CN205096663U - Little online electrochemistry preparation facilities of cylindrical electrode of high gyration precision - Google Patents
Little online electrochemistry preparation facilities of cylindrical electrode of high gyration precision Download PDFInfo
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- CN205096663U CN205096663U CN201520949728.9U CN201520949728U CN205096663U CN 205096663 U CN205096663 U CN 205096663U CN 201520949728 U CN201520949728 U CN 201520949728U CN 205096663 U CN205096663 U CN 205096663U
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Abstract
The utility model discloses a little online electrochemistry preparation facilities of cylindrical electrode of high gyration precision, the metal sheet of negative plate for having the aperture, set up in electrolyte reservoir, control system control electrolytic machine tools is x, Y and z are to the motion, make the centre gripping be located negative plate aperture center at the work piece of electrolytic machine tools chuck, and dip in the electrolyte, make the electric main shaft on the electrolytic machine tools drive the work piece rotation, utilize direct current pulse generator to apply voltage for positive pole work piece and negative plate, the hall current sensor detects direct current pulse generator electric current, transmit the current signal for control system, thereby processing obtains the cylindrical electrode of high gyration precision. The utility model discloses an electric field flow field is even in the control course of working to guarantee the high gyration precision of processing electrode, and improved the stability and the precision of processing, the electric current of feedback control processing simultaneously, the thickness of diffuse layer is moderate around can control electrode to the electrode shape of guaranteeing processing is cylindric.
Description
Technical field
The utility model relates to the online electrochemistry preparation facilities of the micro-columnar electrode of a kind of high rotating accuracy.
Background technology
Tunnel ESEM or AFM, due to its high resolution ratio, are widely used in the fields such as Surface Science, material science and bioscience, and become the key technology of nanoprocessing.But tunnel ESEM or AFM are when applying, and need to utilize a kind of superfine miniature probe to scan, obtain corresponding image.So the preparation of microprobe, using and developing for tunnel ESEM or AFM, significant.In addition, in cell operation and in fine electric spark or electrochemical micromachining, due to the size of operation and the size of processing less, also must with the minimum microprobe of diameter and microelectrode (being referred to as microelectrode below).In electrochemical micromachining, microelectrode determines the size and precision that machining can reach, micro-columnar electrode can not only process the simple shape face such as micropore, seam, groove, but also can carry out the Milling Process of 3 D complex die cavity as cutter, and therefore the preparation of micro-columnar electrode is even more important.
Microelectrode due to its size less, generally at micron order, traditional processing method be difficult to processing.The preparation of current microelectrode is main, and what rely on is special process method, mainly contains: precision cutting technology, fine ground technology, wire electric discharge grinding technique and electrochemical etching method, but at present these methods all more or less some is not enough.
Precision cutting technology, fine ground technology are the principles based on traditional removal material, prepared by the processing carrying out microelectrode.Due in process, the existence of machining stress, microelectrode diameter dimension is limited, not easily processes very tiny microelectrode, and the microelectrode inside obtained exists machining stress.In addition, these processing methods require higher to process equipment, and apparatus expensive, cost is high.
Wire electric discharge grinding technique is a kind of method of reasonable processing microelectrode, and it utilizes spark discharge ablation material, reaches the object of processing microelectrode.Owing to utilizing spark discharge to remove material, the microelectrode of reduced size can be obtained, and in process, instrument does not directly contact with workpiece, in gained microelectrode, there is not machining stress.But because spark ablation speed is comparatively slow, working (machining) efficiency is too low.
In recent years, lot of domestic and international expert special concern electrochemical micromachining technology, also has many experts and scholars to utilize electrochemical etching method to process microelectrode.Electrochemical etching method, utilizes the principle that electrical-chemistry method Anodic dissolves, and the size of atomic ion is processed workpiece, can obtain the atomic little electrode of diameter.And instrument does not also directly contact with workpiece, in gained microelectrode, there is not machining stress.In addition, in electrochemical etching process, material ablation occurs in region, thus working (machining) efficiency comparatively wire electric discharge grinding technique is high.But in conventional electrochemical etching processing, because the electric field between electrolyte flow field and anode and cathode is difficult to equal control, the electrode shape precision that machining obtains is not high, and process is also unstable.
At present, utilize electrochemical etching technology to process microelectrode, the greatest problem faced is exactly electric field, the unmanageable problem in flow field.Resolve this problem, electrochemical etching technology beyond doubt at present processing prepares the most Perfected process of microelectrode.
The Wang Minghuan of Nanjing Aero-Space University probed into and utilizes electrochemical etching technology to process microelectrode.In order to control processing electric field well, in guarantee process, surrounding them electric field is even, and she have employed the thinking of making a call to an aperture at plate-like cathodes plate center, maintains the electric fields uniform of surrounding them preferably, has processed the columnar microelectrode of uniform diameter.But in practical operation, because centering operation is difficult to ensure that workpiece anode is placed in minus plate aperture center, the electric field of surrounding them might not be very even, and the cylindricity of the microelectrode therefore obtained not is very high.And in actual process, the machined electrode obtained differs greatly, process is unstable.
The Zeng Yongbin of Nanjing Aero-Space University once copied line electric spark grinding technology type, utilized filamentary cathode Electrolyzed Processing workpiece anode, by controlling the internal field around workpiece, realized the idea processing the microelectrode of various shape.The advantage of this mentality of designing, is just the microelectrode that can process various shape.But in actual process, due to the existence of re-electrolysis, the form accuracy of the microelectrode obtained is not high.
Utility model content
The utility model is in order to solve the problem, propose the online electrochemistry preparation facilities of the micro-columnar electrode of a kind of high rotating accuracy, this utility model adopts the narrow meshed metallic plate in center to make negative electrode, anode workpiece is positioned over small hole center, and make workpiece not stop the method rotated, process microelectrode, ensure that the electric field, the even flow field that add around piece pole in man-hour, improve the rotating accuracy of machined electrode; Recycling Hall current sensor measures direct current pulse power source electric current, and utilize data collecting card to gather this current signal, as system feedback control signal, the electric current be conducive in controlled working process changes by theoretical rule in time, ensures that it is cylindric for processing the electrode obtained.
To achieve these goals, the utility model adopts following technical scheme:
The online electrochemistry preparation facilities of a kind of micro-columnar electrode of high rotating accuracy, comprise direct current pulse power source, electrolytic machine tool, control system and Hall current sensor, wherein, minus plate is the foraminate metallic plate of band, be arranged in electrolytic bath, control system controls electrolytic machine tool and is x, y and z is to motion, the workpiece being clamped in electrolytic machine tool chuck is made to be positioned at minus plate small hole center, and in immersion electrolyte, the electro spindle of electrolytic machine tool makes workpiece keep rotating, take workpiece as anode, minus plate is negative electrode, direct current pulse power source is utilized to apply voltage to workpiece and minus plate, Hall current sensor detects processing electric current, and by data acquisition unit, current signal is passed to control system, control system is according to the size of current signal, the voltage magnitude of dynamic fine tune direct current pulse power source, the electric current of processing is changed by theoretical rule in time.
Described electrolytic bath is positioned on lifting platform.
Preferably, described electrolytic machine tool is fine electrolytic machining tool.
Centered by described minus plate, foraminate metallic plate is established in position.
Described workpiece is cylindric tungsten filament, and in process, described workpiece is placed in the center, hole of minus plate.This tungsten filament carries out alignment in advance.
Described minus plate is positioned in electrolyte container, electrolyte submergence minus plate upper surface.
The diameter of described aperture is 3-6mm.
Described metallic plate is corrosion resistant plate.
Based on a preparation method for said apparatus, comprise the following steps:
(1) make workpiece, be arranged on the electro spindle chuck of electrolytic machine tool, minus plate level is arranged in electrolytic bath on fixture, in electrolytic bath, add electrolyte, guarantees electrolyte just submergence minus plate upper surface;
(2) control the motion in electrolytic machine tool x, y and z axes direction, make piece pole be positioned at minus plate small hole center, direct current pulse power source positive pole connects workpiece, and negative pole connects minus plate, switches on power;
(3) control electro spindle to rotate, and drive by the workpiece of its grips, workpiece is ceaselessly rotated in the electrolytic solution;
(4) Hall current sensor is adopted to measure direct current pulse power source electric current, and gather current signal, as control system feedback control signal, dynamic fine tune direct current pulse power source output voltage amplitude, to ensure that processing electric current changes by theoretical rule in time; The microelectrode that processing is obtained is uniform cylindrical shape.
In described step (1), the method making workpiece is: intercept tungsten filament as workpiece, and carry out alignment to it.
Described workpiece, in process, is in rotation status always, and the range of speeds is: (0,1500] RPM.
Operation principle of the present utility model is: with the metallic plate with central small hole for negative electrode, workpiece is anode, in process, makes workpiece be positioned at negative electrode small hole center, and rotates under the drive of machine tool chief axis.Adding man-hour, negative and positive pole clearance is equal, symmetrical in each radial direction, therefore, electric field around piece pole and even flow field symmetry, the rotation of workpiece simultaneously, the impact that the electric field flow field that produced because workpiece centering is forbidden is uneven can be avoided, from overall and dynamic angle, further ensure the electric field around piece pole and even flow field symmetry.From electrical-chemistry method theory, each radial electric field even flow field of workpiece is symmetrical, then each radial ablation speed is identical, is conducive to the electrode processing high rotating accuracy.
Secondly, Hall current sensor is utilized to measure direct current pulse power source electric current, and utilize data collecting card to carry out acquisition and processing to it, make it as system feedback control signal, the electric current be conducive in controlled working process changes by theoretical rule in time, thus ensureing that the thickness of surrounding them diffusion layer is moderate, the electrode that processing is obtained is uniform cylindrical shape.
The beneficial effects of the utility model are:
(1) utilize the electric field even flow field that the utility model method can ensure around piece pole preferably, make piece pole in process, each radial ablation speed is identical, thus ensures the high rotating accuracy of machined electrode;
(2) utilize current signal to feed back, the change of control impuls supply voltage amplitude makes the thickness of diffusion layer around piece pole moderate, ensures that it is cylindric for processing the electrode obtained;
(3) use of direct current pulse power source, and electric field between anode and cathode, being uniformly distributed of flow field, make process more stable, the precision of processing is higher.
Accompanying drawing explanation
Fig. 1 is the micro-columnar electrode of high rotating accuracy online electrochemistry preparation facilities structural representation;
Fig. 2 is the structural representation of hollow cathode plate;
Fig. 3 is section between anode and cathode, workpiece each radial direction Electric Field Distribution schematic diagram;
Fig. 4 is section between anode and cathode, workpiece each radial direction electrolyte stream field distribution schematic diagram;
Fig. 5 is the distribution schematic diagram of diffusion layer around workpiece;
Wherein, 1 is computer, and 2 is Hall current sensor, and 3 is workpiece anode, and 4 is minus plate, and 5 is electrolyte, and 6 is electrolytic bath, and 7 is experiment porch, and 8 is flow field line, and 9 is diffusion layer, and 10 is electric field line.
Detailed description of the invention:
Below in conjunction with accompanying drawing and embodiment, the utility model is described in further detail.
As shown in Figure 1, first intercept the processing work 3 of certain length (about 2.5cm), be arranged in electro spindle chuck after alignment; In electrolytic bath 6, add appropriate electrolyte 5, guarantee that electrolyte 5 can flood minus plate 4; Regulate hand-operated lifting platform and electrolytic bath 6, piece pole is immersed in electrolyte and is arranged in the aperture of minus plate; By computer 1 control X, Y direction motor movement, make piece pole 3 be positioned at the center of minus plate aperture, realize centering; Workpiece 3 connects direct current pulse power source positive pole, and minus plate 4 connects direct current pulse power source negative pole, controls electro spindle rotate with certain rotating speed by computer 1, thus drives piece pole 3 to rotate; Connect direct current pulse power source, output voltage is controlled by computer 1, can start processing; In process, Hall current sensor 2 is utilized to detect processing electric current, after carrying out signal conversion by data collecting card, pass to computer 1, after data processing operation, output feedback signal controls direct current pulse power source output voltage amplitude, thus ensures processing electric current in time by theoretical rule change, ensure that the microelectrode shape of processing is cylindric, and there is high rotating accuracy.
Fig. 3 is the distribution situation of anodic-cathodic radial electric field in any position (in the workpiece degree of depth) interpolar section, because anode workpiece is positioned at the center of minus plate, then between any position anode and cathode, radial spacing is equal, then uniform in the distribution of each radial electric field of surrounding them, as shown in Figure 3.In addition, because actual centering operates, not necessarily very accurate, the axle center of piece pole is made not necessarily to be positioned at the small hole center of minus plate, then actual electric field is very uneven, so need to make workpiece rotate, in rotary course, the electric field cyclically-varying of each radial direction of workpiece, entirety sees that the electric field of surrounding them is uniform.From microcosmic angle, the distribution of electric field reflects the distribution of current density size, and each radial electric field of surrounding them is evenly distributed, then electric current distribution is even, therefore the electrolysis ablation speed of each radial direction of workpiece is also uniform, just can obtain the higher workpiece of rotating accuracy.
Fig. 4 is all the distribution situation of anodic-cathodic radial flow fields in any position (in the workpiece degree of depth) interpolar section, because anode member is positioned at the center of circular hole of minus plate, and columnar workpiece ceaselessly rotates, to see between anode and cathode in the situation of each radial direction it is identical dynamically, workpiece can ignore the impact of centrifugal force through alignment, the flow field then produced between anode and cathode is also identical in each radial direction, thus achieves the even of flow field.Flow field evenly mean that the electrolyte properties of each radial direction between anode and cathode is identical, and concentration of electrolyte is one of key factor affecting electrolysis ablation speed, so just can improve the rotating accuracy of microelectrode further.In addition being uniformly distributed of surrounding them electric field flow field, is conducive to the stability and the working (machining) efficiency that improve processing.
Fig. 5 is the diffusion layer distribution situation in process around piece pole.In electrochemical machining process, the formation of diffusion layer is inevitable, simultaneously the existence of diffusion layer, make workpiece equal in the ablation speed possibility of axial direction, equal key is controlled working voltage, makes the current density adding man-hour be a certain stationary value, thus obtains cylindrical electrode.
Hall current sensor is adopted to measure direct current pulse power source electric current, and utilize data collecting card to gather this current signal, as system feedback control signal, this current signal is utilized to carry out FEEDBACK CONTROL, dynamic fine tune direct current pulse power source output voltage, processing electric current is changed by theoretical rule in time, makes the thickness of diffusion layer around piece pole moderate, thus guarantee that the shape of machined electrode is cylindric.
By reference to the accompanying drawings detailed description of the invention of the present utility model is described although above-mentioned; but the restriction not to the utility model protection domain; one of ordinary skill in the art should be understood that; on the basis of the technical solution of the utility model, those skilled in the art do not need to pay various amendment or distortion that creative work can make still within protection domain of the present utility model.
Claims (7)
1. the online electrochemistry preparation facilities of the micro-columnar electrode of high rotating accuracy, it is characterized in that: comprise direct current pulse power source, electrolytic machine tool, control system and Hall current sensor, wherein, minus plate is the foraminate metallic plate of band, be arranged in electrolytic bath, control system controls electrolytic machine tool and is x, y and z is to motion, the workpiece being clamped in electrolytic machine tool chuck is made to be positioned at minus plate small hole center, and in immersion electrolyte, the electro spindle of electrolytic machine tool makes workpiece keep rotating, take workpiece as anode, minus plate is negative electrode, direct current pulse power source is utilized to apply voltage to workpiece and minus plate, Hall current sensor detects processing electric current, and by data acquisition unit, current signal is passed to control system, control system is according to the size of current signal, the voltage magnitude of dynamic fine tune direct current pulse power source, the electric current of processing is changed by theoretical rule in time.
2. the online electrochemistry preparation facilities of the micro-columnar electrode of a kind of high rotating accuracy as claimed in claim 1, is characterized in that: described electrolytic bath is positioned on lifting platform.
3. the online electrochemistry preparation facilities of the micro-columnar electrode of a kind of high rotating accuracy as claimed in claim 1, is characterized in that: centered by described minus plate, foraminate metallic plate is established in position.
4. the online electrochemistry preparation facilities of the micro-columnar electrode of a kind of high rotating accuracy as claimed in claim 1, is characterized in that: described workpiece is cylindric tungsten filament, and in process, described workpiece is placed in the center, hole of minus plate.
5. the online electrochemistry preparation facilities of the micro-columnar electrode of a kind of high rotating accuracy as claimed in claim 1, is characterized in that: described minus plate level is arranged in electrolyte container on special fixture, electrolyte submergence minus plate upper surface.
6. the online electrochemistry preparation facilities of the micro-columnar electrode of a kind of high rotating accuracy as claimed in claim 3, is characterized in that: the diameter of described aperture is 3-6mm.
7. the online electrochemistry preparation facilities of the micro-columnar electrode of a kind of high rotating accuracy as claimed in claim 3, is characterized in that: described metallic plate is corrosion resistant plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520949728.9U CN205096663U (en) | 2015-11-24 | 2015-11-24 | Little online electrochemistry preparation facilities of cylindrical electrode of high gyration precision |
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| CN201520949728.9U CN205096663U (en) | 2015-11-24 | 2015-11-24 | Little online electrochemistry preparation facilities of cylindrical electrode of high gyration precision |
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| CN205096663U true CN205096663U (en) | 2016-03-23 |
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| CN201520949728.9U Withdrawn - After Issue CN205096663U (en) | 2015-11-24 | 2015-11-24 | Little online electrochemistry preparation facilities of cylindrical electrode of high gyration precision |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105312692A (en) * | 2015-11-24 | 2016-02-10 | 山东大学（威海） | Online electrochemical preparation device and method of high-rotation precision micro cylindrical electrode |
| CN108746897A (en) * | 2018-06-12 | 2018-11-06 | 山东大学 | A kind of spiral microelectrode electrical-chemistry method system and method |
| CN113500259A (en) * | 2021-07-27 | 2021-10-15 | 南京航空航天大学 | Pulsating electrolytic machining device and method for quickly leveling surface of revolving body |
| CN117346640A (en) * | 2023-12-05 | 2024-01-05 | 中国航发四川燃气涡轮研究院 | Centering adjustment method for axis of compressor rotating shaft and axis of torque meter |
-
2015
- 2015-11-24 CN CN201520949728.9U patent/CN205096663U/en not_active Withdrawn - After Issue
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105312692A (en) * | 2015-11-24 | 2016-02-10 | 山东大学（威海） | Online electrochemical preparation device and method of high-rotation precision micro cylindrical electrode |
| CN105312692B (en) * | 2015-11-24 | 2017-04-12 | 山东大学（威海） | Online electrochemical preparation device and method of high-rotation precision micro cylindrical electrode |
| CN108746897A (en) * | 2018-06-12 | 2018-11-06 | 山东大学 | A kind of spiral microelectrode electrical-chemistry method system and method |
| CN108746897B (en) * | 2018-06-12 | 2019-09-17 | 山东大学 | A kind of spiral microelectrode electrical-chemistry method system and method |
| CN113500259A (en) * | 2021-07-27 | 2021-10-15 | 南京航空航天大学 | Pulsating electrolytic machining device and method for quickly leveling surface of revolving body |
| CN113500259B (en) * | 2021-07-27 | 2022-05-13 | 南京航空航天大学 | Pulsating electrolytic machining device and method for quickly leveling surface of revolving body |
| US11759876B2 (en) | 2021-07-27 | 2023-09-19 | Nanjing University Of Aeronautics And Astronautics | Pulse dynamic electrochemical machining apparatus and method for rapidly leveling surface of revolving part |
| CN117346640A (en) * | 2023-12-05 | 2024-01-05 | 中国航发四川燃气涡轮研究院 | Centering adjustment method for axis of compressor rotating shaft and axis of torque meter |
| CN117346640B (en) * | 2023-12-05 | 2024-02-20 | 中国航发四川燃气涡轮研究院 | Centering adjustment method for axis of compressor rotating shaft and axis of torque meter |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160323 Effective date of abandoning: 20170412 |
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| AV01 | Patent right actively abandoned |