CN205008163U - Hot shielding structure of ultrasonic spray pyrolysis spraying reacting chamber - Google Patents
Hot shielding structure of ultrasonic spray pyrolysis spraying reacting chamber Download PDFInfo
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- CN205008163U CN205008163U CN201520614967.9U CN201520614967U CN205008163U CN 205008163 U CN205008163 U CN 205008163U CN 201520614967 U CN201520614967 U CN 201520614967U CN 205008163 U CN205008163 U CN 205008163U
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- water
- cover
- barricade
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- reative cell
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Abstract
The utility model discloses an upper portion is equipped with the microscope carrier in the hot shielding structure of ultrasonic spray pyrolysis spraying reacting chamber, reacting chamber, and the microscope carrier top sets up the heating member shell that is equipped with the heating member, the microscope carrier passes through the dwang to be connected with motor output shaft lower extreme, and heating member shell external fixation has air exhaust cover, and air exhaust cover passes through at the top mount to be fixed on the annular heat reflect cover of circle, the heat reflect cover top surface passes through fixed column hoist and mount down and hoists at the upper cover lower surface through last fixed column at water -cooling thermal shield board, water -cooling thermal shield board, have the cooling water course on the water -cooling thermal shield board, water -cooling thermal shield board top surface is equipped with inlet tube and outlet pipe, and the cooling water course on two genshui pipe and the water -cooling thermal shield board feeds through. The utility model discloses can realize the thermoreflectance through heat reflect cover to through the firm and hard existing cooling of water -cooling thermal shield, prevent heat conduction ground reacting chamber top, the non - conversion zone of reacting chamber inner wall is transferred to near reacting chamber inner wall, the droplet after avoiding so again misunderstanding in a large number to heat reflect cover and water -cooling thermal shield board outward flange.
Description
Technical field
The utility model belongs to ultrasonic spray pyrolysis spraying reaction chamber field, particularly relates to a kind of heat shield structure of ultrasonic spray pyrolysis spraying reaction chamber.
Background technology
Ultrasonic spray pyrolysis spraying (being called for short USP) is a kind of common thin-film material preparation technology, and have been widely used in research and production, this method is good at the preparation of the compound films such as oxide, sulfide, chloride.Under rational technological parameter, the thin-film material that the quality of USP film can be prepared with sputtering method, CVD method is suitable, but cost significantly reduces.
Ultrasonic spray pyrolysis spraying reaction chamber top is provided with a microscope carrier for stationary substrate, is provided with iodine-tungsten lamp above this microscope carrier, thus forms a high-temperature hot conversion zone by the region of this iodine-tungsten lamp near microscope carrier.Droplet after atomization sprays from atomization source, directive microscope carrier from lower to upper, thus herein pyrolytic reaction occurs.Microscope carrier is rotating table, this microscope carrier is coaxially connected with the output shaft lower end of motor by a dwang, and motor is fixed on the upper surface of upper cover by support, and the end face of upper cover and reative cell is tightly connected, and upper cover can be opened when changing the product sprayed.
Region near microscope carrier is high-temperature hot conversion zone, and existing structure does not have heat shielding function, and a large amount of heat energy can be transmitted to reactor top, will cause energy waste like this.Meanwhile, the droplet after atomization also can be full of the inner chamber of reactor top, and droplet is strong acid or strong basicity drop, has very strong corrosivity, will corrode territory, non-reaction zone like this, is badly in need of solving above-mentioned technical barrier for this reason.
Utility model content
Technical problem to be solved in the utility model is the heat shield structure providing a kind of ultrasonic spray pyrolysis spraying reaction chamber, for the top preventing the droplet of heat and atomization from transferring to reative cell too much.
The technical solution of the utility model is as follows: a kind of heat shield structure of ultrasonic spray pyrolysis spraying reaction chamber, comprise reative cell (1) and upper cover (8), upper level wherein in reative cell (1) is provided with a microscope carrier for stationary substrate (2), the top of this microscope carrier is provided with a calandria shell (3), in calandria shell (3), be provided with calandria (4), near microscope carrier (2), form high-temperature hot conversion zone by this calandria, described microscope carrier (2) is coaxially connected with the output shaft lower end of motor (6) by a dwang (5), this motor is supported on the upper surface of described upper cover (8) by electric machine support (7), and between upper cover (8) and described reative cell (1) upper surface, be provided with 0 RunddichtringO, and upper cover (8) can be opened when needed, it is characterized in that: described calandria shell (3) extenal fixation has a draft hood (9), this draft hood top is fixed on heat reflection cover (11) bottom surface of annular by a fixed mount (10), the outward flange of this heat reflection cover is near the inwall of described reative cell (1), its gap value is less than 0.3mm, under described heat reflection cover (11) end face passes through one group, fixed leg (12) is lifted on the bottom surface of one piece of water-cooled barricade (13), this water-cooled barricade is cirque structure, its outward flange is near the inwall of reative cell (1), its gap value is less than 0.3mm, and water-cooled barricade (13) end face is lifted on the lower surface of described upper cover (8) by fixed leg (14) on a group, described water-cooled barricade (13) has cooling water channel, and be vertically provided with a water inlet pipe (15) and an outlet pipe (16) at water-cooled barricade end face, the lower end of these two water pipes is all communicated with the cooling water channel on water-cooled barricade (13), and the upper end of these two water pipes all reaches reative cell (1) outside from described upper cover (8).
Adopt above technical scheme, the utility model realizes heat reflection by heat reflection cover, and realizes cooling further by water-cooled barricade, prevents heat conduction ground reactor top, and then energy-conservation; Simultaneously, the outward flange of heat reflection cover and water-cooled barricade is near the inwall of reative cell, the droplet after misunderstanding can be avoided so again to transfer to the territory, non-reaction zone of reaction chamber wall in a large number, thus prevent the parts corroding territory, non-reaction zone, and then overcome the defect of prior art well, there is good practicality.
In the present case, described water inlet pipe (15) and outlet pipe (16) are located at the both sides of motor (6).
Adopt above structural design, the utility model just can improve heat shielding effects.
As preferably, described heat reflection cover (11) and water-cooled barricade (13) are a pot lid-like, and the gap value between its outward flange and described reative cell (1) inwall is 0.2mm.
Adopt above structural design, just can improve heat shielding effects of the present utility model further, and prevent the droplet after being atomized from transferring to the territory, non-reaction zone at reative cell (1) top.
For the ease of gathering materials on the spot, described calandria (4) selects iodine-tungsten lamp.
Beneficial effect: the utility model realizes heat reflection by heat reflection cover, and realize cooling further by water-cooled barricade, prevent heat conduction ground reactor top, so energy-conservation; Simultaneously, the outward flange of heat reflection cover and water-cooled barricade is near the inwall of reative cell, the droplet after misunderstanding can be avoided so again to transfer to the territory, non-reaction zone of reaction chamber wall in a large number, thus prevent the parts corroding territory, non-reaction zone, and then overcome the defect of prior art well, there is good practicality.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Detailed description of the invention
Below in conjunction with drawings and Examples, the utility model is described in further detail:
As shown in Figure 1, a heat shield structure for ultrasonic spray pyrolysis spraying reaction chamber, is formed primarily of reative cell 1, microscope carrier 2, calandria shell 3, calandria 4, dwang 5, motor 6, electric machine support 7, upper cover 8, draft hood 9, fixed mount 10, heat reflection cover 11, lower fixed leg 12, water-cooled barricade 13, upper fixed leg 14, water inlet pipe 15 and outlet pipe 16.Wherein, reative cell 1 is double-decker, and the cavity between its inside and outside layer is for holding cooling water.Upper level in reative cell 1 is provided with a microscope carrier 2 for stationary substrate, and the structure of this microscope carrier 2 is existing structure, does not repeat at this.
The top of microscope carrier 2 is provided with a calandria shell 3, is provided with calandria 4 in calandria shell 3, forms high-temperature hot conversion zone by this calandria 4 near microscope carrier 2.In the present case, calandria 4 selects iodine-tungsten lamp.Microscope carrier 2 is coaxially connected with the output shaft lower end of motor 6 by a dwang 5, this motor 6 is supported on the upper surface of upper cover 8 by electric machine support 7, and be provided with 0 RunddichtringO between upper cover 8 and reative cell 1 upper surface, and upper cover 8 takes out product at needs or can open when adding substrate.
As shown in Figure 1, calandria shell 3 extenal fixation has a draft hood 9, this draft hood 9 top is fixed on heat reflection cover 11 bottom surface of annular by a fixed mount 10, and the outward flange of this heat reflection cover 11 is near the inwall of reative cell 1, and its gap value is less than 0.3mm.Heat reflection cover 11 end face is lifted on the bottom surface of one piece of water-cooled barricade 13 by fixed leg 12 under a group, this water-cooled barricade 13 is cirque structure, its outward flange is near the inwall of reative cell 1, its gap value is less than 0.3mm, and water-cooled barricade 13 end face is lifted on the lower surface of upper cover 8 by fixed leg 14 on a group.As preferably, heat reflection cover 11 and water-cooled barricade 13 are a pot lid-like, and the gap value between its outward flange and reative cell 1 inwall is 0.2 or 0.1mm.
Water-cooled barricade 13 has cooling water channel, and be vertically provided with a water inlet pipe 15 and an outlet pipe 16 at water-cooled barricade 13 end face, the lower end of these two water pipes is all communicated with the cooling water channel on water-cooled barricade 13, and the upper end of these two water pipes all reaches outside reative cell 1 from described upper cover 8.In addition, water inlet pipe 15 and outlet pipe 16 are located at the both sides of motor 6.
The foregoing is only preferred embodiment of the present utility model; it is not restriction with the utility model; all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.
Claims (4)
1. the heat shield structure of a ultrasonic spray pyrolysis spraying reaction chamber, comprise reative cell (1) and upper cover (8), upper level wherein in reative cell (1) is provided with a microscope carrier for stationary substrate (2), the top of this microscope carrier is provided with a calandria shell (3), in calandria shell (3), be provided with calandria (4), near microscope carrier (2), form high-temperature hot conversion zone by this calandria, described microscope carrier (2) is coaxially connected with the output shaft lower end of motor (6) by a dwang (5), this motor is supported on the upper surface of described upper cover (8) by electric machine support (7), and between upper cover (8) and described reative cell (1) upper surface, be provided with 0 RunddichtringO, and upper cover (8) can be opened when needed, it is characterized in that: described calandria shell (3) extenal fixation has a draft hood (9), this draft hood top is fixed on heat reflection cover (11) bottom surface of annular by a fixed mount (10), the outward flange of this heat reflection cover is near the inwall of described reative cell (1), its gap value is less than 0.3mm, under described heat reflection cover (11) end face passes through one group, fixed leg (12) is lifted on the bottom surface of one piece of water-cooled barricade (13), this water-cooled barricade is cirque structure, its outward flange is near the inwall of reative cell (1), its gap value is less than 0.3mm, and water-cooled barricade (13) end face is lifted on the lower surface of described upper cover (8) by fixed leg (14) on a group, described water-cooled barricade (13) has cooling water channel, and be vertically provided with a water inlet pipe (15) and an outlet pipe (16) at water-cooled barricade end face, the lower end of these two water pipes is all communicated with the cooling water channel on water-cooled barricade (13), and the upper end of these two water pipes all reaches reative cell (1) outside from described upper cover (8).
2. the heat shield structure of ultrasonic spray pyrolysis spraying reaction chamber according to claim 1, is characterized in that: described water inlet pipe (15) and outlet pipe (16) are located at the both sides of motor (6).
3. the heat shield structure of ultrasonic spray pyrolysis spraying reaction chamber according to claim 1, it is characterized in that: described heat reflection cover (11) and water-cooled barricade (13) are a pot lid-like, and the gap value between its outward flange and described reative cell (1) inwall is 0.2mm.
4., according to the heat shield structure of the arbitrary described ultrasonic spray pyrolysis spraying reaction chamber of claim 1-3, it is characterized in that: described calandria (4) selects iodine-tungsten lamp.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520614967.9U CN205008163U (en) | 2015-08-14 | 2015-08-14 | Hot shielding structure of ultrasonic spray pyrolysis spraying reacting chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520614967.9U CN205008163U (en) | 2015-08-14 | 2015-08-14 | Hot shielding structure of ultrasonic spray pyrolysis spraying reacting chamber |
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| Publication Number | Publication Date |
|---|---|
| CN205008163U true CN205008163U (en) | 2016-02-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201520614967.9U Expired - Fee Related CN205008163U (en) | 2015-08-14 | 2015-08-14 | Hot shielding structure of ultrasonic spray pyrolysis spraying reacting chamber |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106733364A (en) * | 2016-11-01 | 2017-05-31 | 重庆理工大学 | Ultrasonic atomizatio continuous spray coating process |
-
2015
- 2015-08-14 CN CN201520614967.9U patent/CN205008163U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106733364A (en) * | 2016-11-01 | 2017-05-31 | 重庆理工大学 | Ultrasonic atomizatio continuous spray coating process |
| CN106733364B (en) * | 2016-11-01 | 2019-03-08 | 重庆理工大学 | Ultrasonic atomizatio continuous spray coating process |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160203 Termination date: 20200814 |