CN205087923U - Polycrystalline silicon reduction furnace insulated electrode insulating protecting structure - Google Patents
Polycrystalline silicon reduction furnace insulated electrode insulating protecting structure Download PDFInfo
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- CN205087923U CN205087923U CN201520798375.7U CN201520798375U CN205087923U CN 205087923 U CN205087923 U CN 205087923U CN 201520798375 U CN201520798375 U CN 201520798375U CN 205087923 U CN205087923 U CN 205087923U
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- electrode
- porcelain ring
- ring
- polycrystalline silicon
- porcelain
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Abstract
The utility model relates to a polycrystalline silicon reduction furnace insulated electrode insulating protecting structure, include a porcelain ring (2), the 2nd porcelain ring (3) of making by aluminium oxide or silicon nitride ceramic material, characterized by: a porcelain ring (2) two semi -ring combinations for taking the T head, the card is gone into between chassis and electrode (1), the 2nd porcelain ring (3) lie in a porcelain ring lower part, and the suit is on electrode (1), and tetrafluoro cover (4) suit is in the electrode lower part. Owing to a porcelain ring sets up between chassis and electrode, it is little that it is wholly assaulted by high temperature, and owing to having adopted two semi -ring composite structure, the stress of the inflation production that has significantly reduced has lengthened life.
Description
Technical field
The utility model relates to the electrode insulation component in polysilicon production process equipment, is specifically related to a kind of polycrystalline silicon reducing furnace electrode insulation insulating protection structure.
Background technology
At present, production of polysilicon mainly adopts improved Siemens technique, its principle adopts high-voltage breakdown mode to make silicon core become conductor exactly in reduction furnace, motor current makes silicon core temperature rise fast, high-purity trichlorosilane is reduced by High Purity Hydrogen on the HIGH-PURITY SILICON core of about 1100 DEG C, generate polysilicon deposition on silicon core, generate polycrystalline silicon rod.The protective insulation requirements of polycrystalline silicon reducing furnace to electrode is high, and current domestic main employing electrode structure mainly comprises electrode body, tetrafluoro cover and monoblock type ceramic insulation ring etc.; Adopt tetrafluoro to overlap between electrode and chassis to insulate with ceramic ring.Because reduction in-furnace temperature is very high; and furnace atmosphere is severe corrosive gas; inlet mouth is distributed in chassis, and the air-flow that temperature is low ceaselessly washes away the ceramic ring being positioned at chassis upper, and so long-time High Temperature High Pressure is run rear ceramic insulation ring and easily lost efficacy; cause puncturing cracking etc.; after ceramic ring cracking, tetrafluoro cover loses thermal insulation protection, will soon ablation; cause losing insulation protection and producing leakage phenomenon, the normal operation that can affect reduction furnace even brings security incident.
Summary of the invention
The utility model easily punctures the deficiency of cracking for monoblock type ceramic insulation ring, provides a kind of resistance to elevated temperatures good and changes easy polycrystalline silicon reducing furnace electrode insulation insulating protection structure.
The utility model adopts following technical proposals to realize goal of the invention: a kind of polycrystalline silicon reducing furnace electrode insulation insulating protection structure, comprise the first porcelain ring, the second porcelain ring be made up of aluminum oxide or silicon nitride ceramic material, it is characterized in that: the first porcelain ring is two semi-ring combinations of band T head, snaps between chassis and electrode; Second porcelain ring is positioned at the first porcelain ring bottom, and be set on electrode, tetrafluoro cover is sleeved on electrode bottom.
The utility model is arranged between chassis and electrode due to the first porcelain ring, and it is overall little by high temperature impact, and owing to have employed two semi-ring integrated structures, greatly reduces the stress expanding and produce, extend work-ing life.
Described alumina ceramic material is 95% or 99% alumina-ceramic preferably, along being provided with pair of holes on described second porcelain ring, conveniently picks and places.
Because the utility model makes the upper end that tetrafluoro overlaps into aluminum oxide or silicon nitride ceramic material, utilize high insulating property and the resistance to elevated temperatures of aluminum oxide or silicon nitride ceramics, effectively prevent PTFE easily burned near chassis end, and the long-term shortcoming easily aging in high temperature corrosion environment of tetrafluoro cover, make extend a lot the work-ing life of lower end tetrafluoro cover, and replace the replacing of the ceramic member of upper end tetrafluoro very simply to save time, owing to catching a cold, hot temperature variation is less, cracked hardly; Protection porcelain ring on chassis adopts two semi-ring combinations; decapacitation play insulation, heat insulation, prevent from falling into outside the effect of silica flour etc.; owing to have employed semi-loop; the stress that when being heated, stupalith expansion produces easily discharges; therefore substantially prolongs work-ing life; through the life-time service of Duo Jia polysilicon producer reduction furnace at home, its breakage rate is average monthly less than 2%, and the life-span, 20-30 was doubly than original structure to prolong.
Accompanying drawing explanation
Fig. 1 is the assembly structure figure of electrode of the prior art and insulation protective jacket.
Fig. 2 is the assembly structure figure of the utility model and electrode.
Fig. 3 is the plan structure figure of the first porcelain ring in the utility model.
Fig. 4 is the half section structure iron of Fig. 3.
Fig. 5 is the plan structure figure of the second porcelain ring in the utility model.
Fig. 6 is the half section structure iron of Fig. 5.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further detail.
As shown in the drawings.In Fig. 1, what play insulation protection effect to electrode 1 is the first porcelain ring 2 and the second porcelain ring 3 be sleeved on electrode, plays insulation protection effect; First porcelain ring 2 is one-piece construction and entirety is positioned at the top on chassis, large by high temperature high-voltage impact, easily bursts.In Fig. 2, the first porcelain ring 2 is two semi-rings combination (as shown in Figure 3, Figure 4) of band T head, and its T head and chassis are adjacent to, and snap between chassis and electrode, and the high temperature high-voltage impact be thus subject to is little, not fragile with the stress born; Second porcelain ring 3 is trapezoidal thimble structure, is set on electrode, and its internal surface and electrode 1 outside surface are close to, and tetrafluoro cover is sleeved on electrode bottom, is bonded operator guards, plays good insulated heat effect with the first porcelain ring 2 and the second porcelain ring 3.First porcelain ring 2 and the second porcelain ring 3 are made up of 95% or 99% alumina-ceramic or silicon nitride ceramic material; The upper edge of the second porcelain ring 3 is also provided with pair of holes 5(as shown in Figure 5, Figure 6), be convenient to hook and stretch into, conveniently pick and place.
Claims (2)
1. a polycrystalline silicon reducing furnace electrode insulation insulating protection structure, comprise the first porcelain ring (2), the second porcelain ring (3) be made up of aluminum oxide or silicon nitride ceramic material, it is characterized in that: the first porcelain ring (2) is two semi-ring combinations of band T head, snaps between chassis and electrode (1); Second porcelain ring (3) is positioned at the first porcelain ring bottom, and be set on electrode (1), tetrafluoro cover (4) is sleeved on electrode bottom.
2. polycrystalline silicon reducing furnace electrode insulation insulating protection structure as claimed in claim 1, is characterized in that: the upper edge of described second porcelain ring (3) is also provided with pair of holes (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520798375.7U CN205087923U (en) | 2015-10-16 | 2015-10-16 | Polycrystalline silicon reduction furnace insulated electrode insulating protecting structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520798375.7U CN205087923U (en) | 2015-10-16 | 2015-10-16 | Polycrystalline silicon reduction furnace insulated electrode insulating protecting structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205087923U true CN205087923U (en) | 2016-03-16 |
Family
ID=55478629
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520798375.7U Expired - Fee Related CN205087923U (en) | 2015-10-16 | 2015-10-16 | Polycrystalline silicon reduction furnace insulated electrode insulating protecting structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205087923U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107686113A (en) * | 2017-08-29 | 2018-02-13 | 四川瑞能硅材料有限公司 | Reduction furnace and its chassis structure |
| CN110759345A (en) * | 2019-10-31 | 2020-02-07 | 新疆东方希望新能源有限公司 | Ceramic insulation ring structure applied to reduction furnace |
-
2015
- 2015-10-16 CN CN201520798375.7U patent/CN205087923U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107686113A (en) * | 2017-08-29 | 2018-02-13 | 四川瑞能硅材料有限公司 | Reduction furnace and its chassis structure |
| CN110759345A (en) * | 2019-10-31 | 2020-02-07 | 新疆东方希望新能源有限公司 | Ceramic insulation ring structure applied to reduction furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160316 Termination date: 20201016 |