CN205313659U - Vacuum sputtering equipment and composite aluminum foil who obtains with its preparation - Google Patents
Vacuum sputtering equipment and composite aluminum foil who obtains with its preparation Download PDFInfo
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- CN205313659U CN205313659U CN201520585834.3U CN201520585834U CN205313659U CN 205313659 U CN205313659 U CN 205313659U CN 201520585834 U CN201520585834 U CN 201520585834U CN 205313659 U CN205313659 U CN 205313659U
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Abstract
The utility model discloses a vacuum sputtering equipment and composite aluminum foil who obtains with its preparation, include the vacuum sputtering room and locate indoor negative plate, the aluminium foil of vacuum sputtering unreels roller, aluminium foil wind -up roll, aluminium foil driving roller, be equipped with evacuation mouth and argon gas entry on the locular wall of vacuum sputtering room bottom, the indoor top of vacuum sputtering is located to the negative plate, with graphite alkene lump material on the negative plate, the aluminium foil unreels the roller and the aluminium foil wind -up roll is located unreeling and the rolling of aluminium foil is accomplished respectively to negative plate below both sides, the aluminium foil driving roller is located the aluminium foil unreels between roller and the aluminium foil wind -up roll for make aluminium foil horizontal drive below the negative plate, the graphite alkene lump material of being convenient for plates on the aluminium foil. The utility model discloses a graphite alkene layer is thin, and it is good to save raw and other materials and adsorption effect. For attached graphene film, there is not the one deck adhesion agent between aluminium foil and the graphite alkene layer, the product heat conductivility is better, and graphite alkene vacuum sputtering adheres to effectually.
Description
Technical field
This utility model relates to a kind of vacuum sputtering equipment, additionally, this utility model has further related to the clad aluminum foil prepared with above-mentioned vacuum sputtering equipment.
Background technology
Aluminium foil surface easily forms oxide layer one layer fine and close because of oxidation, and the heat conductivility of oxide layer is not good so that the heat conductivility of aluminium foil reduces, and adds one layer of heat-conducting layer on the surface of aluminium foil, fine can must improve its radiating effect. The method mostly adopting now patch graphene film, binding agent is required that comparison is high by the graphene film sticked, and while namely requiring to have good heat conductive performance, requires there is excellent caking property again, admittedly relatively costly when using.
Utility model content
The purpose of this utility model is the problem that the cost caused to overcome aluminium foil patch graphene film in prior art is high, a kind of vacuum sputtering equipment and the clad aluminum foil prepared with it are provided, the heat conductivility of the product not only aluminium foil that its heat conductivility is pasted with Graphene than in prior art is higher, and cost is low.
For solving above-mentioned technical problem, technology of the present utility model by the following technical solutions:
A kind of vacuum sputtering equipment, including vacuum sputtering room and the minus plate being located at described vacuum sputtering indoor, aluminium foil let off roll, aluminium foil wind-up roll, aluminium foil live-roller, described vacuum sputtering room bottom chamber wall is provided with vacuum orifice and Ar inlet, described minus plate is located at above vacuum sputtering indoor, with Graphene block on described minus plate, described aluminium foil let off roll and aluminium foil wind-up roll are located at both sides below described minus plate, it is respectively completed unreeling and rolling of aluminium foil, described aluminium foil live-roller is located between described aluminium foil let off roll and aluminium foil wind-up roll, for making aluminium foil in minus plate lower horizontal transmission, it is easy to Graphene block be plated on aluminium foil.
As preferably, in order to make transmission in the transmission process of aluminium foil more mild, increasing the effect plating Graphene on aluminium foil, described aluminium foil live-roller has four, and under working condition, the indoor vacuum of described vacuum sputtering is-0.1MPa, electrode voltage 1200～2500V.
As preferably, described Graphene block is the Graphene block that quality is loose.
A kind of clad aluminum foil, including aluminium foil body, the surface of described aluminium foil body is coated with graphene layer, and under duty, the vacuum of described vacuum sputtering equipment is-0.1MPa, and electrode voltage is 1200～2500V.
As preferably, the thickness of the described graphene layer being plated to is 1-2 micron.
As preferably, described Graphene block is the Graphene block that quality is loose.
Compared with prior art, this utility model has the beneficial effect that graphene layer of the present utility model is thin, saves raw material and advantages of good adsorption effect. Relative to the graphene film attached, not having one layer of sticker between aluminium foil and graphene layer, more preferably, Graphene vacuum sputtering, adhesion effect is good for product heat conductivility.
Accompanying drawing explanation
Fig. 1 is the structural representation of this utility model embodiment 1;
Fig. 2 is the structural representation of this utility model embodiment 2.
In figure: 1-vacuum sputtering room; 11-vacuum orifice; 12-Ar inlet; 2-minus plate; 3-aluminium foil let off roll; 4-aluminium foil wind-up roll; 5-aluminium foil live-roller; 6-Graphene block; 7-aluminum paper tinsel; 8-graphene layer.
Detailed description of the invention
Get information about this utility model for allowing those skilled in the art become apparent from, below in conjunction with accompanying drawing, this utility model is further described.
Embodiment 1
The vacuum sputtering equipment of the present embodiment is as shown in Figure 1, including vacuum sputtering room 1 and be located at the minus plate 2 in vacuum sputtering room 1, aluminium foil let off roll 3, aluminium foil wind-up roll 4, aluminium foil live-roller 5, vacuum sputtering room 1 bottom chamber wall is provided with vacuum orifice 11 and Ar inlet 12, above minus plate 2 is located in vacuum sputtering room 1, with Graphene block 6 on minus plate 2, aluminium foil let off roll 3 and aluminium foil wind-up roll 4 are located at both sides below minus plate 2, it is respectively completed unreeling and rolling of aluminium foil 7, aluminium foil live-roller 5 is located between aluminium foil let off roll 3 and aluminium foil wind-up roll 4, for making aluminium foil 7 in minus plate 2 lower horizontal transmission, it is easy to Graphene block 6 and is plated on aluminium foil 7, wherein, in order to make transmission in the transmission process of aluminium foil 7 milder, increase the effect plating Graphene on aluminium foil 7, aluminium foil live-roller 5 has four, under working condition, vacuum in vacuum sputtering room 1 is-0.1MPa, electrode voltage 1200～2500V.
Embodiment 2
The clad aluminum foil of the present embodiment includes shown in Fig. 2, and including aluminium foil 7 and the graphene layer 8 being plated on aluminium foil 7 surface, under duty, the vacuum in vacuum sputtering room 1 is-0.1MPa, electrode voltage 1200～2500V.
As preferably, the thickness of the graphene layer 8 being plated to is 1-2 micron.
The foregoing is only preferred embodiment of the present utility model; not in order to limit this utility model; all within spirit of the present utility model and principle, any amendment of making, equivalent replacement, improvement etc., should be included within protection domain of the present utility model.
Claims (6)
1. a vacuum sputtering equipment, it is characterized in that: include vacuum sputtering room and be located at the minus plate that described vacuum sputtering is indoor, aluminium foil let off roll, aluminium foil wind-up roll, aluminium foil live-roller, described vacuum sputtering room bottom chamber wall is provided with vacuum orifice and Ar inlet, described minus plate is located at above vacuum sputtering indoor, with Graphene block on described minus plate, described aluminium foil let off roll and aluminium foil wind-up roll are located at both sides below described minus plate, it is respectively completed unreeling and rolling of aluminium foil, described aluminium foil live-roller is located between described aluminium foil let off roll and aluminium foil wind-up roll, for making aluminium foil in minus plate lower horizontal transmission, it is easy to Graphene block be plated on aluminium foil.
2. vacuum sputtering equipment according to claim 1, it is characterised in that: described aluminium foil live-roller has four.
3. vacuum sputtering equipment according to claim 1, it is characterised in that: described Graphene block is the Graphene block that quality is loose.
4. the clad aluminum foil prepared with the vacuum sputtering equipment described in any one of claims 1 to 3, it is characterised in that: including aluminium foil body, the surface of described aluminium foil body is coated with graphene layer.
5. clad aluminum foil according to claim 4, it is characterised in that: the thickness of the described graphene layer being plated to is 1-2 micron.
6. clad aluminum foil according to claim 4, it is characterised in that: described Graphene block is the Graphene block that quality is loose.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520585834.3U CN205313659U (en) | 2015-08-06 | 2015-08-06 | Vacuum sputtering equipment and composite aluminum foil who obtains with its preparation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520585834.3U CN205313659U (en) | 2015-08-06 | 2015-08-06 | Vacuum sputtering equipment and composite aluminum foil who obtains with its preparation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205313659U true CN205313659U (en) | 2016-06-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520585834.3U Active CN205313659U (en) | 2015-08-06 | 2015-08-06 | Vacuum sputtering equipment and composite aluminum foil who obtains with its preparation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205313659U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106705723A (en) * | 2016-12-08 | 2017-05-24 | 苏州鸿凌达电子科技有限公司 | Heat pipe core, heat pipe and sputtering process of heat pipe |
| CN107574469A (en) * | 2017-01-03 | 2018-01-12 | 丁彦天 | A kind of anticorrosion Mg alloy surface anode oxidation process |
-
2015
- 2015-08-06 CN CN201520585834.3U patent/CN205313659U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106705723A (en) * | 2016-12-08 | 2017-05-24 | 苏州鸿凌达电子科技有限公司 | Heat pipe core, heat pipe and sputtering process of heat pipe |
| CN107574469A (en) * | 2017-01-03 | 2018-01-12 | 丁彦天 | A kind of anticorrosion Mg alloy surface anode oxidation process |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |