CN205529003U - Adulterate with baffle control system that opens and shuts in two sources - Google Patents
Adulterate with baffle control system that opens and shuts in two sources Download PDFInfo
- Publication number
- CN205529003U CN205529003U CN201620114856.6U CN201620114856U CN205529003U CN 205529003 U CN205529003 U CN 205529003U CN 201620114856 U CN201620114856 U CN 201620114856U CN 205529003 U CN205529003 U CN 205529003U
- Authority
- CN
- China
- Prior art keywords
- baffle plate
- connecting rod
- control system
- beam arm
- evaporation source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses an adulterate with baffle control system that opens and shuts in two sources, including the evaporation source clamping ring and with the evaporation source clamping ring forms the circular baffle that the cooperation is connected, the system still includes crank link mechanism and xarm roof beam, the both ends of xarm roof beam respectively with double -phase neighbour circular baffle is articulated, the xarm roof beam with crank link mechanism fixed connection, last being equipped with of crank link mechanism is used for the drive linear motion's pivot is followed to the xarm roof beam, rotatory and the drive of pivot reciprocating motion is made to the xarm roof beam, makes two circular baffle is simultaneously rather than the correspondence the evaporation source clamping ring is realized opening and shutting. The utility model provides a current organic electroluminescence deposit system has improved the stability of two sources doping carrying out two sources baffle that in -process that the dual component adulterateed exists non -synchronous problem that opens and shuts.
Description
Technical field
This utility model includes electroluminescent material application, is specifically related to a kind of double source doping
By baffle plate folding control system, for organic electroluminescent depositing system, improve the stability of doping.
Background technology
The deposition of electroluminescent organic material is mainly carried out in vacuum chamber, and this mode can
Composition and the ratio that material deposits is accurately controlled under the influence of not by atmospheric environment and impurity.Organic
Electroluminescent material mainly by the high-purity source material being positioned in evaporation source after being heated to uniform temperature
Evaporation obtains.
One size big plate washer more than substrate can be installed in general chamber in the middle of substrate and evaporation source,
Meanwhile, between big plate washer and evaporation source, corresponding each evaporation source can install one rotatable little
Baffle plate, its size is more than evaporation source opening.Big baffle plate and small front apron are respectively provided with the work stoping material to pass through
With.Wherein, big baffle plate is for stoping the material in all evapn source deposition on substrate, and small front apron
While stoping the most corresponding evaporation source material to pass through, it is also with the baffle plate that folding simultaneously is different,
Reach the purpose that multiple material doping is steamed altogether.
Traditional small front apron mostly is refractory metal material and processes, the most single circular fan shape,
Press close to evaporation source opening, control can reduce while material passes through the loss of evaporation source heat.
Utilize double source carry out material doped in the case of, owing to material is during steaming, evaporate
Particle typically move along a straight line, in order to improve uniformity and the stability of doping, be generally doped
Bi-material can be placed in adjacent two evaporation source.
Need to open the small front apron in each source in the doping incipient stage, evaporation rate is adjusted, due to
Two baffle plates all there are differences on manual control and automatic reaction, can be greatly prolonged the time of rate stabilization,
Cause the waste of material；Closing process revolves due to the artificial priority difference closing baffle plate and steering spindle
Rotational speed rate is different, can cause asynchronous in closing process of two baffle plates equally so that one-component goes out
The phenomenon of existing excess, impact doping effect.
Utility model content
Therefore, this utility model is carrying out bi-component to solve current organic electroluminescent depositing system
The double source nonsynchronous problem of baffle plate folding existed during doping, improves the stability of double source doping,
This utility model provides a kind of double source and is doped with baffle plate folding control system.
Described technical scheme is as follows:
A kind of double source is doped with baffle plate folding control system, including evaporation source pressure ring and with described evaporation source
Pressure ring forms the circular baffle plate being connected, it is characterised in that described system also includes crank connecting link machine
Structure and beam arm, adjacent with the two respectively described circular baffle plate in the two ends of described beam arm is hinged, described
Beam arm is fixing with described toggle to be connected, and described toggle is provided with for driving
The rotating shaft that described beam arm moves along a straight line, described rotating shaft rotates and drives described beam arm to make reciprocal shifting
Dynamic, the described evaporation source pressure ring making circular baffle plate described in two the most corresponding realizes folding.
Described evaporation source pressure ring is provided with direction recess, and the lower surface of described circular baffle plate is provided with described
Direction recess forms the sliding guide rail joining connection.
The described guide rail degree of depth is more than the degree of depth of described direction recess, and its width is less than described direction recess
Groove width.
Described direction recess runs through the center of described evaporation source pressure ring, and described guide rail is along described circular baffle plate
Diametric(al) is arranged.
Described toggle includes first connecting rod and second connecting rod, one end of described first connecting rod with
Described rotating shaft is detachably fixed one end of connection, the other end of described first connecting rod and described second connecting rod
Being rotatably connected, the other end of described second connecting rod is detachably fixed with the middle part of described beam arm and is connected.
Described beam arm is the non-twisted structure of V-arrangement, the line at its both ends and the fortune of described beam arm
Dynamic direction is vertical setting.
Described toggle (3) meets relational expression: L=b=R1+R3、R3>R2>R1、cosα
=(2a2-b2)/2a2；
Wherein: the distance run when L is described circular baffle plate folding；
B is the length of second connecting rod；
A is the length of first connecting rod；
R1And R2Inside and outside radius for evaporation source pressure ring；
R3For circular baffle plate radius, α is the rotating shaft anglec of rotation.
Described evaporation source pressure ring is T-shaped annulus, and described direction recess is positioned at T-shaped circular planes, and its
The centrage midpoint by T-shaped annulus.
Described beam arm arranges the top with described toggle, with described second connecting rod in the middle part of it
Free end be detachably fixed connection by steady pin.
The drive end of described first connecting rod with the collar of fastening screw, fixing for described rotating shaft,
The free end of described second connecting rod is provided with retainer ring, and on described beam arm, the insertion of steady pin is fixed.
Technical solutions of the utility model, have the advantage that
A kind of double source the most provided by the utility model is doped with baffle plate folding control system, for Organic Electricity
The folding of photoluminescence depositing system evaporation source controls, and is driven by toggle and is positioned at beam arm two ends
Circular baffle plate move back and forth along straight line, thus realize synchronous on-off to adjacent two baffle plates, it is to avoid
There is the phenomenon of excess in one-component, improves the stability of double source doping.
B. this utility model has the direction recess that cross section is rectangle on the upper end platform of evaporation source pressure ring,
Circular baffle plate is that whole evaporation source can be covered with the guide rail matched with direction recess, baffle plate area in lower end,
During toggle drives beam arm to move, circular baffle plate moves along direction recess, logical
Cross V-type beam arm two adjacent circular baffle plate are attached, strengthen structural stability and realize two circles
Opening and closing while baffle plate；While the first connecting rod being connected in rotating shaft provides baffle plate folding power, also carry
The high stability of system.
Circular baffle plate the most of the present utility model and evaporation source pressure ring are apart from minimum, it is possible to effectively play steaming
Rise the effect being incubated and prevent material from overflowing.
Baffle plate can be risen while connecting two adjacent screen by V-type beam arm the most described in the utility model
To supporting role and gearing, connecting relative to coilable crank, this utility model is more stable；
By using slot-and-crank drive mode, compared to the transmission that is rigidly connected, it is possible in limited cavity
Move while realizing folk art term plate.
Accompanying drawing explanation
In order to be illustrated more clearly that this utility model detailed description of the invention or technical side of the prior art
Case, will make simply the accompanying drawing used required in detailed description of the invention or description of the prior art below
Introduce, it should be apparent that, the accompanying drawing in describing below is embodiments more of the present utility model, right
From the point of view of those of ordinary skill in the art, on the premise of not paying creative work, it is also possible to according to
These accompanying drawings obtain other accompanying drawing.
Fig. 1 is the planar structure schematic diagram that double source provided by the utility model is doped with baffle plate；
Fig. 2 is the Fig. 1 left view when baffle plate open mode；
Fig. 3 is the assembling front view of T-shaped pressure ring, baffle plate and V-type beam arm；
Fig. 4 is T-shaped pressure ring, baffle plate and the assembling plan view of V-type beam arm；
Fig. 5 is the view under folding condition of toggle；
Fig. 6 is the left view of toggle；
Fig. 7 is the lateral plan of evaporation source pressure ring in Fig. 1；
Fig. 8 is the lateral plan of circular baffle plate in Fig. 1.
In figure: 1-evaporation source pressure ring；2-circular baffle plate；3-toggle, 31-first connecting rod,
32-second connecting rod, 33-guide post；4-beam arm；5-direction recess；6-guide rail；The 7-collar；8-
Retainer ring；9-rotating shaft；10-steady pin.
Detailed description of the invention
Below in conjunction with accompanying drawing, the technical solution of the utility model is clearly and completely described, aobvious
So, described embodiment is a part of embodiment of this utility model rather than whole embodiments.
Based on the embodiment in this utility model, those of ordinary skill in the art are not making creative work
The every other embodiment obtained under premise, broadly falls into the scope of this utility model protection.
As depicted in figs. 1 and 2, this utility model provides a kind of double source and is doped with baffle plate folding control
System, forms, including evaporation source pressure ring 1 with evaporation source pressure ring 1, the circular baffle plate 2 being connected, is
System also includes toggle 3 and beam arm 4, the circle that the two ends of beam arm 4 are adjacent with two respectively
Baffle plate 2 is hinged, and beam arm 4 is fixing with toggle 3 to be connected, and toggle 3 sets
Having the rotating shaft 9 for driving beam arm 4 to move along a straight line, rotating shaft 9 rotates and to drive beam arm 4 to make past
Multiple mobile, the evaporation source pressure ring 1 making two circular baffle plate 2 the most corresponding realizes folding, it is achieved that
The synchronous on-off of adjacent two circular baffle plate 2, it is to avoid the phenomenon of excess occurs in one-component, improves
The stability of double source doping.
In order to improve the accurate folding between circular baffle plate 2 and evaporation source pressure ring 1, such as Fig. 7 and Fig. 8 institute
Show, evaporation source pressure ring 1 be provided with direction recess 5, the lower surface of circular baffle plate 2 be provided with guide recessed
Groove 5 forms the sliding guide rail 6 joining connection.Under the effect of toggle 3, drive circular baffle plate 2
Move with the direction that coordinates of direction recess 5 along guide rail 6, wherein combine Fig. 2 and Fig. 3, circular baffle plate
The center line of guide rail on 26 and the direction recess 5 of evaporation source pressure ring 1 all by circular baffle plate 2 with evaporate
The midpoint of source pressure ring 1, guide rail 6 height is more than the degree of depth of direction recess 5, the greatest length of guide rail 6
For the diameter of circular baffle plate 2, the greatest length of direction recess 5 is the diameter of evaporation source pressure ring 1, leads
Width to groove 5 should be slightly bigger than the width of guide rail 6.Wherein two adjacent screen 2 are through V-type beam arm 4
Connecting, constrain in the direction recess 5 of evaporation source pressure ring 1, anglec of rotation α of first connecting rod 31 is also
Promote V-type beam arm 4, drive circular baffle plate 2 to move along direction recess 5 direction, it is achieved two adjacent circles
Folding while shape baffle plate 2.
Toggle 3 therein as shown in Figure 5 and Figure 6, connects including first connecting rod 31 and second
Bar 32, one end of first connecting rod 31 is detachably fixed with rotating shaft 9 and is connected, another of first connecting rod 31
End is rotatably connected with one end of second connecting rod 32, in the other end of second connecting rod 32 and beam arm 4
Portion is detachably fixed connection.The wherein non-twisted structure of beam arm 4 preferably V-arrangement, as shown in Figure 4,
The line at its both ends is vertical setting with the direction of motion of beam arm 4.
Toggle 3 therein meets relational expression: L=b=R1+R3、R3>R2>R1、cosα
=(2a2-b2)/2a2；
Wherein: the distance run when L is described circular baffle plate folding；
B is the length of second connecting rod；
A is the length of first connecting rod；
R1And R2Inside and outside radius for evaporation source pressure ring；
R3For circular baffle plate radius, α is the rotating shaft anglec of rotation.
The L of baffle plate move distance shown in Fig. 1 meets L=b=R1+R3, can be seen that circular baffle plate in conjunction with Fig. 2
2 in motor process, and baffle plate 2 and evaporation source pressure ring 1 are in interlocking pattern all the time, enhance structure
Stability.
In closed condition, circular baffle plate 2 is perpendicular to horizontal plane with the midpoint line of evaporation source pressure ring 1.
Greatest length is reached time at first connecting rod 31 and second connecting rod 32 on the same line, therefore,
First connecting rod 31 should select the initial angle installed according to the anglec of rotation of rotating shaft, to the greatest extent in installation process
The possible anglec of rotation α anglec of rotation equal to rotating shaft making first connecting rod 31.
Such as Fig. 5, V-type beam arm 4 is connected by pin-pore structure with second connecting rod 32, is ensureing even
Ensure that the activity performance of connection while connecing intensity, and in this structure toggle 3 under, V
Type beam arm 4 the most effectively enhances the stability of V-type beam arm 4 in upper structure.Meanwhile, for
Ensure that toggle 3 will not be affected by V-type beam arm 4, such as Fig. 2 in motor process
Shown in, the height of V-type beam arm 4 should be not less than the maximum height at toggle 3 place.
Connecting rod shown in Fig. 1-4 all can use circle or boxed rod to be attached.
All fitment material all should use heating resisting metal to be processed, with produce during adapting to evaporation
Heat.Meanwhile, circular baffle plate 2 and evaporation source pressure ring 1 more preferably use one cutting technique to carry out accurately
Processing, toggle 3 should select the metal material of high intensity, high-wearing feature further.
Evaporation source pressure ring 1 in this utility model is T-shaped annulus, and direction recess 5 is positioned at T-shaped annulus
Plane, and the midpoint that its centrage is by T-shaped annulus.Beam arm 4 is arranged and toggle 3
Top, be detachably fixed by steady pin 10 with the free end of second connecting rod 32 in the middle part of it and be connected.
It is further preferred that first connecting rod 31 drive end with fastening screw the collar 7, be used for
Fixing of rotating shaft 9, the free end of second connecting rod 32 is provided with retainer ring 8, fixing on beam arm 4
The insertion of pin 10 is fixed.
Obviously, above-described embodiment is only for clearly demonstrating example, and not to embodiment party
The restriction of formula.For those of ordinary skill in the field, the most also may be used
To make other changes in different forms.Here without also all of embodiment being given
With exhaustive.And the obvious change thus extended out or variation are created still in this utility model
Protection domain among.
Claims (10)
1. double source is doped with a baffle plate folding control system, including evaporation source pressure ring (1) and with institute
State evaporation source pressure ring (1) and form the circular baffle plate (2) being connected, it is characterised in that described system
Also include toggle (3) and beam arm (4), the two ends of described beam arm (4) respectively with
Two adjacent described circular baffle plate (2) are hinged, described beam arm (4) and described toggle
(3) fixing connection, described toggle (3) is provided with for driving described beam arm (4)
The rotating shaft (9) moved along a straight line；Described rotating shaft (9) rotates and drives described beam arm (4) to make past
Multiple mobile, the described evaporation source pressure ring (1) making circular baffle plate described in two (2) the most corresponding is real
Existing folding.
Double source the most according to claim 1 is doped with baffle plate folding control system, it is characterised in that
Described evaporation source pressure ring (1) is provided with direction recess (5), the lower surface of described circular baffle plate (2)
It is provided with to be formed to slide with described direction recess (5) and joins the guide rail (6) being connected.
Double source the most according to claim 2 is doped with baffle plate folding control system, it is characterised in that
Described guide rail (6) degree of depth is less than described guiding more than the degree of depth of described direction recess (5), its width
The groove width of groove (5).
Double source the most according to claim 3 is doped with baffle plate folding control system, it is characterised in that
Described direction recess (5) runs through the center of described evaporation source pressure ring (1), and described guide rail (6) is along institute
State circular baffle plate (2) diametric(al) to arrange.
Double source the most according to claim 1 is doped with baffle plate folding control system, it is characterised in that
Described toggle (3) includes first connecting rod (31) and second connecting rod (32), described first
One end of connecting rod (31) is detachably fixed with described rotating shaft (9) and is connected, described first connecting rod (31)
The other end be rotatably connected with one end of described second connecting rod (32), described second connecting rod (32)
The other end is detachably fixed with the middle part of described beam arm (4) and is connected.
Double source the most according to claim 5 is doped with baffle plate folding control system, it is characterised in that
Described beam arm (4) is the non-twisted structure of V-arrangement, the line at its both ends and described beam arm (4)
The direction of motion be vertical setting.
Double source the most according to claim 6 is doped with baffle plate folding control system, it is characterised in that
Described toggle (3) meets relational expression: L=b=R1+R3、R3>R2>R1, cos α=(2a2-b2)/2a2；
Wherein: the distance run when L is described circular baffle plate folding；
B is the length of second connecting rod；
A is the length of first connecting rod；
R1And R2Inside and outside radius for evaporation source pressure ring；
R3For circular baffle plate radius, α is the rotating shaft anglec of rotation.
8. being doped with baffle plate folding control system according to the arbitrary described double source of claim 1-7, it is special
Levying and be, described evaporation source pressure ring (1) is T-shaped annulus, and described direction recess (5) is positioned at T-shaped
Circular planes, and the midpoint that its centrage is by T-shaped annulus.
Double source the most according to claim 8 is doped with baffle plate folding control system, it is characterised in that
Described beam arm (4) is arranged and the top of described toggle (3), with described the in the middle part of it
The free end of two connecting rods (32) is detachably fixed connection by steady pin (10).
Double source the most according to claim 9 is doped with baffle plate folding control system, and its feature exists
In, the drive end of described first connecting rod (31) is with the collar (7) of fastening screw, for described turn
Fixing of axle (9), the free end of described second connecting rod (32) is provided with retainer ring (8), for described
The insertion of the upper steady pin (10) of beam arm (4) is fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620114856.6U CN205529003U (en) | 2016-02-04 | 2016-02-04 | Adulterate with baffle control system that opens and shuts in two sources |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620114856.6U CN205529003U (en) | 2016-02-04 | 2016-02-04 | Adulterate with baffle control system that opens and shuts in two sources |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205529003U true CN205529003U (en) | 2016-08-31 |
Family
ID=56777122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620114856.6U Active CN205529003U (en) | 2016-02-04 | 2016-02-04 | Adulterate with baffle control system that opens and shuts in two sources |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205529003U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109252139A (en) * | 2018-10-25 | 2019-01-22 | 北京空间机电研究所 | A kind of coating apparatus and film plating process of optical element |
-
2016
- 2016-02-04 CN CN201620114856.6U patent/CN205529003U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109252139A (en) * | 2018-10-25 | 2019-01-22 | 北京空间机电研究所 | A kind of coating apparatus and film plating process of optical element |
| CN109252139B (en) * | 2018-10-25 | 2020-09-18 | 北京空间机电研究所 | Coating device and coating method for optical element |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107352043B (en) | A kind of six axis posture adjustment platforms for the installation of aircraft engine complete machine | |
| CN106271358B (en) | A kind of fixing device in short pipe fitting laser cutting process | |
| CN207062370U (en) | A kind of multi-arc ion coating pivoted frame and multi-arc ion coating film device | |
| CN208232581U (en) | A kind of printing machine that roller height can be adjusted | |
| CN205529003U (en) | Adulterate with baffle control system that opens and shuts in two sources | |
| CN108163098A (en) | A kind of automotive four-door hinge installation harness and its application method | |
| CN108857179B (en) | Online intelligent repair welding machine for large gear | |
| CN105834550B (en) | A kind of underwater melt pole electrical arc cutting high-speed camera observation device and its application method | |
| CN204959430U (en) | Wool fabric evaporates location structure who scalds machine | |
| CN108636709B (en) | A kind of LED pipe device for coating | |
| CN208167978U (en) | A kind of height-adjustable Intelligent balcony expansion plate mechanism | |
| CN207448307U (en) | A kind of outer surface is the fixed mechanism of elliptical shape product | |
| CN204174265U (en) | A kind of overturning drive device realizing flaps automatically under vacuum state | |
| CN207611194U (en) | A kind of 3 D laser scanning head | |
| CN105803657A (en) | Warp knitting machine looping device | |
| CN203034086U (en) | Laser beam automatic shifting control device | |
| CN207709272U (en) | A kind of reduction furnace tube inner-wall spraying manipulator | |
| CN106285494B (en) | A kind of boring spraying dust-collecting robot of down-the-hole drill | |
| CN205855554U (en) | A kind of plaiter | |
| CN208294553U (en) | A kind of spraying machine for open coal mine based on Internet of Things | |
| CN105088228B (en) | Water heater liner automatic on-line machine for enamelling | |
| CN208177723U (en) | Seven axis oil-injection machines of intelligence | |
| CN211084768U (en) | Adjusting device for air outlet movement | |
| CN208249687U (en) | A kind of container spreader cam mechanism | |
| CN208529988U (en) | A kind of rotating laser marking machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170220 Address after: 100192 Beijing city Haidian District West Road No. 66 small Zhongguancun Dongsheng Technology Park North Territory D District No. 2 Building 3 layer Patentee after: BEIJING ETERNAL MATERIAL TECHNOLOGY CO., LTD. Address before: 065500 Langfang new industrial demonstration zone, Langfang, Hebei, China Patentee before: GU'AN ETERNAL MATERIAL TECHNOLOGY CO., LTD. |