CN204991673U - Installation and aligner - Google Patents
Installation and aligner Download PDFInfo
- Publication number
- CN204991673U CN204991673U CN201520455971.5U CN201520455971U CN204991673U CN 204991673 U CN204991673 U CN 204991673U CN 201520455971 U CN201520455971 U CN 201520455971U CN 204991673 U CN204991673 U CN 204991673U
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- manipulator
- main part
- heat dish
- instrument main
- contact
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides an installation and aligner, has solved the installation of the interior spare part of current device compartment, the difference problem among the calibration process. This instrument includes the instrument main part both sides above the instrument main part are equipped with the heat dish respectively and pass piece position contact and the high contact of thimble, be equipped with locating pin and heat dish and manipulator interval contact below the instrument main part respectively. The center below the instrument main part is established to above -mentioned locating pin, and the heat dish contacts then establish the position of being close the end below the instrument main part with the manipulator interval. The utility model discloses the manipulator is calibrated to the interval of hot dish cart face in the time of can and passing the piece to hot biography piece position of coiling, wafer climbing mechanism height, and independence ruler scale can pinpoint. Mainly be applied to the sedimentary application technique field of semiconductor films.
Description
Technical field
The utility model relates to a kind of multipurpose tool of semiconductor coated film equipment, in the installation that this instrument is mainly used in parts in semiconductor coated film device reaction cavity and calibration process, belongs to the applied technical field of semiconductive thin film deposition.
Background technology
When in the chamber of existing semiconductor coated film equipment, parts are installed and are calibrated, rely on ruler as standard, artificial ruler reading of observing is relied on to determine position, because operating personnel are different, angle and the method for observing scale are different, cause there are differences between board and board, this causes harmful effect to the uniformity of process results.
Summary of the invention
The utility model, for the purpose of solving the problem, devises multipurpose tool, solves the difference problem in the installation of parts in existing equipment chamber, calibration process.
For achieving the above object, the utility model adopts following technical proposals: a kind of installation and truing tool, comprise tool body (1), the both sides on described tool body (1) are respectively equipped with heat dish and pass contact, sheet position (5) and pitch of enters contact (2); Be respectively equipped with below described tool body (1) alignment pin (4) and heat dish with manipulator pitch contacts (3).Above-mentioned alignment pin (4) is located at the center below tool body (1), and heat dish and manipulator pitch contacts (3) are then located at tool body (1) below close to the position of termination.
The utility model can to the biography sheet position of heat dish, wafer lifting body height and pass sheet time manipulator calibrate to the spacing of hot panel surface, do not rely on ruler scale, can accurately locate above-mentioned position.When calibrating heat dish and passing sheet position, the end plane A (6) that heat dish passes contact, sheet position (5) near-end is placed down, tool body (1) is stood on cavity bottom surface, now to rising heat dish.When ceramic ring upper surface and the instrument contact of heat dish, preserve heat dish position, this position fixed is for passing sheet position.This heat is kept to coil motionless, the end plane B (7) of pitch of enters contact (2) near-end is placed down, near centre hole position, stands on hot panel surface, adjustment pitch of enters is to top and the instrument contact of thimble, and this position is the raised position of pitch of enters calmly.Manipulator is stretched into cavity, the alignment pin of instrument (4) is inserted the circular hole at manipulator center, keep flat instrument, adjustment manipulator height, just contact with ceramic ring upper surface with manipulator pitch contacts (3) to heat dish, preserve manipulator height.Complete calibration.
The beneficial effects of the utility model and feature are:
The utility model provides a kind of special truing tool rational in infrastructure, solves prior art and relies on ruler as standard, the problem that dependence artificial observation ruler reading is determined position and caused precision low.This instrument is easy to use, positioning precision is high.The applied technical field of semiconductive thin film deposition can be widely used in.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
In figure, piece mark represents respectively:
1, tool body; 2, pitch of enters contact; 3, heat dish and manipulator pitch contacts; 4, alignment pin; 5, heat dish passes contact, sheet position; 6, end plane A; 7, end plane B.
Embodiment
Embodiment
With reference to Fig. 1, a kind of installation and truing tool, comprise tool body 1, and the both sides on described tool body 1 are respectively equipped with heat dish and pass contact, sheet position 5 and pitch of enters contact 2; Be respectively equipped with below described tool body 1 alignment pin 4 and heat dish with manipulator pitch contacts 3.Above-mentioned alignment pin (4) is located at the center below tool body 1, and heat dish and manipulator pitch contacts 3 are then located at tool body 1 below close to the position of termination.
The utility model can to the biography sheet position of heat dish, wafer lifting body height and pass sheet time manipulator calibrate to the spacing of hot panel surface, do not rely on ruler scale, can accurately locate above-mentioned position.When calibrating heat dish and passing sheet position, the end plane A6 that heat dish passes contact 5, sheet position near-end is placed down, tool body 1 is stood on cavity bottom surface, now to rising heat dish.When ceramic ring upper surface and the instrument contact of heat dish, preserve heat dish position, this position fixed is for passing sheet position.Keep this heat to coil motionless, placed down by the end plane B7 of pitch of enters contact 2 near-end, near centre hole position, stand on hot panel surface, adjustment pitch of enters is to the top of thimble and instrument contact, and this position is the raised position of pitch of enters calmly.Manipulator is stretched into cavity, the alignment pin 4 of instrument is inserted the circular hole at manipulator center, keep flat instrument, adjustment manipulator height, just contacts with ceramic ring upper surface with manipulator pitch contacts 3 to heat dish, preserves manipulator height.Complete calibration.
Claims (1)
1. install and truing tool for one kind, it is characterized in that: this instrument comprises tool body (1), the both sides on described tool body (1) are respectively equipped with heat dish and pass contact, sheet position (5) and pitch of enters contact (2); Be respectively equipped with below described tool body (1) alignment pin (4) and heat dish with manipulator pitch contacts (3), above-mentioned alignment pin (4) is located at the center below tool body (1), and heat dish and manipulator pitch contacts (3) are then located at tool body (1) below close to the position of termination.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520455971.5U CN204991673U (en) | 2015-06-29 | 2015-06-29 | Installation and aligner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520455971.5U CN204991673U (en) | 2015-06-29 | 2015-06-29 | Installation and aligner |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204991673U true CN204991673U (en) | 2016-01-20 |
Family
ID=55126012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520455971.5U Active CN204991673U (en) | 2015-06-29 | 2015-06-29 | Installation and aligner |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204991673U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110310913A (en) * | 2018-03-20 | 2019-10-08 | 北京北方华创微电子装备有限公司 | Robot calibration device and method |
-
2015
- 2015-06-29 CN CN201520455971.5U patent/CN204991673U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110310913A (en) * | 2018-03-20 | 2019-10-08 | 北京北方华创微电子装备有限公司 | Robot calibration device and method |
| CN110310913B (en) * | 2018-03-20 | 2022-03-22 | 北京北方华创微电子装备有限公司 | Manipulator calibration device and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No.900 Shuijia, Hunnan District, Shenyang City, Liaoning Province Patentee after: Tuojing Technology Co.,Ltd. Address before: 110179 3rd floor, No.1-1 Xinyuan street, Hunnan New District, Shenyang City, Liaoning Province Patentee before: PIOTECH Co.,Ltd. |