CN205263392U - Piezoelectricity motor drive's automatic control microscope cargo platform - Google Patents

Abstract

The utility model provides a piezoelectricity motor drive's automatic control microscope cargo platform, relates to and is used for placing the cargo platform who is surveyd the thing. Including objective table, piezoelectricity motor, feedback device and control circuit, the objective table is equipped with top shoe, intermediate lamella and bottom plate from top to bottom, the sliding fit who constitutes along Y axle direction is connected with the intermediate lamella through last guide rail to the top shoe, and the intermediate lamella passes through the lower guideway with the bottom plate and is connected the sliding fit who constitutes along X axle direction, on the stator of first piezoelectricity motor was fixed in the intermediate lamella, the active cell and the top shoe of first piezoelectricity motor were connected, on the stator of second piezoelectricity motor was fixed in the bottom plate, the active cell of second piezoelectricity motor was connected with the intermediate lamella, feedback device is equipped with the encoder, and on the first coding ware was fixed in the intermediate lamella, on the second encoder was fixed in the bottom plate, control circuit included microprocessor, and position detected signal first, the second encoder transmits to microprocessor signal input part, and the microprocessor control signal is transmitted respectively to first, second piezoelectricity motor.

Description

The automatic control microscope article carrying platform that a kind of piezoelectric motor drives

Technical field

The utility model relates to a kind of for placing the article carrying platform that is observed thing, especially relates to a kind of piezoelectric motor driving oneselfThe moving microscope article carrying platform of controlling.

Background technology

Along with the raising of scientific and technological level, microscope is more and more automatic and intelligent, and the automatic demand for control of objective table is also progressively carriedHigh; The microscope carrier that tradition adopts servomotor or stepper motor (needs screw mandrel, spiral shell because of the reason of structure and type of driveFemale etc.) can produce more serious hysterisis error, reduce accuracy of observation, affect result of use.

Summary of the invention

The purpose of this utility model is to provide a kind of precision and is obviously better than traditional stepper motor, directly driving objective table motion, withoutUnnecessary frame for movement, poor without backhaul, the automatic control microscope loading that the piezoelectric motor that speed stability significantly improves drives is flatPlatform.

The utility model comprises objective table, the first piezoelectric motor, the second piezoelectric motor, feedback device and control circuit;

Described objective table is provided with top shoe, intermediate plate and base plate from top to bottom successively; Top shoe surface is as loading plane, upper cunningPiece and intermediate plate connect and compose along being slidably matched of Y direction by upper rail, and intermediate plate and base plate connect and compose by lower guidewayAlong being slidably matched of X-direction; The stator of the first piezoelectric motor is fixed on intermediate plate, the mover of the first piezoelectric motor and upper cunningPiece connects; The stator of the second piezoelectric motor is fixed on base plate, and the mover of the second piezoelectric motor is connected with intermediate plate; Feedback deviceBe provided with the first encoder, the second encoder, the first encoder is fixed on intermediate plate, and the second encoder is fixed on base plate, controlCircuit processed comprises microprocessor, and the position detection signal of the first encoder and the second encoder is passed to microprocessor signals input,Microprocessor control signal is passed to respectively the first piezoelectric motor and the second piezoelectric motor.

Described microprocessor adopts the embedded controllers such as digital signal processor (DSP) or single-chip microcomputer

Compared with the prior art, the utility model beneficial effect is as follows:

The utility model is by changing drive motors on driving objective table, replaces stepper motor with piezoelectric motor, drives platform to carry outX-axis and Y-axis motion, coordinate guide rail and encoder position to detect the high accuracy control of implementation platform.

Piezoelectric motor can directly drive platform to carry out rectilinear motion, does not need screw mandrel and nut, avoided mechanical hysterisis error,Save the maintenance work of mechanical part, ensure higher kinematic accuracy, reduced product working service cost simultaneously. Piezoelectric motorThan stepper motor, can be under off-position self-locking rapidly, and remain on for a long time same position. Feedback device comprises volumeCode device and photoelectric position limit device: encoder detects the relative position of objective table, because the precision of encoder is higher, can improve positionControl accuracy, repetitive positioning accuracy is better than 1 μ m, and highest resolution can reach 0.005 μ m; Use photoelectric position limit device monitoring XAxle and Y-axis two ends, if objective table arrives two ends, stop motion. For further improving security of system, also can add machinerySpacing, software limit function, forms 3 layers of position limitation protection.

When the utility model is used for microscope carrier system works, host computer sends movement instruction, delivers to control circuit. ControlCircuit, through computing, generates control signal. Control signal, through power amplification, drives the switching tube of main circuit, and then controls and pressElectricity motor, objective table carries out the motion of X-axis and Y-axis thereupon. In motion process, encoder detects the position of objective table, by positionPut signal feedback to control circuit, control circuit, according to position feed back signal Correction and Control signal, forms closed-loop control, improves systemThe control accuracy of system.

Obviously, the utlity model has following advantage:

1. piezoelectric motor control accuracy is better than traditional stepper motor.

2. the direct driving objective table motion of piezoelectric motor, without unnecessary frame for movement, poor without backhaul.

3. piezoelectric motor has the function of cutting off self-lock, and remains on same position for a long time.

4. piezoelectric motor utilizes inverse piezoelectric effect motion, and the electromagnetic field in space can not cause interference to it, and itself can not motor yetBecome electromagnetic disturbance source.

Brief description of the drawings

Fig. 1 is the decomposition texture schematic diagram of the utility model embodiment.

Fig. 2 is the assembly structure schematic diagram of the utility model embodiment.

Detailed description of the invention

Referring to Fig. 1 and 2, the utility model comprise objective table, the first piezoelectric motor 2, the second piezoelectric motor 3,Feedback device and control circuit;

Described objective table is provided with top shoe 11, intermediate plate 12 and base plate 13 from top to bottom successively; Top shoe 11 surfaces are as loadingPlane, top shoe 11 and intermediate plate 12 connect and compose along being slidably matched of Y direction by upper rail 14, intermediate plate 12 withBase plate 13 connects and composes being slidably matched along X-direction by lower guideway 15; In the middle of the stator of the first piezoelectric motor 2 is fixed onOn plate 12, the mover of the first piezoelectric motor 2 is connected with top shoe 11 by fricting strip 61; The stator of the second piezoelectric motor 3 is solidOn base plate 13, the mover of the second piezoelectric motor 3 is connected with intermediate plate 12 by fricting strip 62; Feedback device is provided with firstEncoder 41 and the second encoder 42, the first encoders 41 are fixed on intermediate plate 12, and the second encoder 42 is fixed on base plateOn 13, control circuit comprises microprocessor, and the position detection signal of the first encoder 41 and the second encoder 42 is passed to micro-placeReason device signal input part, microprocessor control signal is passed to respectively the first piezoelectric motor 2 and the second piezoelectric motor 3.

Described microprocessor adopts digital signal processor (DSP) (also can adopt single-chip microcomputer etc.) embedded controller.

Claims (2)

1. the automatic control microscope article carrying platform that piezoelectric motor drives, is characterized in that, comprises objective table, the first piezoelectricityMotor, the second piezoelectric motor, feedback device and control circuit;

Described objective table is provided with top shoe, intermediate plate and base plate from top to bottom successively; Top shoe surface is as loading plane, upper cunningPiece and intermediate plate connect and compose along being slidably matched of Y direction by upper rail, and intermediate plate and base plate connect and compose by lower guidewayAlong being slidably matched of X-direction; The stator of the first piezoelectric motor is fixed on intermediate plate, the mover of the first piezoelectric motor and upper cunningPiece connects; The stator of the second piezoelectric motor is fixed on base plate, and the mover of the second piezoelectric motor is connected with intermediate plate; Feedback deviceBe provided with the first encoder, the second encoder, the first encoder is fixed on intermediate plate, and the second encoder is fixed on base plate, controlCircuit processed comprises microprocessor, and the position detection signal of the first encoder and the second encoder is passed to microprocessor signals input,Microprocessor control signal is passed to respectively the first piezoelectric motor and the second piezoelectric motor.

2. the automatic control microscope article carrying platform that a kind of piezoelectric motor drives as claimed in claim 1, is characterized in that, described inMicroprocessor adopts digital signal processor or single-chip microcomputer.