CN209507591U - A kind of plasma enhancing carbon nano tube growth equipment - Google Patents
A kind of plasma enhancing carbon nano tube growth equipment Download PDFInfo
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- CN209507591U CN209507591U CN201920077387.9U CN201920077387U CN209507591U CN 209507591 U CN209507591 U CN 209507591U CN 201920077387 U CN201920077387 U CN 201920077387U CN 209507591 U CN209507591 U CN 209507591U
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- device framework
- radio
- quartz ampoule
- preheating furnace
- power supply
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 27
- 239000002041 carbon nanotube Substances 0.000 title claims abstract description 21
- 229910021393 carbon nanotube Inorganic materials 0.000 title claims abstract description 21
- 230000002708 enhancing effect Effects 0.000 title claims abstract description 10
- 238000010438 heat treatment Methods 0.000 claims abstract description 29
- 239000003708 ampul Substances 0.000 claims abstract description 22
- 239000010453 quartz Substances 0.000 claims abstract description 22
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 22
- 230000000740 bleeding effect Effects 0.000 claims abstract description 14
- 239000003054 catalyst Substances 0.000 claims description 24
- 210000000481 breast Anatomy 0.000 claims description 3
- 239000000203 mixture Substances 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 15
- 239000007789 gas Substances 0.000 description 15
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 10
- 229910052799 carbon Inorganic materials 0.000 description 9
- 238000001704 evaporation Methods 0.000 description 7
- 230000008020 evaporation Effects 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 229910052742 iron Inorganic materials 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 3
- 150000001721 carbon Chemical group 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000002045 lasting effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000033228 biological regulation Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000002207 thermal evaporation Methods 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002048 multi walled nanotube Substances 0.000 description 1
- 239000011943 nanocatalyst Substances 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Carbon And Carbon Compounds (AREA)
Abstract
It include radio frequency control instrument the utility model discloses a kind of plasma enhancing carbon nano tube growth equipment, air inlet, coil, preheating furnace, heating furnace, touch control screen, bleeding point, sliding rail, device framework and radio-frequency power supply, quartz ampoule is fixed with by two supports on the top table top of the device framework, one end of the quartz ampoule is connect with vacuum flange, air inlet is provided on vacuum flange, and quartz ampoule sequentially passes through radio-frequency power supply, preheating furnace and heating furnace, the radio-frequency power supply, preheating furnace and heating furnace are arranged at the top of device framework, the other end of the quartz ampoule is connect with vacuum flange, bleeding point is provided on vacuum flange, being horizontally disposed on table top at the top of the device framework has sliding rail, preheating furnace placement is slided on the slide rail, touch control screen is fixedly installed on the top table top of the device framework, this is practical It is novel, so that Fe composition constant, controlled diameter can preferably control the growth quality of carbon nanotube.
Description
Technical field
The utility model relates to PE, the dual promotion carbon nano tube growth equipment technical field of catalyst, and in particular to a kind of
Plasma enhancing carbon nano tube growth equipment.
Background technique
The carbon-source gas containing thin film composition atom is ionized by radio-frequency power supply, generates brightness being partially formed plasma
Optical phenomenon, and plasma chemistry activity is very strong, it is easy to it reacts, is deposited in the substrate for cover catalyst film desired
Carbon nanotube.
In order to carry out chemical reaction can at a lower temperature, the activity of plasma is utilized to promote to react, mistake
Strong plasma enhances the bombardment of substrate surface, increases the internal stress of film and substrate, increases the internal flaws such as lattice, due to
Nanocatalyst and CNT are destroyed by high-energy ion bombardment bring ion induction, can not be kept away again in low pressure PECVD growth
The appearance CNF and MWCNT exempted from；Quality of forming film is caused to decline.
It is existing on the Al matrix of Fe plated film come grow carbon nanotube technique in, catalyst Fe plated film be single layer, due to
Carbon-coating exists in catalyst surface, and catalyst is made to lose activity, can only grow single layer or few layer carbon nanotube, increment is extremely
It is limited；Also there is experiment by being passed through O2Oxidation of Fe, but O2Presence can greatly reduce the quality of carbon nano tube growth.
Utility model content
In order to overcome above-mentioned technical problem, the purpose of this utility model is to provide a kind of plasma enhancing carbon nanometers
Pipe growth apparatus mainly installs preheating furnace additional between inductance-coupled coil and heating furnace, the catalysis of film forming is placed in preheating furnace
Agent source, form a film carbon atom of the gaseous carbon source after PE is cracked, together with catalyst source PE bombardment, the Fe atom after by thermal evaporation
It is deposited in substrate in heating furnace, since the evaporation of Fe atom has preheating furnace independent control, guarantees the lasting supply of catalyst, from
And guarantee being carried out continuously for deposition film forming procedure.
The purpose of this utility model can be achieved through the following technical solutions:
A kind of plasma enhancing carbon nano tube growth equipment, including radio frequency control instrument, air inlet, coil, preheating furnace, plus
Hot stove, quartz ampoule, touch control screen, bleeding point, sliding rail, screw rod, motor, gas control unit, device framework and radio frequency electrical
Source is fixed with quartz ampoule, one end of the quartz ampoule and vacuum flange by two supports on the top table top of the device framework
It connects, is provided with air inlet on vacuum flange, and quartz ampoule sequentially passes through radio-frequency power supply, preheating furnace and heating furnace, the radio frequency
Power supply, preheating furnace and heating furnace are arranged at the top of device framework, and the other end of the quartz ampoule is connect with vacuum flange, vacuum
Bleeding point is provided on flange, being horizontally disposed on table top at the top of the device framework has sliding rail, and preheating furnace placement is slided on the slide rail
It is dynamic, touch control screen is fixedly installed on the top table top of the device framework, the inside of the device framework is equipped with electricity
Machine, the screw rod rotation being arranged on the motor driving apparatus frame roof table top, the screw rod driving heating furnace are mobile；It is described to set
The inside of standby frame is equipped with radio frequency control instrument and gas control unit.
As a further solution of the present invention: catalyst source is placed on preheating furnace bosom position.
As a further solution of the present invention: the radio-frequency power supply is internally provided with coil.
As a further solution of the present invention: the specific work steps of the growth apparatus are as follows:
Step 1: the Al substrate after cleaning, drying is placed in the quartz ampoule of two warm area heating furnaces, catalyst source is steeped
Foam iron is placed in preheating furnace；
Step 2: closing left and right side vacuum flange, closes each air valve door and enables bleeding point, opens preheating furnace and carries out
Heating, then passes to H2While and furnace body is continued to heat up, open radio-frequency power supply and regulation power in 200W, then pass to
CH4；
Step 3: after reacting and carrying out 30min, CH is successively closed4, radio-frequency power supply, heating furnace, preheating furnace, room to be down to
H is closed when warm2, bleeding point.
The utility model has the beneficial effects that the utility model mainly places the catalyst source of film forming in preheating furnace, with
This carries out PE bombardment, thermal evaporation double action to catalyst source, and the catalyst after evaporation is attached on the matrix of heating furnace, forms a film
Carbon atom of the gaseous carbon source after PE is cracked is deposited in catalyst surface and is formed a film, since the preheating furnace of independent temperature control guarantees catalyst
Lasting evaporation, to ensure that the condition of carbon nanotube continued propagation.Due to the preparation process and pyrolytical condition of catalyst
Control is the key that influence CNT yield and purity, the diameter of carbon nanotube rely heavily on catalyst particulate component and
Diameter, due to the gaseous catalyst Fe composition constant after evaporation, controlled diameter can preferably control the growth matter of carbon nanotube
Amount.
Detailed description of the invention
The utility model will be further described below with reference to the accompanying drawings.
Fig. 1 is the utility model overall structure diagram.
In figure: 1, radio frequency control instrument；2, air inlet；3, coil；4, preheating furnace；5, heating furnace；6, quartz ampoule；7, control is touched
Screen processed；8, bleeding point；9, sliding rail；10, screw rod；11, motor；12, gas control unit；13, device framework；14, radio frequency electrical
Source.
Specific embodiment
Below in conjunction with the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out clear, complete
Site preparation description, it is clear that the described embodiments are only a part of the embodiments of the utility model, instead of all the embodiments.
Based on the embodiments of the present invention, obtained by those of ordinary skill in the art without making creative efforts
All other embodiment, fall within the protection scope of the utility model.
Refering to Figure 1, a kind of plasma enhancing carbon nano tube growth equipment, including radio frequency control instrument 1, air inlet
2, coil 3, preheating furnace 4, heating furnace 5, quartz ampoule 6, touch control screen 7, bleeding point 8, sliding rail 9, screw rod 10, motor 11, gas
Body control unit 12, device framework 13 and radio-frequency power supply 14 are fixed with stone by two supports on the top table top of device framework 13
One end of English pipe 6, quartz ampoule 6 is connect with vacuum flange, air inlet 2 is provided on vacuum flange, and quartz ampoule 6 is sequentially passed through and penetrated
Frequency power 14, preheating furnace 4 and heating furnace 5, radio-frequency power supply 14, preheating furnace 4 and heating furnace 5 are arranged at 13 top of device framework,
The other end of quartz ampoule 6 is connect with vacuum flange, and bleeding point 8, water on 13 top table top of device framework are provided on vacuum flange
Flat to be provided with sliding rail 9, preheating furnace 4 is placed on sliding rail 9 and slides, and touch control is fixedly installed on the top table top of device framework 13
Screen 7 processed, touch control screen 7 are electrically connected radio frequency control instrument 1, gas control unit 12, radio-frequency power supply 14, preheating furnace 4, add
Hot stove 5 and motor 11, the inside of device framework 13 are equipped with motor 11, are arranged on 11 driving equipment frame of motor, 13 top table top
Screw rod 10 rotate, screw rod 10 drives heating furnace 5 mobile, is easy to use；The inside of device framework 13 is equipped with radio frequency control instrument 1
With gas control unit 12, radio frequency control instrument 1 is RF radio frequency control instrument, and gas control unit 12 is a kind of gas of GMF-3Z model
Body control unit；Catalyst source is placed on 4 bosom position of preheating furnace；Radio-frequency power supply 14 is RF radio-frequency power supply, radio-frequency power supply
14 are internally provided with coil 3, convenient for heating.
The specific work steps of the growth apparatus are as follows:
Step 1: the Al substrate after cleaning, drying is placed in the quartz ampoule 6 of two warm area heating furnaces 5, by catalyst source
Foamed iron is placed in preheating furnace 4；
Step 2: closing left and right side vacuum flange, closes each air valve door and enables bleeding point 8, open preheating furnace 4 into
Row heating, then passes to H2While and furnace body is continued to heat up, open radio-frequency power supply 14 and regulation power in 200W, then lead to
Enter CH4；
Step 3: after reacting and carrying out 30min, CH is successively closed4, radio-frequency power supply 14, heating furnace 5, preheating furnace 4, wait drop
H is closed when to room temperature2, bleeding point 8.
Working principle of the utility model is: gas supply device gas outlet after gas flow control device with left side
Vacuum flange air inlet 2 is connected, and left side vacuum flange air inlet 2 is used to be passed through the growth carbon-source gas of carbon nanotube and lazy
Property carrier gas, radio-frequency power supply 14 promotes decomposition and the carbon of carbon source for generating uniformly equivalent plasma glow in quartz ampoule 6
The growth rate of nanotube places to be evaporated, distillation urge so that the growth temperature of carbon nanotube be effectively reduced in preheating furnace 4
Agent source, place the matrix of deposition film in two warm area heating furnaces 5, and touch control screen 7 is for preheating furnace 4, heating furnace 5
Temperature programming, the supply control for participating in gas and control of motor 11 of mobile heating furnace 5 etc., the bleeding point of right side vacuum flange
8 for gas to be discharged.
The utility model has the advantages that placing the catalyst source of film forming in preheating furnace 4, PE bombardment and heat are carried out to catalyst source with this
Evaporation, the catalyst after evaporation are attached on the matrix of heating furnace 5, and carbon atom of the gaseous carbon source after PE is cracked that form a film is being catalyzed
Agent surface deposition film forming, since the preheating furnace 4 of independent temperature control guarantees the lasting evaporation of catalyst, to ensure that carbon nanotube
Continued propagation condition.
In the description of this specification, the description of reference term " one embodiment ", " example ", " specific example " etc. means
Particular features, structures, materials, or characteristics described in conjunction with this embodiment or example are contained at least one of the utility model
In embodiment or example.In the present specification, schematic expression of the above terms be not necessarily referring to identical embodiment or
Example.Moreover, particular features, structures, materials, or characteristics described can be in any one or more embodiment or examples
In can be combined in any suitable manner.
Above content is only to examples for clearly illustrating the present invention and explanation, affiliated those skilled in the art couple
Described specific embodiment does various modifications or additions or is substituted in a similar manner, without departing from practical new
Type or beyond the scope defined by this claim, all should belong to the protection range of the utility model.
Claims (3)
1. a kind of plasma enhancing carbon nano tube growth equipment, which is characterized in that including radio frequency control instrument (1), air inlet
(2), coil (3), preheating furnace (4), heating furnace (5), quartz ampoule (6), touch control screen (7), bleeding point (8), sliding rail (9),
Screw rod (10), motor (11), gas control unit (12), device framework (13) and radio-frequency power supply (14), the device framework
(13) it being fixed with quartz ampoule (6) on top table top by two supports, one end of the quartz ampoule (6) is connect with vacuum flange,
It is provided on vacuum flange air inlet (2), and quartz ampoule (6) sequentially passes through radio-frequency power supply (14), preheating furnace (4) and heating furnace
(5), the radio-frequency power supply (14), preheating furnace (4) and heating furnace (5) are arranged at the top of device framework (13), the quartz ampoule
(6) the other end is connect with vacuum flange, is provided on vacuum flange bleeding point (8), table top at the top of the device framework (13)
Upper be horizontally disposed with has sliding rail (9), and preheating furnace (4) is placed on sliding rail (9) and slides, on the top table top of the device framework (13)
It is fixedly installed with touch control screen (7), the inside of the device framework (13) is equipped with motor (11), and the motor (11) is driven
Screw rod (10) rotation being arranged on table top at the top of dynamic device framework (13), screw rod (10) driving heating furnace (5) are mobile；It is described
The inside of device framework (13) is equipped with radio frequency control instrument (1) and gas control unit (12).
2. a kind of plasma enhancing carbon nano tube growth equipment according to claim 1, which is characterized in that catalyst source
It is placed on preheating furnace (4) bosom position.
3. a kind of plasma enhancing carbon nano tube growth equipment according to claim 1, which is characterized in that the radio frequency
Power supply (14) is internally provided with coil (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920077387.9U CN209507591U (en) | 2019-01-17 | 2019-01-17 | A kind of plasma enhancing carbon nano tube growth equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920077387.9U CN209507591U (en) | 2019-01-17 | 2019-01-17 | A kind of plasma enhancing carbon nano tube growth equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209507591U true CN209507591U (en) | 2019-10-18 |
Family
ID=68201056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920077387.9U Expired - Fee Related CN209507591U (en) | 2019-01-17 | 2019-01-17 | A kind of plasma enhancing carbon nano tube growth equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209507591U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109553088A (en) * | 2019-01-17 | 2019-04-02 | 合肥百思新材料研究院有限公司 | A kind of plasma enhancing carbon nano tube growth equipment |
-
2019
- 2019-01-17 CN CN201920077387.9U patent/CN209507591U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109553088A (en) * | 2019-01-17 | 2019-04-02 | 合肥百思新材料研究院有限公司 | A kind of plasma enhancing carbon nano tube growth equipment |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230118 Address after: 238000 101, Baisi Group office building, northwest corner of the intersection of Heping Avenue and Xiuhu Road, Chaohu Economic Development Zone, Hefei, Anhui Province Patentee after: Hefei Baisi Intelligent Equipment Co.,Ltd. Address before: 238000 northwest corner of the intersection of Heping Avenue and Xiuhu Road, Chaohu Economic Development Zone, Hefei City, Anhui Province Patentee before: HEFEI BAISI NEW MATERIALS RESEARCH INSTITUTE Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191018 |
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| CF01 | Termination of patent right due to non-payment of annual fee |