CN205529027U - Binary channels diamond like carbon film deposition apparatus - Google Patents
Binary channels diamond like carbon film deposition apparatus Download PDFInfo
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- CN205529027U CN205529027U CN201620267625.9U CN201620267625U CN205529027U CN 205529027 U CN205529027 U CN 205529027U CN 201620267625 U CN201620267625 U CN 201620267625U CN 205529027 U CN205529027 U CN 205529027U
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- interface channel
- vacuum chamber
- room
- target
- regulation valve
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Abstract
The utility model relates to a coating film technical field especially relates to a binary channels diamond like carbon film deposition apparatus, and is relative at the bottom of real empty room's upper cover and real empty room's the room, and real empty room's lateral wall is connected at the bottom of upper cover and the room, plate target and cathode target set up in real empty room's inside, and the plate target sets up with cathode target relatively, and cathode target is located at the bottom of real empty room's the room and between the plate target, actuating mechanism links to each other with cathode target at the bottom of passing the room, an interface channel and the 2nd interface channel be in parallelly connected back, establishes ties between evacuating device and real empty room, and intercommunication evacuating device and real empty room, an interface channel's diameter are the 2nd interface channel's 3 times of diameter, first governing valve setting is in an interface channel and real empty room intercommunication department, the second governing valve sets up in the 2nd interface channel and real empty room intercommunication department. This application is through set up two interface channel between evacuating device and real empty room, through the regulation of the switching degree to two interface channel, and the homogeneity of the inside air current of control deposition apparatus that can be accurate.
Description
Technical field
This utility model relates to coating technique field, particularly relates to a kind of dual pathways diamond-like carbon film deposition dress
Put.
Background technology
Diamond-like carbon film (Diamond Like Carbon, DLC) is a kind of shape with sp3 and sp2 key
Formula combines the metastable material generated, and it has not only had the good characteristic of diamond and graphite concurrently, has also had height
Hardness, high resistivity and favorable optical performance, have again self unique tribological property simultaneously, can extensively use
In fields such as machinery, electronics, optics, calorifics, acoustics and medical science.
Owing to DLC is metastable material, energetic ion is needed to bombard growing surface in preparation process, logical
Often, physical gas-phase deposite method, chemical deposition or plasma enhanced chemical vapor deposition are used
(Plasma Enhanced Chemical Vapor Deposition, PECVD) method is prepared, and
PECVD method, owing to sedimentation rate is fast, quality of forming film is good, is widely used in the preparation of DLC.
For precipitation equipment, the uniformity of its internal air-flow is most important to deposition effect.Existing skill
Art only exists an interface channel between the vacuum extractor and vacuum chamber of precipitation equipment, at regulation air-flow
Time, not only degree of regulation is low, poor repeatability, also results in deposition effect undesirable.
Utility model content
This utility model, by providing a kind of dual pathways diamond-like-carbon film deposition apparatus, solves prior art
In middle precipitation equipment, air-flow degree of regulation is low, the technical problem of poor repeatability.
This utility model embodiment provides a kind of dual pathways diamond-like-carbon film deposition apparatus, including vacuum
Room, plate target, cathode target, drive mechanism, vacuum extractor, the first interface channel, the second interface channel,
First regulation valve, the second regulation valve and inflation introduce seat；
The upper cover of described vacuum chamber is relative with at the bottom of the room of described vacuum chamber, and the sidewall of described vacuum chamber connects described
At the bottom of upper cover and described room, to form a chamber；
Described plate target and described cathode target are arranged on the inside of described vacuum chamber, and, described plate target and institute
Stating cathode target to be oppositely arranged, described cathode target is at the bottom of the room of described vacuum chamber and between described plate target；
Described drive mechanism is connected through at the bottom of described room with described cathode target；
Described first interface channel and described second interface channel, after parallel connection, are connected on described vacuum extractor
With between described vacuum chamber, to connect described vacuum extractor and described vacuum chamber, wherein, described first even
3 times of the diameter of a diameter of described second interface channel in connection road；
Described first regulation valve is arranged at described first interface channel and described vacuum chamber；
Described second regulation valve is arranged at described second interface channel and described vacuum chamber；
Described inflation introduces seat and is arranged at the bottom of described room.
Preferably, the diameter range of described second interface channel is 60～100mm.
Preferably, a diameter of 80mm of described second interface channel.
Preferably, baroceptor is also included；
Described baroceptor is arranged at the inside of described vacuum chamber, and, described baroceptor respectively with institute
State the first regulation valve to be connected with described second regulation valve.
Preferably, described first regulation valve and described second regulation valve are butterfly valve.
Preferably, described drive mechanism is motor.
Preferably, elevating mechanism is also included；
Described elevating mechanism is connected with described upper cover.
Preferably, described elevating mechanism is electric lifting mechanism or hydraulicefficiency elevation structure.
Preferably, described vacuum means is set to vacuum extractor.
One or more technical schemes in this utility model embodiment, at least have the following technical effect that or excellent
Point:
This utility model is different by arranging small one and large one two diameters between vacuum extractor from vacuum chamber
Interface channel, in parallel between two interface channels, by the regulation of the opening and closing degree to two interface channels,
The uniformity of precipitation equipment internal gas flow can be accurately controlled, it is ensured that air-flow is uniform, reproducible, reaction
Speed is fast, can also obtain satisfied deposition effect simultaneously.
Accompanying drawing explanation
In order to be illustrated more clearly that this utility model embodiment or technical scheme of the prior art, below by right
In embodiment or description of the prior art, the required accompanying drawing used is briefly described, it should be apparent that below,
Accompanying drawing in description is only embodiment of the present utility model, for those of ordinary skill in the art,
On the premise of not paying creative work, it is also possible to obtain other accompanying drawing according to the accompanying drawing provided.
Fig. 1 is the profile of a kind of dual pathways diamond-like-carbon film deposition apparatus in this utility model embodiment.
Wherein, 1 is vacuum chamber, and 101 is upper cover, and 2 is door body, and 3 is plate target, and 4 is cathode target, 5
For drive mechanism, 6 is vacuum extractor, and 71 is the first interface channel, and 72 is the second interface channel, and 8 are
Frame, 9 for visiting window, and 10 is elevating mechanism, and 11 is electric field balanced controls, and 12 is the second regulation valve.
Detailed description of the invention
Low, the technical problem of poor repeatability for air-flow degree of regulation in precipitation equipment in solution prior art, this
Utility model provides a kind of dual pathways diamond-like-carbon film deposition apparatus, by vacuum extractor and vacuum chamber
Between the interface channel that small one and large one two diameters are different is set, in parallel between two interface channels, by right
The regulation of the opening and closing degree of two interface channels, it is possible to be accurately controlled the uniform of precipitation equipment internal gas flow
Property, it is ensured that air-flow is uniform, reproducible, and response speed is fast, can also obtain satisfied deposition effect simultaneously.
For making the purpose of this utility model embodiment, technical scheme and advantage clearer, below in conjunction with this
Accompanying drawing in utility model embodiment, carries out clear, complete to the technical scheme in this utility model embodiment
Ground describes, it is clear that described embodiment is a part of embodiment of this utility model rather than whole realities
Execute example.Based on the embodiment in this utility model, those of ordinary skill in the art are not making creative labor
The every other embodiment obtained under dynamic premise, broadly falls into the scope of this utility model protection.
This utility model embodiment provides a kind of diamond-like-carbon film deposition apparatus, as it is shown in figure 1, described dress
Put and include that vacuum chamber 1, plate target 3, cathode target 4, drive mechanism 5, vacuum extractor 6, first connect
Passage the 71, second interface channel the 72, first regulation valve, the second regulation valve 12 and frame 8, wherein, the
One regulation valve is not shown.Vacuum chamber 1 is positioned in frame 8.Plate target 3 and cathode target 4 are arranged on vacuum
The inside of room 1, and, plate target 3 is oppositely arranged with cathode target 4, and cathode target 4 is positioned at vacuum chamber 1
At the bottom of room and between plate target 3.Drive mechanism 5 is connected through at the bottom of the room of vacuum chamber 1 with cathode target 4.First
Interface channel 71 and the second interface channel 72 after parallel connection, be connected on vacuum extractor 6 and vacuum chamber 1 it
Between, to connect vacuum extractor 6 and vacuum chamber 1, wherein, vacuum extractor 6 is specially molecular pump.The
A connection channel 71 is different with the diameter of the second interface channel 72, a diameter of the of the first interface channel 71
3 times of the diameter of two interface channels 72.First regulation valve is arranged on the first interface channel 71 and vacuum chamber 1
Connectivity part.Second regulation valve 12 is arranged on the second interface channel 72 and vacuum chamber 1 connectivity part.Wherein,
One regulation valve is for controlling the opening and closing degree of the first interface channel 71, and the second regulation valve 12 is for control second
The opening and closing degree of interface channel 72, the size coupling of the first regulation valve and the first interface channel 71, second adjusts
Joint valve 12 mates with the size of the second interface channel 72, and the first regulation valve and the second regulation valve 12 are butterfly
Valve.
The application arranges the connection that small one and large one two diameters are different between vacuum extractor 6 from vacuum chamber 1
Passage, by the control to two interface channels, it is possible to is accurately controlled the uniform of precipitation equipment internal gas flow
Property, it is ensured that air-flow is uniform, reproducible, can also obtain satisfied deposition effect simultaneously.
In this application, the preferred diameter range of the second interface channel 72 is 60～100mm, thus, the
The diameter range of a connection channel 71 is 180mm～300mm.For reaching more preferable regulating effect, preferably
, a diameter of 80mm of the second interface channel 72, then a diameter of 240mm of the first interface channel 71.
It should be noted that according to actual evacuation and the difference of inflation situation, different regulations can be used
Two regulation valves are controlled by strategy, and then the opening and closing degree of two interface channels of regulation, such as, close
Arbitrary interface channel, only regulates another interface channel opened, or, open two interface channels also simultaneously
It is adjusted.The application will provide a specific embodiment to regulation strategy below, but open for interface channel
Closing and the regulation of opening and closing degree is not limited to this specific embodiment, those skilled in the art are based on this practicality
Under the enlightenment of novel disclosure, it is possible to otherwise regulate interface channel according to practical situation.
In one embodiment, first interface channel 71 of a diameter of 240mm is used for taking out local vacuum,
And second interface channel 72 of a diameter of 80mm is for accurately controlling air-flow further, when taking out this
During ground vacuum, by controlling the first regulation valve, the first interface channel 71 is made to be shown in a fully open operation, i.e. first
The diameter degree of opening wide of interface channel 71 is 100%, meanwhile, by controlling the second regulation valve 12, makes the
Two interface channels 72 are in full-shut position, i.e. the diameter degree of opening wide of the second interface channel 72 is 0%,
Thus quickly take out local vacuum.Taking out after local vacuum terminates, progressively closing off the first interface channel 71, and by
Gradually open the second interface channel 72, utilize the second interface channel 72 that diameter is less to regulate in precipitation equipment
Air-flow.
Further, the dual pathways diamond-like-carbon film deposition apparatus of the application also includes baroceptor, air pressure
Sensor is arranged at the inside of vacuum chamber 1, and, baroceptor regulates with the first regulation valve and second respectively
Valve 12 is connected.Baroceptor is for detecting the atmospheric pressure value within vacuum chamber 1, and feeds back to the first regulation
Valve and the second regulation valve 12, to realize the first regulation valve and second are regulated automatically controlling of valve 12.
It addition, the dual pathways diamond-like-carbon film deposition apparatus of the application also includes elevating mechanism 10.Elevator
One end of structure 10 is fixed in frame 8, and, the other end of elevating mechanism 10 and the upper cover 101 of vacuum chamber 1
It is connected.Utilize elevating mechanism 10 can open the upper cover 101 of vacuum chamber 11, and rotate upper cover 101, with
It is easy to the element within vacuum chamber 1 is dismantled.Further, elevating mechanism 10 is electric lifting mechanism
Or hydraulicefficiency elevation structure.It addition, introduce seat being additionally provided with inflation at the bottom of the room of vacuum chamber 1, gas charging system leads to
Gas overcharging introduces seat and is connected with vacuum chamber 1, it is ensured that stable inflation, and wherein, it is not shown that inflation introduces seat.
Prior art is when sediment cleaning rubbish, and vacuum cups extend into vacuum chamber from the top of vacuum chamber 1
The bottom of 1, clears up the deposit rubbish of bottom, is often inconvenient to due to vacuum cups turn round, because of
This, when clearing up the deposit rubbish bottom vacuum chamber 1, clean difficulty big, exist and clear up halfway asking
Topic, it is difficult to by clean for deposit garbage-cleaning, under the influence of primary depositing.Therefore, at the sidewall of vacuum chamber 1
On offer an opening, door body 2 is connected with vacuum chamber 1 at opening part, sets opening for lid.
The application arranges door body 2 on the sidewall of vacuum chamber 1, when needs sediment cleaning rubbish, opens
Door body 2 on sidewall, reaches inside by vacuum cups from the sidewall of vacuum chamber 1 and cleans, vacuum cups
Being no longer necessary to turn round, it is easy to the deposit rubbish bottom cleaning, cleaning thoroughly, will not be polluted and deposit next time
Process.
Generally, vacuum chamber 1 is cylinder, and in this application, the shape of door body 2 is not limited by opening,
As long as door body 2 is after being connected with vacuum chamber 1, ensure that vacuum chamber 1 is closed at closing time.Door body
The shape of 2 can be square, it is also possible to for circle.Additionally, it is preferred that, the material of door body 2 and vacuum chamber
The material of 1 is identical.
For convenience of observing the reactive state in vacuum chamber 1 at any time, and observe deposit rubbish in vacuum chamber 1
Accumulation degree, door body 2 is provided with a visiting window 9, visits the shape of window 9 the most not by door body 2
The restriction of shape, when door body 2 is square, it can be circular for visiting window 9, it is also possible to for square.Pass through
Visiting window 9, operator can observe the reactive state in vacuum chamber 1 at any time, and make phase when needed
The process answered, meanwhile, can also observe the accumulation degree of deposit rubbish at any time by visiting window 9,
After running up to a certain degree, stopped reaction is opened door body 2 and is cleaned.
Due to when setting up door body 2, it will in the sidewall upper shed of vacuum chamber 1, and opening can be in certain journey
Cause the electric field in vacuum chamber 1 uneven on degree.Therefore, the application sets up electric field balanced controls at opening part
11, electric field balanced controls 11 are detachably connected on the sidewall of vacuum chamber 1 of opening part, for completion
Opening, wherein, electric field balanced controls 11 are plate-shaped, and, the size of electric field balanced controls 11 is more than or equal to
The size of opening.
Specifically, when the size of electric field balanced controls 11 is more than the size of opening, electric field balanced controls
11 can be identical with the shape of opening, it is also possible to different, as long as after mounting, and electric field balanced controls 11 energy
Enough completion openings.And, when the size of electric field balanced controls 11 is equal to the size of opening, electric field is put down
Weighing apparatus mechanism 11 is identical with the shape of opening, and size is the most identical, and when mounted, electric field balanced controls 11 are just
Can completion opening.The application, by setting up electric field balanced controls 11 at opening part, utilizes electric field balanced controls
Opening on the sidewall of 11 completion vacuum chambers 1 such that it is able to ensure the electric field balance in vacuum chamber 1, and then
Ensure deposition effect.
Preferably, the size of electric field balanced controls 11 is equivalently-sized with opening, and electric field balanced controls 11 are firm
Well can completion opening, thus, can either ensure that electric field balances, material will not be wasted again.Also, electric field is put down
It is bolted between weighing apparatus mechanism 11 and the sidewall of vacuum chamber 1, when needs are from the internal dismounting of vacuum chamber 1
During lower electric field balanced controls 11, the lower bolt of first dismounting, then take off electric field balancing machine from vacuum chamber 1 sidewall
Structure 11, convenient disassembly.
When vacuum chamber 1 is cylinder, in a kind of specific embodiment, opening is arc, thus, and open
The electric field balanced controls 11 that mouth matches are arc, and the radian of this arc and opening match, therefore,
The radian of this arc matches with the radian of the sidewall of vacuum chamber 1.Further, this arc and cathode target
4 is concentric.Certainly, if the opening offered according to actual needs is not arc, then according to the shape that opening is actual
With size, adjust shape and the size of electric field balanced controls 11 adaptively, to guarantee electric field balanced controls
11 completion openings.Preferably, the material of electric field balanced controls 11 is identical with the material of vacuum chamber 1.
It should be noted that when described device includes electric field balanced controls 11, at needs sediment cleaning rubbish
Time, the lower electric field balanced controls 11 of first dismounting, the door body that then vacuum cups could be opened from vacuum chamber 1 sidewall
2 reach inside cleans, and after cleaning, then electric field balanced controls 11 is installed to the sidewall of vacuum chamber 1
On.
Technical scheme in above-mentioned the embodiment of the present application, at least has the following technical effect that or advantage:
This utility model is different by arranging small one and large one two diameters between vacuum extractor from vacuum chamber
Interface channel, in parallel between two interface channels, by the regulation of the opening and closing degree to two interface channels,
The uniformity of precipitation equipment internal gas flow can be accurately controlled, it is ensured that air-flow is uniform, reproducible, reaction
Speed is fast, can also obtain satisfied deposition effect simultaneously.
Although having been described for preferred embodiment of the present utility model, but those skilled in the art once learning
Basic creative concept, then can make other change and amendment to these embodiments.So, appended power
Profit requires to be intended to be construed to include preferred embodiment and fall into all changes of this utility model scope and repair
Change.
Obviously, those skilled in the art this utility model can be carried out various change and modification without deviating from
Spirit and scope of the present utility model.So, if these amendments of the present utility model and modification belong to this reality
Within the scope of novel claim and equivalent technologies thereof, then this utility model is also intended to comprise these changes
With including modification.
Claims (9)
1. a dual pathways diamond-like-carbon film deposition apparatus, it is characterised in that include vacuum chamber, anode
Target, cathode target, drive mechanism, vacuum extractor, the first interface channel, the second interface channel, the first tune
Joint valve, the second regulation valve and inflation introduce seat；
The upper cover of described vacuum chamber is relative with at the bottom of the room of described vacuum chamber, and the sidewall of described vacuum chamber connects described
At the bottom of upper cover and described room, to form a chamber；
Described plate target and described cathode target are arranged on the inside of described vacuum chamber, and, described plate target and institute
Stating cathode target to be oppositely arranged, described cathode target is at the bottom of the room of described vacuum chamber and between described plate target；
Described drive mechanism is connected through at the bottom of described room with described cathode target；
Described first interface channel and described second interface channel, after parallel connection, are connected on described vacuum extractor
With between described vacuum chamber, to connect described vacuum extractor and described vacuum chamber, wherein, described first even
3 times of the diameter of a diameter of described second interface channel in connection road；
Described first regulation valve is arranged at described first interface channel and described vacuum chamber；
Described second regulation valve is arranged at described second interface channel and described vacuum chamber；
Described inflation introduces seat and is arranged at the bottom of described room.
2. device as claimed in claim 1, it is characterised in that the diameter model of described second interface channel
Enclose is 60～100mm.
3. device as claimed in claim 2, it is characterised in that described second interface channel a diameter of
80mm。
4. device as claimed in claim 1, it is characterised in that also include baroceptor；
Described baroceptor is arranged at the inside of described vacuum chamber, and, described baroceptor respectively with institute
State the first regulation valve to be connected with described second regulation valve.
5. device as claimed in claim 1, it is characterised in that described first regulation valve and described second
Regulation valve is butterfly valve.
6. device as claimed in claim 1, it is characterised in that described drive mechanism is motor.
7. device as claimed in claim 1, it is characterised in that also include elevating mechanism；
Described elevating mechanism is connected with described upper cover.
8. device as claimed in claim 7, it is characterised in that described elevating mechanism is electric lift
Structure or hydraulicefficiency elevation structure.
9. device as claimed in claim 1, it is characterised in that described vacuum means is set to vacuum means
Put.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620267625.9U CN205529027U (en) | 2016-03-31 | 2016-03-31 | Binary channels diamond like carbon film deposition apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620267625.9U CN205529027U (en) | 2016-03-31 | 2016-03-31 | Binary channels diamond like carbon film deposition apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205529027U true CN205529027U (en) | 2016-08-31 |
Family
ID=57141348
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620267625.9U Expired - Fee Related CN205529027U (en) | 2016-03-31 | 2016-03-31 | Binary channels diamond like carbon film deposition apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205529027U (en) |
-
2016
- 2016-03-31 CN CN201620267625.9U patent/CN205529027U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160831 Termination date: 20210331 |
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| CF01 | Termination of patent right due to non-payment of annual fee |