CN204887464U - Anti low frequency noise's microphone monomer - Google Patents
Anti low frequency noise's microphone monomer Download PDFInfo
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- CN204887464U CN204887464U CN201520245502.0U CN201520245502U CN204887464U CN 204887464 U CN204887464 U CN 204887464U CN 201520245502 U CN201520245502 U CN 201520245502U CN 204887464 U CN204887464 U CN 204887464U
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- acoustic diaphragm
- low frequency
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- frequency noise
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- 239000000178 monomer Substances 0.000 title claims abstract description 33
- 239000000758 substrate Substances 0.000 claims description 10
- 230000010355 oscillation Effects 0.000 claims description 6
- 238000001914 filtration Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 6
- 239000003990 capacitor Substances 0.000 abstract description 4
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 230000005284 excitation Effects 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 230000005855 radiation Effects 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
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- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
The utility model relates to a speech signal processing technique field especially relates to an anti low frequency noise's microphone monomer. Including the MEMS transducer, the MEMS transducer has, an acoustic diaphragm, with the center of vibrating diaphragm sets up a first through -hole, and in the acoustic diaphragm is kept away from the position of first through -hole is provided with a plurality of second through -holes that are used for releasing stress, one with form the back electrode of a fixed interval between the acoustic diaphragm, wherein, the acoustic diaphragm with a back electrode formation plate capacitor ware, in under the state of acoustic diaphragm vibration, plate capacitor ware basis the vibrating diaphragm range of acoustic diaphragm form with the output of vibration range assorted capacitor signal. Compared with the prior art, the utility model has the advantages that: set up a first through -hole at the acoustic diaphragm center for filtering low frequency noise signal.
Description
Technical field
The utility model relates to voice process technology field, particularly relates to a kind of microphone monomer of anti-low frequency noise.
Background technology
Current, the consumer electronics product market demand sharply increases, audio input device is widely used in each electronic product, such as mobile phone, notebook computer, panel computer, camera, video camera etc., therefore needs a large amount of microphones to be integrated in these products.
The kind of microphone mainly contains two kinds in the market, and one is ECM (ElectretCondenser
Microphone, electret capacitor microphone), another kind is MEMS (MicroElectroMechanicalSystem, MEMS (micro electro mechanical system)) micro-microphone.ECM, because its volume is large, cost is high, is substituted by MEMS micro-microphone in a lot of occasion, on the same substrate the multiple microphone of accessible site, can be mutually integrated with chip.Especially the difference of volume, the back pole plate in MEMS micro-microphone and vibrating membrane also less more than 10 times than minimum ECM, therefore in recent years by domestic and international extensively investigation and application.But existing MEMS microphone comprises an acoustic diaphragm, and the backboard that relative with acoustic diaphragm, vibrating diaphragm produces different capacitances from acoustic diaphragm and exports after receiving the pressing of air, can realize voice signal being converted into the signal of telecommunication to export, but in actual use, usually (such as wind is hot-tempered to be attended by low-frequency noise signal in voice signal, car is hot-tempered), microphone is in actual radio reception process, except collecting effective voice signal, also can absorb a large amount of low frequency noise signals, but once microphone diaphragm saturated by low-frequency noise signal after, then cannot collect effective voice signal, such as people speaks in wind, wind is hot-tempered too large, make the collecting unit of microphone saturated (under namely vibrating diaphragm is in maximum amplitude state) completely, then microphone just cannot the voice signal that sends of collector.
Utility model content
For the deficiencies in the prior art, the utility model provide a kind of can the microphone monomer of anti-low frequency noise of effectively filtering low-frequency noise.
The utility model realizes above-mentioned purpose by following scheme.
A microphone monomer for anti-low frequency noise, wherein: comprise MEMS transducer, described MEMS transducer has,
One acoustic diaphragm, arranges one first through hole in the center of described vibrating diaphragm, and in described acoustic diaphragm, the position of described first through hole is provided with a plurality of the second through hole in order to discharge stress;
The back electrode of a fixed interval (FI) is formed between one and described acoustic diaphragm;
Wherein, described acoustic diaphragm and described back electrode form a plate condenser, and under the state that described acoustic diaphragm vibrates, described plate condenser forms according to the Oscillation Amplitude of described acoustic diaphragm the capacitance signal matched with described Oscillation Amplitude and exports.
The microphone monomer of above-mentioned anti-low frequency noise, wherein: also comprise,
One substrate with radio reception through hole, described radio reception through hole is just to described acoustic diaphragm; Form an acoustics ante-chamber between described acoustic diaphragm and described substrate, described acoustics ante-chamber is in order to detect high-frequency signal;
One cover plate, be fixedly connected with described substrate and cover described MEMS transducer completely, described cover plate and described back electrode form an acoustical back chamber, and the volume in described acoustical back chamber is greater than the volume of described acoustics ante-chamber, and described acoustical back chamber is in order to detect low frequency signal;
The microphone monomer of above-mentioned anti-low frequency noise, wherein: the volume of described first through hole is not more than 10% of described acoustic diaphragm volume.
The microphone monomer of above-mentioned anti-low frequency noise, wherein: a plurality of described second through hole is uniformly distributed on described acoustic diaphragm.
The microphone monomer of above-mentioned anti-low frequency noise, wherein: also comprise an asic chip, connects described MEMS transducer, in order to receive the described capacitance signal that described MEMS transducer exports, and does analyzing and processing to described capacitance signal, forms a processing signals and export.
The microphone monomer of above-mentioned anti-low frequency noise, wherein: the quantity of described second through hole is eight.
The microphone monomer of above-mentioned anti-low frequency noise, wherein: the quantity of described second through hole is six.
The microphone monomer of above-mentioned anti-low frequency noise, wherein: described acoustic diaphragm is thin and resilient acoustics diaphragm.
The microphone monomer of above-mentioned anti-low frequency noise, wherein: the thickness of described acoustic diaphragm is 500nm.
Compared with prior art, the utility model has the advantages that:
One first through hole is set at acoustic diaphragm center, in order to filtering low frequency noise signals.The wavelength of low frequency noise signals is longer and stroke is longer, forms acoustic resonance and produce elastic strain when acoustic diaphragm receives low frequency signal excitation, and the area of acoustic diaphragm vibration is comparatively large, often centered by acoustic diaphragm center to external radiation.Acoustic diaphragm center is provided with the first through hole, the elastic strain that the first through hole release low frequency signal excitation produces, the sensitivity of acoustic diaphragm to low frequency signal can be reduced, and then the ability of its filtering low frequency signal can be realized.
Accompanying drawing explanation
Fig. 1 is the structural representation of the middle acoustic diaphragm in the microphone monomer of the anti-low frequency noise of the utility model;
Fig. 2 is the structural representation of the microphone monomer of anti-low frequency noise in the utility model.
Embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail, but not as restriction of the present utility model.
Below in conjunction with the accompanying drawing in the utility model embodiment, be clearly and completely described the technical scheme in the utility model embodiment, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiments.Based on the embodiment in the utility model, the every other embodiment that those of ordinary skill in the art obtain under the prerequisite of not making creative work, all belongs to the scope of the utility model protection.
It should be noted that, when not conflicting, the embodiment in the utility model and the feature in embodiment can combine mutually.
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail, but not as restriction of the present utility model.
As shown in Figure 1, a kind of microphone monomer of anti-low frequency noise, wherein: comprise MEMS transducer 1, described MEMS transducer 1 has,
One acoustic diaphragm 11, arranges one first through hole 111 with the center of described vibrating diaphragm, and in described acoustic diaphragm 11, the position of described first through hole 111 is provided with a plurality of the second through hole 112 in order to discharge stress;
The back electrode 12 of a fixed interval (FI) is formed between one and described acoustic diaphragm 11;
Wherein, described acoustic diaphragm 11 forms a plate condenser 13 with described back electrode 12, under the state that described acoustic diaphragm 11 vibrates, described plate condenser 13 forms according to the Oscillation Amplitude of described acoustic diaphragm 11 capacitance signal matched with described Oscillation Amplitude and exports.
Operation principle of the present utility model is: described acoustic diaphragm 11 forms a plate condenser 13 with described back electrode 12, voice signal produces vibrations in transmitting procedure, voice signal is converted into acoustic signals, the vibration compressing acoustic diaphragm 11 of sound wave vibrates, the vibration of acoustic diaphragm 11 makes the spatial joint clearance between acoustic diaphragm 11 and back electrode 12 change, and then the capacitance signal between the described plate condenser 13 that formed between acoustic diaphragm 11 and back electrode 12 is changed, described plate condenser 13 forms the capacitance signal matched with described voice signal and exports.Thus achieve process sound being converted into the signal of telecommunication.
Acoustic diaphragm 11 is provided with a plurality of second through hole 112, is used under acoustic diaphragm 11 vibrational state, release acoustic diaphragm 11 either side to elastic strain power.Second through hole 112 also can act on voice guide hole simultaneously, reduces the airflow impedances produced in air gap, improves high-frequency sensitivity.
At acoustic diaphragm 11 center, one first through hole 111 is set, in order to filtering low frequency noise signals.The wavelength of low frequency noise signals is longer and stroke is longer, forms acoustic resonance and produce elastic strain when acoustic diaphragm 11 receives low frequency signal excitation, and the area that acoustic diaphragm 11 vibrates is comparatively large, often centered by acoustic diaphragm 11 center to external radiation.Be provided with the elastic strain that the first through hole 111, first through hole 111 discharges low frequency signal excitation generation at acoustic diaphragm 11 center, the sensitivity of acoustic diaphragm 11 pairs of low frequency signals can be reduced, and then the ability of its filtering low frequency signal can be realized.
Simultaneously illustratively, the acoustic diaphragm 11 pairs of high-frequency signals offering the first through hole 111 do not produce any adverse effect, because the wavelength of high-frequency signal is shorter and formed shorter, to the very small size of acoustic diaphragm 11 or more only can only produce vibration.The part of usual vibration, all at the non-central location of acoustic diaphragm 11, does not have an impact so be provided with the first through hole 111 pairs of high-frequency signals at acoustic diaphragm 11 center.
As shown in Figure 2, as further preferred embodiment, the microphone monomer of above-mentioned anti-low frequency noise, wherein: also comprise,
One substrate 2 with radio reception through hole, described radio reception through hole is just to described acoustic diaphragm 11; Form an acoustics ante-chamber 4 between described acoustic diaphragm 11 and described substrate 2, described acoustics ante-chamber 4 is in order to detect high-frequency signal;
One cover plate 3, be fixedly connected with described substrate 2 and cover described MEMS transducer 1 completely, described cover plate 3 forms an acoustical back chamber 5 with described back electrode 12, and the volume in described acoustical back chamber 5 is greater than the volume of described acoustics ante-chamber, and described acoustical back chamber 5 is in order to detect low frequency signal.
According to last of the twelve Earthly Branches nurse hertz resonance bottom, volume and the resonance frequency of cavity are inversely proportional to, namely the volume of cavity is larger, then gas resonance frequency is lower, and in structural design, that is designed by acoustics ante-chamber 4 is less, because high-frequency vibratory energy is less, so acoustics ante-chamber 4 to be arranged on the top of vibrating diaphragm, to there is resonance when acoustics ante-chamber 4 and high-frequency signal, can high-frequency signal be detected.In like manner, acoustical back chamber 5 volume is comparatively large, in order to low frequency signal generation resonance, detecting low frequency signal.
As further preferred embodiment, the microphone monomer of above-mentioned anti-low frequency noise, wherein: the volume of described first through hole 111 is not more than 10% of described acoustic diaphragm 11 volume.Be be not more than described acoustic diaphragm 11 volume 10% by the Volume design of the first through hole 111, can better filtering low-frequency noise signal, effective low frequency signal is not had an impact simultaneously.
As further preferred embodiment, the microphone monomer of above-mentioned anti-low frequency noise, wherein: a plurality of described second through hole 112 is uniformly distributed on described acoustic diaphragm 11.Second through hole 112 is evenly distributed on described acoustic diaphragm 11, in order to improve the air penetrability of described acoustic diaphragm 11.
As further preferred embodiment, the microphone monomer of above-mentioned anti-low frequency noise, wherein: also comprise an asic chip 6, connect described MEMS transducer 1, in order to receive the described capacitance signal that described MEMS transducer 1 exports, and analyzing and processing is done to described capacitance signal, form a processing signals and export.Asic chip 6 is mainly used in doing analyzing and processing to capacitance signal, and this processing procedure is the common practise of those skilled in the art, does not repeat herein.Do not do any technology limiting simultaneously yet.
As further preferred embodiment, the microphone monomer of above-mentioned anti-low frequency noise, wherein: the quantity of described second through hole 112 is eight.Further, the quantity that described second through hole 112 also can be is six.The object of the second through hole 112 is intended to the air penetrability improving acoustic diaphragm 11, adopts eight through holes or six through holes, can select, be only citing herein, do not limit according to the area of acoustic diaphragm 11.
As further preferred embodiment, the microphone monomer of above-mentioned anti-low frequency noise, wherein: described acoustic diaphragm 11 is thin and resilient acoustics diaphragm.Adopt thin and resilient acoustics diaphragm can improve the sensitivity of acoustic diaphragm 11 pairs of high-frequency signals.
As further preferred embodiment, the microphone monomer of above-mentioned anti-low frequency noise, wherein: the thickness of described acoustic diaphragm 11 is 500nm.
The foregoing is only the utility model preferred embodiment; not thereby execution mode of the present utility model and protection range is limited; to those skilled in the art; should recognize and all should be included in the scheme that equivalent replacement done by all utilization the utility model specifications and diagramatic content and apparent change obtain in protection range of the present utility model.
Claims (9)
1. a microphone monomer for anti-low frequency noise, is characterized in that: comprise MEMS transducer, and described MEMS transducer has,
One acoustic diaphragm, arranges one first through hole in the center of described vibrating diaphragm, and in described acoustic diaphragm, the position of described first through hole is provided with a plurality of the second through hole in order to discharge stress;
The back electrode of a fixed interval (FI) is formed between one and described acoustic diaphragm;
Wherein, described acoustic diaphragm and described back electrode form a plate condenser, and under the state that described acoustic diaphragm vibrates, described plate condenser forms according to the Oscillation Amplitude of described acoustic diaphragm the capacitance signal matched with described Oscillation Amplitude and exports.
2. the microphone monomer of anti-low frequency noise according to claim 1, is characterized in that: also comprise,
One substrate with radio reception through hole, described radio reception through hole is just to described acoustic diaphragm; Form an acoustics ante-chamber between described acoustic diaphragm and described substrate, described acoustics ante-chamber is in order to detect high-frequency signal;
One cover plate, be fixedly connected with described substrate and cover described MEMS transducer completely, described cover plate and described back electrode form an acoustical back chamber, and the volume in described acoustical back chamber is greater than the volume of described acoustics ante-chamber, and described acoustical back chamber is in order to detect low frequency signal.
3. the microphone monomer of anti-low frequency noise according to claim 1, is characterized in that: the volume of described first through hole is not more than 10% of described acoustic diaphragm volume.
4. the microphone monomer of anti-low frequency noise according to claim 1, is characterized in that: a plurality of described second through hole is uniformly distributed on described acoustic diaphragm.
5. the microphone monomer of anti-low frequency noise according to claim 1, it is characterized in that: also comprise an asic chip, connect described MEMS transducer, in order to receive the described capacitance signal that described MEMS transducer exports, and analyzing and processing is done to described capacitance signal, form a processing signals and export.
6. the microphone monomer of anti-low frequency noise according to claim 1, is characterized in that: the quantity of described second through hole is eight.
7. the microphone monomer of anti-low frequency noise according to claim 1, is characterized in that: the quantity of described second through hole is six.
8. the microphone monomer of anti-low frequency noise according to claim 1, is characterized in that: described acoustic diaphragm is thin and resilient acoustics diaphragm.
9. the microphone monomer of anti-low frequency noise according to claim 1, is characterized in that: the thickness of described acoustic diaphragm is 500nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520245502.0U CN204887464U (en) | 2015-04-20 | 2015-04-20 | Anti low frequency noise's microphone monomer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520245502.0U CN204887464U (en) | 2015-04-20 | 2015-04-20 | Anti low frequency noise's microphone monomer |
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| Publication Number | Publication Date |
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| CN204887464U true CN204887464U (en) | 2015-12-16 |
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| CN201520245502.0U Withdrawn - After Issue CN204887464U (en) | 2015-04-20 | 2015-04-20 | Anti low frequency noise's microphone monomer |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106162476A (en) * | 2015-04-20 | 2016-11-23 | 钰太芯微电子科技（上海）有限公司 | The mike monomer of anti-low frequency noise |
| CN106686477A (en) * | 2017-03-10 | 2017-05-17 | 安徽声讯信息技术有限公司 | No source microphone for remote recording and transcription |
| CN112637736A (en) * | 2018-04-26 | 2021-04-09 | 深圳市韶音科技有限公司 | Earphone system and microphone device thereof |
| WO2023273545A1 (en) * | 2021-06-29 | 2023-01-05 | 歌尔股份有限公司 | Sound production unit, loudspeaker assembly, and electronic device |
-
2015
- 2015-04-20 CN CN201520245502.0U patent/CN204887464U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106162476A (en) * | 2015-04-20 | 2016-11-23 | 钰太芯微电子科技（上海）有限公司 | The mike monomer of anti-low frequency noise |
| CN106162476B (en) * | 2015-04-20 | 2023-10-27 | 钰太芯微电子科技（上海）有限公司 | Microphone unit for resisting low-frequency noise |
| CN106686477A (en) * | 2017-03-10 | 2017-05-17 | 安徽声讯信息技术有限公司 | No source microphone for remote recording and transcription |
| CN112637736A (en) * | 2018-04-26 | 2021-04-09 | 深圳市韶音科技有限公司 | Earphone system and microphone device thereof |
| WO2023273545A1 (en) * | 2021-06-29 | 2023-01-05 | 歌尔股份有限公司 | Sound production unit, loudspeaker assembly, and electronic device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20151216 Effective date of abandoning: 20231027 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20151216 Effective date of abandoning: 20231027 |