CN205062232U - Low pressure diffusion furnace - Google Patents
Low pressure diffusion furnace Download PDFInfo
- Publication number
- CN205062232U CN205062232U CN201520787099.4U CN201520787099U CN205062232U CN 205062232 U CN205062232 U CN 205062232U CN 201520787099 U CN201520787099 U CN 201520787099U CN 205062232 U CN205062232 U CN 205062232U
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- Prior art keywords
- heater
- diffusion furnace
- tail gas
- low pressure
- furnace body
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- Expired - Fee Related
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a low pressure diffusion furnace, including the furnace body, heating element, quartzy door, the metal seal circle, pressure sensor, broken vacuum nitrogen gas mouth, the vacuum spigot joint, cooling device, the air inlet, tail gas recovery unit, quartzy door sets up in furnace body one end, heating element sets up in furnace body top and bottom, the metal seal circle sets up at quartzy door otherly, pressure sensor, broken vacuum nitrogen gas mouth, vacuum spigot joint setting circles at metal seal, cooling device sets up at the furnace body other end, tail gas recovery unit sets up by cooling device, inlet set is on the furnace body. The utility model discloses production efficiency is high, sparingly produces materials.
Description
Technical field
The utility model relates to a kind of low pressure diffusion furnace, belongs to diffusion furnace technical field.
Background technology
Diffusion furnace is a kind of important processing unit in solar cell blade technolgy, be mainly used in doping process, for the preparation of PN junction, the quality of crystalline silicon solar cell PN junction quality directly determines photoelectric transformation efficiency, so diffusion furnace is the key processing equipment on crystal-silicon solar cell production line.
In the requirement reaction tubes of diffusion technique, stable, gas field, warm field is stablized, but traditional normal pressure diffusion furnace also exists some shortcomings in the use procedure of equipment, can have influence on diffusion technique quality, mainly comprise:
1, because foreign atom intrinsic standoff ratio is little, silicon chip neighbor distance is little, and cause the gap at the doping content in the middle of silicon chip and edge comparatively large, diffusion technique is of poor quality, and homogeneity is lower.
2, diffusion furnace does not have pressure-controlling and stopping property is unreliable, and the pressure in reaction tubes and flow can change by external environment influence, thus has influence on the stable of the gentle field, temperature field in reaction tubes, have influence on PN junction quality and batch between repeatability.
3, diffusion furnace is when diffusion process, and the diffusion of liquid phosphorus source can produce entrap bubble (P2O5) and the waste gas (Cl2) of a large amount of diffusion technique.If run into the freezing air that temperature is lower, water wherein and P2O5 generate metaphosphoric acid, generate hydrochloric acid with Cl2.Metaphosphoric acid and hydrochloric acid can cause serious injury to human body, and the easy deliquescence of metaphosphoric acid generates phosphoric acid, and phosphoric acid and hydrochloric acid produce corrosion to equipment and instrument, affect its work-ing life and serviceability.
Along with the continuous progress of diffusion technique, researchist finds that the operating air pressure reduced in diffusion furnace can improve the even row in diffusion furnace, avoids turbulent flow to produce, thus improves the homogeneity of diffusion.
Utility model content
For overcoming above-mentioned deficiency, the utility model object provides a kind of low pressure diffusion furnace.
Scheme of the present utility model is as follows: a kind of low pressure diffusion furnace, comprise body of heater, heating component, quartz door, metal o-ring, pressure transmitter, vacuum breaker nitrogen mouth, vacuum connects mouth, refrigerating unit, inlet mouth, device for recovering tail gas, described quartzy door is arranged on body of heater one end, described heating component is arranged on body of heater top and bottom, described metal o-ring is arranged on by quartzy door, described pressure transmitter, vacuum breaker nitrogen mouth, vacuum connects mouth and is arranged on metal o-ring, described refrigerating unit is arranged on the body of heater the other end, described device for recovering tail gas is arranged on by refrigerating unit, described inlet mouth is arranged on body of heater, described device for recovering tail gas is by conduit and body of heater UNICOM, described refrigerating unit is arranged on conduit, dry pump is provided with in described device for recovering tail gas.
The beneficial effects of the utility model: the utility model reduces diffusion furnace tube internal pressure in diffusion, regulate temperature simultaneously, time, airshed, turbulent flow is avoided to produce, thus improve the homogeneity of diffused sheet resistance, due to the raising of diffused sheet resistance homogeneity, about the design of load quartz boat separation can reduce to the half of standard value, the effect brought like this is that production capacity significantly promotes when equipment volume is constant, the utilising efficiency in diffusion process diffusion phosphorus source improves, the consumption in diffusion phosphorus source significantly reduces, save cost, low pressure diffusion furnace is compared with conventional atmospheric diffusion furnace, diffusion uniformity is good, efficiency promotes and to have output high, lattice imperfection is few, chemical and special gas loss significantly reduce, maintenance intervals is long.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Embodiment
Below in conjunction with accompanying drawing, utility model is described further.
A kind of low pressure diffusion furnace, comprise body of heater 1, heating component 2, quartz door 3, metal o-ring 4, pressure transmitter 5, vacuum breaker nitrogen mouth 6, vacuum connects mouth 7, refrigerating unit 8, inlet mouth 9, device for recovering tail gas 10, described quartzy door 3 is arranged on body of heater 1 one end, described heating component 2 is arranged on body of heater 1 top and bottom, it is other that described metal o-ring 4 is arranged on quartzy door 3, described pressure transmitter 5, vacuum breaker nitrogen mouth 6, vacuum connects mouth 7 and is arranged on metal o-ring 4, described refrigerating unit 8 is arranged on body of heater 1 the other end, it is other that described device for recovering tail gas 10 is arranged on refrigerating unit 8, described inlet mouth 9 is arranged on body of heater 1, described device for recovering tail gas 10 is by conduit and body of heater 1 UNICOM, described refrigerating unit 8 is arranged on conduit, dry pump is provided with in described device for recovering tail gas 10.
Although give detailed description and explanation to embodiment of the present utility model above; but what should indicate is; we can carry out various equivalence according to conception of the present utility model to above-mentioned embodiment and change and amendment; its function produced do not exceed that specification sheets and accompanying drawing contain yet spiritual time, all should within protection domain of the present utility model.
Claims (3)
1. a low pressure diffusion furnace, comprise body of heater, heating component, quartz door, metal o-ring, pressure transmitter, vacuum breaker nitrogen mouth, vacuum connects mouth, refrigerating unit, inlet mouth, device for recovering tail gas, it is characterized in that: described quartzy door is arranged on body of heater one end, described heating component is arranged on body of heater top and bottom, described metal o-ring is arranged on by quartzy door, described pressure transmitter, vacuum breaker nitrogen mouth, vacuum connects mouth and is arranged on metal o-ring, described refrigerating unit is arranged on the body of heater the other end, described device for recovering tail gas is arranged on by refrigerating unit, described inlet mouth is arranged on body of heater.
2. a kind of low pressure diffusion furnace according to claim 1, is characterized in that: described device for recovering tail gas is by conduit and body of heater UNICOM, and described refrigerating unit is arranged on conduit.
3. a kind of low pressure diffusion furnace according to claim 1, is characterized in that: be provided with dry pump in described device for recovering tail gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520787099.4U CN205062232U (en) | 2015-10-13 | 2015-10-13 | Low pressure diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520787099.4U CN205062232U (en) | 2015-10-13 | 2015-10-13 | Low pressure diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205062232U true CN205062232U (en) | 2016-03-02 |
Family
ID=55388812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520787099.4U Expired - Fee Related CN205062232U (en) | 2015-10-13 | 2015-10-13 | Low pressure diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205062232U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107090594A (en) * | 2017-04-20 | 2017-08-25 | 通威太阳能（合肥）有限公司 | Sealing device for furnace mouth of pressure reduction diffusion furnace |
| CN110538620A (en) * | 2018-11-14 | 2019-12-06 | 北京北方华创微电子装备有限公司 | Pressure control system and pressure control method of reaction chamber |
-
2015
- 2015-10-13 CN CN201520787099.4U patent/CN205062232U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107090594A (en) * | 2017-04-20 | 2017-08-25 | 通威太阳能（合肥）有限公司 | Sealing device for furnace mouth of pressure reduction diffusion furnace |
| CN110538620A (en) * | 2018-11-14 | 2019-12-06 | 北京北方华创微电子装备有限公司 | Pressure control system and pressure control method of reaction chamber |
| CN110538620B (en) * | 2018-11-14 | 2021-10-15 | 北京北方华创微电子装备有限公司 | Pressure control system and pressure control method of reaction chamber |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160302 Termination date: 20161013 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |