CN205452288U - Optical chip's integrated morphology - Google Patents

Abstract

The utility model discloses an optical chip's integrated morphology, LED chip be including setting up the substrate on optical sensor, the substrate has first surface, the second surface that is located different planes to and extend to a plurality of inclined planes on the second surface from first surface edge slope, be provided with the functional layer of sending out light zone as the LED chip on these a plurality of inclined planes. The utility model discloses an integrated morphology, the functional layer on these a plurality of inclined planes of LED chip accessible gives out light, has realized single chip's multi -direction light emission function. The integrated back together of this LED chip and optical sensor can be applicable to to utilize and be close in a plurality of measurement fields that the light principle goes on detecting, and the LED chip can distribute in the vertical direction with optical sensor, but the size of the whole integrated morphology of greatly reduced from this to can improve optical chip measuring stability and precision.

Description

A kind of integrated morphology of optical chip

Technical field

This utility model relates to optical pickocff field, more specifically, this utility model relates to the integrated morphology of a kind of optical chip, particularly relates to a kind of close to light sensor chip.

Background technology

Along with the development of smart machine, for realizing its intelligentized function, increasing sensor is introduced in smart machine, and optical pickocff is no exception.At some close in optical sensor, the function of gesture identification can be realized by certain algorithm, this generally comprising close to optical sensor is positioned at the optical pickocff at middle part and multiple LED chip of being positioned at around optical pickocff, and optical pickocff, LED chip are independently encapsulated on circuit substrate.Due to the restriction of LED chip structure in prior art so that a certain distance must be reserved between above-mentioned multiple LED chip and optical pickocff, optical pickocff just can be made to sense the optical signal that LED chip sends；If the distance between LED chip and optical pickocff is the least, gesture None-identified can be caused or identify insensitive.

In intelligence wearable device, it is possible to utilize the sign information measuring some human body close to optical sensor, such as measure heart rate etc..Tradition be used for measuring human body physical sign information close to optical sensor, owing to its light path is asymmetric so that during wearing, need together with guarantee equipment and human body skin be in close contact, otherwise to cause the erroneous judgement detecting signal.

Utility model content

A purpose of the present utility model is to provide the new solution of the integrated morphology of a kind of optical chip.

According to first aspect of the present utility model, it is provided that the integrated morphology of a kind of optical chip, including substrate, the optical pickocff with optical region, described optical pickocff is arranged on substrate；Also including that LED chip, described LED chip include the substrate arranged on the optical sensor, described substrate has and is positioned at the first surface of Different Plane, second surface, and extends to the multiple inclined planes second surface from first surface edge tilt；Described the plurality of inclined plane is provided with the functional layer as LED chip luminous zone；It is additionally provided with the through through hole to optical pickocff optical region over the substrate；Also include the printing opacity plastic-sealed body got up to major general's LED chip functional layer and optical pickocff optical region plastic packaging.

Preferably, described first surface is circular, and the plurality of inclined plane extends to second surface from the circumferential edges of first surface；Described first surface, inclined plane, second surface define frustum cone structure；The through hole of described through optical pickocff optical region is positioned at the middle part of frustum cone structure.

Preferably, described first surface is rectangle, and described inclined plane is provided with four, extends to second surface from the edge of first surface respectively；Described first surface, inclined plane, second surface define truncated rectangular pyramids structure, described in be positioned at optical signal that functional layer in inclined plane sends and transmit towards the lateral direction of truncated rectangular pyramids structure；The through hole of described through optical pickocff optical region is positioned at the middle part of truncated rectangular pyramids structure.

Preferably, being additionally provided with reflecting part, described reflecting part is configured to: the optical signal that wherein side functional layer launches by truncated rectangular pyramids structure reflects towards the opposite side direction of truncated rectangular pyramids structure.

Preferably, described inclined plane is provided with four, extends to second surface from the edge of first surface respectively, and described first surface, inclined plane, second surface define the trapezoid groove structure of one and the truncated rectangular pyramids form fit stood upside down；Described it be positioned at optical signal that functional layer in inclined plane sends and transmit towards the direction, inner side of trapezoid groove structure；The through hole of described through optical pickocff optical region is positioned at the middle part of trapezoid groove structure.

Preferably, being additionally provided with reflecting part, described reflecting part is configured to: the optical signal that wherein side functional layer transmits by trapezoid groove structure reflects towards the opposite side direction of trapezoid groove structure.

Preferably, on described substrate, position between inclined plane and through hole is additionally provided with light shielding part.

Preferably, described substrate is the single crystal silicon material with<100>crystal orientation, and described inclined plane is obtained by the anisotropic etch of monocrystal silicon.

Preferably, multiple functional layers of being arranged on described in multiple inclined plane are isolated from one another to be opened.

Preferably, described functional layer extends at least part of first surface, second surface from inclined plane；The pad of conducting functional layer it is provided with in the position of described first surface or second surface.

Integrated morphology of the present utility model, multiple inclined plane being positioned on different directions it is provided with on the substrate of LED chip, the plurality of inclined plane is respectively arranged to the functional layer of luminescence, make described LED chip can carry out luminescence by the functional layer in the plurality of inclined plane, it is achieved that the multi-direction lighting function of single chips.After this LED chip and optical pickocff integrate, go for utilization and carry out in the multiple fields of measurement detected close to light principle；And LED chip can be distributed in vertical direction with optical pickocff, thus can be substantially reduced the size of whole integrated morphology, it is possible to improve stability and precision that optical chip is measured.

Inventor of the present utility model finds, in the prior art, LED chip can only send the optical signal of single direction, and this has limited to the integrated of LED chip and optical pickocff significantly；Also increase the area of whole package dimension simultaneously.Therefore, that technical assignment that this utility model is to be realized or the those skilled in the art of technical problem is that to be solved never expect or it is not expected that, therefore this utility model is a kind of new technical scheme.

By detailed description to exemplary embodiment of the present utility model referring to the drawings, further feature of the present utility model and advantage thereof will be made apparent from.

Accompanying drawing explanation

Combined in the description and the accompanying drawing of the part that constitutes description shows embodiment of the present utility model, and be used for explaining principle of the present utility model together with its explanation.

Fig. 1 is the generalized section of this utility model integrated morphology.

Fig. 2 is the structural representation removing printing opacity plastic-sealed body in Fig. 1.

Fig. 3 is the optic path schematic diagram of integrated morphology in Fig. 1.

Fig. 4 is the generalized section of this utility model another embodiment of integrated morphology.

Fig. 5 is the generalized section of this utility model the third embodiment of integrated morphology.

Fig. 6 is the structural representation removing printing opacity plastic-sealed body in Fig. 5.

Fig. 7 is the optic path schematic diagram of integrated morphology in Fig. 5.

Detailed description of the invention

Various exemplary embodiment of the present utility model is described in detail now with reference to accompanying drawing.It should also be noted that unless specifically stated otherwise, the parts illustrated the most in these embodiments and positioned opposite, the numerical expression of step and numerical value are not intended to scope of the present utility model.

Description only actually at least one exemplary embodiment is illustrative below, never as to this utility model and application thereof or any restriction of use.

May be not discussed in detail for technology, method and apparatus known to person of ordinary skill in the relevant, but in the appropriate case, described technology, method and apparatus should be considered a part for description.

In shown here and all examples of discussing, any occurrence should be construed as merely exemplary rather than as limiting.Therefore, other example of exemplary embodiment can have different values.

It should also be noted that similar label and letter represent similar terms in following accompanying drawing, therefore, the most a certain Xiang Yi accompanying drawing is defined, then need not it is further discussed in accompanying drawing subsequently.

With reference to Fig. 1, Fig. 2, this utility model provides the integrated morphology of a kind of optical chip, it includes substrate 11 and fixing optical pickocff 12 on the substrate 11, on described optical pickocff 12, there is optical region 12a, the optical signal in the external world is sensed by this optical region 12a, so that optical pickocff 12 can send different responses according to different optical signals, such as optical pickocff 12 can be made to send different control signals etc. according to the power of light, the structure of this optical pickocff and principle thereof belong to the common knowledge of those skilled in the art, no longer illustrate at this.

Optical pickocff such as fixing by the way of attachment can be additionally provided with LED chip on the substrate 11 on described optical pickocff 12, and described LED chip and optical pickocff 12 are distributed in vertical direction.Specifically, described LED chip includes the substrate 1 being arranged on optical pickocff 12, and the functional layer 9 as LED chip luminous zone, the through through hole 10 to optical pickocff 12 optical region 12a it is provided with on described substrate 1, by this through hole 10, the optical region 12a of optical pickocff 12 is come out so that it is the optical signal in the external world can be sensed.

Described substrate 1 has and is positioned at the first surface 5 of Different Plane, second surface 6, and extends to the multiple inclined plane 7 second surface 6 from first surface 5 edge tilt, and the plurality of inclined plane 7 is positioned on different directions.Wherein, the functional layer 9 of described LED chip is arranged in the inclined plane 7 of the plurality of different directions.Integrated morphology of the present utility model, also includes the printing opacity plastic-sealed body 13 got up to major general's LED chip functional layer 9 and optical pickocff 12 optical region 12a plastic packaging.The optical region 12a of the functional layer 9 of LED chip and optical pickocff 12 can be played the effect of protection by this printing opacity plastic-sealed body 13, does not interferes with LED chip, the function of optical pickocff 12 simultaneously.Printing opacity plastic-sealed body 13 uses the material of printing opacity to make, and this belongs to the common knowledge of those skilled in the art, no longer illustrates at this.Preferably, printing opacity plastic-sealed body 13 by whole LED chip, optical pickocff 12 plastic packaging on the substrate 11, defines the encapsulating housing of this utility model integrated morphology to this utility model.Injection when, this printing opacity plastic-sealed body 13 can be filled in the through hole 10 of substrate 1 simultaneously, is covered by the optical region 12a of optical pickocff 12.

With reference to the view direction of Fig. 2, first surface 5, second surface 6 can be the horizontal planes being parallel to each other, and second surface 6 is positioned at the lower section of first surface 5, and inclined plane 7 extends obliquely downward to second surface 6 from the marginal position of first surface 5；This inclined plane 7 can be the plane of an inclination, it is also possible to be to tilt, from first surface 5, the curved surface extending to second surface 6.

In one specific embodiment of this utility model, described first surface 5 can be circular, the most the plurality of inclined plane 7 extends to second surface 6 from the circumferential edges of first surface 5, making the plurality of inclined plane 7 surround the taper surface of a tubular, described first surface 5, inclined plane 7, second surface 6 define the frustum cone structure that upper end is little, lower end is big jointly；Described through hole 10 is positioned at the middle part of frustum cone structure.

In another specific embodiment of this utility model, described first surface 5 is rectangle, and now, described inclined plane 7 is provided with four, and from the edge of first surface 5, extension extends obliquely downward to second surface 6 these four inclined planes 7 respectively；It is to say, these four inclined planes 7 intersect a rectangular configuration on second surface 6；Described first surface 5, inclined plane 7, second surface 6 is made to define the truncated rectangular pyramids structure that upper end is little, lower end is big, with reference to Fig. 1, Fig. 2.Can certainly regard as, this substrate 1 has a truncated rectangular pyramids structure, four inclined planes are positioned on the outside side wall of this truncated rectangular pyramids structure, and this allows for optical signal that in each inclined plane 7, functional layer 9 sends and transmits towards the lateral direction of truncated rectangular pyramids structure.Described through hole 10 is positioned at the middle part of this truncated rectangular pyramids structure so that four inclined planes 7 of this truncated rectangular pyramids structure are symmetrical relative to described through hole 10.

In this embodiment, substrate 1 can use the single crystal silicon material with<100>crystal orientation, aforementioned four inclined plane 7 can be obtained by the anisotropic etch of monocrystal silicon, wherein, the angle that inclined plane tilts is 54.74 °, the method that this monocrystal silicon to<100>crystal orientation carries out anisotropic etch belongs to the common knowledge of those skilled in the art, no longer illustrates at this.

LED chip of the present utility model, the functional layer 9 of its luminous zone includes p type semiconductor layer 3, n type semiconductor layer 4, and this p type semiconductor layer 3, n type semiconductor layer 4 can use GaN material.P type semiconductor layer 3, n type semiconductor layer 4 can be arranged in inclined plane 7 by the way of being sequentially depositing；Such as can first deposit p type semiconductor layer 3, then deposited n-type semiconductor layer 4 on p type semiconductor layer 3；Can certainly be, first deposited n-type semiconductor layer 4 in inclined plane 7 then to deposit p type semiconductor layer 3 on n type semiconductor layer 4, the PN junction of LED chip be formed in inclined plane 7 the most at last.The method of above layers deposition belongs to the common knowledge of those skilled in the art, no longer illustrates at this.

Fig. 3 shows the light path schematic diagram of this utility model integrated morphology, this integrated morphology can apply to gesture identification field, view direction with reference to Fig. 3, when LED chip functional layer 9 on left side face 7 sends towards upper left optical signal, this optical signal transmits in printing opacity plastic-sealed body 13, when arriving the upper end position of printing opacity plastic-sealed body 13, there is refraction and continue transmission in atmosphere；When the finger of human body starts to slide in primary importance when, this optical signal can be blocked by the finger of human body, and reflexed on printing opacity plastic-sealed body 13 by finger, afterwards through being refracted into the through hole 10 of substrate 1, and sensed by the optical region 12a of optical pickocff 12, make optical pickocff 12 send the first response；When LED chip functional layer 9 in right side inclined plane 7 sends towards top-right optical signal, this optical signal transmits in printing opacity plastic-sealed body 13, when arriving the upper end position of printing opacity plastic-sealed body 13, refraction occurs and continues transmission in atmosphere；When the finger of human body slides into the right second position, this optical signal can be blocked by the finger of human body, and reflexed on printing opacity plastic-sealed body 13 by finger, afterwards through being refracted into the through hole 10 of substrate 1, and sensed by the optical region 12a of optical pickocff 12, make optical pickocff 12 send the second response；By the first response of this optical pickocff 12, the second response, such that it is able to judge that the direction of now human body gesture is to be moved to the second position by primary importance.

Above-mentioned optical signal is when human body reflects and passes through in through hole 10, have some optical signal transmission to the sidewall of through hole 10, in order to make optical pickocff 12 optical region 12a can sense more optical signal, the sidewall of described through hole 10 can also arrange one layer of reflecting layer；Optical signal, after the external world is transferred to the sidewall of through hole 10, reflexes on the optical region 12a of optical pickocff 12 through reflecting layer.Reflecting layer of the present utility model can be the materials well-known to those skilled in the art such as metallic aluminium, no longer illustrates at this.

In the above-described embodiments, the optical signal that functional layer 9 sends is refracted in air through the upper end of printing opacity plastic-sealed body 13, certainly the transmission path of optical signal can also be selected according to the needs of actual design, such as this utility model one preferred embodiment in, select suitable printing opacity plastic-sealed body 13 shape, when making optical signal transmission that LED chip functional layer 9 sends to the sidewall locations of printing opacity plastic-sealed body 13, there is refraction and continue transmission the most in atmosphere, reference Fig. 4.

The integrated morphology of above-mentioned optical chip, the light transmission path caused by its structure so that it is can use as the sensor identifying gesture.When being changed the transmission path of light by structure design, such optical chip can also be applied in other field of optical measurements.Such as this utility model one preferred embodiment in, can be positioned at each functional layer of LED chip 9 on printing opacity plastic-sealed body 13 goes out to arrange in light path reflecting part, is reflexed on the opposite side direction of truncated rectangular pyramids structure by this reflecting part optical signal that wherein side functional layer 9 emits by truncated rectangular pyramids structure.Such as with reference to the view direction of Fig. 3, when LED chip functional layer 9 on left side face 7 sends towards upper left optical signal, this optical signal transmits in printing opacity plastic-sealed body 13, when this optical signal runs into reflecting part so that this optical signal reflects towards the upper right side of truncated rectangular pyramids structure.The optical chip of this kind of structure such as can be applied in wearable device as heart rate sensor, such that it is able to the sign information such as the heart rate of detection human body.

In above-mentioned LED chip, described first surface 5, inclined plane 7, second surface 6 define the truncated rectangular pyramids structure that upper end is little, lower end is big；In another specific embodiment of this utility model, described first surface 5, inclined plane 7, second surface 6 define trapezoid groove structure, and this trapezoid groove structure and the truncated rectangular pyramids mating shapes of handstand, with reference to Fig. 5, Fig. 6.Can certainly regard as, substrate 1 has a trapezoid groove structure, four inclined planes 7 are positioned in the inside side walls of this trapezoid groove structure so that be positioned at optical signal that in inclined plane 7, functional layer 9 sends and transmit towards the direction, inner side of trapezoid groove structure.Now, the through hole 10 of described through optical pickocff 12 optical region 12a is positioned at the middle part of trapezoid groove structure so that four inclined planes 7 of this trapezoid groove structure are symmetrical relative to described through hole 10.

In this embodiment, substrate 1 can use the single crystal silicon material with<100>crystal orientation, aforementioned four inclined plane 7 can be obtained by the anisotropic etch of monocrystal silicon, wherein, the angle that inclined plane tilts is 54.74 °, the method that this monocrystal silicon to<100>crystal orientation carries out anisotropic etch belongs to the common knowledge of those skilled in the art, no longer illustrates at this.

Fig. 7 shows the light path schematic diagram of this integrated morphology, the integrated morphology of this optical chip can apply to measure the wearable device field of human body physical sign information, view direction with reference to Fig. 7, when LED chip functional layer 9 on left side face 7 sends towards top-right optical signal, this optical signal transmits in printing opacity plastic-sealed body 13, when arriving the upper end of printing opacity plastic-sealed body 13, there is refraction and continue transmission in atmosphere, the optical signal of this transmission is after human body skin, reflex to the upper end of printing opacity plastic-sealed body 13, being refracted into the through hole 10 of substrate 1 through printing opacity plastic-sealed body 13, and sensed by the optical region 12a of optical pickocff 12.By LED chip of the present utility model so that the most all have the optical signal for detection to send, thus improve the precision of detection；The optical path being additionally, since each optical signal transmission is full symmetric so that such wearable device is not easily susceptible to extraneous motor message or wear to be affected improperly.

The integrated morphology of this optical chip, the optical signal sent due to functional layer 9 in inclined plane 7 transmits towards the direction, inner side of trapezoid groove structure, this optical signal allowing for transmission is the most directly sensed by the optical region 12a of optical pickocff 12, thus has influence on the precision of detection.In order to solve this problem, on substrate 1 one light shielding part 14 can be set for position between inclined plane 7 and through hole 10, with reference to Fig. 5, Fig. 6.The optical signal being possible to prevent functional layer 9 to send by this light shielding part 14 is directly sensed by the optical region 12a of optical pickocff 12, thus ensure that the accuracy of optical chip.This light shielding part 14 can be arranged on second surface 6, and such as it can extend vertically upwards from second surface 6.

The integrated morphology of above-mentioned optical chip, the light transmission path caused by its structure so that it is can use as the sensor of detection human body physical sign；When being changed the transmission path of light by structure design, such optical chip can also be applied in other field of optical measurements.Such as this utility model one preferred embodiment in, can on printing opacity plastic-sealed body 13 functional layer 9 each for LED chip go out light path is arranged reflecting part, will be located in the trapezoid groove structure optical signal that wherein side functional layer 9 launches by this reflecting part and reflex on the opposite side direction of trapezoid groove structure.Such as with reference to the view direction of Fig. 7, when LED chip functional layer 9 on left side face 7 sends towards top-right optical signal, this optical signal transmits in printing opacity plastic-sealed body 13, when this optical signal runs into reflecting part so that this optical signal reflects towards the upper left side of trapezoid groove structure.The optical chip of this kind of structure may apply to above-mentioned gesture identification field.

Integrated morphology of the present utility model, multiple inclined plane being positioned on different directions it is provided with on the substrate of LED chip, the plurality of inclined plane is respectively arranged to the functional layer of luminescence, make described LED chip can carry out luminescence by the functional layer in the plurality of inclined plane, it is achieved that the multi-direction lighting function of single chips.After this LED chip and optical pickocff integrate, go for utilization and carry out in the multiple fields of measurement detected close to light principle；And LED chip can be distributed in vertical direction with optical pickocff, thus can be substantially reduced the size of whole integrated morphology, it is possible to improve stability and precision that optical chip is measured.

This utility model one preferred embodiment in, the functional layer 9 of described LED chip extends at least part of first surface 5, second surface 6 from inclined plane 7 so that this functional layer 9 can preferably combine with inclined plane 7.The terminals of LED chip can also be set in the position of first surface 5, second surface 6 simultaneously.Specifically, on described first surface 5 or the position of second surface 6 is provided with the pad 8 being respectively turned on p type semiconductor layer 3, n type semiconductor layer 4.Pad 8 is arranged on first surface 5 or the position of second surface 6, and turns on respective semiconductor layer so that pad 8 does not interferes with and is positioned at the functional layer 9 of inclined plane 7 position and works.

LED chip of the present utility model, in order to make together with the functional layer 9 of LED chip preferably mates with the lattice of substrate 1, is additionally provided with cushion 2 between first surface 5, second surface 6, inclined plane 7 and functional layer 9.Manufacturing when, in the first surface 5 of substrate 1, second surface 6, inclined plane 7, first deposit one layer of cushion 2, on this cushion 2, then form functional layer 9.The material of cushion 2 selects according to the material of substrate 1 and functional layer 9, and this belongs to the common knowledge of those skilled in the art, no longer illustrates at this.

This utility model one preferred embodiment in, the described functional layer 9 being arranged in multiple inclined plane 7 is connected together, say, that the functional layer 9 in multiple inclined planes 7 is one, turned on by single pad so that whole functional layer 9 is the most luminous.In another preferred embodiment, the described functional layer 9 being arranged in multiple inclined plane 7 is isolated from one another to be opened, make each functional layer 9 can be individually luminous, now need to arrange independent pad 8 in each functional layer 9, turn on corresponding functional layer 9 by respective pad 8, work alone such that it is able to control each functional layer 9.

Although being described in detail specific embodiments more of the present utility model by example, but it should be appreciated by those skilled in the art, example above is merely to illustrate rather than in order to limit scope of the present utility model.It should be appreciated by those skilled in the art, in the case of without departing from scope and spirit of the present utility model, above example can be modified.Scope of the present utility model is defined by the following claims.

Claims (10)

1. the integrated morphology of an optical chip, it is characterized in that: including substrate (11), have the optical pickocff (12) of optical region (12a), described optical pickocff (12) is arranged on substrate (11)；Also include LED chip, described LED chip includes the substrate (1) being arranged on optical pickocff (12), described substrate (1) has and is positioned at the first surface (5) of Different Plane, second surface (6), and extends to the multiple inclined planes (7) second surface (6) from first surface (5) edge tilt；Described the plurality of inclined plane (7) is provided with the functional layer (9) as LED chip luminous zone；Described substrate (1) is additionally provided with the through through hole (10) to optical pickocff (12) optical region (12a)；Also include the printing opacity plastic-sealed body (13) got up to major general's LED chip functional layer (9) and optical pickocff (12) optical region (12a) plastic packaging.

Integrated morphology the most according to claim 1, it is characterised in that: described first surface (5) is circular, and the plurality of inclined plane (7) extends to second surface (6) from the circumferential edges of first surface (5)；Described first surface (5), inclined plane (7), second surface (6) define frustum cone structure；The through hole (10) of described through optical pickocff (12) optical region (12a) is positioned at the middle part of frustum cone structure.

Integrated morphology the most according to claim 1, it is characterized in that: described first surface (5) is rectangle, described inclined plane (7) is provided with four, and the edge from first surface (5) extends to second surface (6) respectively；Described first surface (5), inclined plane (7), second surface (6) define truncated rectangular pyramids structure, described in be positioned at optical signal that the upper functional layer (9) of inclined plane (7) sends and transmit towards the lateral direction of truncated rectangular pyramids structure；The through hole (10) of described through optical pickocff (12) optical region (12a) is positioned at the middle part of truncated rectangular pyramids structure.

Integrated morphology the most according to claim 3, it is characterised in that: being additionally provided with reflecting part, described reflecting part is configured to: the optical signal that wherein side functional layer (9) launches by truncated rectangular pyramids structure reflects towards the opposite side direction of truncated rectangular pyramids structure.

Integrated morphology the most according to claim 1, it is characterized in that: described inclined plane (7) is provided with four, edge from first surface (5) extends to second surface (6) respectively, and described first surface (5), inclined plane (7), second surface (6) define the trapezoid groove structure of one and the truncated rectangular pyramids form fit stood upside down；Described it be positioned at optical signal that the upper functional layer (9) of inclined plane (7) sends and transmit towards the direction, inner side of trapezoid groove structure；The through hole (10) of described through optical pickocff (12) optical region (12a) is positioned at the middle part of trapezoid groove structure.

Integrated morphology the most according to claim 5, it is characterised in that: being additionally provided with reflecting part, described reflecting part is configured to: the optical signal that wherein side functional layer (9) transmits by trapezoid groove structure reflects towards the opposite side direction of trapezoid groove structure.

Integrated morphology the most according to claim 5, it is characterised in that: the position being positioned between inclined plane (7) and through hole (10) on described substrate (1) is additionally provided with light shielding part (14).

8. according to the integrated morphology described in any one of claim 3 to 7, it is characterised in that: described substrate (1) is the single crystal silicon material with<100>crystal orientation, and described inclined plane (7) is obtained by the anisotropic etch of monocrystal silicon.

9. according to the integrated morphology described in any one of claim 1 to 7, it is characterised in that multiple functional layers (9) of being arranged on described in: in multiple inclined plane (7) are isolated from one another to be opened.

Integrated morphology the most according to claim 9, it is characterised in that: described functional layer (9) extends at least part of first surface (5), second surface (6) from inclined plane (7)；The pad (8) of conducting functional layer (9) it is provided with in the position of described first surface (5) or second surface (6).