CN204773088U - Declination degree cutting combination formula work piece holder - Google Patents
Declination degree cutting combination formula work piece holder Download PDFInfo
- Publication number
- CN204773088U CN204773088U CN201520515344.6U CN201520515344U CN204773088U CN 204773088 U CN204773088 U CN 204773088U CN 201520515344 U CN201520515344 U CN 201520515344U CN 204773088 U CN204773088 U CN 204773088U
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- cutting
- crystal bar
- work piece
- holder
- brilliant
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Abstract
The utility model provides a declination degree cutting combination formula work piece holder, is applicable to semiconductor wafer silicon wafer processing. The utility model discloses well forked tail prism asks (2) to solve in the cutting of wafer silicon chip and cuts gauze lower time when the crystal bar, and gauze material receiving box's terminal surface can be touch to the one end of crystal bar, causes cutting equipment to transship and reports to the police or broken and the problem of scrapping of whole crystal bar, and forked tail arris type structural design brilliant asks (2) to cooperate newly -designed dovetail (5), and 6 inches and the cutting of following crystal bar declination degree have been realized to space in the middle of two crystal bars of make full use of.
Description
Technical field
The utility model belongs to semiconductor crystal wafer silicon chip processing technique field, relates generally to a kind of inclination angle cutting combined type work piece holder.
Background technology
Wire cutting machine occupies most ratio in the cutting of semicon industry silicon chip, along with the continuous expansion in domestic 6 inch semiconductor wafer silicon chip markets, wire cutting machine work in-process more seems important, the particularly crystalline substance holder of Linear cut use, because structure limit, cause the crystal bar in 6 inches of inclined 4 degree of crystal orientation of <111> cannot cut on multi-wire saw.Usually, crystal bar is bonded on the bonding plane of work plate by resin plate, and work plate and dovetail work-pieces board clamp link together, and clamping is in the dovetail groove of equipment, and the high speed gauze of cutting on line cuts, and realizes by the process of crystal bar to silicon chip.But in actual use, because the product in the current inclined 4 degree of crystal orientation of 6 inches of <111> gets more and more, and crystal bar is that inclination is bonding, so cannot cut on existing multi-wire saw, in cutting when crystal bar cuts under gauze, the end face of pulp-collecting box under gauze can be encountered in one end of crystal bar, causes the fragmentation of cutting equipment overload-alarm or whole crystal bar and scraps.
Utility model content
In view of technical problem existing in currently available technology, the utility model designs and discloses a kind of inclination angle cutting combined type work piece holder, by the redesign to crystalline substance holder and dovetail groove, hold in the palm the technological difficulties problems such as inclined 4 degree of the 6 inches of <111> occurred in cutting technique in order to solve existing crystalline substance.
For achieving the above object, the concrete technical scheme that the utility model is taked is: a kind of inclination angle cutting combined type work piece holder, is formed primarily of work plate, brilliant holder, coattail edge fixture, jackscrew, wedge, dovetail groove; Work plate is connected together with brilliant holder by interior six side's screws, and the crystalline substance holder connecting work plate is arranged on coattail edge fixture, and wedge compresses brilliant holder and dovetail groove by jackscrew, makes together with brilliant holder fits tightly with the dovetail groove on coattail edge fixture; Dovetail groove is connected with the feed mechanism of cutting equipment by interior six side's screws.Described a kind of inclination angle cutting combined type work piece holder, wherein work plate designs for I-shaped structure; Described a kind of inclination angle cutting combined type work piece holder, the bottom of wherein brilliant holder is in " L " type, and top is coattail edge type structure.
A kind of inclination angle cutting combined type work piece holder described in the utility model, solve the problem that traditional wire cutting cannot realize 6 inches of inclination angle cuttings, bottom is in " L " type, top is that the crystalline substance holder of coattail edge type structural design to solve in cutting when crystal bar cuts under gauze, the end face of pulp-collecting box under gauze can be encountered in one end of crystal bar, the problem such as cause the fragmentation of cutting equipment overload-alarm or whole crystal bar and scrap.The utility model achieves 6 inches of bonding cuttings of crystal bar inclination angle, improves the utilization rate of equipment.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
In figure: 1, work plate; 2, brilliant holder; 3, jackscrew; 4, wedge; 5, dovetail groove; 6, coattail edge fixture; 7, feed mechanism.
Detailed description of the invention
Detailed description of the invention of the present utility model is provided as follows below in conjunction with accompanying drawing:
As shown in Figure 1, a kind of inclination angle cutting combined type work piece holder described in the utility model is mainly made up of work plate 1, brilliant holder 2, jackscrew 3, wedge 4, dovetail groove 5, coattail edge fixture 6, wherein, I-shaped structure work plate 1 by interior six side's screws and bottom in " L " type, top is that the crystalline substance holder 2 of coattail edge type structural design links together; Brilliant holder 2 is arranged on coattail edge fixture 6, and wedge 4 compresses brilliant holder 2 and dovetail groove 5 by jackscrew 3, and make together with brilliant holder 2 closely cooperates with dovetail groove 5, dovetail groove 5 adopts interior six side's screws to be connected with the feed mechanism 7 of equipment.Be the crystalline substance holder 2 of coattail edge type structure in " L " type, top by the I shape work plate 1 that redesigns and bottom, crystal bar can bottom work plate 1 inclination angle bonding, realize the needs of 6 inches and the cutting of following size crystal bar inclination angle, to solve in cutting when crystal bar cuts under gauze, the end face of pulp-collecting box under gauze can be encountered in one end of crystal bar, the problem such as cause the fragmentation of cutting equipment overload-alarm or whole crystal bar, scrap.
Claims (3)
1. an inclination angle cutting combined type work piece holder, it is characterized in that: described inclination angle cutting combined type work piece holder, is mainly made up of work plate (1), brilliant holder (2), jackscrew (3), wedge (4), dovetail groove (5), coattail edge fixture (6); Wherein, work plate (1) asks (2) to link together by interior six side's screws with brilliant; Brilliant holder (2) is arranged on coattail edge fixture (6); Wedge (4) compresses brilliant holder (2) and dovetail groove (5) by jackscrew (3), makes brilliant holder (2) and dovetail groove (5) closely cooperate together; Dovetail groove (5) is connected with the feed mechanism (7) of equipment by interior six side's screws.
2. a kind of inclination angle cutting combined type work piece holder according to claim 1, is characterized in that: work plate (1) is I-shaped structure.
3. a kind of inclination angle cutting combined type work piece holder according to claim 1, is characterized in that: the bottom of brilliant holder (2) is in " L " type, and top is coattail edge type structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520515344.6U CN204773088U (en) | 2015-07-16 | 2015-07-16 | Declination degree cutting combination formula work piece holder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520515344.6U CN204773088U (en) | 2015-07-16 | 2015-07-16 | Declination degree cutting combination formula work piece holder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204773088U true CN204773088U (en) | 2015-11-18 |
Family
ID=54513212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520515344.6U Expired - Fee Related CN204773088U (en) | 2015-07-16 | 2015-07-16 | Declination degree cutting combination formula work piece holder |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204773088U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106976167A (en) * | 2017-03-17 | 2017-07-25 | 浙江好亚能源股份有限公司 | Diamond cutting line slicing machine |
| CN107030907A (en) * | 2017-03-17 | 2017-08-11 | 浙江好亚能源股份有限公司 | The processing method of polysilicon chip |
-
2015
- 2015-07-16 CN CN201520515344.6U patent/CN204773088U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106976167A (en) * | 2017-03-17 | 2017-07-25 | 浙江好亚能源股份有限公司 | Diamond cutting line slicing machine |
| CN107030907A (en) * | 2017-03-17 | 2017-08-11 | 浙江好亚能源股份有限公司 | The processing method of polysilicon chip |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151118 Termination date: 20170716 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |