CN205491150U

CN205491150U - MEMS (Micro -electromechanical system) microphone

Info

Publication number: CN205491150U
Application number: CN201620082720.1U
Authority: CN
Inventors: 张金宇
Original assignee: AAC Acoustic Technologies Shenzhen Co Ltd
Current assignee: AAC Technologies Holdings Shenzhen Co Ltd
Priority date: 2016-01-27
Filing date: 2016-01-27
Publication date: 2016-08-17
Anticipated expiration: 2026-01-27

Abstract

The utility model provides a MEMS (Micro -electromechanical system) microphone, movable polar plate and fixed polar plate on establishing the notched basement and place the basement in, relative and the interval setting of movable polar plate and fixed polar plate, be equipped with antiseized arch between movable polar plate and the fixed polar plate, antiseized arch includes a plurality of not bellyings of co -altitude that have. The utility model discloses an among the MEMS (Micro -electromechanical system) microphone, it can avoid to have not the bellying of co -altitude the backplate with the vibrating diaphragm bonding to processing is simple, and is antiseized effectual.

Description

MEMS microphone

[technical field]

This utility model relates to a kind of mike, concrete, relates to a kind of MEMS microphone.

[background technology]

Mobile communication technology has been rapidly developed in recent years, and consumer is increasingly using movement Communication equipment, such as portable phone, the portable phone that can surf the Net, personal digital assistant or special Other equipment that communication network communicates.

MEMS (Micro-Electro-Mechanical System, MEMS) mike is one The electric energy kind utilizing micromachining technology to make changes sound device, and it has, and volume is little, Frequency Response The features such as good, noise is low.Along with the development compact, lightening of electronic equipment, MEMS microphone quilt Apply to more and more widely on these equipment.

MEMS microphone includes vibrating diaphragm and the backboard arranged with described vibrating diaphragm relative spacing, in order to prevent two Person bonds, and the MEMS microphone in correlation technique is arranged with described between described vibrating diaphragm and described backboard Several antiseized projections of backboard bonding, several described antiseized heights of projection are equal, described antiseized convex Rising and stick area for reduction, reduce total adhesive force, the most described vibrating diaphragm and described backboard are easier to pendulum Debinding state.

When the described antiseized protruding quantity bonded is more, described backboard with described vibrating diaphragm it is possible to There is pinning phenomenon, in order to solve this technical problem, described anti-by constantly reducing in correlation technique The method of viscous protruding size reduces further sticks area, but this method difficulty of processing is big, produces Product fraction defective is high.

Therefore, it is necessary to provide a kind of new MEMS microphone to solve drawbacks described above.

[utility model content]

The purpose of this utility model is provide a kind of anti-adhesion effects good and process simple MEMS Mike Wind.

The technical solution of the utility model is as follows: a kind of MEMS microphone, including setting reeded substrate And be placed in suprabasil movable plate and fixed polar plate, described movable plate relative with fixed polar plate and Interval is arranged, and is provided with antiseized projection, described antiseized protruding bag between described movable plate and fixed polar plate Include multiple lobe with differing heights.

Preferably, described antiseized projection extends to the direction of described fixed polar plate from described movable plate.

Preferably, described antiseized projection extends to the direction of described movable plate from described fixed polar plate.

Preferably, the height of adjacent lobe differs.

Preferably, described lobe spaced set.

Preferably, multiple lobe form at least one hexagonal cells.

Preferably, described movable plate is vibrating diaphragm, and described fixed polar plate is back pole plate.

The beneficial effects of the utility model are: several the described lobe highly differed are in height Fluctuating shape is distributed between described backboard and described vibrating diaphragm, can effectively reduce described backboard and shake with described Film stick area, anti-bonding effect be substantially improved, meanwhile, the processing technique letter of described antiseized projection Single.

[accompanying drawing explanation]

Fig. 1 is the part-structure schematic diagram of this utility model MEMS microphone embodiment one；

Fig. 2 is the part-structure schematic diagram of this utility model MEMS microphone embodiment two；

[detailed description of the invention]

The utility model is described in further detail with embodiment below in conjunction with the accompanying drawings.

As it is shown in figure 1, be the structural representation of the first embodiment of this utility model MEMS microphone Figure, described MEMS microphone 100 includes the substrate 10 being provided with groove 101 and is placed in substrate 10 On movable plate 30 and fixed polar plate 20, set between described movable plate 30 and fixed polar plate 20 The support member 50 having insulation makes movable plate 30 and fixed polar plate 20 is relative and interval is arranged, described Being provided with antiseized projection between movable plate 30 and fixed polar plate 20, described antiseized projection includes multiple tool There is the lobe of differing heights.

In the present embodiment, described movable plate 30 is vibrating diaphragm, and described fixed polar plate 20 is backplane Plate, forms electric capacity between vibrating diaphragm and back pole plate, when external sound wave makes diaphragm oscillations and produces displacement, Electric capacity between vibrating diaphragm with back pole plate changes and is converted to the signal of telecommunication corresponding with acoustic signals, in It it is the function just completing acoustic-electric conversion.

Antiseized projection can extend formation from back pole plate to the direction of vibrating diaphragm, and the height of lobe refers to Lobe is extended height to the direction of vibrating diaphragm from the surface relative with vibrating diaphragm of back pole plate, in this enforcement In mode, the height of lobe has two kinds, i.e. lobe includes that first with the first height H1 is protruding 41 and there is second projection 42, H1 of the second height H2 > H2, first protruding 41 with the second projection Difference in height between 42 can be adjusted as required, and first protruding 41 and second protruding 42 interlocks Arrangement, therefore, when antiseized projection is adhered with vibrating diaphragm, due to the existence of the first projection 41, can open Under the effect of power F0, motion structure is pulled from the second projection 42 so that participate in sticking only the One projection 41, owing to the quantity of the first projection 41 reduces, total adhesive force is relatively low, and movable plate i.e. shakes Film can readily break away from the state of being adhered, it is to avoid the inefficacy that MEMS thus results in.

In the present embodiment, the height of adjacent lobe can differ, and the most adjacent first is convex Play one the second projection 42 of sandwiched between 41；In other embodiments, between adjacent lobe Height can also be identical, can be i.e. between two the first projections sandwiched several are second protruding, Or several first projections of sandwiched between two the second projections.It addition, lobe can be equidistant Arrange, it is also possible in irregular arrangement.

It addition, multiple lobe form at least one hexagonal cells, so that the rigidity of system subtracts Little for original 48%, and sensitivity can promote up to 6dB and not be adhered.

In other embodiments, antiseized projection can also from vibrating diaphragm support or oppose pole plate direction extend formed, Now, the height of lobe refers to from the surface relative with back pole plate of vibrating diaphragm to the direction of back pole plate Extended height.

As in figure 2 it is shown, the structure for the second embodiment of MEMS microphone of the present utility model is shown Being intended to, this embodiment differs only in the first embodiment, MEMS microphone 100 ＇'s Antiseized projection includes the lobe of three kinds of height, i.e. have first height H1 ＇ the first protruding 41 ＇, There are second protruding 42 ＇ of the second height H2 ＇ and there are the 3rd protruding 43 ＇ of third height H3 ＇, H1 ＇ > H2 ＇ > H3 ＇, the first protruding 41 ＇, the second protruding 42 ＇ and the 3rd protruding 43 ＇ successively between Every arrangement, certainly, in other embodiments, the first protruding 41 ＇, the second protruding 42 ＇ and Three protruding 43 ＇ can also random arrange, it addition, lobe can also have the height of more than three kinds.

The MEMS microphone that this utility model provides has the advantages that what extended height differed Several described antiseized projections are that height fluctuating shape is distributed between described backboard and described vibrating diaphragm, permissible That effectively reduces described backboard and described vibrating diaphragm sticks area, and anti-bonding effect be substantially improved, meanwhile, The processing technique of described antiseized projection is simple.Under equal anti-bonding effect, MEMS of the present utility model The processing technique difficulty of mike is lower, and product fraction defective significantly reduces.

Above-described is only embodiment of the present utility model, it should be noted here that for this area Those of ordinary skill for, without departing from this utility model create design on the premise of, it is also possible to do Go out to improve, but these belong to protection domain of the present utility model.

Claims

1. a MEMS microphone, including setting reeded substrate and being placed in suprabasil movable pole Plate and fixed polar plate, and fixed polar plate is relative and interval is arranged for described movable plate, it is characterised in that Being provided with antiseized projection between described movable plate and fixed polar plate, described antiseized projection includes multiple having The lobe of differing heights.

MEMS microphone the most according to claim 1, it is characterised in that: described antiseized projection Extend to the direction of described fixed polar plate from described movable plate.

MEMS microphone the most according to claim 1, it is characterised in that: described antiseized projection Extend to the direction of described movable plate from described fixed polar plate.

MEMS microphone the most according to claim 1, it is characterised in that: adjacent lobe Height differ.

MEMS microphone the most according to claim 1, it is characterised in that: described lobe etc. Spacing is arranged.

MEMS microphone the most according to claim 1, it is characterised in that: multiple lobe groups Become at least one hexagonal cells.

7. according to the MEMS microphone described in claim 1-6 any claim, it is characterised in that: Described movable plate is vibrating diaphragm, and described fixed polar plate is back pole plate.