CN205077143U - Novel heating plate device - Google Patents
Novel heating plate device Download PDFInfo
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- CN205077143U CN205077143U CN201520797612.8U CN201520797612U CN205077143U CN 205077143 U CN205077143 U CN 205077143U CN 201520797612 U CN201520797612 U CN 201520797612U CN 205077143 U CN205077143 U CN 205077143U
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- heating plate
- mounting groove
- sealing
- metal washer
- utility
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Abstract
The utility model provides a local combustion phenomena scheduling problem that novel heating plate device, the main solution has the heating plate now because the radio -frequency power supply leads to the utility model provides a novel heating plate device, this heating plate include the heating plate body, water -cooling piece, metal packing ring, sealing washer, metal packing ring mounting groove and sealing washer mounting groove. The utility model discloses a heating plate simple structure can prevent the heating plate upper surface because energy concentrating and the local combustion phenomena that produces effectively.
Description
Technical field
The utility model relates to a kind of Novel heating dish device, belongs to technical field of manufacturing semiconductors.
Background technology
Because plasma-reinforced chemical vapor deposition has the advantages such as deposition temperature is low, deposited film pinhold density is little, good uniformity, step coverage are good, therefore plasma-reinforced chemical vapor deposition technology is in the development of semiconducter device and unicircuit, for making the deielectric-coating between the passive film of chip and multilayer wiring, earn widespread respect in the time in the past.Plasma apparatus is in the process of deposit film, in order to provide energy to reaction source, need high-octane radio frequency, when passing into this high-octane ion in chamber, heating plate upper surface can produce partial combustion phenomenon due to energy accumulating, affect the processing performance of semiconductor plasma equipment.
Utility model content
The utility model is for the purpose of solving the problem, a kind of Novel heating dish device is provided, heating plate of the present utility model increases metal washer in the bottom of heating plate, the electric charge that radio-frequency power supply can be sent is by this kind of grounding structure, excess charge is derived, thus avoids electric charge in heating plate surface aggregation formation partial combustion phenomenon.
For achieving the above object, the utility model adopts following technical proposals:
A kind of Novel heating dish device, this heating plate comprises heating plate body, water-cooled block, metal washer, sealing-ring, metal washer mounting groove and sealing-ring mounting groove; Described water-cooled block inside is provided with metal washer mounting groove and sealing-ring mounting groove, metal washer to be arranged in metal washer mounting groove and to be embedded in the bottom of described heating plate body, sealing-ring is arranged in sealing-ring mounting groove, and water-cooled block and heating plate body are bolted fixing.
Described metal washer is cored screw shape.
Described sealing-ring is rubber seal.
The beneficial effects of the utility model are:
The utility model contacts with water-cooled block by adopting metal washer, the electric charge sent by radio-frequency power supply is by this kind of grounding structure, excess charge is derived, thus avoid electric charge at heating plate surface aggregation formation arcing, affect the processing performance of semiconductor plasma equipment, heating plate structure of the present utility model is simple, effectively can prevent the partial combustion phenomenon that heating plate upper surface produces due to energy accumulating.
Accompanying drawing explanation
Fig. 1 is heating plate structural representation of the present utility model;
Fig. 2 is the partial enlarged drawing of Fig. 1.
Embodiment
Further the utility model is described in detail below in conjunction with embodiment, but utility model protection content is not limited to described embodiment:
Embodiment 1
With reference to Fig. 1-2, a kind of Novel heating dish device, this heating plate comprises heating plate body 1, water-cooled block 2, metal washer 3, sealing-ring 4, metal washer mounting groove 5 and sealing-ring mounting groove 6; Described water-cooled block 2 inside is provided with metal washer mounting groove 5 and sealing-ring mounting groove 6, metal washer 3 to be arranged in metal washer mounting groove 5 and to be embedded in the bottom of described heating plate body 1, sealing-ring 4 is arranged in sealing-ring mounting groove 6, and water-cooled block 2 and heating plate body 1 are bolted fixing.
Described metal washer 3 is cored screw shape.
Described sealing-ring 4 is rubber seal.
During use, plasma apparatus is when deposit film, in order to provide crossbeam to reaction source, need high-octane radio frequency, when passing into this high-octane ion in chamber, heating plate upper surface can produce partial combustion phenomenon due to energy accumulating, described heating plate is contacted with water-cooled block 2 by metal washer 3, excess charge, by this kind of grounding structure, is derived, thus is avoided electric charge and produce partial combustion phenomenon at heating plate surface aggregation by the electric charge sent by radio-frequency power supply.
Claims (3)
1. a Novel heating dish device, is characterized in that, this heating plate comprises heating plate body, water-cooled block, metal washer, sealing-ring, metal washer mounting groove and sealing-ring mounting groove; Described water-cooled block inside is provided with metal washer mounting groove and sealing-ring mounting groove, metal washer to be arranged in metal washer mounting groove and to be embedded in the bottom of described heating plate body, sealing-ring is arranged in sealing-ring mounting groove, and water-cooled block and heating plate body are bolted fixing.
2. a kind of Novel heating dish device as claimed in claim 1, it is characterized in that, described metal washer is cored screw shape.
3. a kind of Novel heating dish device as claimed in claim 1, it is characterized in that, described sealing-ring is rubber seal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520797612.8U CN205077143U (en) | 2015-10-14 | 2015-10-14 | Novel heating plate device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520797612.8U CN205077143U (en) | 2015-10-14 | 2015-10-14 | Novel heating plate device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205077143U true CN205077143U (en) | 2016-03-09 |
Family
ID=55429561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520797612.8U Active CN205077143U (en) | 2015-10-14 | 2015-10-14 | Novel heating plate device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205077143U (en) |
-
2015
- 2015-10-14 CN CN201520797612.8U patent/CN205077143U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: No.900 Shuijia, Hunnan District, Shenyang City, Liaoning Province Patentee after: Tuojing Technology Co.,Ltd. Address before: 110179 3rd floor, No.1-1 Xinyuan street, Hunnan New District, Shenyang City, Liaoning Province Patentee before: PIOTECH Co.,Ltd. |
|
| CP03 | Change of name, title or address |