CN204741012U - Based on flexible substrate terahertz graphite alkene syntonizer now - Google Patents
Based on flexible substrate terahertz graphite alkene syntonizer now Download PDFInfo
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- CN204741012U CN204741012U CN201520121897.3U CN201520121897U CN204741012U CN 204741012 U CN204741012 U CN 204741012U CN 201520121897 U CN201520121897 U CN 201520121897U CN 204741012 U CN204741012 U CN 204741012U
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Abstract
Based on flexible substrate terahertz graphite alkene syntonizer now, it relates to the terahertz super material of graphite alkene now. The utility model discloses the current terahertz that utilizes the rigid substrate material preparation is super material now, causes practical application to receive the problem of very big restriction owing to it can not bend to required shape. It includes substrate, flexible substrate, graphite alkene syntonizer, has set gradually flexible substrate and graphite alkene syntonizer layer on the substrate. The utility model discloses doing graphite alkene syntonizer on polyimide, after photoetching experiment finishes, can peeling off polyimide from the silicon chip together together with the syntonizer, the terahertz of making flexible substrate is super material now. Compare with traditional rigid substrate, have advantages such as flexible. The material that the syntonizer was chooseed for use is a monolayer graphite alkene, graphite alkene except electrically conductive, the heat conductivility is very good, resistivity is extremely low, outside electron transfer speed waited the advantage very fast, its conductivity can be controlled through the applied voltage effectively, just so can control the frequency of resonance production very conveniently.
Description
Technical field
The utility model belongs to Material Field, is specifically related to based on flexible substrate Terahertz Graphene Meta Materials.
Background technology
Along with the development of semiconductor technology and MEMS technology, device application panorama is more and more extensive, based on Terahertz Meta Materials prepared by conventional rigid backing material (as: silicon, GaAs, glass etc.), to receive in practical application greatly limit because substrate can not bend to required shape.In order to improve this present situation, people propose to study based on the Terahertz Meta Materials of flexible substrate.In microelectronic technique, flexible substrate mainly refers to backing material deflection, can substitute the flexible carrier that conventional rigid backing material deposits various function film and metallic film thereon, and utilizes microelectronic technique on substrate, prepare corresponding device.Due to flexible substrate material have deflection, shock-resistant, defect can be confined on flexible layer and improve the advantages such as epitaxial layer quality, the Terahertz Meta Materials based on flexible substrate is had broad application prospects.
Utility model content
The utility model object is to solve the existing Terahertz Meta Materials utilizing rigid substrate materials to prepare, because it can not bend to the problem that required shape causes practical application to be extremely restricted, so we have proposed based on flexible substrate Terahertz Graphene resonator.
The utility model is based on flexible substrate Terahertz Graphene Meta Materials, and it comprises flexible substrate, Graphene resonator, flexible substrate is provided with Graphene resonator layer;
Graphene resonator comprises two graphene strips and is respectively graphene strips one and graphene strips two, and a Graphene annulus;
Described graphene strips one is arranged with graphene strips two is vertical on flexible substrates, and the length of graphene strips one is the same with the length of side of flexible substrate, and the length of graphene strips two is between the internal diameter and external diameter of Graphene annulus,
Described graphene strips one and graphene strips two together form four fan-shaped resonance ranges with Graphene annulus, are respectively fan-shaped resonance region one, fan-shaped resonance region two, fan-shaped resonance region three and fan-shaped resonance region four; Described fan-shaped resonance region one, fan-shaped resonance region two, fan-shaped resonance region three and fan-shaped resonance region four are all at Graphene annulus place opening.
Advantage of the present utility model: 1. do on polyimide by Graphene resonator, after lithography experiments terminates, can peel off polyimides from silicon chip together with resonator, and this has just made the Terahertz Meta Materials of flexible substrate.Compared with traditional rigid substrate, there is the advantages such as flexible.Flexible substrate has important application in the every field of life, such as, Flexible Displays shows as the next generation, to show with plasma with the LCDs as flat panel display and compare, have ultra-thin, quality is light, durable, memory space large, design freely, collapsible advantage, the report data of iSuppli Flexible Displays claim, and the flexible display market at 2007 ~ 2013 about has 2,000,000,000 dollars.Because flexible substrate has bio-compatibility, monitoring bone the wounded bone in health can be implanted and connect and healing state, according to the stress of strain gauge detection thus suitable loading external force carrys out the growth of Artificial Control bone.Meanwhile, external scientist also studies and carrys out detectable biomolecule concentration based on flexible substrate biological transducer.2. the material selected by resonator is single-layer graphene, Graphene except conduction, heat conductivility is very good, outside the advantages such as resistivity is extremely low, and electron transfer rate is very fast, its conductivity can be controlled effectively by applied voltage, so just can control the frequency that resonance produces easily.
Accompanying drawing explanation
Fig. 1 is the described structural representation based on flexible substrate Terahertz Graphene Meta Materials;
Fig. 2 is the A direction view of Fig. 1;
Fig. 3 is the STRUCTURE DECOMPOSITION figure of Graphene resonator;
Fig. 4 is the schematic diagram of the resonant ring producing LC resonance;
Fig. 5 is the transmission situation schematic diagram adopting Terahertz Graphene Meta Materials of the present utility model to transmit electromagnetic wave; Wherein, A is the transmission data of 0.1eV, and B is the transmission data of 0.2eV, and C is the transmission data of 0.3eV, and D is the transmission data of 0.4eV, and E is the transmission data of 0.5eV;
Fig. 6 is the result map obtained based on preparation of the present utility model and exploitation present stage.
Embodiment
Embodiment one: present embodiment is described below in conjunction with Fig. 1 to Fig. 6, present embodiment is based on flexible substrate Terahertz Graphene Meta Materials, and it comprises flexible substrate 1, Graphene resonator 2, flexible substrate 1 is provided with Graphene resonator layer 2;
Graphene resonator 2 comprises two graphene strips and is respectively graphene strips one 2-1 and graphene strips two 2-2, and a Graphene annulus 2-3;
Described graphene strips one 2-1 is arranged with graphene strips two 2-2 is vertical in flexible substrate 1, and the length of graphene strips one 2-1 is the same with the length of side of flexible substrate 1, and the length of graphene strips two 2-2 is between the internal diameter and external diameter of Graphene annulus 2-3,
Described graphene strips one 2-1 and graphene strips two 2-2 and Graphene annulus 2-3 together form four fan-shaped resonance ranges, is respectively fan-shaped resonance region one 2-4-1, fan-shaped resonance region two 2-4-2, fan-shaped resonance region three 2-4-3 and fan-shaped resonance region four 2-4-4; Described fan-shaped resonance region one 2-4-1, fan-shaped resonance region two 2-4-2, fan-shaped resonance region three 2-4-3 and fan-shaped resonance region four 2-4-4 are all at Graphene annulus 2-3 place opening.
The fan-shaped resonance split ring of present embodiment can induce LC resonance, due to four fan-shaped resonance split rings symmetric relation structurally, so what induce is same resonance frequency, because the conductivity of Graphene can be realized by applied voltage, and between voltage and Fermi's energy, have specific relation, so the adjustable LC resonance of Terahertz Graphene Meta Materials can be realized when emulating by changing Fermi.
Fig. 5 adopts the Terahertz Graphene Meta Materials based on flexible substrate described in the utility model to transmit electromagnetic situation, and when Fermi can be 0.1eV, Graphene Meta Materials is 0.9% in the transfer rate of 1.19THz; When Fermi can be 0.2eV, Graphene Meta Materials is 0.6% in the transfer rate of 1.37THz; When Fermi can be 0.3eV, Graphene Meta Materials is 0.3% in the transfer rate of 1.47THz; When Fermi can be 0.4eV, Graphene Meta Materials is 0.1% in the transfer rate of 1.53THz; When Fermi can be 0.5eV, Graphene Meta Materials is 0.0% in the transfer rate of 1.57THz; These results show, by regulate be added in Fermi on Graphene can namely voltage, effectively can control transmission amplitude and the frequency of this Graphene Meta Materials.
Fig. 6 is the design sketch that in the utility model preparation, photoetching part completes, first spin-on polyimide on silicon chip; Then Graphene is transferred on polyimide layer; Then, Graphene gets rid of one deck photoresist, after photoetching is complete, carry out oxygen plasma etching, peel off after having etched; Finally, polyimides is taken off from silicon substrate can prepare Terahertz Graphene Meta Materials.
Embodiment two: present embodiment further illustrates execution mode one, Graphene resonator layer 2 is single-layer graphene, and thickness is 0.34nm, and conductivity changes along with the change of applied voltage.
Embodiment three: present embodiment further illustrates execution mode one, the width of graphene strips one 2-1 in Graphene resonator layer 2 and graphene strips two 2-2 is 4 μm.
Embodiment four: present embodiment further illustrates execution mode one, in Graphene resonator layer 2, the inner and outer diameter of Graphene annulus 2-3 is respectively 28 μm and 36 μm.
Embodiment five: present embodiment further illustrates execution mode one, the width of fan-shaped resonance region one 2-4-1, fan-shaped resonance region two 2-4-2, fan-shaped resonance region three 2-4-3 and fan-shaped resonance region four 2-4-4 is 4 μm.
Embodiment six: present embodiment further illustrates execution mode one, the cellular construction size based on flexible substrate Terahertz Graphene Meta Materials is 50 μm × 50 μm.
Embodiment seven: present embodiment further illustrates execution mode one, flexible substrate 1 is flexible polyimide.
Claims (6)
1. based on flexible substrate Terahertz Graphene resonator, it is characterized in that, it comprises flexible substrate (1), Graphene resonator (2), flexible substrate (1) is provided with Graphene resonator layer (2);
Graphene resonator (2) comprises two graphene strips and is respectively graphene strips one (2-1) and graphene strips two (2-2), and a Graphene annulus (2-3);
Described graphene strips one (2-1) and graphene strips two (2-2) are in the upper vertical setting of flexible substrate (1), and the length of graphene strips one (2-1) is the same with the length of side of flexible substrate (1), and the length of graphene strips two (2-2) is between the internal diameter and external diameter of Graphene annulus (2-3)
Described graphene strips one (2-1) and graphene strips two (2-2) together form four fan-shaped resonance ranges with Graphene annulus (2-3), are respectively fan-shaped resonance region one (2-4-1), fan-shaped resonance region two (2-4-2), fan-shaped resonance region three (2-4-3) and fan-shaped resonance region four (2-4-4); Described fan-shaped resonance region one (2-4-1), fan-shaped resonance region two (2-4-2), fan-shaped resonance region three (2-4-3) and fan-shaped resonance region four (2-4-4) are all at Graphene annulus (2-3) place opening.
2. according to claim 1ly it is characterized in that based on flexible substrate Terahertz Graphene resonator, Graphene resonator layer (2) is single-layer graphene, and thickness is 0.34nm.
3. according to claim 1ly it is characterized in that based on flexible substrate Terahertz Graphene resonator, the graphene strips one (2-1) in Graphene resonator layer (2) and the width of graphene strips two (2-2) are 4 μm.
4. according to claim 1ly it is characterized in that based on flexible substrate Terahertz Graphene resonator, the inner and outer diameter of Graphene annulus (2-3) is respectively 28 μm and 36 μm.
5. according to claim 1 based on flexible substrate Terahertz Graphene resonator, it is characterized in that, the width of fan-shaped resonance region one (2-4-1), fan-shaped resonance region two (2-4-2), fan-shaped resonance region three (2-4-3) and fan-shaped resonance region four (2-4-4) is 4 μm.
6. according to claim 1ly it is characterized in that based on flexible substrate Terahertz Graphene resonator, the thickness of flexible substrate (1) is 7 μm.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108507685A (en) * | 2018-03-13 | 2018-09-07 | 烟台睿创微纳技术股份有限公司 | A kind of graphene detector and preparation method thereof |
| CN110515224A (en) * | 2019-09-04 | 2019-11-29 | 哈尔滨理工大学 | A kind of graphene-metallic channel Meta Materials Terahertz slower rays device of biobelt flexible choice regulation |
| CN110954496A (en) * | 2019-11-15 | 2020-04-03 | 浙江大学 | Sample signal amplification method using terahertz waveband graphene absorber |
| CN111352175A (en) * | 2020-03-10 | 2020-06-30 | 山东大学 | Dynamically-adjustable graphene metamaterial terahertz device based on anapole mode and preparation method and application thereof |
| CN113974638A (en) * | 2021-10-21 | 2022-01-28 | 光子集成(温州)创新研究院 | Implantable resonant ring sensor and electroencephalogram detection system |
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2015
- 2015-03-02 CN CN201520121897.3U patent/CN204741012U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108507685A (en) * | 2018-03-13 | 2018-09-07 | 烟台睿创微纳技术股份有限公司 | A kind of graphene detector and preparation method thereof |
| CN110515224A (en) * | 2019-09-04 | 2019-11-29 | 哈尔滨理工大学 | A kind of graphene-metallic channel Meta Materials Terahertz slower rays device of biobelt flexible choice regulation |
| CN110515224B (en) * | 2019-09-04 | 2022-11-08 | 哈尔滨理工大学 | Graphene-metal groove metamaterial terahertz slow-light device with double bands capable of being flexibly and selectively regulated |
| CN110954496A (en) * | 2019-11-15 | 2020-04-03 | 浙江大学 | Sample signal amplification method using terahertz waveband graphene absorber |
| CN110954496B (en) * | 2019-11-15 | 2021-01-08 | 浙江大学 | Sample signal amplification method using terahertz waveband graphene absorber |
| CN111352175A (en) * | 2020-03-10 | 2020-06-30 | 山东大学 | Dynamically-adjustable graphene metamaterial terahertz device based on anapole mode and preparation method and application thereof |
| CN111352175B (en) * | 2020-03-10 | 2021-04-27 | 山东大学 | Dynamically-adjustable graphene metamaterial terahertz device based on anapole mode and preparation method and application thereof |
| CN113974638A (en) * | 2021-10-21 | 2022-01-28 | 光子集成(温州)创新研究院 | Implantable resonant ring sensor and electroencephalogram detection system |
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Granted publication date: 20151104 Termination date: 20160302 |
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