CN205187875U - A equipment that is used for CVD to prepare graphite alkene in succession - Google Patents
A equipment that is used for CVD to prepare graphite alkene in succession Download PDFInfo
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- CN205187875U CN205187875U CN201521049268.0U CN201521049268U CN205187875U CN 205187875 U CN205187875 U CN 205187875U CN 201521049268 U CN201521049268 U CN 201521049268U CN 205187875 U CN205187875 U CN 205187875U
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- roller bearing
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- continuous production
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
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Abstract
The utility model discloses an equipment that is used for CVD to prepare graphite alkene in succession, including tube -like stove and quartzy pipeline, quartzy pipeline passes the tube -like stove, the both ends of quartzy pipeline are equipped with first flange and second flange respectively, the outside of first flange is equipped with into the gas port, the inboard of first flange is equipped with first support, the outside of second flange is equipped with the gas outlet, the inboard of second flange is equipped with the second support, the mutually sidewise punishment of first support and second support do not is equipped with first roller bearing and second roller bearing, and flexible basement winding is in on the first roller bearing and pull to the second roller bearing, the motor drives the second roller bearing and rotates, first roller bearing and second roller bearing are detachable roller bearing. The utility model discloses based on the tube -like stove, through the mode that makes the continuous by heating of basement district avoid heating up repeatedly cooling and change the process of basement, improve the efficiency of graphite alkene preparation, reduce the energy consumption simultaneously, improving energy efficiency.
Description
Technical field
The utility model relates to a kind of equipment preparing Graphene, particularly relates to a kind of equipment for CVD continuous production Graphene.
Background technology
2004, Univ Manchester UK physicist An Deliegaimu and Constantine Nuo Woxiaoluofu, novel nano-material " Graphene " is isolated in success from graphite, and confirm that it can Individual existence, therefore two people also obtain Nobel Prize in physics in 2010 jointly.Graphene a kind ofly forms with sp2 hybridized orbital the flat film that hexangle type is honeycomb lattice by carbon atom, only has the two-dimensional material of a carbon atom thickness.Graphene has excellent mechanics, electrical and optical properties: Stability Analysis of Structures, very pliable and tough, also harder than diamond, taller upper 100 times of the iron and steel that strength ratio is best in the world; Almost completely transparent, but very fine and close, waterproof, airtight, even if the minimum helium of atomic size also cannot penetrate; Conduct electricity very well, in Graphene, the movement velocity of electronics reaches 1/300 of the light velocity, and electroconductibility has exceeded any traditional electro-conductive material; The similar graphite surface of chemical property, can the various atom of adsorption and desorption and molecule, resists the ability of strong acid and strong base in addition.At present, the preparation method of Graphene mainly contains following several: micromechanics stripping method, liquid phase ultrasonic method, epitaxial growth method, chemical Vapor deposition process and chemistry redox method.Wherein, chemical Vapor deposition process (CVD) and oxidation reduction process are considered to the method being hopeful realization production in enormous quantities most.
Prepare in Graphene process in the actual CVD that utilizes, due to needs hot environment, thus need a large amount of intensifications and temperature fall time, waste a large amount of time; And because body of heater heating region is limited, need replacing substrate repeatedly, cause output to reduce.Whole process wastes time and energy.It is exactly by tube furnace that at present conventional CVD prepares Graphene, passes into carbon-containing atmosphere under the high temperature conditions, substrate deposits Graphene, controls the thickness of Graphene by controlling depositing time and the carbonaceous gas amount that passes into.But current used equipment all can not realize the continuous production of Graphene, deposition substrate limited area, need cooling after primary depositing, take out the sample deposited, change new substrate, heating repeats above-mentioned steps again, takes time and effort.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of equipment for CVD continuous production Graphene, based on tube furnace, avoids repeatedly heating up lower the temperature and change the process of substrate by the mode making substrate continue through heating zone.
In order to solve the problems of the technologies described above, the utility model adopts following technical scheme: a kind of equipment for CVD continuous production Graphene, comprise tube furnace and quartz pipe, described quartz pipe is through described tube furnace, the two ends of described quartz pipe are respectively equipped with the first flange and the second flange, the outside of described first flange is provided with air intake, and the inner side of described first flange is provided with the first support; The outside of described second flange is provided with air outlet, and the inner side of described second flange is provided with the second support; Described first support and the second support opposite sides place are respectively equipped with the first roller bearing and the second roller bearing, and substrate is wrapped on described first roller bearing, and by described substrate traction on the second roller bearing, driven by motor second roller bearing rotates.
As the further optimization of such scheme, described motor and speed control system are electrically connected, and described speed control system is for arranging the rotating speed of motor thus controlling carbon atom at suprabasil depositing time.
As the further optimization of such scheme, described first roller bearing and the second roller bearing are detachable roller bearing.
As the further optimization of such scheme, be located in the described quartz pipe of the described tube furnace left and right sides and be equipped with pipe plug, corresponding structure the first thermal insulation areas and the second thermal insulation areas.
As the further optimization of such scheme, described substrate is Copper Foil or foam nickel material.
Compared with the prior art, the beneficial effect of a kind of equipment for CVD continuous production Graphene of the present utility model is embodied in:
1), a kind of equipment for CVD continuous production Graphene of the present utility model, adopt the mode of substrate winding to increase depositional area, therefore reduce and change the number of times of substrate.
2) compared with the method, preparing Graphene with traditional C VD, the utility model is based on tube furnace, avoid repeatedly heating up by the mode making substrate continue through heating zone and lower the temperature and change the process of substrate, improve efficiency prepared by Graphene, reduce energy consumption simultaneously, improve energy utilization rate.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of equipment for CVD continuous production Graphene of the present utility model.
Being labeled as of each parts in accompanying drawing: air intake 1, first flange 2, first support 3, first roller bearing 4, substrate 5, first thermal insulation areas 6, tube furnace 7, second thermal insulation areas 8, second roller bearing 9, second support 10, motor 11, air outlet 12, second flange 13, speed control system 14.
Embodiment
Below in conjunction with accompanying drawing, the utility model is further described:
See the structural representation that Fig. 1, Fig. 1 are a kind of equipment for CVD continuous production Graphene of the present utility model.A kind of equipment for CVD continuous production Graphene, comprise tube furnace 7 and quartz pipe, quartz pipe is through tube furnace 7, and the two ends of quartz pipe are respectively equipped with the first flange 2 and the second flange 13, the outside of the first flange 2 is provided with air intake 1, and the inner side of the first flange 2 is provided with the first support 3; The inner side that the outside of the second flange 13 is provided with air outlet 12, second flange 13 is provided with the second support 10; First support 3 and the second support 10 opposite sides place are respectively equipped with the first roller bearing 4 and the second roller bearing 9, substrate 5 connects the first roller bearing 4 and the second roller bearing 9, second roller bearing 9 rotation can make to be wrapped in the substrate 5 on the first roller bearing 4, by being wrapped on the second roller bearing 9 behind high temperature deposition district, motor 11 drives the second roller bearing 9 to rotate, for transmitting substrate 5.Motor 11 and speed control system 14 are electrically connected, and are arranged the rotating speed of motor by described speed control system 14.
Be located in the described quartz pipe of tube furnace 7 left and right sides and be equipped with pipe plug, corresponding structure the first thermal insulation areas 6 and the second thermal insulation areas 8, prevents the temperature in quartz pipe to scatter and disappear too fast, avoids power loss.In this preferred embodiment, substrate 5 is the substrate of copper foil material.
The workflow of a kind of equipment for CVD continuous production Graphene of the present utility model is: the first roller bearing 4 being wound with flexible substrates 5 is arranged on the first support 3, adjust angle and the first flange 2 is installed, substrate 5 drawn to the second roller bearing 9 and fix, second roller bearing 9 is arranged on the second support 10, same adjustment angle installs the second flange 13, makes quartz pipe system be in sealed state, after vacuum gas washing, start heating, to temperature required; After speed control system 14 setting speed, pass into carbonaceous gas, and starter motor 11, start to rotate, drive the second roller bearing 9 to rotate, thus transmission deposits the substrate of Graphene; Stopping heating and air inlet after treating substrate 5 release on first roller bearing 4 at air intake 1 place, after temperature is reduced to room temperature, taking off the second roller bearing 9 on second flange 13 at air outlet place, for deposited the substrate of Graphene on it.
A kind of equipment for CVD continuous production Graphene of the present utility model, the mode of substrate winding is adopted to increase depositional area, the utility model does not need repeatedly to change substrate, reduces the time consumed because of heating and cooling and reduces heating repeatedly and the time of cooling, reduce the number of times changing substrate.A kind of equipment for CVD continuous production Graphene of the present utility model can improve efficiency prepared by Graphene, falls low-energy waste simultaneously, improves energy utilization rate.
The foregoing is only preferred embodiment of the present utility model, not in order to limit the utility model, all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.
Claims (5)
1. the equipment for CVD continuous production Graphene, comprise tube furnace and quartz pipe, it is characterized in that: described quartz pipe is through described tube furnace, the two ends of described quartz pipe are respectively equipped with the first flange and the second flange, the outside of described first flange is provided with air intake, and the inner side of described first flange is provided with the first support; The outside of described second flange is provided with air outlet, and the inner side of described second flange is provided with the second support; Described first support and the second support opposite sides place are respectively equipped with the first roller bearing and the second roller bearing, and substrate is wrapped on described first roller bearing and by described substrate traction on the second roller bearing, driven by motor second roller bearing rotates.
2. a kind of equipment for CVD continuous production Graphene according to claim 1, it is characterized in that, described motor and speed control system are electrically connected, and described speed control system is for arranging the rotating speed of motor thus controlling carbon atom at suprabasil depositing time.
3. a kind of equipment for CVD continuous production Graphene according to claim 1, is characterized in that, described first roller bearing and the second roller bearing are detachable roller bearing.
4. a kind of equipment for CVD continuous production Graphene according to claim 1, is characterized in that, is located in the described quartz pipe of the described tube furnace left and right sides and is equipped with pipe plug, corresponding structure the first thermal insulation areas and the second thermal insulation areas.
5. a kind of equipment for CVD continuous production Graphene according to claim 1, is characterized in that, described substrate is Copper Foil or foam nickel material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521049268.0U CN205187875U (en) | 2015-12-15 | 2015-12-15 | A equipment that is used for CVD to prepare graphite alkene in succession |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521049268.0U CN205187875U (en) | 2015-12-15 | 2015-12-15 | A equipment that is used for CVD to prepare graphite alkene in succession |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205187875U true CN205187875U (en) | 2016-04-27 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521049268.0U Expired - Fee Related CN205187875U (en) | 2015-12-15 | 2015-12-15 | A equipment that is used for CVD to prepare graphite alkene in succession |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205187875U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108463013A (en) * | 2018-04-02 | 2018-08-28 | 东海县晶盛源硅微粉有限公司 | A kind of milky white silica tube |
-
2015
- 2015-12-15 CN CN201521049268.0U patent/CN205187875U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108463013A (en) * | 2018-04-02 | 2018-08-28 | 东海县晶盛源硅微粉有限公司 | A kind of milky white silica tube |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160427 Termination date: 20191215 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |