CN205175426U - 一种电容式的环境传感器 - Google Patents
一种电容式的环境传感器 Download PDFInfo
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- CN205175426U CN205175426U CN201520978160.3U CN201520978160U CN205175426U CN 205175426 U CN205175426 U CN 205175426U CN 201520978160 U CN201520978160 U CN 201520978160U CN 205175426 U CN205175426 U CN 205175426U
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- 230000007613 environmental effect Effects 0.000 title claims abstract description 46
- 239000012528 membrane Substances 0.000 claims abstract description 59
- 239000000758 substrate Substances 0.000 claims abstract description 46
- 239000003990 capacitor Substances 0.000 claims description 60
- 238000009413 insulation Methods 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 abstract description 6
- 230000009021 linear effect Effects 0.000 abstract description 5
- 230000035945 sensitivity Effects 0.000 abstract 2
- 230000001174 ascending effect Effects 0.000 abstract 1
- 239000000725 suspension Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000000605 extraction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
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CN201520978160.3U CN205175426U (zh) | 2015-11-30 | 2015-11-30 | 一种电容式的环境传感器 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105333889A (zh) * | 2015-11-30 | 2016-02-17 | 歌尔声学股份有限公司 | 一种电容式的环境传感器及其制造方法 |
CN109238550A (zh) * | 2018-10-26 | 2019-01-18 | 歌尔股份有限公司 | 电容式气压传感器 |
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2015
- 2015-11-30 CN CN201520978160.3U patent/CN205175426U/zh active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105333889A (zh) * | 2015-11-30 | 2016-02-17 | 歌尔声学股份有限公司 | 一种电容式的环境传感器及其制造方法 |
CN105333889B (zh) * | 2015-11-30 | 2017-12-05 | 歌尔股份有限公司 | 一种电容式的环境传感器及其制造方法 |
CN109238550A (zh) * | 2018-10-26 | 2019-01-18 | 歌尔股份有限公司 | 电容式气压传感器 |
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Address after: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
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TR01 | Transfer of patent right |
Effective date of registration: 20200610 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
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