CN205360855U - 一种真空过滤器 - Google Patents
一种真空过滤器 Download PDFInfo
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- CN205360855U CN205360855U CN201620061908.8U CN201620061908U CN205360855U CN 205360855 U CN205360855 U CN 205360855U CN 201620061908 U CN201620061908 U CN 201620061908U CN 205360855 U CN205360855 U CN 205360855U
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CN201620061908.8U CN205360855U (zh) | 2016-01-22 | 2016-01-22 | 一种真空过滤器 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105498380A (zh) * | 2016-01-22 | 2016-04-20 | 青岛赛瑞达电子科技有限公司 | 一种真空过滤器 |
CN110975453A (zh) * | 2019-11-27 | 2020-04-10 | 北京北方华创微电子装备有限公司 | 尾气处理装置及半导体加工设备 |
CN114146505A (zh) * | 2021-11-29 | 2022-03-08 | 北京北方华创微电子装备有限公司 | 过滤装置和半导体工艺设备 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105498380A (zh) * | 2016-01-22 | 2016-04-20 | 青岛赛瑞达电子科技有限公司 | 一种真空过滤器 |
CN110975453A (zh) * | 2019-11-27 | 2020-04-10 | 北京北方华创微电子装备有限公司 | 尾气处理装置及半导体加工设备 |
CN114146505A (zh) * | 2021-11-29 | 2022-03-08 | 北京北方华创微电子装备有限公司 | 过滤装置和半导体工艺设备 |
CN114146505B (zh) * | 2021-11-29 | 2023-08-18 | 北京北方华创微电子装备有限公司 | 过滤装置和半导体工艺设备 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220317 Address after: 214000 workshop and office space on the south side of the first floor of Plant No. 4, precision machinery industrial park, Xishan District, Wuxi City, Jiangsu Province Patentee after: Sairuida intelligent electronic equipment (Wuxi) Co.,Ltd. Address before: 266109 No. 826, Huadong Road, high tech Zone, Qingdao, Shandong Patentee before: QINGDAO SUNRED ELECTRONIC TECHNOLOGY Co.,Ltd. |
|
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 214000 workshop and office space on the south side of the first floor of Plant No. 4, precision machinery industrial park, Xishan District, Wuxi City, Jiangsu Province Patentee after: Sairuida Intelligent Electronic Equipment (Wuxi) Co.,Ltd. Address before: 214000 workshop and office space on the south side of the first floor of Plant No. 4, precision machinery industrial park, Xishan District, Wuxi City, Jiangsu Province Patentee before: Sairuida intelligent electronic equipment (Wuxi) Co.,Ltd. |