CN205331721U - Adjustable precision positioning platform of displacement - Google Patents

Adjustable precision positioning platform of displacement Download PDF

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Publication number
CN205331721U
CN205331721U CN201521077996.2U CN201521077996U CN205331721U CN 205331721 U CN205331721 U CN 205331721U CN 201521077996 U CN201521077996 U CN 201521077996U CN 205331721 U CN205331721 U CN 205331721U
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CN
China
Prior art keywords
platform
displacement
axis
slide unit
locating platform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201521077996.2U
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Chinese (zh)
Inventor
王念峰
张志远
张宪民
郑永忠
周升勇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FOSHAN SON-TECH PRECISION MACHINERY Co Ltd
South China University of Technology SCUT
Original Assignee
FOSHAN SON-TECH PRECISION MACHINERY Co Ltd
South China University of Technology SCUT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FOSHAN SON-TECH PRECISION MACHINERY Co Ltd, South China University of Technology SCUT filed Critical FOSHAN SON-TECH PRECISION MACHINERY Co Ltd
Priority to CN201521077996.2U priority Critical patent/CN205331721U/en
Application granted granted Critical
Publication of CN205331721U publication Critical patent/CN205331721U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses an adjustable precision positioning platform of displacement, include: a pedestal. Manual adjustable slip table platform, the alternately rotatory guide rail of accessible realizes that the precision positioning of three degrees of freedom adjusts, flat cushion piece is installed through four screw holes of evenly distributed on the slip table, gentle and agreeable hinge precision positioning platform, thus fix through two screw holes among them and make the platform can move adjustable slip table platform conveniently on flat cushion piece to realize X axle and the displacement of Y axle direction, four blocks of electromagnetism armature, it is fixed in four position of gentle and agreeable hinge precision positioning platform through threaded connection, two Z axle right angle keysetss meet with the platform base through threaded connection on it, the electromagnetic drive ware is as the drive device of platform, thereby it meets with Z axle right angle keysets through threaded connection and the platform base is connected. The utility model provides an adjustable precision positioning platform of displacement simple structure, whole size is little, and is with low costs, and convenient operation can realize the location requirement of high accuracy.

Description

A kind of displacement adjustable accurate locating platform
Technical field
This utility model belongs to submissive precision positioning field, particularly relates to a kind of displacement adjustable accurate locating platform。
Background technology
Precision positioning technology has a wide range of applications in fields such as biomedical engineering, precision optics engineering, microelectronics system, science and techniques of defence, becomes the requisite link of development in Hi-Tech。Precision positioning technology utilizes high-precision driving device to drive supporting construction to realize positioning requirements。Compared to other location technologies, submissive hinge precisely locating platform obtains the displacement output of platform, simple in construction by Electromagnetic Drive, the friction between hinge and backhaul gap can be eliminated, without lubrication, the displacement output of larger row journey can be obtained simultaneously, there is very big advantage。For needing high performance precision locating platform to do the fields such as the semiconductor lithography of technical support, miniature assembling, biological cell operation, submissive hinge precisely locating platform has prospect widely。
For precisely locating platform, while realizing big stroke location, it is often more important that rapidity and accuracy that platform positions will be ensured。Accordingly, do not require nothing more than driving equipment and have higher precision and superperformance and the premium properties of supporting construction, in addition it is also necessary to ensure reasonability and elaboration that whole platform assembles, convenient operation。And traditional meek precisively positioning platform assembly precision is not high, not easily operate, lack the protection to submissive supporting construction, cause that platform entirety positioning precision is subject to large effect。
Utility model content
For the technical problem of described existence, the purpose of this utility model is in that to provide a kind of novel displacement adjustable accurate locating platform, it is possible to make submissive hinge precisely locating platform positioning precision high, simple in construction and conveniently operation, it is achieved positioning requirements quickly and accurately。
For solving described technical problem, this utility model by the following technical solutions:
A kind of displacement adjustable accurate locating platform, including: playing the base of supporting and protective effect, it is arranged on precision optics vibration-isolating platform by the equally distributed screwed hole of surrounding;Realize X-axis Y-axis displacement by intersection rotary rail and R axle rotates the manual adjustable frame slide unit platform of fine setting on three degree of freedom direction, four sunk screws that described manual adjustable frame slide unit platform is distributed by bottom even are affixed with base, and its work top is uniformly distributed several screwed holes;Platform cushion block, is installed on the working platform face on adjustable frame displacement slide unit platform, supports submissive hinge precisely locating platform, and have the screwed hole for installing submissive hinge precisely locating platform;Submissive hinge precisely locating platform, can realize the displacement on X-axis Y-axis two-freedom direction driving of electromagnetic driver under left and right, and it is threaded connection and is arranged on described platform cushion block;Four pieces of electromagnet armatures, it is threaded connection in four orientation being symmetrically mounted on described submissive hinge precisely locating platform;Playing the Z axis right angle keyset of supporting and switching effect, it is fixed on described platform base by the locating piece on lower screws and base;As the electromagnetic driver driving equipment of whole platform, it is threaded connection and is arranged on described Z axis right angle keyset, just to described electromagnet armature, it is provided that stablize electromagnetic force。
Further, described manual adjustable frame slide unit platform is had the guide rail of V-type rolling channel, roller cage cylindrical roller etc. by two and forms, the cylindrical roller arranged that intersects is moving back and forth on the V-type rolling channel face of accurate grinding, can realizing stroke in X-axis Y direction and reach ± steady the rectilinear motion of 6.5mm, precision is up to 0.01mm。Thus the size of the gap changed quickly and accurately between electromagnet armature and electric magnet and then change electromagnetic actuation force, thus obtaining the displacement output of required submissive hinge precisely locating platform, drastically increase the accuracy of platform experiment。
Further, described manual adjustable frame slide unit platform can realize 360o coarse adjustment and ± 5o accurate adjustment on R direction of principal axis, switching screw can be adjusted to switch over by coarse-fine between coarse-fine tune。Improve the depth of parallelism of electromagnet armature and electric magnet front surface to the full extent, substantially increase the installation accuracy of whole locating platform and the convenience of experiment。
Further, the X-axis Y direction of described manual adjustable frame slide unit platform is adjusted respectively through X-direction differential head, Y direction differential head, and each direction is respectively provided with X-axis reverse locking screw and fixes slide unit platform with Y direction lock screw stay corresponding to compression;R direction of principal axis arranges the opposed stop screw bed knife that rightabout obtains vibration resistance, reliability is high from R direction of principal axis differential head。
Further, described manual adjustable frame slide unit platform all adopts aluminium alloy material AL7075-T651 except installing screw, and both pass through black anodizing and process, light weight, it is to avoid this manual adjustable frame slide unit platform affects the electromagnetic drive equipment driving effect to submissive hinge precisely locating platform。
Further, described Z axis right angle keyset adopts integral type aluminium block to process, and surface processes through black anodizing, and is symmetrically arranged with rib structure。Good solidness can be provided。Its pairwise orthogonal face Precision Machining, it is ensured that perpendicularity requirement。The rib structure of lateral symmetry distribution thereafter strengthens installation mechanical performance simultaneously。
Further, described electromagnetic driver is sucked type square electric Magnet, and running voltage is 24VDC, and power reaches 10W, well meets and drives requirement。
Further, the material that described platform cushion block adopts is aluminum alloy materials AL7075-T651, it it is the aluminum alloy materials of material identical with submissive hinge precisely locating platform, while not affecting experimental result, function well as the effect of cushion block, efficiently solve the problem that the differential head position of electromagnet armature and manual adjustable frame slide unit platform interferes。
Compared to existing technology, this utility model has the advantage that
Adopt the manual adjustable frame slide unit platform of XYR axle Three Degree Of Freedom as submissive hinge precisely locating platform supporting member, realize changing the initial position in submissive platform X-axis Y direction in reciprocating motion on the V-type rolling channel face of accurate grinding by the cylindrical roller of the arrangement that intersects, stroke is up to ± 6.5mm, can minimum for the rank of 0.01mm adjusts the distance between electromagnet armature and electric magnet, and then the size of driving force in change all directions, thus obtaining the displacement output of required submissive hinge precisely locating platform, greatly simplifie operating process, the controllability of R axle can ensure the depth of parallelism of electromagnet armature and square electric Magnet simultaneously, enhance precision and the reliability of platform displacement data。
The finished product that batch chemical conversion that the Z axis right angle keyset adopted in this utility model is produced by precision optical machinery company, pairwise orthogonal face Precision Machining, it is possible to ensure perpendicularity requirement。Process company compared to specialty, greatly reduce mismachining tolerance, it is ensured that the reliability of experimental result。On base, processing has locating piece simultaneously, it is possible to helps Z axis right angle keyset location and installation quickly and accurately, greatly reduces the set-up time while improving assembly precision。
The platform base peace cushion block that this utility model adopts all adopts anodized, makes aluminum surface can generate several micron oxide-film to hundreds of micron, improves corrosion resistance and the wearability of platform, also substantially improves the aesthetic property of platform simultaneously。
Accompanying drawing explanation
Fig. 1 is the schematic perspective view of the displacement adjustable accurate locating platform involved by this utility model embodiment。
Fig. 2 is the schematic top plan view of the displacement adjustable accurate locating platform involved by this utility model embodiment。
Fig. 3 is the cut-away view of the displacement adjustable accurate locating platform involved by this utility model embodiment。
Fig. 4 is the top view of the manual adjustable frame slide unit platform involved by this utility model embodiment。
In figure: 1. base;2. manual adjustable frame slide unit platform;3. opposed stop screw;4.X direction of principal axis differential head;5. coarse-fine tune switches screw;6.R direction of principal axis differential head;7.Y direction of principal axis differential head;8. platform cushion block;9. electromagnetic driver;10. electromagnet armature;11. submissive hinge precisely locating platform;12. locating piece;13.Z axle right angle keyset;14. working platform face;15.Y direction of principal axis lock screw;16.X axle reverse locking screw。
Detailed description of the invention
Below in conjunction with drawings and Examples, this utility model is further elaborated。
As shown in Figures 1 to 4; a kind of displacement adjustable accurate locating platform; including: playing the base 1 of supporting and protective effect, it is arranged on precision optics vibration-isolating platform by the equally distributed screwed hole of surrounding, and on it, also processing has the some screwed holes for installing other parts;Realize X-axis Y-axis displacement by intersection rotary rail and R axle rotates the manual adjustable frame slide unit platform 2 of fine setting on three degree of freedom direction, four sunk screws that described manual adjustable frame slide unit platform 2 is distributed by bottom even are affixed with base 1, and its work top is uniformly distributed several screwed holes;Platform cushion block 8, is installed on the working platform face 14 on adjustable frame displacement slide unit platform 2, supports submissive hinge precisely locating platform 11, and have the screwed hole for installing submissive hinge precisely locating platform 11;Submissive hinge precisely locating platform 11, can realize the displacement on X-axis Y-axis two-freedom direction driving of electromagnetic driver 9 under left and right, and it is threaded connection and is arranged on described platform cushion block 8;Four pieces of electromagnet armatures 10, it is threaded connection in four orientation being symmetrically mounted on described submissive hinge precisely locating platform 11, is symmetrically installed the effect that can also play counterpoise, eliminates the impact because displacement accuracy is produced by weight imbalance;Playing the Z axis right angle keyset 13 of supporting and switching effect, it is fixed on described platform base 1 by the locating piece 12 on lower screws and base;As the electromagnetic driver 9 driving equipment of whole platform, it is threaded connection and is arranged on described Z axis right angle keyset 13, just to described electromagnet armature 10, it is provided that stablize electromagnetic force。
Described manual adjustable frame slide unit platform 2 is had the guide rail of V-type rolling channel, roller cage cylindrical roller etc. by two and forms, the cylindrical roller arranged that intersects is moving back and forth on the V-type rolling channel face of accurate grinding, can realizing stroke in X-axis Y direction and reach ± steady the rectilinear motion of 6.5mm, precision is up to 0.01mm。Thus the size of the gap changed quickly and accurately between electromagnet armature and electric magnet and then change electromagnetic actuation force, thus obtaining the displacement output of required submissive hinge precisely locating platform, drastically increase the accuracy of platform experiment。
Described manual adjustable frame slide unit platform 2 can realize 360o coarse adjustment and ± 5o accurate adjustment on R direction of principal axis, can pass through coarse-fine tune switching screw 5 and switch between coarse-fine tune。Improve the depth of parallelism of electromagnet armature and electric magnet front surface to the full extent, substantially increase the installation accuracy of whole locating platform and the convenience of experiment。
The X-axis Y direction of described manual adjustable frame slide unit platform 2 is adjusted respectively through X-direction differential head 4, Y direction differential head 7, and each direction is respectively provided with X-axis reverse locking screw 16 and Y direction lock screw 15 compresses corresponding stay and fixes slide unit platform;R direction of principal axis arranges the opposed stop screw 3 bed knife that rightabout obtains vibration resistance, reliability is high from R direction of principal axis differential head 6。
Described manual adjustable frame slide unit platform 2 all adopts aluminium alloy AL7075-T651 except installing screw, and both pass through black anodizing process, light weight, it is to avoid this manual adjustable frame slide unit platform affects the electromagnetic driver 9 driving effect to submissive hinge precisely locating platform 11。
Described Z axis right angle keyset 13 adopts integral type aluminium block to process, and surface processes through black anodizing, and is symmetrically arranged with rib structure。Good solidness can be provided。Its pairwise orthogonal face Precision Machining, it is ensured that perpendicularity requirement。The rib structure of lateral symmetry distribution thereafter strengthens installation mechanical performance simultaneously。
Described electromagnetic driver 9 is sucked type square electric Magnet, and running voltage is 24VDC, and power reaches 10W, well meets and drives requirement。
The material that described platform cushion block 8 adopts is aluminum alloy materials AL7075-T651, it is and the aluminum alloy materials of the submissive identical material of hinge precisely locating platform 11, while not affecting experimental result, function well as the effect of cushion block, efficiently solve the problem that the differential head position of electromagnet armature 10 and manual adjustable frame slide unit platform interferes。
This utility model assembly precision is high, easily operates, it is achieved that the protection to submissive supporting construction, and platform entirety positioning precision is high, and simple in construction, overall dimensions is little, and cost is low, easy to operate, it may be achieved high-precision positioning requirements。
Described embodiment of the present utility model is only for clearly demonstrating this utility model example, and is not the restriction to embodiment of the present utility model。For those of ordinary skill in the field, the basis of described explanation can also make other changes in different forms。Here without also cannot all of embodiment be given exhaustive。All any amendment, equivalent replacement and improvement etc. made within spirit of the present utility model and principle, should be included within this utility model scope of the claims。

Claims (8)

1. a displacement adjustable accurate locating platform, it is characterised in that including: playing the base (1) of supporting and protective effect, it is arranged on precision optics vibration-isolating platform by the equally distributed screwed hole of surrounding;Realize X-axis Y-axis displacement by intersection rotary rail and R axle rotates manual adjustable frame slide unit platform (2) of fine setting on three degree of freedom direction, four sunk screws that described manual adjustable frame slide unit platform (2) is distributed by bottom even are affixed with base (1), and its work top is uniformly distributed several screwed holes;Platform cushion block (8), is installed on the working platform face (14) on adjustable frame displacement slide unit platform (2), supports submissive hinge precisely locating platform (11), and has the screwed hole for installing submissive hinge precisely locating platform (11);Submissive hinge precisely locating platform (11), can realize the displacement on X-axis Y-axis two-freedom direction driving of electromagnetic driver (9) under left and right, and it is threaded connection and is arranged on described platform cushion block (8);Four pieces of electromagnet armatures (10), it is threaded connection in four orientation being symmetrically mounted on described submissive hinge precisely locating platform (11);Playing Z axis right angle keyset (13) of supporting and switching effect, it is fixed on described platform base (1) by the locating piece (12) on lower screws and base;As the electromagnetic driver (9) driving equipment of whole platform, it is threaded connection and is arranged on described Z axis right angle keyset (13), just to described electromagnet armature (10)。
2. displacement adjustable accurate locating platform according to claim 1, it is characterized in that: described manual adjustable frame slide unit platform (2) by two there is the guide rail of V-type rolling channel, roller cage cylindrical roller forms, the cylindrical roller arranged that intersects is moving back and forth on the V-type rolling channel face of accurate grinding, can realizing stroke in X-axis Y direction and reach ± steady the rectilinear motion of 6.5mm, precision is up to 0.01mm。
3. displacement adjustable accurate locating platform according to claim 1, it is characterized in that: described manual adjustable frame slide unit platform (2) can realize 360o coarse adjustment and ± 5o accurate adjustment on R direction of principal axis, coarse-fine tune switching screw (5) can be passed through between coarse-fine tune and switch over。
4. displacement adjustable accurate locating platform according to claim 1, it is characterized in that: the X-axis Y direction of described manual adjustable frame slide unit platform (2) is adjusted respectively through X-direction differential head (4), Y direction differential head (7), and each direction is respectively provided with X-axis reverse locking screw 16 and Y direction lock screw 15 compresses corresponding stay and fixes slide unit platform;R direction of principal axis arranges opposed stop screw (3) and obtains bed knife from the rightabout of R direction of principal axis differential head (6)。
5. displacement adjustable accurate locating platform according to claim 1, it is characterised in that: described manual adjustable frame slide unit platform (2) all adopts aluminium alloy material AL7075-T651 except installing screw, and both passes through black anodizing process。
6. displacement adjustable accurate locating platform according to claim 1, it is characterised in that: described Z axis right angle keyset (13) adopts integral type aluminium block to process, and surface processes through black anodizing, and is provided with rib structure。
7. displacement adjustable accurate locating platform according to claim 1, it is characterised in that: described electromagnetic driver (9) is sucked type square electric Magnet, and running voltage is 24VDC, and power reaches 10W。
8. displacement adjustable accurate locating platform according to claim 1, it is characterised in that: the material that described platform cushion block (8) adopts is aluminum alloy materials AL7075-T651。
CN201521077996.2U 2015-12-20 2015-12-20 Adjustable precision positioning platform of displacement Expired - Fee Related CN205331721U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201521077996.2U CN205331721U (en) 2015-12-20 2015-12-20 Adjustable precision positioning platform of displacement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201521077996.2U CN205331721U (en) 2015-12-20 2015-12-20 Adjustable precision positioning platform of displacement

Publications (1)

Publication Number Publication Date
CN205331721U true CN205331721U (en) 2016-06-22

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CN201521077996.2U Expired - Fee Related CN205331721U (en) 2015-12-20 2015-12-20 Adjustable precision positioning platform of displacement

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105485481A (en) * 2015-12-20 2016-04-13 华南理工大学 Displacement-adjustable precision locating platform

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105485481A (en) * 2015-12-20 2016-04-13 华南理工大学 Displacement-adjustable precision locating platform

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160622

Termination date: 20161220