CN204855730U - Detection apparatus for it detects to be used for passing a sentence classes and grades in school CCD sensitization homogeneity - Google Patents

Detection apparatus for it detects to be used for passing a sentence classes and grades in school CCD sensitization homogeneity Download PDF

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Publication number
CN204855730U
CN204855730U CN201520664667.1U CN201520664667U CN204855730U CN 204855730 U CN204855730 U CN 204855730U CN 201520664667 U CN201520664667 U CN 201520664667U CN 204855730 U CN204855730 U CN 204855730U
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China
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laser
ccd
scientific grade
grade ccd
homogeneity
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CN201520664667.1U
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Chinese (zh)
Inventor
巴荣声
姜宏振
郑垠波
陈波
袁静
周信达
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Laser Fusion Research Center China Academy of Engineering Physics
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Laser Fusion Research Center China Academy of Engineering Physics
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Abstract

The utility model discloses a detection apparatus for it detects to be used for passing a sentence classes and grades in school CCD sensitization homogeneity belongs to optical element and detects the detection device who is used for detecting CCD sensitization homogeneity among the technical field, and its aim at provides one kind and detects the detection apparatus for it detects to be used for passing a sentence classes and grades in school CCD sensitization homogeneity that the precision is high, detects error traceability. It includes fiber laser, optic fibre, optical collimator, first board, laser power meter, electronic translation platform and the branch of academic or vocational study classes and grades in school CCD of splitting, and incident laser that fiber laser produced loops through and shines first splitting on the board behind light, the optical collimator, partly laser sees through the first plate -type of splitting and becomes the transmission laser and shine to the laser power meter, another part laser produces the reflection on splitting the board and shines to the branch of academic or vocational study classes and grades in school CCD on first, still be provided with the 2nd laser power meter in the first light path of splitting between board and the branch of academic or vocational study classes and grades in school CCD. The utility model is suitable for a detect the detection device of CCD sensitization homogeneity.

Description

A kind of pick-up unit detected for the photosensitive homogeneity of scientific grade CCD
Technical field
The utility model belongs to optical element detection technique field, relates to a kind of pick-up unit for detecting the photosensitive uniformity coefficient of CCD, particularly relates to a kind of pick-up unit for detecting the photosensitive uniformity coefficient of scientific grade CCD.
Background technology
Over nearly 40 years, the research of CCD device and application technology thereof achieves breakthrough, particularly more rapid in the development in image sensing and non-cpntact measurement field.No matter be the digital camera of Scientific Grade, civilian digital camera or common camera, it is all take CCD as the instrument that light signal accepts device.Although the basic imaging principle of a few person is consistent, but the application that they have nothing in common with each other, especially the develop rapidly of Scientific Grade digital camera technology, makes that Scientific Grade digital camera is widely used in life science, astronomical sight, medical science detect the technical fields such as the exploitation of new instrument, satellite monitoring, environmental monitoring and new-type weapon and equipment.
Due to the singularity of the application of Scientific Grade digital camera, thus the scientific grade CCD that Scientific Grade digital camera uses is had higher requirement.The photosensitive homogeneity of scientific grade CCD weighs the important indicator of CCD in laser parameter measurement process, the excellent accuracy beam modulation near field degree, contrast, light beam useful area etc. that are directly connected to laser beam measured of the photosensitive homogeneity of scientific grade CCD.The photosensitive homogeneity detection of conventional CCD usually uses integrating sphere to add two kinds of major ways such as attenuator, method cypress standard and detects.Adopt integrating sphere to CCD carry out photosensitive homogeneity detect time, CCD chip is photosensitive by entirety, the photosensitive homogeneity reflection of the CCD therefore detected be the photosensitive homogeneity of whole CCD chip.Because integrating sphere also exists non-standard component, for the integrating sphere of standard, also error will be there is in partial product bulb separation, and also do not have a mechanism can assert error existing for integrating sphere, the metrical error cannot eliminated because integrating sphere brings because the error of integrating sphere is unknown when thus adopting integrating sphere to detect, namely the tractability of metrical error is poor, and the photosensitive homogeneity accuracy of detection of CCD is lower.When photosensitive homogeneity of carrying out employing method cypress standard detects, although decrease the quantity of attenuator, but the position exported due to method cypress standard each point is different, and therefore determine that the photosensitive homogeneity of CCD same point is comparatively complicated, the photosensitive homogeneity accuracy of detection of CCD is lower.
Summary of the invention
Goal of the invention of the present utility model is: for prior art Problems existing, and provide the pick-up unit detected for the photosensitive homogeneity of scientific grade CCD that a kind of accuracy of detection is high, metrical error can be traced to the source.
To achieve these goals, the technical solution adopted in the utility model is:
A kind of pick-up unit detected for the photosensitive homogeneity of scientific grade CCD, comprise fiber laser, optical fiber, optical fiber collimator, first split plate, the first laser powermeter, motorized precision translation stage and scientific grade CCD, described scientific grade CCD to be arranged on motorized precision translation stage and can to move along the horizontal direction of motorized precision translation stage, vertical direction; The incident laser that described fiber laser produces is split on plate by being irradiated to first after light, optical fiber collimator successively; Part laser light first is split plate and is formed transmission laser, and this transmission laser is irradiated on the first laser powermeter; Another part laser is split generation on plate first and is reflected to form reflects laser, and this refracted laser illumination is in scientific grade CCD; Described first splits in the light path between plate and scientific grade CCD and is also provided with the second laser powermeter.
As preferred version of the present utility model, described motorized precision translation stage is also provided with synchronizer in backlight side, and described synchronizer is corresponding to be respectively electrically connected with scientific grade CCD, the first laser powermeter.
As preferred version of the present utility model, also comprise second and split plate, described first split plate reflection after reflects laser split plate through second and expose in scientific grade CCD after secondary reflection again.
As preferred version of the present utility model, the sensitive chip of described scientific grade CCD is mutually vertical with the reflects laser be irradiated on sensitive chip.
In sum, owing to have employed technique scheme, the beneficial effects of the utility model are:
1, in the utility model, the incident laser that fiber laser produces is split on plate first and is produced transmission, reflect and form transmission laser, reflects laser, first with the first laser powermeter through calibrating before detecting, through point backscatter extinction logarithmic ratio of the second laser powermeter demarcation incident laser of calibrating, the second laser powermeter is taken out during detection, transmission laser is irradiated in scientific grade CCD, then scientific grade CCD is triggered under dark fieid conditions photosensitive and record photosensitive pattern image as a setting, then laser is sent and the bearing member, image of the output power value of recording laser and scientific grade CCD at laser instrument, the unified scanning of scientific grade CCD is realized by the scientific grade CCD on mobile electric translation stage, the gray-scale value of the gray-scale value subtracting background image of the photosensitive pattern of the scientific grade CCD of correspondence position point, negative value zero setting image full width gray integration value after calculating zero setting, this image full width gray integration value obtains the light sensitivity of this location point divided by the output power value of correspondence, by calculating the photosensitive homogeneity of standard variance as scientific grade CCD of the light sensitivity of all location points, this pick-up unit simple and reasonable for structure, when the photosensitive homogeneity adopting this pick-up unit to carry out scientific grade CCD detects, because the first laser powermeter and the second laser powermeter are all through calibrating, its error amount is all known, thus the metrical error when detecting can be traced to the source, effectively avoid the metrical error of the photosensitive homogeneity of scientific grade CCD caused because of error the unknown of the parts in pick-up unit self, the metrical error of this pick-up unit is less, thus improves the accuracy of detection of this pick-up unit.
2, in the utility model, be also provided with synchronizer in pick-up unit, this synchronizer is electrically connected with scientific grade CCD, the first laser powermeter respectively; When scientific grade CCD, the first laser powermeter need to record bearing member, image, laser output power time, synchronizer sends signal respectively to scientific grade CCD, the first laser powermeter, scientific grade CCD, the first laser powermeter gather corresponding informance simultaneously, thus effectively can avoid the metrical error because scientific grade CCD, the first laser powermeter cause because the output power of the laser of different time points is different when different time points Information Monitoring, effectively improve the accuracy of detection of this pick-up unit.
3, in the utility model, in the first light path of splitting between plate and scientific grade CCD, also arrange second split plate, first split plate reflection after reflects laser split plate through second and expose in scientific grade CCD after secondary reflection again, thus the spacing that first splits plate and scientific grade CCD can effectively be shortened, make the structure of this pick-up unit more simple, reasonable, the space that pick-up unit takies is less.
Accompanying drawing explanation
Fig. 1 is the structural representation demarcated before the utility model detects when dividing backscatter extinction logarithmic ratio;
Structural representation when Fig. 2 is the utility model detection;
Wherein, Reference numeral is: 1-fiber laser, 2-optical fiber, 3-optical fiber collimator, 4-the first split plate, the 5-the first laser powermeter, 6-synchronizer, 7-motorized precision translation stage, 8-scientific grade CCD, the 9-the second laser powermeter, 10-the second split plate.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in detail.
In order to make the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the utility model, and be not used in restriction the utility model.
embodiment 1
For the pick-up unit that the photosensitive homogeneity of scientific grade CCD detects, this pick-up unit is used for the detection of the photosensitive homogeneity of scientific grade CCD.This pick-up unit comprises fiber laser 1, optical fiber 2, optical fiber collimator 3, first split plate 4, first laser powermeter 5, second laser powermeter 9, motorized precision translation stage 7 and scientific grade CCD 8, and this first laser powermeter 5 and the second laser powermeter 9 are all through the laser powermeter of calibrating, the first laser powermeter 5 and the second laser powermeter 9 all have corresponding error amount.The incident laser that this fiber laser 1 produces exposes to first successively and splits plate 4 after optical fiber 2, optical fiber collimator 3, and this incident laser splits generation reflection and projection on plate 4 first.Incide the first portions incident laser projection splitting plate 4 place to cross first and split plate 4 and form transmission laser, and this transmission laser exposes on the first laser powermeter 5 the most at last.Incide the first another part incident laser splitting plate 4 place to split plate 4 produces first and reflect to form reflects laser, this reflects laser finally exposes in scientific grade CCD 8, and forms bearing member, image in scientific grade CCD 8.This second laser powermeter 9 is arranged in the first light path of splitting between plate 4 and scientific grade CCD 8; Before pick-up unit detects, need the second laser powermeter 9 be arranged in the first light path of splitting between plate 4 and scientific grade CCD 8, thus can demarcate by the first laser powermeter 5 and the second laser powermeter 9 incident laser to split plate 4 place point backscatter extinction logarithmic ratio first; When In service inspection device detects, take out the second laser powermeter 9, the second laser powermeter 9 need not be placed, refracted laser illumination to scientific grade CCD 8 forms the gray scale of bearing member, image in scientific grade CCD 8.This scientific grade CCD 8 is arranged on motorized precision translation stage 7, and this scientific grade CCD 8 can move along the horizontal direction of motorized precision translation stage 7, vertical direction on motorized precision translation stage 7, thus detect time by the scientific grade CCD 8 on mobile electric translation stage 7, realize the unified scanning to scientific grade CCD 8.
The testing process of this pick-up unit is:
Step one, scientific grade CCD 8 to be arranged on motorized precision translation stage 7, and scientific grade CCD 8 is placed in the light path of detection;
Step 2, use autocollimation mode regulate the position of scientific grade CCD 8, make the sensitive chip of scientific grade CCD 8 vertical with the incident direction of the laser on the sensitive chip being incident to scientific grade CCD 8;
Step 3, arrange scientific grade CCD 8 integral time (i.e. time shutter) and scientific grade CCD 8 is set to external trigger mode, this integral time be 10 milliseconds once;
Step 4, unlatching fiber laser 1, and adjust the output power of fiber laser 1, the output power of fiber laser 1 is progressively improved from minimum output power, until when the output power of fiber laser 1 reaches a certain certain power value, the gray-scale value of the bearing member, image that laser is formed in scientific grade CCD 8 is 1/2 ~ 2/3 of the maximum gradation value of the bearing member, image that scientific grade CCD 8 is formed;
Step 5, fiber laser 1 keep the specific output power in step 4 constant, second laser powermeter 9 is arranged in the first light path of splitting between plate 4 and scientific grade CCD 8, demarcates by the first laser powermeter 5, second laser powermeter 9 after calibrating incident laser to split plate 4 place point backscatter extinction logarithmic ratio first;
Step 6, closedown fiber laser 1, take out the second laser powermeter 9, trigger scientific grade CCD 8 under dark fieid conditions, the bearing member, image image as a setting now scientific grade CCD 8 formed;
Step 7, open the output power that fiber laser 1, first laser powermeter 5 records incident laser, scientific grade CCD 8 forms bearing member, image, thus record the bearing member, image in the output power of incident laser and scientific grade CCD 8;
Step 8, move scientific grade CCD 8 by motorized precision translation stage 7, repeat step 7, realize the unified scanning to scientific grade CCD 8, and scan compensation is the spot diameter of the bearing member, image that reflects laser is formed in scientific grade CCD 8;
Step 9, the gray-scale value of bearing member, image during each location point, scientific grade CCD 8 formed in step 8 is deducted the gray-scale value of the background image in step 6, negative value zero setting;
Step 10, calculating the integrated value of the gray-scale value after each location point zero setting, by calculating the integrated value of gained divided by the performance number of correspondence position point, obtaining the light sensitivity of correspondence position point;
The standard variance of the light sensitivity of all location points in step 11, calculation procedure ten, as the photosensitive homogeneity of scientific grade CCD 8;
In this pick-up unit, the incident laser that fiber laser 1 produces is split on plate 4 first and is produced transmission, reflect and form transmission laser, reflects laser, first with the first laser powermeter 5 through calibrating before detecting, the second laser powermeter 9 through examining and determine demarcates point backscatter extinction logarithmic ratio of incident laser, the second laser powermeter 9 is removed during detection, transmission laser is irradiated in scientific grade CCD 8, then scientific grade CCD 8 is triggered under dark fieid conditions photosensitive and record photosensitive pattern image as a setting, then laser is sent and the bearing member, image of the output power value of recording laser and scientific grade CCD 8 at laser instrument, the unified scanning of scientific grade CCD 8 is realized by the scientific grade CCD 8 on mobile electric translation stage 7, the gray-scale value of the gray-scale value subtracting background image of the photosensitive pattern of the scientific grade CCD 8 of correspondence position point, negative value zero setting image full width gray integration value after calculating zero setting, this image full width gray integration value obtains the light sensitivity of this location point divided by the output power value of correspondence, by calculating the photosensitive homogeneity of standard variance as scientific grade CCD 8 of the light sensitivity of all location points, this pick-up unit simple and reasonable for structure, when the photosensitive homogeneity adopting this pick-up unit to carry out scientific grade CCD 8 detects, because the first laser powermeter 5 and the second laser powermeter 9 are all through calibrating, its error amount is all known, thus the metrical error when detecting can be traced to the source, effectively avoid the metrical error of the photosensitive homogeneity of scientific grade CCD 8 caused because of error the unknown of the parts in pick-up unit self, the metrical error of this pick-up unit is less, thus improves the accuracy of detection of this pick-up unit.
embodiment 2
On the basis of embodiment one, motorized precision translation stage 7 is also provided with synchronizer 6 in backlight side, and this synchronizer is corresponding to be respectively electrically connected with scientific grade CCD 8, first laser powermeter 5.Due to the less stable of output power in long-time of laser, the change root-mean-square value (RMS) of output power can reach 3%; And the output power of laser stability is at short notice higher, the change of output power can reach less than 0.5%.Thus even eliminating scientific grade CCD 8, first laser powermeter 5 when different time points gathers corresponding informance because of the metrical error that the difference of the output power of the laser of different time points causes to reduce, thus setting up synchronizer 6.This synchronizer 6 is electrically connected with scientific grade CCD 8, first laser powermeter 5 respectively; When scientific grade CCD 8, first laser powermeter 5 needs the output power of record bearing member, image, laser, synchronizer sends signal respectively to scientific grade CCD 8, first laser powermeter 5, scientific grade CCD 8, first laser powermeter 5 gathers corresponding informance simultaneously, thus effectively can avoid the metrical error because scientific grade CCD 8, first laser powermeter 5 causes because the output power of the laser of different time points is different when different time points Information Monitoring, effectively improve the accuracy of detection of this pick-up unit.
Embodiment
On the basis of embodiment one or embodiment two, this pick-up unit also comprises second and splits plate 10, first split plate 4 reflect after reflects laser to split on plate 10 secondary reflection again second, and through second split plate 10 reflect after refracted laser illumination in scientific grade CCD 8.This second laser powermeter 9 is arranged at second and splits between plate 10 and scientific grade CCD 8.
In the first light path of splitting between plate 4 and scientific grade CCD 8, also arrange second split plate 10, first split plate 4 reflect after reflects laser split plate 10 through second and expose in scientific grade CCD 8 after secondary reflection again, thus the spacing that first splits plate 4 and scientific grade CCD 8 can effectively be shortened, make the structure of this pick-up unit more simple, reasonable, the space that pick-up unit takies is less.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.

Claims (4)

1. the pick-up unit detected for the photosensitive homogeneity of scientific grade CCD, it is characterized in that: comprise fiber laser (1), optical fiber (2), optical fiber collimator (3), first split plate (4), the first laser powermeter (5), motorized precision translation stage (7) and scientific grade CCD (8), it is upper and can move along the horizontal direction of motorized precision translation stage (7), vertical direction that described scientific grade CCD (8) is arranged on motorized precision translation stage (7); The incident laser that described fiber laser (1) produces is split on plate (4) by being irradiated to first after optical fiber (2), optical fiber collimator (3) successively; Part laser light first is split plate (4) and is formed transmission laser, and this transmission laser is irradiated on the first laser powermeter (5); Another part laser is split the upper generation of plate (4) first and is reflected to form reflects laser, and this refracted laser illumination is in scientific grade CCD (8); Described first splits in the light path between plate (4) and scientific grade CCD (8) and is also provided with the second laser powermeter (9).
2. a kind of pick-up unit detected for the photosensitive homogeneity of scientific grade CCD as claimed in claim 1, it is characterized in that: described motorized precision translation stage is also provided with synchronizer (6) in backlight side, described synchronizer (6) is corresponding to be respectively electrically connected with scientific grade CCD (8), the first laser powermeter (5).
3. a kind of pick-up unit detected for the photosensitive homogeneity of scientific grade CCD as claimed in claim 1, it is characterized in that: also comprise second and split plate (10), described first split plate (4) reflection after reflects laser split plate (10) through second and expose in scientific grade CCD (8) after secondary reflection again.
4. a kind of pick-up unit detected for the photosensitive homogeneity of scientific grade CCD as described in claim 1 or 3, is characterized in that: the sensitive chip of described scientific grade CCD (8) is mutually vertical with the reflects laser be irradiated on sensitive chip.
CN201520664667.1U 2015-08-31 2015-08-31 Detection apparatus for it detects to be used for passing a sentence classes and grades in school CCD sensitization homogeneity Expired - Fee Related CN204855730U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105676098A (en) * 2016-01-13 2016-06-15 中国工程物理研究院激光聚变研究中心 Device and method for detecting response non-uniformity and linearity of CCD
CN105953927A (en) * 2016-03-10 2016-09-21 中国科学院合肥物质科学研究院 Near-infrared detector uniformity test system
WO2017114368A1 (en) * 2015-12-29 2017-07-06 努比亚技术有限公司 Method and device for processing photosensitive quality of camera module, and storage medium

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017114368A1 (en) * 2015-12-29 2017-07-06 努比亚技术有限公司 Method and device for processing photosensitive quality of camera module, and storage medium
CN105676098A (en) * 2016-01-13 2016-06-15 中国工程物理研究院激光聚变研究中心 Device and method for detecting response non-uniformity and linearity of CCD
CN105676098B (en) * 2016-01-13 2018-05-15 中国工程物理研究院激光聚变研究中心 The detection device and detection method of a kind of CCD Photo-Response Non-Uniformities and linear property
CN105953927A (en) * 2016-03-10 2016-09-21 中国科学院合肥物质科学研究院 Near-infrared detector uniformity test system

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