CN205501413U - Work piece clamping tool structure is exempted from to plate by vertical barreled work rest step of coating machine - Google Patents
Work piece clamping tool structure is exempted from to plate by vertical barreled work rest step of coating machine Download PDFInfo
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- CN205501413U CN205501413U CN201620264318.5U CN201620264318U CN205501413U CN 205501413 U CN205501413 U CN 205501413U CN 201620264318 U CN201620264318 U CN 201620264318U CN 205501413 U CN205501413 U CN 205501413U
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Abstract
The utility model provides a work piece clamping tool structure is exempted from to plate by vertical barreled work rest step of coating machine, include: vertical barreled work rest and set up in anchor clamps panel on the work rest, be equipped with embedded through -hole on the anchor clamps panel, embedded through -hole is used for the installation to wait to plate the work piece. Embedded through -hole have the front subtotal with openly partial relative back part. Wait to plate the work piece treat the coating film face to the positive part of embedded through -hole, the recess of taking the step is set for to embedded through -hole back part. Embedded through -hole is big or small, the shape profile needs with wait to plate the work piece size, shape profile height is identical, step width w and high h need and wait to plate the work piece to exempt from to plate partial width and highly identical. The utility model provides a structure through setting up the recess of taking the step in anchor clamps panel embedded through -hole back part, conveniently waits to plate the work piece card, realizes the step and exempts from to plate the function, and simple structure, convenient operation, low price, easy to maintain.
Description
Technical field
This utility model relates to coating technique field, particularly relates to a kind of coater vertical barreled work rest step and exempts to plate clamping workpiece jig structure.
Background technology
Magnetron sputtering is a part critically important in physical vapour deposition (PVD) (Physical Vapor Deposition, PVD).Magnetron sputtering plating is to use magnetically confined electronics, uses glow discharge technique, and argon ionization is produced argon ion, and argon ion accelerates bombarding cathode under the effect of electromagnetic field, makes cathode material be sputtered and gets off to deposit to the method that surface of the work forms film.Compared with traditional vacuum evaporation, sputter coating has lot of advantages, and the adhesive force such as film layer and matrix is strong, can produce the thin film of high-melting-point substances easily, and coating process substrate temperature is low, and the composition of thin film is easily controlled.
The magnetron sputtering method grown up now achieve high speed, low temperature, low damage and be widely used in the various fields such as building materials, decoration, optics, anticorrosion, tool and mould strengthening, integrated circuit.Utilize magnetron sputtering technique to carry out the function films such as photoelectricity, photo-thermal, magnetics, superconduction, medium, catalysis and be prepared as current hotspot.Along with plated film develops in the infiltration of all trades and professions, the size of workpiece to be plated, shape profile, performance requirement are different.In order to workpiece to be plated can be well fixed in district to be plated, ensure corresponding production capacity simultaneously, need to develop the fixture of various difformity, difference in functionality.
In existing magnetic-controlled sputtering coating equipment, some place of workpiece is not protected by fixture, causes the product after plated film, in addition it is also necessary to externally side stage rank carry out strip process.Wasting time and energy, cost of idleness the most likely damages product, reduces coated product quality.
Summary of the invention
In order to solve the problems referred to above, this utility model provides a kind of clamping jig structure, exempts from plating function realizing the step of workpiece to be plated.
The technical solution of the utility model is as follows: this utility model provides a kind of coater vertical barreled work rest step to exempt to plate clamping workpiece jig structure, including: vertical barreled work rest and be arranged at the fixture sheet material on described vertical barreled work rest, described fixture sheet material is provided with interior embedded hole, and described interior embedded hole is used for installing workpiece to be plated.Described interior embedded hole includes front portion and the back portion relative with described front portion.Described workpiece to be plated is to be coated facing to described interior embedded hole front portion, and described interior embedded hole back portion sets groove with the level.
Described embedded hole size, shape profile and workpiece size to be plated, contour shape are the most identical, and both gaps are not more than 0.1 mm；Described step width w and height h need to exempt from workpiece to be plated plate partial width and highly match.
Further, the material of described fixture sheet material is plastic cement, glass or metal.
Further, described embedded shape of through holes is circular.
Further, described embedded hole size, shape profile and described step width w and height h need to workpiece size to be plated, shape, exempt to plate partial width and highly matching, therebetween gap can not be more than 0.1mm, otherwise magnetron sputtering plating coating materials will exempt from plating part around being mapped to workpiece to be plated, it is impossible to step is fully achieved and exempts from plating function.
Further, described workpiece to be plated snaps in step and exempts to plate in clamping workpiece tool, the coated floor height molecular compound thin film in rear, then is placed on vertical barreled work rest by high temperature resistant cohesive material, it is to avoid in coating process, workpiece drops.
Using such scheme, the coater vertical barreled work rest step that this utility model provides exempts to plate clamping workpiece jig structure, and repeatable utilization, not by space, time restriction；Workpiece local location to be plated can be realized and exempt from plating function.Simultaneously this structure be easily maintained, simple in construction, with low cost, easy to use.
Accompanying drawing explanation
Fig. 1 is that coater vertical barreled work rest step exempts to plate clamping workpiece jig structure schematic diagram；
In figure, 11 is vertical barreled work rest, and 12 is fixture sheet material, and 13 is the interior embedded hole on fixture sheet material.
Fig. 2 is the interior embedded hole generalized section on fixture sheet material；
In figure, 21 is groove with the level；22 is workpiece to be plated；23 is face to be plated.
Detailed description of the invention
For the ease of being better understood from, the utility model is described in further detail with the following Examples.
See Fig. 1, Fig. 2, a kind of coater vertical barreled work rest step exempts to plate clamping workpiece jig structure, its critical piece includes vertical barreled work rest 11 and is arranged at the fixture sheet material 12 on described vertical barreled work rest 11, described fixture sheet material 12 is provided with interior embedded hole 13, and described interior embedded hole 13 is used for installing workpiece 22 to be plated.Described interior embedded hole 13 includes front portion and the back portion relative with described front portion.Described workpiece to be plated 22 face to be plated 23 is towards described interior embedded hole 13 front portion, and described interior embedded hole 13 back portion sets groove 21 with the level.Described groove 21, in order to block workpiece 22 to be plated, is allowed to not drop to fixture sheet material 12 frontal.After workpiece 22 to be plated snaps in groove 21, one layer of PET film will be coated with overleaf, it is to avoid it comes off in coating process；Then fixture sheet material 12 is fixed on vertical barreled work rest 11 by high-temp glue, is placed in vacuum chamber.Described interior embedded hole 13 size, shape profile need to match with workpiece 22 size to be plated, shape profile elevations h, and gap therebetween can not be more than 0.1 mm；Described step width w and height h need to exempt from workpiece 22 to be plated plate partial width and highly match, and otherwise magnetron sputtering plating coating materials will exempt from plating part around being mapped to workpiece 22 to be plated, it is impossible to step is fully achieved and exempts from plating function.
In sum, this utility model provides a kind of coater vertical barreled work rest step to exempt to plate clamping workpiece jig structure, by arranging interior embedded hole on fixture sheet material, and groove with the level is set at interior embedded hole back portion, workpiece to be plated is fixed on fixture sheet material, the plating of exempting from of workpiece to be plated is partially submerged into interior embedded hole, it is possible to achieve step part exempts from the function of plating, saves the trouble of strip.
Finally should be noted that; above example is merely to illustrate the technical solution of the utility model rather than restriction to this utility model protection domain; although this utility model being explained in detail with reference to preferred embodiment; it will be understood by those within the art that; the technical solution of the utility model can be modified or equivalent, without deviating from the spirit and scope of technical solutions of the utility model.
Claims (7)
1. a coater vertical barreled work rest step exempts to plate clamping workpiece jig structure, it is characterised in that:
Vertical barreled work rest and be arranged at the fixture sheet material on described vertical barreled work rest, described fixture sheet material is provided with interior embedded hole, and described interior embedded hole is used for installing workpiece to be plated.
Coater the most according to claim 1 vertical barreled work rest step exempts to plate clamping workpiece jig structure, it is characterised in that: the material of described fixture sheet material is plastics, glass or metal.
Coater the most according to claim 1 vertical barreled work rest step exempts to plate clamping workpiece jig structure, it is characterised in that: described embedded hole size, contour shape need to be the most identical with workpiece size to be plated, contour shape, and both gaps are not more than 0.1 mm.
Coater the most according to claim 3 vertical barreled work rest step exempts to plate clamping workpiece jig structure, it is characterised in that: described interior embedded hole is circular.
Coater the most according to claim 1 vertical barreled work rest step exempts to plate clamping workpiece jig structure, it is characterized in that: described interior embedded hole includes that front portion and the back portion relative with described front portion, described interior embedded hole back portion are provided with groove with the level.
Coater the most according to claim 5 vertical barreled work rest step exempts to plate clamping workpiece jig structure, is further characterized in that: described interior embedded hole back portion is provided with the width w and height h of the groove of step and need to exempt from workpiece to be plated plate partial width and highly match.
Coater the most according to claim 5 vertical barreled work rest step exempts to plate clamping workpiece jig structure, is further characterized in that: described workpiece to be plated is to be coated facing to described interior embedded hole front portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620264318.5U CN205501413U (en) | 2016-04-01 | 2016-04-01 | Work piece clamping tool structure is exempted from to plate by vertical barreled work rest step of coating machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620264318.5U CN205501413U (en) | 2016-04-01 | 2016-04-01 | Work piece clamping tool structure is exempted from to plate by vertical barreled work rest step of coating machine |
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| CN205501413U true CN205501413U (en) | 2016-08-24 |
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| CN201620264318.5U Active CN205501413U (en) | 2016-04-01 | 2016-04-01 | Work piece clamping tool structure is exempted from to plate by vertical barreled work rest step of coating machine |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112458414A (en) * | 2020-10-30 | 2021-03-09 | 湘潭宏大真空技术股份有限公司 | Sputtering film coating machine under magnetic control |
| CN114150280A (en) * | 2021-10-26 | 2022-03-08 | 南阳清水科技有限公司 | Automatic turnover device for drum type magnetron sputtering machine |
| CN115976495A (en) * | 2022-12-19 | 2023-04-18 | 杭州邦齐州科技有限公司 | ALD coating clamp for micro-nano grating cathode assembly |
-
2016
- 2016-04-01 CN CN201620264318.5U patent/CN205501413U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112458414A (en) * | 2020-10-30 | 2021-03-09 | 湘潭宏大真空技术股份有限公司 | Sputtering film coating machine under magnetic control |
| CN114150280A (en) * | 2021-10-26 | 2022-03-08 | 南阳清水科技有限公司 | Automatic turnover device for drum type magnetron sputtering machine |
| CN114150280B (en) * | 2021-10-26 | 2023-09-29 | 南阳清水科技有限公司 | Automatic overturning device for drum type magnetron sputtering machine |
| CN115976495A (en) * | 2022-12-19 | 2023-04-18 | 杭州邦齐州科技有限公司 | ALD coating clamp for micro-nano grating cathode assembly |
| CN115976495B (en) * | 2022-12-19 | 2024-04-12 | 杭州邦齐州科技有限公司 | ALD (atomic layer deposition) coating fixture for micro-nano grating cathode assembly |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210106 Address after: 518000 101, No.5, Nuclear Power Industrial Park, Fumin community, Fucheng street, Longhua District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Sanbundle Coating Technology Co.,Ltd. Address before: 518000 a, 6th floor, No.6 workshop, Zhongsheng Science Park, Ganli Road, shanglilang community, Nanwan street, Longgang District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN SUNHIGH TECHNOLOGY Co.,Ltd. |