CN205008161U - Burnt ultrasonic spray pyrolysis spraying reacting chamber of stand alone type multisource copolymerization - Google Patents

Abstract

The utility model discloses a burnt ultrasonic spray pyrolysis spraying reacting chamber of stand alone type multisource copolymerization, the sample microscope carrier is established in the reacting chamber, sample microscope carrier top is equipped with a heating member shell, is equipped with the heating member in the heating member shell, and atomization source's figure is two, mutual independence between these atomization source at least to circumference along the reacting chamber arranges that the nozzle on every atomization source upper portion is connected with an injection spray pipe respectively, the upper portion of all injection spray pipes is all towards the axial lead of reacting chamber to form spray angle alpha with the axial lead of reacting chamber, the spout punishment of all injection spray pipes upper end do not is equipped with a baffle, and the baffle can shelter from or the nozzle of unlimited injection spray pipe upper end. The utility model discloses can obtain the film of required composition to the defect that traditional structure leads to cross contamination has been overcome, the utility model discloses a take out the pyroreaction tail gas that tail gas covered near sample microscope carrier, the utility model discloses can realize the thermoreflectance through heat reflect cover to further realize the cooling through water -cooling thermal shield board.

Description

The burnt ultrasonic spray pyrolysis spraying reaction chamber of stand alone type multi-source copolymerization

Technical field

The utility model belongs to ultrasonic spray pyrolysis spray-coated film field of material preparation, particularly relates to the burnt ultrasonic spray pyrolysis spraying reaction chamber of a kind of free-standing multi-source copolymerization.

Background technology

Ultrasonic spray pyrolysis spraying (being called for short USP) is a kind of common thin-film material preparation technology, and have been widely used in research and production, this method is good at the preparation of the compound films such as oxide, sulfide, chloride.Under rational technological parameter, the thin-film material that the quality of USP film can be prepared with sputtering method, CVD method is suitable, but cost significantly reduces.

Doping film and plural layers are thin-film material research and situation very common in producing, certain problem is there is in traditional USP method in doping and multilayer film preparation, subject matter is that the reative cell of spray pyrolysis only has an atomization source, needs the drop spraying heterogeneity to reative cell during the work of this atomization source according to the composition of film.Meanwhile, the reative cell also had at present has multiple atomization source, but these atomization sources share same injection spray pipe, and the axis parallel of the axial line of injection spray pipe and sample matrices.When manufacturing multi-layer compound film or doping deposit film, need the droplet spraying heterogeneity, and chemical reaction between the droplet of heterogeneity, may be there is, therefore above-mentioned two kinds of structures are used just very easily to pollute droplet, or allow between droplet chemical reaction occurs, thus required film cannot be obtained.In addition, due to the axial line of injection spray pipe and the axis parallel of sample matrices, so just cause droplet vertical incidence, thus very easily make droplet recoil downwards, and then be unfavorable for deposition and the formation of film.

A sample stage rotated is provided with in existing spray pyrolysis reative cell, this sample stage is used for fixed sample matrix, microscope carrier is coaxially connected with the output shaft lower end of motor by a dwang, and motor is fixed on the upper surface of upper cover by support, and the end face of upper cover and reative cell is tightly connected, upper cover can be opened when changing the product sprayed.Be provided with iodine-tungsten lamp above microscope carrier, thus form a high-temperature hot conversion zone by the region of this iodine-tungsten lamp near microscope carrier, and be provided with atomizer in the below of sample stage.During work, atomizer sprays the droplet after atomization from bottom to top, and high-temperature area near directive sample stage and sample matrices, and in sample matrices, form film by thermal decomposition and thin film deposition.Injection structure from bottom to top achieves the function that droplet sizes is selected to a certain extent, gravity is relied on to achieve the function of particle diameter selector, because larger droplet cannot arrive high-temperature area and sample matrices surface under gravity, which improves thin film deposition quality, is all useful for raising thin-film material surface fineness, reduction and elimination growth stresses of thin film, reduction or elimination fault of construction.

In use, we find that pyroreaction tail gas can be gathered near sample stage, and then form a pyroreaction tail gas layer, the droplet directive sample matrices that this pyroreaction tail gas layer can hinder atomizer to spray, and reduce the momentum on the incident sample matrices surface of droplet, and easily make droplet be subject to hindering backward lower recoil, be so also unfavorable for deposition and the formation of film; Meanwhile, owing to there is pyroreaction tail gas layer, so pyroreaction tail gas layer may pollute droplet; Or pyroreaction tail gas enters in deposited thin film material, thus cause the composition of film to change, so just cannot obtain the film wanting composition, the degree of crystallinity of film, density also can be caused to reduce, the problems such as fault of construction increase.

In addition, existing structure does not have heat shielding function, and a large amount of heat energy can be transmitted to reactor top, will cause energy waste like this.Meanwhile, the droplet after atomization also can be full of the inner chamber of reactor top, and droplet is strong acid or strong basicity drop, has very strong corrosivity, will corrode territory, non-reaction zone like this.In territory, non-reaction zone, there is signal transmssion line and the power transmission line of multiple testing arrangement, as thermocouple, heating iodine-tungsten lamp etc.The existence of corrosion can cause above measurement device precision to reduce appreciation can not measuring, cannot heat even short circuit and the serious consequence such as to burn.Although can pass through the frequent way changed to solve, dismounting, scouring are wasted time and energy, and equipment use cost also can significantly improve.

Utility model content

Technical problem to be solved in the utility model is to provide a kind of free-standing multi-source copolymerization burnt ultrasonic spray pyrolysis spraying reaction chamber, for overcoming the easy cross pollution in traditional single atomization source, technological parameter poor repeatability, and the uncontrollable defect of thin film composition.

The technical solution of the utility model is as follows: the burnt ultrasonic spray pyrolysis spraying reaction chamber of a kind of free-standing multi-source copolymerization, comprise reative cell (1) and sample stage (4), wherein reative cell (1) below is provided with atomization source (2), and droplet is penetrated from bottom to top by injection spray pipe (3) in this atomization source; Described sample stage (4) for coaxial fixed sample matrix, and is located in reative cell (1), and level is located at injection spray pipe (3) top; Described sample stage (4) is coaxially connected with the output shaft lower end of motor (6) by a dwang (5), this motor is supported on the upper surface of upper cover (8) by electric machine support (7), and be provided with 0 RunddichtringO between upper cover and described reative cell (1) upper surface, and upper cover (8) can be opened when needed; Described sample stage (4) top is provided with a calandria shell (9), is provided with calandria (10), forms high temperature thermal decomposition conversion zone by this calandria near sample stage (4) in calandria shell; It is characterized in that: the number of described atomization source (2) is at least two, separate between these atomization sources, and along described reative cell (1) circumferentially, and the nozzle on each atomization source (2) top is connected to a described injection spray pipe (3); The axial line of the equal orientating reaction room (1) in top of all described injection spray pipes (3), and form the identical spreading of spray α of a numerical value with the axial line of this reative cell, 15 °≤α≤45 °, and the axial line of all injection spray pipes (3) intersects at a point, this intersection point is the joining of described sample matrices axial line and its lower surface; The nozzle of all described injection spray pipe (3) upper ends is respectively equipped with one piece of baffle plate (11), this baffle plate is connected with corresponding driven unit, and under the driving of driven unit, block or open wide the nozzle of described injection spray pipe (3) upper end selectively.

In technique scheme, the utility model has abandoned the structure that conventional art shares an atomization source, the substitute is and multiple separate atomization source is set, these atomization sources along reative cell circumferentially, and be connected to an injection spray pipe at the nozzle on top, each atomization source, so form multi-source multi-pipeline formula structure, there is fundamental difference in this structure and traditional one, atomization source injection spray pipe or multi-source condominium road.Simultaneously, the nozzle on injection spray pipe top can by baffle plate opening and closing, thus a kind of droplet of composition can be formed in each atomization source, and the ejection of droplet can be controlled whether by the opening and closing of baffle plate, thus obtain the film of required composition, thus overcome the defect that traditional structure causes cross pollution well, and for manufacture composition doping film or multi-layer compound film provide possibility, and the utility model structure is simple, easy to implement, there is good technology and economic worth.And, in the utility model, the set-up mode of injection spray pipe (3) is very special, its spreading of spray α is between 15 ° and 45 °, and the axial line of all injection spray pipes (3) intersects at a point, this intersection point is the joining of described sample matrices axial line and its lower surface, so just form copolymerization burnt, both droplet will be caused downwards to recoil because spreading of spray α is too small, can not cross dense fog because of spreading of spray α again causes droplet cannot be attached on sample stage (4), thus be beneficial to very much deposition and the formation of film, improve film forming efficiency.

In the present case, described driven unit is made up of drive rod (12) and drive motors (13), wherein drive rod (12) upper end is vertical with described baffle plate (11) lower face fixes, and drive rod (12) lower end is through after the via hole on described reative cell (1), coaxially fix with the output shaft upper end of described drive motors (13), this drive motors is arranged on the outer wall of reative cell (1).

Adopt above structure, can not only reliably drive baffle plate to block or open wide the nozzle on injection spray pipe top, and structure is simple, reliably, be easy to control.Further, all driven units can link or differential, facilitate like this and produce doping or plural layers, thus are greatly convenient to manufacture.

In order to one of important inventive point of the present utility model, described sample stage (4) outside is covered with one and takes out tail gas cover (14), this is taken out tail gas cover Upper vertical and is connected with a tail gas exhaust tube (15), the high-temperature tail gas at described sample stage (4) place is discharged to reative cell (1) outward by this tail gas exhaust tube in time, thus avoids forming pyroreaction tail gas layer at sample stage (4) place.

In technique scheme, the utility model covers pyroreaction tail gas near sample stage by taking out tail gas cover, pyroreaction tail gas is prevented to be full of the inner chamber of reative cell, density again due to pyroreaction tail gas is smaller, so just can automatically be discharged to outside reative cell by tail gas exhaust tube, thus avoid near sample stage, form pyroreaction tail gas layer, so not only can droplet incident sample matrices surface time momentum, and can effectively prevent droplet from recoiling downwards, thus advantageously in deposition and the formation of film, and effectively can prevent pyroreaction tail gas pollution droplet, ensure the film obtaining required composition.

As preferably, described tail gas cover (14) of taking out comprises interior cover body (14a) and annular connecting plate (14c), wherein interior cover body (14a) is coaxially provided with an outer outlet body (14b) outward, the upper end of these two cover bodies is connected by described annular connecting plate (14c), and the uncovered of two these two cover body upper ends is closed, and on annular connecting plate (14c), be provided with a described tail gas exhaust tube (15), and annular connecting plate is fixedly connected with heat reflection cover (18) bottom surface of annular with a mounting bracket (16) by bolt;

The lower end of described interior cover body (14a) and outer outlet body (14b), all by the formation taper seat that slopes inwardly, forms an annular region between the taper seat of these two cover body lower ends, and covers pyroreaction tail gas by this annular region.

Adopt above structural design, originally take out tail gas cover and can more effectively cover pyroreaction tail gas, to extract pyroreaction tail gas, and then avoid near sample stage, form pyroreaction tail gas layer.

In order to another important inventive point of the present utility model, described tail gas cover (14) of taking out covers on calandria shell (9) outside simultaneously, this is taken out tail gas cover top and is fixed on described heat reflection cover (18) bottom surface by a fixed mount (17), the outward flange of this heat reflection cover is near the inwall of described reative cell (1), and its gap value is less than 0.3mm; Under described heat reflection cover (18) end face passes through one group, fixed leg (19) is lifted on one piece of water-cooled barricade (20) bottom surface, this water-cooled barricade is cirque structure, its outward flange is near the inwall of reative cell (1), its gap value is less than 0.3mm, and water-cooled barricade (20) end face is lifted on described upper cover (8) lower surface by fixed leg (21) on a group; Described water-cooled barricade (20) has cooling water channel, and be vertically provided with a water inlet pipe (22) and an outlet pipe (23) at water-cooled barricade end face, the lower end of these two water pipes is all communicated with the cooling water channel on water-cooled barricade (20), and the upper end of these two water pipes all reaches reative cell (1) outside from described upper cover (8).

Adopt above structural design, the utility model realizes heat reflection by heat reflection cover, and realizes cooling further by water-cooled barricade, prevents heat conduction ground reactor top, and then energy-conservation; Meanwhile, the outward flange of heat reflection cover and water-cooled barricade, near the inwall of reative cell, can be avoided so again the droplet after misunderstanding to transfer to the territory, non-reaction zone of reaction chamber wall in a large number, thus prevent the parts corroding territory, non-reaction zone.

As preferably, the number of described atomization source (2) is 3-6, and these atomization sources are uniform along the circumference of described reative cell (1), and the numerical value of described spreading of spray α is 30 °.Certainly, in actual manufacture process, the atomization source (2) of other numbers can also be selected, be not limited to the number described in the present embodiment.

Described heat reflection cover (18) and water-cooled barricade (20) are a pot lid-like, and the gap value between its outward flange and described reative cell (1) inwall is 0.2mm.

Adopt above structural design, just can improve heat shielding effects of the present utility model further, and prevent the droplet after being atomized from transferring to the territory, non-reaction zone at reative cell (1) top.

Beneficial effect: the utility model tool has the following advantages:

1, the utility model has abandoned the structure that conventional art shares an atomization source, the substitute is and multiple separate atomization source is set, these atomization sources along reative cell circumferentially, and be connected to an injection spray pipe at the nozzle on top, each atomization source, and the nozzle on injection spray pipe top can by baffle plate opening and closing, thus a kind of droplet of composition can be formed in each atomization source, and the ejection of droplet can be controlled whether by the opening and closing of baffle plate, thus obtain the film of required composition, thus overcome the defect that traditional structure causes cross pollution well, and for manufacture composition doping film or multi-layer compound film provide engineering feasibility.Simultaneously, in the utility model, the set-up mode of injection spray pipe forms copolymerization Jiao, both droplet will be caused downwards to recoil because spreading of spray α is too small, can not cross dense fog because of spreading of spray α again causes droplet cannot be attached on sample stage, thus be beneficial to very much deposition and the formation of film, improve film forming efficiency.

2, the utility model covers pyroreaction tail gas near sample stage by taking out tail gas cover, pyroreaction tail gas is prevented to be full of the inner chamber of reative cell, density again due to pyroreaction tail gas is smaller, so just can automatically be discharged to outside reative cell by tail gas exhaust tube, thus avoid near sample stage, form pyroreaction tail gas layer, so not only can droplet incident sample matrices surface time momentum, and can prevent droplet from recoiling well downwards, thus be beneficial to deposition and the formation of film, and effectively can prevent pyroreaction tail gas pollution droplet, ensure the film obtaining required composition.

3, the utility model realizes heat reflection by heat reflection cover, and realizes cooling further by water-cooled barricade, prevents heat conduction ground reactor top, and then energy-conservation; Meanwhile, the outward flange of heat reflection cover and water-cooled barricade, near the inwall of reative cell, can be avoided so again the droplet after misunderstanding to transfer to the territory, non-reaction zone of reaction chamber wall in a large number, thus prevent the parts corroding territory, non-reaction zone.

Accompanying drawing explanation

Fig. 1 is structural representation of the present utility model.

Fig. 2 is the partial enlarged drawing of part A in Fig. 1.

Detailed description of the invention

Below in conjunction with drawings and Examples, the utility model is described in further detail:

As shown in Figure 1, 2, the burnt ultrasonic spray pyrolysis spraying reaction chamber of a kind of free-standing multi-source copolymerization, primarily of reative cell 1, atomization source 2, injection spray pipe 3, sample stage 4, dwang 5, motor 6, electric machine support 7, upper cover 8, calandria shell 9, calandria 10, driven unit, takes out tail gas cover 14, tail gas exhaust tube 15, mounting bracket 16, fixed mount 17, heat reflection cover 18, lower fixed leg 19, water-cooled barricade 20, upper fixed leg 21, water inlet pipe 22 and outlet pipe 23 and forms.Wherein, be provided with one group of atomization source 2 below reative cell 1, the number in this atomization source 2 is at least two, separate between these atomization sources 2, and along reative cell 1 circumferentially.In the present case, atomization source 2 can adopt prior art, also can adopt other Novel atomized sources.In the present case, the number in atomization source 2 is 3-6, and these atomization sources 2 are uniform along the circumference of reative cell 1.The nozzle on top, each atomization source 2 is connected to an injection spray pipe 3, the axial line of the equal orientating reaction room 1, top of all injection spray pipes 3, and form the identical spreading of spray α of a numerical value with the axial line of this reative cell 1, and 15 °≤α≤45 °, and can more preferably 20 °, 25 °, 30 °, 35 ° or 40 °.The axial line of all injection spray pipes 3 intersects at a point, and this intersection point is the joining of sample matrices axial line and its lower surface.The nozzle of all injection spray pipe 3 upper ends is respectively equipped with one piece of baffle plate 11, and this baffle plate 11 is connected with corresponding driven unit, and blocks selectively under the driving of driven unit or the nozzle of unlimited injection spray pipe 3 upper end.When the nozzle opening injection spray pipe 3 upper end opens wide, the droplet after atomization penetrates from bottom to top, and directive sample stage 4.

Driven unit is made up of drive rod 12 and drive motors 13, wherein drive rod 12 upper end is vertical with baffle plate 11 lower face fixes, and drive rod 12 lower end is through after the via hole on described reative cell 1, coaxially fix with the output shaft upper end of drive motors 13, this drive motors 13 is arranged on the outer wall of reative cell 1.

As shown in Figure 1, 2, described sample stage 4 is located in reative cell 1, the structure of sample stage 4 adopts existing structure, and the coaxial fixed sample matrix (not marking in figure) of the lower surface of sample stage 4 during use, and the fixed form of sample matrices is prior art.Meanwhile, level is located at above injection spray pipe 3, and near injection spray pipe 3.Sample stage 4 is coaxially connected with the output shaft lower end of motor 6 by a dwang 5, and this motor 6 is supported on the upper surface of upper cover 8 by electric machine support 7, and is provided with 0 RunddichtringO between upper cover and reative cell 1 upper surface, and upper cover 8 can be opened when needed.Be provided with a calandria shell 9 above sample stage 4, in calandria shell 9, be provided with calandria 10, near sample stage 4, form high temperature thermal decomposition conversion zone by this calandria 10.In the present case, calandria 10 selects iodine-tungsten lamp.

Be covered with one outside sample stage 4 and take out tail gas cover 14, this is taken out tail gas cover 14 Upper vertical and is connected with a tail gas exhaust tube 15, the high-temperature tail gas at sample stage 4 place is discharged to outside reative cell 1 by this tail gas exhaust tube in time, thus avoids forming pyroreaction tail gas layer at sample stage 4 place.In the present case, take out tail gas cover 14 and comprise interior cover body 14a and annular connecting plate 14c, wherein interior cover body 14a is coaxially provided with an outer outlet body 14b outward, the upper end of these two cover bodies is connected by annular connecting plate 14c, and the uncovered of two these two cover body upper ends is closed, and on annular connecting plate 14c, be provided with a tail gas exhaust tube 15, and annular connecting plate is fixedly connected with described heat reflection cover 18 bottom surface with a mounting bracket 16 by bolt.The lower end of interior cover body 14a and outer outlet body 14b, all by the formation taper seat that slopes inwardly, forms an annular region between the taper seat of these two cover body lower ends, and covers pyroreaction tail gas by this annular region.

As shown in Figure 1, 2, take out tail gas cover 14 and cover on outside calandria shell 9 simultaneously, this is taken out tail gas cover 14 top and is fixed on heat reflection cover 18 bottom surface of annular by a fixed mount 17.The outward flange of heat reflection cover 19 is near the inwall of described reative cell 1, and its gap value is less than 0.3mm, and can be preferably 0.2mm.Heat reflection cover 18 end face is lifted on one piece of water-cooled barricade 20 bottom surface by fixed leg 19 under a group, and this water-cooled barricade 20 is cirque structure, and its outward flange is near the inwall of reative cell 1, and its gap value is less than 0.3mm, and can more preferably 0.2mm.

Water-cooled barricade 20 end face is lifted on upper cover 8 lower surface by fixed leg 21 on a group, and on this, the number of fixed leg 21 is 3-8 root.Water-cooled barricade 20 has cooling water channel, and be vertically provided with a water inlet pipe 22 and an outlet pipe 23 at water-cooled barricade end face, the lower end of these two water pipes is all communicated with the cooling water channel on water-cooled barricade 20, and the upper end of these two water pipes all reaches outside reative cell 1 from described upper cover 8.

The foregoing is only preferred embodiment of the present utility model; it is not restriction with the utility model; all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.

Claims (7)

1. the burnt ultrasonic spray pyrolysis spraying reaction chamber of free-standing multi-source copolymerization, comprise reative cell (1) and sample stage (4), wherein reative cell (1) below is provided with atomization source (2), and droplet is penetrated from bottom to top by injection spray pipe (3) in this atomization source; Described sample stage (4) for coaxial fixed sample matrix, and is located in reative cell (1), and level is located at injection spray pipe (3) top; Described sample stage (4) is coaxially connected with the output shaft lower end of motor (6) by a dwang (5), this motor is supported on the upper surface of upper cover (8) by electric machine support (7), and be provided with 0 RunddichtringO between upper cover and described reative cell (1) upper surface, and upper cover (8) can be opened when needed; Described sample stage (4) top is provided with a calandria shell (9), is provided with calandria (10), forms high temperature thermal decomposition conversion zone by this calandria near sample stage (4) in calandria shell; It is characterized in that: the number of described atomization source (2) is at least two, separate between these atomization sources, and along described reative cell (1) circumferentially, and the nozzle on each atomization source (2) top is connected to a described injection spray pipe (3); The axial line of the equal orientating reaction room (1) in top of all described injection spray pipes (3), and form the identical spreading of spray α of a numerical value with the axial line of this reative cell, 15 °≤α≤45 °, and the axial line of all injection spray pipes (3) intersects at a point, this intersection point is the joining of described sample matrices axial line and its lower surface; The nozzle of all described injection spray pipe (3) upper ends is respectively equipped with one piece of baffle plate (11), this baffle plate is connected with corresponding driven unit, and under the driving of driven unit, block or open wide the nozzle of described injection spray pipe (3) upper end selectively.

2. the burnt ultrasonic spray pyrolysis spraying reaction chamber of free-standing multi-source copolymerization according to claim 1, it is characterized in that: described driven unit is made up of drive rod (12) and drive motors (13), wherein drive rod (12) upper end is vertical with described baffle plate (11) lower face fixes, and drive rod (12) lower end is through after the via hole on described reative cell (1), coaxially fix with the output shaft upper end of described drive motors (13), this drive motors is arranged on the outer wall of reative cell (1).

3. the burnt ultrasonic spray pyrolysis spraying reaction chamber of free-standing multi-source copolymerization according to claim 1, it is characterized in that: described sample stage (4) outside is covered with one and takes out tail gas cover (14), this is taken out tail gas cover Upper vertical and is connected with a tail gas exhaust tube (15), the high-temperature tail gas at described sample stage (4) place is discharged to reative cell (1) outward by this tail gas exhaust tube in time, thus avoids forming pyroreaction tail gas layer at sample stage (4) place.

4. the burnt ultrasonic spray pyrolysis spraying reaction chamber of free-standing multi-source copolymerization according to claim 3, it is characterized in that: described in take out tail gas cover (14) and comprise interior cover body (14a) and annular connecting plate (14c), wherein interior cover body (14a) is coaxially provided with an outer outlet body (14b) outward, the upper end of these two cover bodies is connected by described annular connecting plate (14c), and the uncovered of two these two cover body upper ends is closed, and on annular connecting plate (14c), be provided with a described tail gas exhaust tube (15), and annular connecting plate is fixedly connected with heat reflection cover (18) bottom surface of annular with a mounting bracket (16) by bolt,

The lower end of described interior cover body (14a) and outer outlet body (14b), all by the formation taper seat that slopes inwardly, forms an annular region between the taper seat of these two cover body lower ends, and covers pyroreaction tail gas by this annular region.

5. the burnt ultrasonic spray pyrolysis spraying reaction chamber of free-standing multi-source copolymerization according to claim 4, it is characterized in that: described in take out tail gas cover (14) cover on simultaneously calandria shell (9) outside, this is taken out tail gas cover top and is fixed on described heat reflection cover (18) bottom surface by a fixed mount (17), the outward flange of this heat reflection cover is near the inwall of described reative cell (1), and its gap value is less than 0.3mm; Under described heat reflection cover (18) end face passes through one group, fixed leg (19) is lifted on one piece of water-cooled barricade (20) bottom surface, this water-cooled barricade is cirque structure, its outward flange is near the inwall of reative cell (1), its gap value is less than 0.3mm, and water-cooled barricade (20) end face is lifted on described upper cover (8) lower surface by fixed leg (21) on a group; Described water-cooled barricade (20) has cooling water channel, and be vertically provided with a water inlet pipe (22) and an outlet pipe (23) at water-cooled barricade end face, the lower end of these two water pipes is all communicated with the cooling water channel on water-cooled barricade (20), and the upper end of these two water pipes all reaches reative cell (1) outside from described upper cover (8).

6. the burnt ultrasonic spray pyrolysis spraying reaction chamber of free-standing multi-source copolymerization according to claim 1, it is characterized in that: the number of described atomization source (2) is 3-6, these atomization sources are uniform along the circumference of described reative cell (1), and the numerical value of described spreading of spray α is 30 °.

7. the burnt ultrasonic spray pyrolysis spraying reaction chamber of free-standing multi-source copolymerization according to claim 5, it is characterized in that: described heat reflection cover (18) and water-cooled barricade (20) are a pot lid-like, and the gap value between its outward flange and described reative cell (1) inwall is 0.2mm.