided on the mounting surface connected to the metal substrate, and a flowing cooling liquid is provided between the liquid storage tank and the metal substrate .

如上所述的半导体制冷组件,所述液体冷却基体远离金属基板的底壁内表面设有抵顶在所述底壁内表面和金属基板之间的至少一个隔板,至少一个隔板将置液槽划分为蛇形的液体流道,所述冷却液体在所述液体流道内流动。In the semiconductor refrigeration assembly as described above, the inner surface of the bottom wall of the liquid cooling base away from the metal substrate is provided with at least one partition that is against the inner surface of the bottom wall and the metal substrate, and at least one partition will place the liquid The grooves are divided into serpentine liquid flow channels in which the cooling liquid flows.

如上所述的半导体制冷组件,所述金属基板朝向所述液体冷却基体的表面上设有凹坑,所述凹坑的数量为至少两个,至少两个凹坑与液体流道的位置对应。According to the above semiconductor refrigeration assembly, the surface of the metal substrate facing the liquid cooling base is provided with pits, the number of the pits is at least two, and the at least two pits correspond to the positions of the liquid flow channels.

如上所述的半导体制冷组件,所述液体冷却基体上与所述底壁相邻的一侧壁上设有进液口和出液口,所述进液口和出液口分别与所述液体流道的始端和末端的位置对应;所述进液口和出液口还与外部的冷却管路连通形成冷却回路,所述冷却回路上设有液体泵。In the semiconductor refrigeration assembly as described above, a liquid inlet and a liquid outlet are provided on the side wall adjacent to the bottom wall of the liquid cooling base, and the liquid inlet and the liquid outlet are respectively connected to the liquid The positions of the beginning end and the end of the flow channel are corresponding; the liquid inlet and the liquid outlet are also communicated with the external cooling pipeline to form a cooling circuit, and the cooling circuit is provided with a liquid pump.

如上所述的半导体制冷组件,所述冷却回路上还设有热交换器,所述热交换器内设有与所述冷却管路连通的液体通道。According to the semiconductor refrigeration assembly as described above, a heat exchanger is further provided on the cooling circuit, and a liquid channel communicating with the cooling pipeline is provided in the heat exchanger.

如上所述的半导体制冷组件,所述液体冷却器件还包括用于对所述热交换器进行散热的冷却风扇。According to the peltier cooling assembly mentioned above, the liquid cooling device further includes a cooling fan for dissipating heat from the heat exchanger.

如上所述的半导体制冷组件,所述金属基板为铝基板。According to the peltier cooling assembly mentioned above, the metal substrate is an aluminum substrate.

如上所述的半导体制冷组件,所述金属基板朝向所述液体冷却基体的表面上设有相互隔开的至少两个金属片,所述金属片与液体流道的位置对应,且每个金属片沿与其对应的液体流道的长度方向延伸。In the semiconductor refrigeration assembly as described above, at least two metal sheets spaced apart from each other are provided on the surface of the metal substrate facing the liquid cooling base, and the positions of the metal sheets correspond to the positions of the liquid flow channels, and each metal sheet Extend along the length direction of the corresponding liquid channel.

如上所述的半导体制冷组件,所述金属基板朝向所述液体冷却基体的表面上设有相互隔开的凸出于该表面上的至少两个金属肋条,所述金属肋条与液体流道的位置对应。In the semiconductor refrigeration assembly as described above, the surface of the metal substrate facing the liquid cooling base is provided with at least two metal ribs spaced apart from each other and protruding from the surface, and the positions of the metal ribs and the liquid flow channel correspond.

如上所述的半导体制冷组件,所述液体冷却基体的安装面上还设有密封槽,所述密封槽内设有密封圈,用于密封所述液体冷却基体与金属基板之间的间隙。According to the above-mentioned semiconductor refrigeration assembly, a sealing groove is further provided on the installation surface of the liquid cooling base, and a sealing ring is provided in the sealing groove to seal the gap between the liquid cooling base and the metal substrate.

本实施例采用的技术方案通过采用液体冷却基体与金属基板的热端表面相连,且在液体冷却基体与金属基板之间设有流动的冷却液体,该流动的冷却液体直接与金属基板接触,能够迅速吸收金属基板的热量,降低金属基板的温度,也进一步迅速降低了半导体电偶对热端的温度。The technical solution adopted in this embodiment connects the hot end surface of the metal substrate with the liquid cooling substrate, and a flowing cooling liquid is provided between the liquid cooling substrate and the metal substrate, and the flowing cooling liquid directly contacts the metal substrate, which can Rapidly absorb the heat of the metal substrate, reduce the temperature of the metal substrate, and further rapidly reduce the temperature of the hot end of the semiconductor couple.

与现有技术中热端基板与散热基板焊接的方式相比,本实施例所提供的技术方案中流动的冷却液体直接与金属基板接触,可迅速对金属基板进行散热,一方面金属基板的热端不存在任何如现有技术中焊料或散热基板自身所具有的热阻,另一方面流动的冷却液体的热容量较大,可大量快速吸收热量,进而能够快速地降低半导体电偶对热端的温度,有利于实现大功率制冷。Compared with the way of welding the hot end substrate and the heat dissipation substrate in the prior art, the cooling liquid flowing in the technical solution provided by this embodiment directly contacts the metal substrate, which can quickly dissipate heat from the metal substrate. On the one hand, the heat dissipation of the metal substrate There is no thermal resistance like the solder or the heat dissipation substrate itself in the prior art. On the other hand, the flowing cooling liquid has a large heat capacity, which can absorb a large amount of heat quickly, and then can quickly reduce the temperature of the semiconductor couple to the hot end. , which is conducive to the realization of high-power cooling.

附图说明Description of drawings

图1为现有的一种半导体制冷组件的结构示意图;Fig. 1 is the structural representation of existing a kind of semiconductor refrigeration assembly;

图2为本实用新型实施例提供的半导体制冷组件的爆炸视图;Fig. 2 is an exploded view of the semiconductor refrigeration assembly provided by the embodiment of the present invention;

图3为本实用新型实施例提供的半导体制冷组件的结构示意图;Fig. 3 is a schematic structural diagram of a semiconductor refrigeration assembly provided by an embodiment of the present invention;

图4为图3中A-A截面的剖视图;Fig. 4 is the sectional view of A-A section among Fig. 3;

图5为本实用新型实施例提供的半导体制冷组件的又一结构示意图;Fig. 5 is another structural schematic diagram of the semiconductor refrigeration assembly provided by the embodiment of the present invention;

图6为本实用新型实施例提供的半导体制冷组件中金属基板的结构示意图;Fig. 6 is a schematic structural view of the metal substrate in the semiconductor refrigeration assembly provided by the embodiment of the present invention;

图7为图6中B-B截面的剖视图;Fig. 7 is the sectional view of B-B section among Fig. 6;

图8为本实用新型实施例提供的半导体制冷组件中金属基板的又一结构示意图;Fig. 8 is another structural schematic diagram of the metal substrate in the semiconductor refrigeration assembly provided by the embodiment of the present invention;

图9为图8中C-C截面的剖视图;Fig. 9 is a sectional view of the C-C section in Fig. 8;

图10为本实用新型实施例提供的半导体制冷组件中金属基板的另一结构示意图;Fig. 10 is another structural schematic diagram of the metal substrate in the semiconductor refrigeration assembly provided by the embodiment of the present utility model;

图11为图10中D-D截面的剖视图。FIG. 11 is a sectional view of the D-D section in FIG. 10 .

附图标记:Reference signs:

11-冷端基板; 12-半导体电偶对; 13-热端基板;11-cold terminal substrate; 12-semiconductor couple pair; 13-hot terminal substrate;

14-冷端电极; 15-热端电极; 16-散热基板;14-cold terminal electrode; 15-hot terminal electrode; 16-heat dissipation substrate;

17-翅片; 18-金属基板; 21-液体冷却基体;17-fin; 18-metal substrate; 21-liquid cooling base;

22-置液槽; 23-隔板; 24-进液口;22-liquid tank; 23-baffle; 24-liquid inlet;

25-出液口; 26-冷却管路; 27-液体泵;25-liquid outlet; 26-cooling pipeline; 27-liquid pump;

28-热交换器; 29-冷却风扇; 210-密封槽;28-heat exchanger; 29-cooling fan; 210-sealing groove;

211-密封圈; 31-凹坑; 32-凹槽;211-sealing ring; 31-dimple; 32-groove;

33-金属肋条。33 - Metal ribs.

具体实施方式detailed description

图2为本实用新型实施例提供的半导体制冷组件的爆炸视图,图3为本实用新型实施例提供的半导体制冷组件的结构示意图,图4为图3中A-A截面的剖视图。本实施例提供一种半导体制冷组件,包括:半导体电偶对12、与半导体电偶对12冷端相连的冷端基板11、与半导体电偶12对热端相连的热端基板、以及液体冷却器件。Fig. 2 is an exploded view of the semiconductor refrigeration assembly provided by the embodiment of the utility model, Fig. 3 is a schematic structural diagram of the semiconductor refrigeration assembly provided by the embodiment of the utility model, and Fig. 4 is a cross-sectional view of the A-A section in Fig. 3 . This embodiment provides a semiconductor refrigeration assembly, including: a pair of semiconductor thermocouples 12, a cold end substrate 11 connected to the cold ends of the pair of semiconductor thermocouples 12, a hot end substrate connected to the hot ends of the pair of semiconductor thermocouples 12, and a liquid cooling device.

其中,半导体电偶对(也称为P-N电偶对)12的冷端通过冷端电极14连接至冷端基板11上,例如可焊接在冷端基板11上。冷端基板11可以为Al2O3陶瓷基板或铝基板,其面积为70mm×50mm。半导体电偶对12的热端通过热端电极15连接至热端基板上,例如通过焊接的方式连接至热端基板上。Wherein, the cold end of the semiconductor couple pair (also referred to as a PN couple pair) 12 is connected to the cold end substrate 11 through the cold end electrode 14 , for example, can be welded on the cold end substrate 11 . The cold end substrate 11 can be an Al 2 O 3 ceramic substrate or an aluminum substrate, and its area is 70mm×50mm. The hot end of the semiconductor couple pair 12 is connected to the hot end substrate through the hot end electrode 15 , for example, connected to the hot end substrate by welding.

热端基板包括金属基板18以及连接在金属基板18与半导体电偶对12之间的导热绝缘层(图中未示出)。具体的,将金属基板18中朝向半导体电偶对12的表面称为冷端表面,背离半导体电偶对12的表面称为热端表面。导热绝缘层敷设在金属基板18的冷端表面。半导体电偶对12的热端通过热端电极15连接至导热绝缘层上,另外,在热端电极15与导热绝缘层之间还设置有导电层,例如采用铜制成。The hot end substrate includes a metal substrate 18 and a thermally conductive insulating layer (not shown in the figure) connected between the metal substrate 18 and the pair of semiconductor couples 12 . Specifically, the surface of the metal substrate 18 facing the pair of semiconductor couples 12 is called the cold end surface, and the surface facing away from the pair of semiconductor couples 12 is called the hot end surface. The thermally conductive insulating layer is laid on the cold end surface of the metal substrate 18 . The hot end of the semiconductor couple pair 12 is connected to the thermally conductive insulating layer through the hot end electrode 15 . In addition, a conductive layer, for example made of copper, is provided between the hot end electrode 15 and the thermally conductive insulating layer.

液体冷却器件包括:与金属基板18热端表面相连的液体冷却基体21,该液体冷却基体21朝向金属基板18的表面称为安装面,该安装面与金属基板18相连,且该安装面上开设置液槽22,置液槽22与金属基板18之间设有流动的冷却液体,则冷却液体可以与金属基板18的热端表面直接接触。冷却液体可以为现有技术中常用的冷却剂,例如水或流动性好的液态化合物等,本实施例采用去离子水,其比热较大,且不具有任何金属离子,避免对金属基板18产生腐蚀。The liquid cooling device includes: a liquid cooling substrate 21 connected to the hot end surface of the metal substrate 18, the surface of the liquid cooling substrate 21 facing the metal substrate 18 is called the installation surface, the installation surface is connected to the metal substrate 18, and the installation surface is open The liquid tank 22 is provided, and a flowing cooling liquid is provided between the liquid tank 22 and the metal substrate 18 , so that the cooling liquid can directly contact the hot end surface of the metal substrate 18 . The cooling liquid can be a commonly used coolant in the prior art, such as water or a liquid compound with good fluidity. Corrosion occurs.

本实施例采用的技术方案通过采用液体冷却基体与金属基板的热端表面相连,且在液体冷却基体与金属基板之间设有流动的冷却液体,该流动的冷却液体直接与金属基板接触,能够迅速吸收金属基板的热量,降低金属基板的温度,也进一步迅速降低了半导体电偶对热端的温度。The technical solution adopted in this embodiment connects the hot end surface of the metal substrate with the liquid cooling substrate, and a flowing cooling liquid is provided between the liquid cooling substrate and the metal substrate, and the flowing cooling liquid directly contacts the metal substrate, which can Rapidly absorb the heat of the metal substrate, reduce the temperature of the metal substrate, and further rapidly reduce the temperature of the hot end of the semiconductor couple.

与现有技术中热端基板与散热基板焊接的方式相比,本实施例所提供的技术方案中流动的冷却液体直接与金属基板接触,可迅速对金属基板进行散热,一方面金属基板的热端不存在任何如现有技术中焊料或散热基板自身所具有的热阻,另一方面流动的冷却液体的热容量较大,可大量快速吸收热量,进而能够快速地降低半导体电偶对热端的温度,有利于实现大功率制冷。Compared with the way of welding the hot end substrate and the heat dissipation substrate in the prior art, the cooling liquid flowing in the technical solution provided by this embodiment directly contacts the metal substrate, which can quickly dissipate heat from the metal substrate. On the one hand, the heat dissipation of the metal substrate There is no thermal resistance like the solder or the heat dissipation substrate itself in the prior art. On the other hand, the flowing cooling liquid has a large heat capacity, which can absorb a large amount of heat quickly, and then can quickly reduce the temperature of the semiconductor couple to the hot end. , which is conducive to the realization of high-power cooling.

并且,现有技术中,由于散热基板与热端基板的贴合方式属于面-面贴合,因此,当散热基板或热端基板发生机械变形,即便是微小变形也会导致二者之间的接触热阻增大,进而降低了热传导效率。而本实施例提供的上述方案中,冷却液体与金属基板的热端表面接触进行换热,该表面为平面,则相当于液体与平面接触换热,则金属基板表面的微小形变不会增大接触热阻,也就不会影响换热效率,有效克服了现有技术中面-面贴合而造成接触热阻增大的问题,进一步具备了实现大功率制冷的能力。Moreover, in the prior art, since the bonding method of the heat dissipation substrate and the hot end substrate is surface-to-surface bonding, when the heat dissipation substrate or the hot end substrate is mechanically deformed, even a small deformation will cause a gap between the two. The contact thermal resistance increases, which in turn reduces the efficiency of heat transfer. However, in the above solution provided by this embodiment, the cooling liquid is in contact with the surface of the hot end of the metal substrate for heat exchange. If the surface is a plane, it is equivalent to the heat exchange between the liquid and the plane, and the small deformation on the surface of the metal substrate will not increase. The contact thermal resistance will not affect the heat exchange efficiency, effectively overcome the problem of increased contact thermal resistance caused by surface-to-surface bonding in the prior art, and further have the ability to realize high-power cooling.

本领域技术人员可以理解的,在金属基板18与液体冷却基体21之间需采用一定的密封手段,确保冷却液体不会从金属基板18与液体冷却基体21的连接缝隙中撒漏。例如采用密封胶粘合、设置密封圈或密封垫等方式。本实施例中,如图2所示,在液体冷却基体21的安装面上设置密封槽210,密封槽210位于置液槽22的边缘,密封槽210内设置密封圈211,用于密封液体冷却基体21和金属基板18之间的间隙。Those skilled in the art can understand that a certain sealing means should be adopted between the metal substrate 18 and the liquid cooling base 21 to ensure that the cooling liquid will not leak from the connection gap between the metal base plate 18 and the liquid cooling base 21 . For example, sealant bonding, sealing rings or gaskets are used. In this embodiment, as shown in FIG. 2, a sealing groove 210 is provided on the mounting surface of the liquid cooling base 21. The sealing groove 210 is located on the edge of the liquid storage tank 22. A sealing ring 211 is arranged in the sealing groove 210 to seal the liquid cooling. The gap between the base body 21 and the metal substrate 18 .

对于上述液体冷却基体的结构,可以有多种实现方式,例如可采用如下的方式:For the structure of the above-mentioned liquid cooling matrix, there are many ways to realize it, for example, the following way can be adopted:

如图2和图4所示,在液体冷却基体21远离金属基板18的底壁内表面设有抵顶在底壁内表面和金属基板18之间的至少一个隔板23,至少一个隔板23将置液槽22划分为蛇形的液体流道,冷却液体在蛇形的液体流道内流动。As shown in Figures 2 and 4, at least one partition 23 is provided on the inner surface of the bottom wall of the liquid cooling base 21 away from the metal substrate 18, and at least one partition 23 is placed between the inner surface of the bottom wall and the metal substrate 18. The liquid storage tank 22 is divided into serpentine liquid flow channels, and the cooling liquid flows in the serpentine liquid flow channels.

具体的,冷却液体在蛇形的液体流道内流动可沿设定的方向流动,则冷却液体在流动过程中,与金属基板18的各个部分均可以充分接触,以充分吸收金属基板18的热量,进一步提高冷却液体的吸热量。Specifically, the cooling liquid can flow in a set direction while flowing in the serpentine liquid channel, so that the cooling liquid can fully contact with various parts of the metal substrate 18 during the flow process, so as to fully absorb the heat of the metal substrate 18, Further increase the heat absorption of the cooling liquid.

进一步的,对于冷却液体在液体流道内流动的实现方式,也可以有多种实现方式,本实施例提供一种具体的方式:Further, there may be many ways to realize the flow of the cooling liquid in the liquid channel, and this embodiment provides a specific way:

图5为本实用新型实施例提供的半导体制冷组件的又一结构示意图。如图2、3、5所示,在液体冷却基体21上与底壁相邻的一侧壁上设有进液口24和出液口25,进液口24和出液口25分别与液体流道的始端和末端的位置对应。并且,进液口24和出液口25还与外部的冷却管路26连通形成冷却回路,冷却回路上设有液体泵27,液体泵27可采用直流供电或交流供电。则在液体泵27的作用下,冷却液体可以在冷却管路26和液体流道内循环流动。液体泵27可采用离心泵或潜水泵,其流量为(1-5)L/min,其流量越大,冷却液体的流动速度越快,散热效果越好。Fig. 5 is another structural schematic diagram of the semiconductor cooling assembly provided by the embodiment of the present invention. As shown in Figures 2, 3, and 5, a liquid inlet 24 and a liquid outlet 25 are arranged on the side wall adjacent to the bottom wall on the liquid cooling base 21, and the liquid inlet 24 and the liquid outlet 25 are connected to the liquid respectively. The positions of the beginning and end of the runner correspond. Moreover, the liquid inlet 24 and the liquid outlet 25 are also connected with the external cooling pipeline 26 to form a cooling circuit. The cooling circuit is provided with a liquid pump 27, and the liquid pump 27 can be powered by DC or AC. Then, under the action of the liquid pump 27 , the cooling liquid can circulate in the cooling pipeline 26 and the liquid flow channel. Liquid pump 27 can adopt centrifugal pump or submersible pump, and its flow rate is (1-5) L/min, and its flow rate is bigger, and the flow speed of cooling liquid is faster, and the cooling effect is better.

进一步的,还可以在冷却回路上设置热交换器28,热交换器28内设有与冷却管路26连通的液体通道,热交换器28上设置有多个散热孔。当冷却液体流经液体冷却基体21内的液体流道时,吸收金属基板18的热量;当冷却液体流经冷却管路26和热交换器28内的液体通道时,与外部空气进行热交换,将热量传递给外部空气。热交换器28具体可采用现有技术中常用的水排散热器,其散热面积可根据半导体电偶对12所需的换热量来设定。Further, a heat exchanger 28 may also be provided on the cooling circuit, and a liquid channel communicating with the cooling pipeline 26 is provided in the heat exchanger 28 , and a plurality of cooling holes are provided on the heat exchanger 28 . When the cooling liquid flows through the liquid channel in the liquid cooling base 21, it absorbs the heat of the metal substrate 18; when the cooling liquid flows through the liquid channel in the cooling pipeline 26 and the heat exchanger 28, it exchanges heat with the external air, Transfer heat to outside air. The heat exchanger 28 can specifically adopt a water radiator commonly used in the prior art, and its heat dissipation area can be set according to the heat exchange required by the semiconductor couple pair 12 .

为了加强热交换,还可以在热交换器28的散热孔处设置用于对热交换器28进行散热的冷却风扇29,冷却风扇29的出风方向可以朝向热交换器28,也可以背离热交换器28,以加快热交换器28周围的空气流动为目的,提高冷却液体与周围空气进行热交换的速度。冷却风扇29的大小可与散热器的水排面积相匹配,其风量、风压参数的选择可根据半导体电偶对12所需的换热量和水排散热器的散热量来进行设定。In order to strengthen the heat exchange, a cooling fan 29 for dissipating heat from the heat exchanger 28 can also be provided at the cooling hole of the heat exchanger 28, and the air outlet direction of the cooling fan 29 can be towards the heat exchanger 28 or away from the heat exchange. The device 28 is used to speed up the air flow around the heat exchanger 28 to increase the heat exchange speed between the cooling liquid and the surrounding air. The size of cooling fan 29 can be matched with the water discharge area of radiator, and the selection of its air volume and wind pressure parameters can be set according to the required heat exchange of semiconductor couple pair 12 and the heat dissipation of water discharge radiator.

由于金属基板18与冷却液体之间的换热量Q满足Q=hAΔT,其中,h为换热系数,A为换热面积,ΔT为金属基板18与冷却液体之间的温差。因此,若需要提高换热量Q,可以从两方面着手,一是提高换热系数h,二是增大换热面积A。Since the heat transfer Q between the metal substrate 18 and the cooling liquid satisfies Q=hAΔT, where h is the heat transfer coefficient, A is the heat transfer area, and ΔT is the temperature difference between the metal substrate 18 and the cooling liquid. Therefore, if you need to increase the heat transfer Q, you can start from two aspects, one is to increase the heat transfer coefficient h, and the other is to increase the heat transfer area A.

因此,在上述技术方案的基础上,为了增大冷却液体与金属基板18之间的换热面积,以提高换热量,本实施例还对金属基板18的结构进行改进,如可采用下面的实现方式:Therefore, on the basis of the above-mentioned technical solution, in order to increase the heat exchange area between the cooling liquid and the metal substrate 18, so as to increase the amount of heat exchange, this embodiment also improves the structure of the metal substrate 18, such as the following Method to realize:

其一,图6为本实用新型实施例提供的半导体制冷组件中金属基板的结构示意图,图7为图6中B-B截面的剖视图。如图6和图7所示,金属基板18朝向液体冷却基体21的表面上(图7中金属基板18的右侧表面,即金属基板18的热端表面)设置凹坑31,凹坑31凹陷于金属基板18的热端表面,相当于增大了金属基板18与冷却液体接触的换热面积。凹坑31的数量可以为至少两个,凹坑31布设在与液体流道对应的位置处,以使冷却液体在液体流道内流动的过程中,能够进入凹坑31内,与凹坑31的表面接触,与表面为平面的金属基板18相比,增大了冷却液体与金属基板18的接触面积,相当于增大了换热面积,有利于提高换热量。而且,在金属基板18的上述表面上设置凹坑31,相当于减小了金属基板18的厚度,减小了传导热阻,也能够提高换热效果。First, FIG. 6 is a schematic structural view of the metal substrate in the semiconductor refrigeration assembly provided by the embodiment of the present invention, and FIG. 7 is a cross-sectional view of the B-B section in FIG. 6 . As shown in FIGS. 6 and 7 , on the surface of the metal substrate 18 facing the liquid cooling base 21 (the right side surface of the metal substrate 18 in FIG. 7 , that is, the hot end surface of the metal substrate 18 ), a pit 31 is provided, and the pit 31 is recessed. On the surface of the hot end of the metal substrate 18, it is equivalent to increasing the heat exchange area where the metal substrate 18 contacts the cooling liquid. The number of dimples 31 can be at least two, and the dimples 31 are arranged at positions corresponding to the liquid flow channel, so that the cooling liquid can enter the dimples 31 during the process of flowing in the liquid flow channel. Compared with the metal substrate 18 whose surface is flat, the surface contact increases the contact area between the cooling liquid and the metal substrate 18, which is equivalent to increasing the heat exchange area, which is beneficial to improve the heat exchange. Moreover, providing the pits 31 on the above-mentioned surface of the metal substrate 18 is equivalent to reducing the thickness of the metal substrate 18, reducing the thermal conduction resistance, and improving the heat exchange effect.

凹坑31的数量、尺寸、形状均可以根据液体流道的数量、宽度和长度进行设定。The number, size and shape of the pits 31 can be set according to the number, width and length of the liquid channels.

图8为本实用新型实施例提供的半导体制冷组件中金属基板18的又一结构示意图,图9为图8中C-C截面的剖视图。如图8和图9所示,或者,可以在金属基板18朝向液体冷却基体21的热端表面上设置凹槽32,凹槽32的长度方向可以沿液体流道的方向延伸。凹槽32凹陷于金属基板18的热端表面,相当于增大了金属基板18与冷却液体接触的换热面积,也能够达到与上述凹坑31相似的散热效果。Fig. 8 is another structural schematic diagram of the metal substrate 18 in the semiconductor refrigeration assembly provided by the embodiment of the present invention, and Fig. 9 is a sectional view of the C-C section in Fig. 8 . As shown in FIG. 8 and FIG. 9 , alternatively, grooves 32 may be provided on the hot end surface of the metal substrate 18 facing the liquid cooling base 21 , and the length direction of the grooves 32 may extend along the direction of the liquid flow path. The groove 32 is recessed on the hot end surface of the metal substrate 18 , which is equivalent to increasing the heat exchange area of the metal substrate 18 in contact with the cooling liquid, and can also achieve a heat dissipation effect similar to that of the above-mentioned recess 31 .

其二,在金属基板18朝向液体冷却基体21的表面上设置至少两个金属片,至少两个金属片相互隔开,且金属片布设在与液体流道对应的位置处。则冷却液体不但能够与金属基板18的表面接触,还能够与金属片接触。由于金属片的导热能力较强,因此,金属基板18的热量能够通过金属片进一步快速地传递给冷却液体,提高了换热速度。金属片具体可采用导热能力较强的金属制成,例如铜、铝。金属片可以采用焊接或嵌入等方式设置在金属基板18的热端表面上。Second, at least two metal sheets are arranged on the surface of the metal substrate 18 facing the liquid cooling base 21 , the at least two metal sheets are separated from each other, and the metal sheets are arranged at positions corresponding to the liquid flow channels. Then the cooling liquid can not only be in contact with the surface of the metal substrate 18, but also be in contact with the metal sheet. Due to the strong thermal conductivity of the metal sheet, the heat of the metal substrate 18 can be further and rapidly transferred to the cooling liquid through the metal sheet, thereby increasing the heat exchange speed. Specifically, the metal sheet can be made of metal with strong thermal conductivity, such as copper and aluminum. The metal sheet can be disposed on the hot end surface of the metal substrate 18 by means of welding or embedding.

该方案与本实施例所提供的上述方案相比,虽然冷却液体与金属基板18接触的面积减少了,但是由于金属片的导热能力非常好,金属片从金属基板18吸收热量的速度远远大于冷却液体从金属基板18吸收热量的速度,然后冷却液体再从金属片吸收热量,相当于提高了上述换热系数h,也就提高了换热量Q。Compared with the above-mentioned solution provided by this embodiment, although the contact area between the cooling liquid and the metal substrate 18 is reduced, because the heat conductivity of the metal sheet is very good, the speed at which the metal sheet absorbs heat from the metal substrate 18 is much faster than The speed at which the cooling liquid absorbs heat from the metal substrate 18, and then the cooling liquid absorbs heat from the metal sheet, is equivalent to increasing the above-mentioned heat transfer coefficient h, which also increases the heat transfer amount Q.

金属片的数量、尺寸、形状均可以根据液体流道的数量、宽度和长度进行设定。金属片可粘接、焊接或采用现有技术中常用的敷设金属的手段敷设于金属基板18与冷却液体接触的表面上。The quantity, size and shape of the metal sheets can be set according to the quantity, width and length of the liquid flow channels. The metal sheet can be bonded, welded or laid on the surface of the metal substrate 18 in contact with the cooling liquid by means of laying metal commonly used in the prior art.

其三,图10为本实用新型实施例提供的半导体制冷组件中金属基板18的另一结构示意图,图11为图10中D-D截面的剖视图。如图10和图11所示,在金属基板18朝向液体冷却基体21的热端表面上设置至少两个凸出于该表面上的金属肋条33(该金属肋条33的形状可参照现有技术中翅片的形状),至少两个金属肋条33相互隔开,且金属肋条33布设在与液体流道对应的位置处。则冷却液体不但能够与金属基板18的表面接触,还能够与金属肋条33接触,而且金属肋条33高于金属基板18的表面的部分能够伸入液体流道内,增大与冷却液体的接触面积,相当于增大了上述换热面积A,并且还提高了换热系数h,有利于提高换热量Q。Thirdly, FIG. 10 is another structural schematic diagram of the metal substrate 18 in the semiconductor refrigeration assembly provided by the embodiment of the present invention, and FIG. 11 is a sectional view of the D-D section in FIG. 10 . As shown in Figures 10 and 11, at least two metal ribs 33 protruding from the surface are provided on the hot end surface of the metal substrate 18 facing the liquid cooling base 21 (the shape of the metal ribs 33 can be referred to in the prior art. Fin shape), at least two metal ribs 33 are separated from each other, and the metal ribs 33 are arranged at positions corresponding to the liquid flow channels. Then the cooling liquid can not only contact the surface of the metal substrate 18, but also contact the metal ribs 33, and the part of the metal ribs 33 higher than the surface of the metal substrate 18 can extend into the liquid flow channel, increasing the contact area with the cooling liquid, It is equivalent to increasing the above-mentioned heat exchange area A, and also increasing the heat exchange coefficient h, which is beneficial to increase the heat exchange quantity Q.

由于金属肋条33的导热能力较强,因此,金属基板18的热量能够通过金属肋条33进一步快速地传递给冷却液体,提高了换热速度。金属肋条33具体可采用导热能力较强的金属制成,例如金、铜、铝。Since the metal ribs 33 have a strong thermal conductivity, the heat of the metal substrate 18 can be further and rapidly transferred to the cooling liquid through the metal ribs 33, thereby increasing the heat exchange rate. The metal ribs 33 can specifically be made of metals with strong thermal conductivity, such as gold, copper, and aluminum.

该方案与本实施例所提供的上述方案相比,虽然冷却液体与金属基板18接触的面积减少了,但是由于金属肋条33的导热能力非常好,金属肋条33从金属基板18吸收热量的速度远远大于冷却液体从金属基板18吸收热量的速度,然后冷却液体再从金属肋条33吸收热量,相当于提高了冷却液体从金属基板18整体吸收热量的速度。Compared with the above-mentioned solution provided by this embodiment, although the contact area between the cooling liquid and the metal substrate 18 is reduced, the metal rib 33 absorbs heat from the metal substrate 18 faster because the metal rib 33 has a very good thermal conductivity. Much faster than the speed at which the cooling liquid absorbs heat from the metal substrate 18 , and then the cooling liquid absorbs heat from the metal ribs 33 , which is equivalent to increasing the speed at which the cooling liquid absorbs heat from the metal substrate 18 as a whole.

金属肋条33的数量、尺寸、形状均可以根据液体流道的数量、宽度和长度进行设定。金属肋条33可粘接、焊接或采用现有技术中常用的连接金属的手段设置于金属基板18与冷却液体接触的表面上。The quantity, size and shape of the metal ribs 33 can be set according to the quantity, width and length of the liquid flow channels. The metal ribs 33 can be bonded, welded or disposed on the surface of the metal substrate 18 that is in contact with the cooling liquid by means of connecting metals commonly used in the prior art.

除上述三种方式之外,本领域技术人员还可以采用其他的方式对金属基板18进行改进,以提高换热效率。In addition to the above three ways, those skilled in the art can also use other ways to improve the metal substrate 18 to improve heat exchange efficiency.

在上述技术方案的基础上,本实施例还提供一种实现方式,能够进一步提高半导体制冷组件的换热效率。On the basis of the above technical solution, this embodiment also provides an implementation manner, which can further improve the heat exchange efficiency of the peltier cooling assembly.

将金属基板18设置为铝基板,铝基板的面积为80mm×90mm,厚度为1.3mm至1.7mm,优选为1.5mm。铝基板与液体冷却基体21之间可采用螺接的方式进行连接。在铝基板朝向半导体电偶对12的冷端表面上敷设导热绝缘层,导热绝缘层可以采用化学及物理方法在铝基板的表面涂覆而成或采用化学处理而得到的一层非常薄的金属导热且绝缘的材料。并且,导热绝缘层通过化学等手段与热端电极15接合。因此,热端电极15与导热绝缘层之间的热阻、以及铝基板自身的热阻相对较小,能够提高热传导效率。The metal substrate 18 is set as an aluminum substrate, the area of the aluminum substrate is 80mm×90mm, and the thickness is 1.3mm to 1.7mm, preferably 1.5mm. The aluminum substrate and the liquid cooling base 21 can be connected by screwing. A thermally conductive insulating layer is laid on the surface of the cold end of the aluminum substrate facing the semiconductor couple pair 12. The thermally conductive insulating layer can be coated on the surface of the aluminum substrate by chemical and physical methods or a very thin layer of metal obtained by chemical treatment. Thermally conductive and insulating material. In addition, the thermally conductive insulating layer is bonded to the hot terminal electrode 15 by means such as chemical means. Therefore, the thermal resistance between the hot terminal electrode 15 and the thermally conductive insulating layer and the thermal resistance of the aluminum substrate itself are relatively small, which can improve the heat conduction efficiency.

则半导体电偶对12在金属基板18上产生的热量可以经过较小热阻的导热绝缘层直接传导至铝基板,利用铝基板良好的导热、均温性能,使热量迅速传导至铝基板朝向液体冷却基体21的热端表面,并被冷却液体吸收,能够成倍提高热量的扩散效率,有利于实现大功率制冷。Then the heat generated by the semiconductor couple 12 on the metal substrate 18 can be directly conducted to the aluminum substrate through the heat-conducting insulating layer with a small thermal resistance, and the good heat conduction and temperature uniformity of the aluminum substrate can be used to quickly conduct the heat to the aluminum substrate toward the liquid Cooling the hot end surface of the substrate 21 and being absorbed by the cooling liquid can double the heat diffusion efficiency, which is beneficial to realize high-power refrigeration.

本实施例所提供的实现方式与现有技术相比,其各部分热阻的分布参见表一。Compared with the prior art, the implementation provided by this embodiment can be seen in Table 1 for the distribution of the thermal resistance of each part.

表一 本实施例提供的半导体制冷组件与现有技术中热阻的分布Table 1 The distribution of the thermal resistance between the semiconductor refrigeration assembly provided in this embodiment and the prior art

其中,R11=R21,R12=R22,R13=R23,R14=R24,R15=R25。Wherein, R11=R21, R12=R22, R13=R23, R14=R24, R15=R25.

本实施例中采用铝基板作为金属基板18,且在金属基板18与半导体电偶对12之间设置导热绝缘层,导热绝缘层与热端电极15相连,R26+R27远小于R16。并且R28远小于R17+R18,因此,本实施例中,半导体电偶对12热端的全部热阻之和远远小于现有技术。降低了热阻,相当于提高了换热效率,有利于实现大功率制冷。In this embodiment, an aluminum substrate is used as the metal substrate 18, and a thermally conductive insulating layer is provided between the metal substrate 18 and the semiconductor couple pair 12. The thermally conductive insulating layer is connected to the hot terminal electrode 15, and R26+R27 is much smaller than R16. And R28 is much smaller than R17+R18, therefore, in this embodiment, the sum of all the thermal resistances of the semiconductor thermocouple pair 12 is far smaller than the prior art. The reduction of thermal resistance is equivalent to the improvement of heat exchange efficiency, which is conducive to the realization of high-power refrigeration.

本实施例所提供的上述方案,在半导体电偶对12输入功率为120W时,其最大产冷量可达到60W-70W,能够实现大功率制冷。另外,通过增加半导体电偶对12中P-N点偶的对数和输入功率,匹配好液体冷却换热部分,还能够进一步增大制冷功率。In the above solution provided by this embodiment, when the input power of the semiconductor couple 12 is 120W, the maximum cooling capacity can reach 60W-70W, which can realize high-power cooling. In addition, by increasing the logarithm and input power of the P-N point couple in the semiconductor couple pair 12, and matching the liquid cooling heat exchange part, the cooling power can be further increased.

最后应说明的是:以上各实施例仅用以说明本实用新型的技术方案,而非对其限制;尽管参照前述各实施例对本实用新型进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分或者全部技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本实用新型各实施例技术方案的范围。Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present utility model, and are not intended to limit it; although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand : It can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements to some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions depart from the embodiments of the present utility model Scope of technical solutions.

Claims (10)

1. a semiconductor refrigerating assembly, it is characterised in that including: semi-conductor electricity couple and quasiconductor Cold end group plate, the hot junction substrate being connected with semi-conductor electricity couple hot junction and the liquid that cold end is connected by galvanic couple Body cooling device;Wherein, described hot junction substrate includes metal basal board and is connected to metal basal board and half Conductor galvanic couple between thermally conductive insulating layer;
Described liquid chiller part includes: the liquid cooling matrix being connected with metal basal board, described liquid is cold But offer on the installed surface that matrix is connected with metal basal board and put liquid bath, described in put between liquid bath and metal basal board It is provided with the cooling liquid of flowing.
Semiconductor refrigerating assembly the most according to claim 1, it is characterised in that described liquid cools down Matrix is provided with away from the diapire inner surface of metal basal board and supports between described diapire inner surface and metal basal board At least one dividing plate, at least one dividing plate is divided into snakelike flow channel for liquids, described cooling by putting liquid bath Liquid flows in described flow channel for liquids.
Semiconductor refrigerating assembly the most according to claim 2, it is characterised in that described metal basal board Being provided with pit towards the surface of described liquid cooling matrix, the quantity of described pit is at least two, extremely Few two pits are corresponding with the position of flow channel for liquids.
Semiconductor refrigerating assembly the most according to claim 3, it is characterised in that described liquid cools down A sidewall adjacent with described diapire on matrix is provided with inlet and liquid outlet, described inlet and go out liquid Mouth is corresponding with the position at the top of described flow channel for liquids and end respectively;Described inlet and liquid outlet also with Outside cooling line connection forms cooling circuit, and described cooling circuit is provided with liquid pump.
Semiconductor refrigerating assembly the most according to claim 4, it is characterised in that described cooling circuit On be additionally provided with heat exchanger, be provided with the fluid passage connected with described cooling line in described heat exchanger.
Semiconductor refrigerating assembly the most according to claim 5, it is characterised in that described liquid cools down Device also includes the cooling fan for dispelling the heat described heat exchanger.
7. according to the semiconductor refrigerating assembly described in any one of claim 1-6, it is characterised in that described Metal basal board is aluminium base.
Semiconductor refrigerating assembly the most according to claim 2, it is characterised in that described metal basal board It is provided with at least two sheet metal spaced apart from each other, described metal towards the surface of described liquid cooling matrix Sheet is corresponding with the position of flow channel for liquids, and each sheet metal is along the length direction of corresponding flow channel for liquids Extend.
Semiconductor refrigerating assembly the most according to claim 2, it is characterised in that described metal basal board It is provided with at least two protruded from this surface spaced apart from each other towards the surface of described liquid cooling matrix Metal rib, described metal rib is corresponding with the position of flow channel for liquids.
10. according to the semiconductor refrigerating assembly described in any one of claim 1-6, it is characterised in that institute State and be additionally provided with seal groove on the installed surface of liquid cooling matrix, be provided with sealing ring in described seal groove, be used for Seal the gap between described liquid cooling matrix and metal basal board.
CN201620123081.9U 2016-02-16 2016-02-16 Semiconductor refrigeration components Expired - Fee Related CN205542899U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105576113A (en) * 2016-02-16 2016-05-11 广东富信科技股份有限公司 Semiconductor refrigeration component
CN110701924A (en) * 2019-10-18 2020-01-17 宁波江丰电子材料股份有限公司 Cooling plate body

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105576113A (en) * 2016-02-16 2016-05-11 广东富信科技股份有限公司 Semiconductor refrigeration component
CN110701924A (en) * 2019-10-18 2020-01-17 宁波江丰电子材料股份有限公司 Cooling plate body

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