CN205258652U - A frequency conversion magnetic field device for controlling vertical pulling method silicon single crystal oxygen content - Google Patents
A frequency conversion magnetic field device for controlling vertical pulling method silicon single crystal oxygen content Download PDFInfo
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- CN205258652U CN205258652U CN201521016961.8U CN201521016961U CN205258652U CN 205258652 U CN205258652 U CN 205258652U CN 201521016961 U CN201521016961 U CN 201521016961U CN 205258652 U CN205258652 U CN 205258652U
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- magnetic field
- plc controller
- oxygen content
- single crystal
- encoder
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Abstract
The utility model discloses a frequency conversion magnetic field device for controlling vertical pulling method silicon single crystal oxygen content. Frequency conversion magnetic field device includes PLC controller, encoder and touch -sensitive screen, the encoder is connected to single crystal length gauge measurer, and the PLC controller is connected to the encoder, and the PLC controller triggers the board with magnetic field respectively, the touch -sensitive screen is connected, and magnetic field is triggered the board and is connected the automatically controlled cabinet in magnetic field, and the PLC controller is connected to the automatically controlled cabinet in magnetic field. The utility model discloses utilize frequency conversion magnetic field device to realize the control to magnetic field intensity not only having reduced the magnetic field energy consumption, can control the single crystal oxygen content again in addition. PLC after setting up can carry out real time monitoring to field current to realize gradualling change to magnetic field intensity, mild regulation if appear reporting to the police, accessible time feeds back to PLC, realizes magnetic field self -protection in order to close magnetic field.
Description
Technical field
The utility model relates to the auxiliary equipment of silicon single crystal production equipment, especially relates to a kind of for controlling the variable frequency magnetic field device of crystal for straight drawing monocrystal oxygen content.
Background technology
Crystal for straight drawing monocrystal is magnetic field crystal pulling technique (MCZ), compares non-magnetic field technique (CZ) and has following pluses and minuses: advantage is: 1) monocrystalline oxygen content can be controlled at reduced levels (< 8E17atm/cm3)；
2) single crystal orientation uniformity is more excellent; 3) indirectly control defect generation probability by controlling oxygen content.
Its shortcoming is: 1) cause the increase of fixed cost due to increase magnetic field; 2) in crystal pulling process, opening magnetic field causes energy consumption to increase. Present stage adds in the vertical pulling method product in magnetic field, and when magnetic field intensity is stabilized in 800 Gauss (magnetic field power 5KW/h), magnetic field energy consumption on average accounts for 1.5% of blow-on cost. Therefore, how to reduce magnetic field energy consumption, and can better to control again monocrystalline oxygen content be the problem that those skilled in the art research and develop.
Summary of the invention
In view of above-mentioned prior art present situation, it is a kind of for controlling the variable frequency magnetic field device of crystal for straight drawing monocrystal oxygen content that the utility model provides. Utilize variable frequency magnetic field device control crystal for straight drawing monocrystal oxygen content, by the code device signal of induction monocrystalline length measuring, change magnetic field intensity according to monocrystalline length, thereby obtain wanting the monocrystalline oxygen content obtaining.
The technical scheme that the utility model is taked is: a kind ofly it is characterized in that for controlling the variable frequency magnetic field device of crystal for straight drawing monocrystal oxygen content, described variable frequency magnetic field device comprises PLC controller, encoder and touch-screen; Monocrystalline length measuring connects encoder, and encoder connects PLC controller, and PLC controller is connected with magnetic field trigger board, touch-screen respectively, and magnetic field trigger board connects magnetic field electrical control cubicles, and magnetic field electrical control cubicles connects PLC controller.
The beneficial effect that the utility model produces is: utilize variable frequency magnetic field device to realize the control to magnetic field intensity, not only reduced magnetic field energy consumption, and can control monocrystalline oxygen content again. Realize the setting to PLC by touch-screen; PLC after arranging can monitor in real time to field supply; and magnetic field intensity is realized to gradual change; mild adjusting; if reporting to the police in use appears in field system; warning message can also be fed back to PLC in time, realize magnetic field self-protection to close magnetic field.
Brief description of the drawings
Fig. 1 is variable frequency magnetic field device catenation principle block diagram of the present utility model.
Detailed description of the invention
Below in conjunction with drawings and Examples, the utility model is described in further detail:
With reference to Fig. 1, comprise PLC controller, encoder and touch-screen for the variable frequency magnetic field device of controlling crystal for straight drawing monocrystal oxygen content; Monocrystalline length measuring connects encoder, and encoder connects PLC controller, and PLC controller is connected with magnetic field trigger board, touch-screen respectively, and magnetic field trigger board connects magnetic field electrical control cubicles, and magnetic field electrical control cubicles connects PLC controller.
Utilize the method for variable frequency magnetic field device control crystal for straight drawing monocrystal oxygen content to be: the monocrystalline length value in preparation process to be arranged to several nodes, the respectively corresponding field strength values of the monocrystalline length value of each node; In single crystal preparation process, the PLC controller of variable frequency magnetic field device reads pulse signal in real time from encoder, this pulse signal is current monocrystalline length value, according to a corresponding monocrystalline length value of pulse signal, the pulse value reading is calculated to current monocrystalline length, calculate current magnetic field intensity according to current monocrystalline length gauge, and show by touch-screen; PLC controller obtains the magnetic field intensity in current single crystal preparation process by magnetic field trigger board in real time simultaneously, and shows by touch-screen; Then taking the monocrystalline length value of each node respectively a corresponding field strength values as foundation, regulate controlling magnetic field intensity.
The monocrystalline length value in preparation process is arranged seven nodes by the method, the monocrystalline length value of each node respectively a corresponding field strength values as following table:
| Monocrystalline length value | Magnetic field intensity | |
| First node | 100mm | 1200GS |
| Section Point | 300mm | 1000GS |
| The 3rd node | 500mm | 700GS |
| The 4th node | 700mm | 400GS |
| The 5th node | 900mm | 600GS |
| The 6th node | 1100mm | 800GS |
The utility model utilizes the technological process of variable frequency magnetic field device control crystal for straight drawing monocrystal oxygen content as follows:
(1) choose intrinsic raw material (N or P type raw material that resistivity is greater than 2000 ohm), and it is melted taking material power as 75 ~ 120kw, the material time is 3 ~ 8 hours.
(2) step (1) is added to phosphorus alloy adulterant (concentration is 0.0001 ~ 0.001) by normal doping (100 ~ 2000mg), use conventional furnace pressure 14torr ~ 20torr to toast 30 minutes.
(3), after having toasted, use 800 gauss magnetic field intensity to carry out crystal pulling, in isometrical process, by the code device signal of induction monocrystalline length measuring, obtain current monocrystalline length, change magnetic field intensity according to monocrystalline length, thereby obtain wanting the monocrystalline oxygen content obtaining.
The utility model is provided with automatic mode on touch screen operation panel, parameter arranges button, realizes the switch of Magnetic Field Automatic Control by button. In isometrical process, can select to adopt " automatic mode " or " parameter setting " two kinds of modes to control, if select " automatic mode ", touch screen interface shows the corresponding magnetic field intensity of monocrystalline length of each node in seven nodes, realizes automatically and regulating. If select parameter setting, carry out manual adjustments, expect that monocrystalline oxygen content is higher, just reduce magnetic field intensity, expect that monocrystalline oxygen content is lower, just increase magnetic field intensity.
The utility model can show current monocrystalline length value, magnetic field setting value, magnetic field feedback value on touch screen operation panel, draws change curve and is presented on touch-screen according to the magnetic field intensity of monocrystalline production technology setting.
The PLC of variable frequency magnetic field device reads out pulse signal from encoder, this pulse signal is actual is monocrystalline length value, then calculate corresponding how many mm of 1 pulse, then when keeping at every turn, press and start automatic control, make to remember Changqing 0, PLC can, according to the pulse value counting reading, calculate concrete monocrystalline length, then PLC coding, calculates the control signal of controlling magnetic field intensity.
The encoder model that variable frequency magnetic field device adopts is E6B2-CWZ6C.
Claims (1)
1. for controlling a variable frequency magnetic field device for crystal for straight drawing monocrystal oxygen content, it is characterized in that, described variable frequency magnetic field device comprises PLC controller, encoder and touch-screen; Monocrystalline length measuring connects encoder, and encoder connects PLC controller, and PLC controller is connected with magnetic field trigger board, touch-screen respectively, and magnetic field trigger board connects magnetic field electrical control cubicles, and magnetic field electrical control cubicles connects PLC controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521016961.8U CN205258652U (en) | 2015-12-09 | 2015-12-09 | A frequency conversion magnetic field device for controlling vertical pulling method silicon single crystal oxygen content |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521016961.8U CN205258652U (en) | 2015-12-09 | 2015-12-09 | A frequency conversion magnetic field device for controlling vertical pulling method silicon single crystal oxygen content |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205258652U true CN205258652U (en) | 2016-05-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521016961.8U Expired - Fee Related CN205258652U (en) | 2015-12-09 | 2015-12-09 | A frequency conversion magnetic field device for controlling vertical pulling method silicon single crystal oxygen content |
Country Status (1)
| Country | Link |
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| CN (1) | CN205258652U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114150372A (en) * | 2022-02-10 | 2022-03-08 | 杭州中欣晶圆半导体股份有限公司 | Transverse magnetic field variable frequency current control system and single crystal growth defect control method |
-
2015
- 2015-12-09 CN CN201521016961.8U patent/CN205258652U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114150372A (en) * | 2022-02-10 | 2022-03-08 | 杭州中欣晶圆半导体股份有限公司 | Transverse magnetic field variable frequency current control system and single crystal growth defect control method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160525 Termination date: 20161209 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |