CN205071304U - 一种mems传感器 - Google Patents
一种mems传感器 Download PDFInfo
- Publication number
- CN205071304U CN205071304U CN201520887114.2U CN201520887114U CN205071304U CN 205071304 U CN205071304 U CN 205071304U CN 201520887114 U CN201520887114 U CN 201520887114U CN 205071304 U CN205071304 U CN 205071304U
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- silicon substrate
- mems
- mems sensor
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- 239000000758 substrate Substances 0.000 claims abstract description 55
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 35
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 35
- 239000010703 silicon Substances 0.000 claims abstract description 35
- 230000013011 mating Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 abstract description 10
- 239000007788 liquid Substances 0.000 abstract description 8
- 238000004806 packaging method and process Methods 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000003292 glue Substances 0.000 description 11
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000009194 climbing Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
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Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201520887114.2U CN205071304U (zh) | 2015-11-09 | 2015-11-09 | 一种mems传感器 |
Applications Claiming Priority (1)
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CN201520887114.2U CN205071304U (zh) | 2015-11-09 | 2015-11-09 | 一种mems传感器 |
Publications (1)
Publication Number | Publication Date |
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CN205071304U true CN205071304U (zh) | 2016-03-02 |
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Family Applications (1)
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CN201520887114.2U Active CN205071304U (zh) | 2015-11-09 | 2015-11-09 | 一种mems传感器 |
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CN (1) | CN205071304U (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022006998A1 (zh) * | 2020-07-06 | 2022-01-13 | 瑞声声学科技(深圳)有限公司 | 一种asic芯片及制造方法 |
US11337010B2 (en) | 2017-04-28 | 2022-05-17 | Cirrus Logic, Inc. | MEMS device and process |
-
2015
- 2015-11-09 CN CN201520887114.2U patent/CN205071304U/zh active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11337010B2 (en) | 2017-04-28 | 2022-05-17 | Cirrus Logic, Inc. | MEMS device and process |
WO2022006998A1 (zh) * | 2020-07-06 | 2022-01-13 | 瑞声声学科技(深圳)有限公司 | 一种asic芯片及制造方法 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20200615 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |