CN205404861U - Optical coating with high permeability - Google Patents
Optical coating with high permeability Download PDFInfo
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- CN205404861U CN205404861U CN201620016754.0U CN201620016754U CN205404861U CN 205404861 U CN205404861 U CN 205404861U CN 201620016754 U CN201620016754 U CN 201620016754U CN 205404861 U CN205404861 U CN 205404861U
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Abstract
The utility model discloses an optical coating with high permeability, including the transparency carrier, its characterized in that: pass through the metallic coating of the mode formation of magnetron sputtering coating film on the transparency carrier, the metallic coating is the periodic constitution in turn of multi -storied si cladding material, moSi2 cladding material, pt cladding material and ti cladding material, and attaches to the transparency carrier surface, the thickness of si cladding material is 40~60nm, the thickness of moSi2 cladding material is 10~25nm, the thickness of pt cladding material is 10~20nm, the thickness of ti cladding material is 20~30nm. The utility model discloses optical coating adopts the mode of magnetron sputtering coating film to form the composite metal cladding material of special structure, has high permeability to the visible light, and average reflectivity only is about 18%. Need not to increase dielectric layer, can reach base metal dielectric reflectance coating the reflectivity can, maximumly kept the characteristics of sexual reflex in the metal film.
Description
Technical field
This utility model belongs to optical film technology field, is specifically related to a kind of optical thin film with high permeability.
Background technology
Optical thin film is with being either physically or chemically coated with the transparent dielectric film being plated on smooth substrate surface.Optical thin film utilizes light wave reflection, refraction and superposition interference in the film can reach anti-reflection or increase anti-effect, it is also possible to play the effects such as light splitting, optical filtering, adjustment light beam polarization or phase state.Optical thin film is widely used in modern science and technology technology, but how to reduce light wave reflection in communication process and also become the important topic in contemporary optics research.
Current metallic reflective coating, mostly adopts extinction coefficient relatively big, and more stable those metals of optical property are as metal membrane material.The metallic film material conventional in ultra-violet (UV) band is aluminum, conventional aluminum and silver in visible region, and conventional gold, silver and copper in ultrared, additionally, chromium and platinum are also commonly used for the coating materials of some specialty films.The advantage of metallic reflective coating is that preparation technology is simple, the wave-length coverage width of work；Shortcoming is that light loss is big, and reflectance can not be significantly high.In order to make the reflectance of metallic reflective coating improve further, it is possible to add which floor certain thickness dielectric layer of plating in the outside of film, form inter metal dielectric reflectance coating.It is pointed out that inter metal dielectric reflectance coating adds the reflectance in a certain wavelength (or a certain ripple district), but destroy the feature of metal film neutral reflection.
Utility model content
For Problems existing in background technology, this utility model provides a kind of optical thin film that visible ray has high permeability formed by magnetron sputtering plating.
The technical solution adopted in the utility model is:
A kind of optical thin film with high permeability, including transparency carrier, it is characterized in that: the coat of metal formed by the mode of magnetron sputtering plating on described transparency carrier, the described coat of metal is that the Si coating of multilamellar, MoSi2 coating, Pt coating and Ti coating are periodically alternately constituted, and is attached to described transparency carrier surface；The thickness of described Si coating is 40 ~ 60nm, and the thickness of described MoSi2 coating is 10 ~ 25nm, and the thickness of described Pt coating is 10 ~ 20nm, and the thickness of described Ti coating is 20 ~ 30nm.
Further, the described coat of metal is upwards followed successively by by substrate surface: thickness is the multilamellar Si coating of 80 ~ 400nm, and thickness is the multilamellar MoSi2 coating of 200 ~ 700nm, and thickness is the multilamellar Pt coating of 100 ~ 400nm, and thickness is the multilamellar Ti coating of 40 ~ 200nm.
Further, described Si coating is 2 ~ 8 layers；Described MoSi2 coating is 15 ~ 30 layers；Described Pt coating is 10 ~ 20 layers；Described Ti coating is 2 ~ 8 layers.
Preferably, the described coat of metal is upwards followed successively by by substrate surface:
The number of plies is the Si coating of 5 layers,
The number of plies is the MoSi2 coating of 25 layers,
The number of plies is the Pt coating of 15 layers,
The number of plies is the Ti coating of 5 layers.
The coating material of this utility model optical thin film selects Si, MoSi2, Pt and Ti, traditional metal coating material selection range and compound mode are broken, the mode adopting magnetron sputtering plating forms the complex metal plating layer of special tectonic, visible ray has high-permeability, and average reflectance is only about 18%.This utility model optical thin film, without increasing dielectric layer, can reach the reflecting properties of common metal electrolyte reflectance coating, farthest remains the feature of metal film neutral reflection.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model；
Fig. 2 is reflectance test result curve figure of the present utility model；
Detailed description of the invention
Below in conjunction with accompanying drawing, this utility model is further described:
A kind of optical thin film with high permeability as shown in Figure 1, including transparency carrier 1, it is characterized in that: the coat of metal formed by the mode of magnetron sputtering plating on described transparency carrier, the described coat of metal is that the Si coating of multilamellar, MoSi2 coating, Pt coating and Ti coating are periodically alternately constituted, and is attached to described transparency carrier surface；The thickness of described Si coating is 40 ~ 60nm, and the thickness of described MoSi2 coating is 10 ~ 25nm, and the thickness of described Pt coating is 10 ~ 20nm, and the thickness of described Ti coating is 20 ~ 30nm.The described coat of metal is upwards followed successively by by substrate surface: thickness is the multilamellar Si coating of 80 ~ 400nm, and thickness is the multilamellar MoSi2 coating of 200 ~ 700nm, and thickness is the multilamellar Pt coating of 100 ~ 400nm, and thickness is the multilamellar Ti coating of 40 ~ 200nm.Described Si coating is 2 ~ 8 layers；Described MoSi2 coating is 15 ~ 30 layers；Described Pt coating is 10 ~ 20 layers；Described Ti coating is 2 ~ 8 layers.Preferably, the described coat of metal is upwards followed successively by by substrate surface: the number of plies is the Si coating of 5 layers, and the number of plies is the MoSi2 coating of 25 layers, and the number of plies is the Pt coating of 15 layers, and the number of plies is the Ti coating of 5 layers.
Being detected by optical thin film print of the present utility model, test result is as follows:
Detection foundation: JJG1034-2008 " spectrophotometer standard filter lens "
Detection site: Shenzhen Academy of Metrology & Quality Inspection's optics 108 Room
Environmental condition: temperature 25 DEG C, relative humidity 60%
Table 1 reflectance test result
| Wavelength (nm) | Reflectance (%R) | Wavelength (nm) | Reflectance (%R) | Wavelength (nm) | Reflectance (%R) | Wavelength (nm) | Reflectance (%R) |
| 400 | 36.06 | 480 | 16.00 | 560 | 37.91 | 640 | 24.97 |
| 410 | 26.95 | 490 | 27.71 | 570 | 39.98 | 650 | 30.96 |
| 420 | 12.06 | 500 | 33.50 | 580 | 36.11 | 660 | 34.03 |
| 430 | 20.65 | 510 | 29.16 | 590 | 27.35 | 670 | 34.40 |
| 440 | 22.19 | 520 | 17.48 | 600 | 16.41 | 680 | 32.65 |
| 450 | 19.02 | 530 | 9.34 | 610 | 8.90 | 690 | 28.97 |
| 460 | 14.48 | 540 | 15.95 | 620 | 9.64 | 700 | 24.14 |
| 470 | 10.58 | 550 | 28.96 | 630 | 16.77 | -- | -- |
Exemplified as above is only to illustration of the present utility model, is not intended that the restriction to protection domain of the present utility model, every belongs within protection domain of the present utility model with the same or analogous design of this utility model.
Claims (7)
1. an optical thin film with high permeability, including transparency carrier, it is characterized in that: the coat of metal formed by the mode of magnetron sputtering plating on described transparency carrier, the described coat of metal is that the Si coating of multilamellar, MoSi2 coating, Pt coating and Ti coating are periodically alternately constituted, and is attached to described transparency carrier surface；The thickness of described Si coating is 40 ~ 60nm, and the thickness of described MoSi2 coating is 10 ~ 25nm, and the thickness of described Pt coating is 10 ~ 20nm, and the thickness of described Ti coating is 20 ~ 30nm.
2. there is the optical thin film of high permeability as claimed in claim 1, it is characterized in that, the described coat of metal is upwards followed successively by by substrate surface: thickness is the multilamellar Si coating of 80 ~ 400nm, thickness is the multilamellar MoSi2 coating of 200 ~ 700nm, thickness is the multilamellar Pt coating of 100 ~ 400nm, and thickness is the multilamellar Ti coating of 40 ~ 200nm.
3. there is the optical thin film of high permeability as claimed in claim 2, it is characterised in that: described Si coating is 2 ~ 8 layers.
4. there is the optical thin film of high permeability as claimed in claim 2, it is characterised in that: described MoSi2 coating is 15 ~ 30 layers.
5. there is the optical thin film of high permeability as claimed in claim 2, it is characterised in that: described Pt coating is 10 ~ 20 layers.
6. there is the optical thin film of high permeability as claimed in claim 2, it is characterised in that: described Ti coating is 2 ~ 8 layers.
7. the optical thin film with high permeability as according to any one of claim 1 ~ 6, it is characterised in that the described coat of metal is upwards followed successively by by substrate surface:
The number of plies is the Si coating of 5 layers,
The number of plies is the MoSi2 coating of 25 layers,
The number of plies is the Pt coating of 15 layers,
The number of plies is the Ti coating of 5 layers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620016754.0U CN205404861U (en) | 2016-01-11 | 2016-01-11 | Optical coating with high permeability |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620016754.0U CN205404861U (en) | 2016-01-11 | 2016-01-11 | Optical coating with high permeability |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205404861U true CN205404861U (en) | 2016-07-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201620016754.0U Expired - Fee Related CN205404861U (en) | 2016-01-11 | 2016-01-11 | Optical coating with high permeability |
Country Status (1)
| Country | Link |
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| CN (1) | CN205404861U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109234728A (en) * | 2018-10-18 | 2019-01-18 | 江苏理工学院 | A kind of molybdenum alloy surface laser melting coating preparation MoSi2The method of coating |
| CN109265718A (en) * | 2018-07-17 | 2019-01-25 | 海安浩驰科技有限公司 | A kind of AgO/Si automobile adhesive film material with spectral selection absorption function |
| CN113568099A (en) * | 2021-07-08 | 2021-10-29 | 武汉大学 | Visible light beam splitting filter film based on nano microcavity and design method thereof |
-
2016
- 2016-01-11 CN CN201620016754.0U patent/CN205404861U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109265718A (en) * | 2018-07-17 | 2019-01-25 | 海安浩驰科技有限公司 | A kind of AgO/Si automobile adhesive film material with spectral selection absorption function |
| CN109234728A (en) * | 2018-10-18 | 2019-01-18 | 江苏理工学院 | A kind of molybdenum alloy surface laser melting coating preparation MoSi2The method of coating |
| CN113568099A (en) * | 2021-07-08 | 2021-10-29 | 武汉大学 | Visible light beam splitting filter film based on nano microcavity and design method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160727 Termination date: 20170111 |