CN204725003U - Laser spot positioner - Google Patents
Laser spot positioner Download PDFInfo
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- CN204725003U CN204725003U CN201520352488.4U CN201520352488U CN204725003U CN 204725003 U CN204725003 U CN 204725003U CN 201520352488 U CN201520352488 U CN 201520352488U CN 204725003 U CN204725003 U CN 204725003U
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Abstract
The utility model relates to a kind of laser spot positioner, this laser spot positioner comprises detector, microscope carrier, position adjusting mechanism, optical attenuator, position adjusting mechanism, optical attenuator and IMAQ and analysis module, microscope carrier is positioned at below detector, position adjusting mechanism is positioned at microscope carrier both sides and is connected with microscope carrier, optical attenuator is positioned at above detector, and IMAQ and analysis module and detector communicate to connect.Above-mentioned laser spot positioner processes laser facula and obtains the most accurate spot size, and then determines focal position exactly, and overcome human factor impact, focus positioning precision is high.
Description
Technical field
The utility model relates to laser process equipment field, particularly relates to laser spot positioner.
Background technology
Current laser processing technology is widely used at the semiconductor applications such as microelectronics, photovoltaic, and it has, and machining accuracy is high, fuel factor is little, process velocity is fast, efficiency is high, to advantages such as material non-selectivities.When laser processing technology is applied on solar energy highly effective battery, can obviously simplify battery preparation flow, and then improving production efficiency and product yield.Along with the raising that the development and apply of laser technology requires, in laser debug process, quick and precisely find laser beam accumulation point position, have vital impact to processing effect.If laser is in out of focus, pattern is processed, and can cause and add laser light energy loss in man-hour, reduce working (machining) efficiency, waste processing cost, even affects processing effect, cause unpredictable impact to product.
Usually, the location for laser spot adopts on corrosion resistant plate or hardboard, to adjust different focal carry out getting ready or the mode of line, then judges the position of focus according to the change of point, line or the severity of laser burn.But the judgment mode of above-mentioned focus needs manually to judge, precision is lower.
Utility model content
Based on this, be necessary to provide a kind of without the need to manually carrying out judging and judging the laser spot positioner that precision is high.
A kind of laser spot positioner, comprising:
Detector, for receiving the pulse imaging that laser sends;
Microscope carrier, is positioned at below described detector, for detector described in support;
Position adjusting mechanism, is positioned at described microscope carrier both sides and is connected with described microscope carrier, and described position adjusting mechanism is for regulating the lifting of described microscope carrier;
Optical attenuator, is positioned at above described detector, for decaying to laser pulse; And
IMAQ and analysis module, communicate to connect with described detector.
Above-mentioned laser spot positioner, adopts passive type to receive the pulse that sends of laser and imaging, by analyzing its circle spot diameter variation tendency, and then finds focal position.Before laser shines detector, first carry out large multiplying power decay through optical attenuator; When laser off-focal, spot diameter becomes large, adopts position adjustment structure to regulate the height of microscope carrier, and then raises or reduce detector, thus the diameter of the hot spot that detector is received is minimum; Meanwhile, IMAQ and analysis module constantly gather hot spot and analyze its diameter, and when spot diameter is minimum, the position residing for detector is focus position.Above-mentioned laser spot positioner processes laser facula and obtains the most accurate spot size, and then determines focal position exactly, and overcome human factor impact, focus positioning precision is high.
Wherein in an embodiment, be also provided with base, the surface of described base offers groove, and described optical attenuator, detector, microscope carrier are all positioned at described groove, and described optical attenuator, detector, microscope carrier are in order arrangement.
Wherein in an embodiment, also comprise level monitoring mechanism, described level monitoring mechanism is embedded on described base, and the quantity of described level monitoring mechanism is two, and two described level monitoring mechanisms are distributed in the both sides of described groove symmetrically.
Wherein in an embodiment, described level monitoring mechanism comprises the first level meter and the second level meter, and described first level meter and described second level meter are rectangular shape, and described first level meter is vertical with described second level meter.
Wherein in an embodiment, described position adjusting mechanism comprises micrometer knob, and described detector is raised by described micrometer knob or reduces.
Wherein in an embodiment, described position adjusting mechanism also comprises driver, and described driver is connected with described micrometer knob.
Wherein in an embodiment, described driver is motor or cylinder.
Wherein in an embodiment, described detector is flat inductive element detectors.
Wherein in an embodiment, described IMAQ is connected with described detector by data wire or wireless mode with analysis module.
Accompanying drawing explanation
Fig. 1 is the front view of the laser spot positioner of an embodiment;
Fig. 2 is the top view of the laser spot positioner shown in Fig. 1;
Fig. 3 is the schematic diagram of laser instrument when non-focus position;
Reference numeral:
10, laser spot positioner; 100, base; 110, detector; 120, microscope carrier; 130, position adjusting mechanism; 140, optical attenuator; 150, IMAQ and analysis module; 160, level monitoring mechanism; 152, data wire; 162, the first level meter; 164, the second level meter.
Detailed description of the invention
For the ease of understanding the utility model, below with reference to relevant drawings, the utility model is described more fully.Preferred embodiment of the present utility model is given in accompanying drawing.But the utility model can realize in many different forms, is not limited to embodiment described herein.On the contrary, provide the object of these embodiments be make the understanding of disclosure of the present utility model more comprehensively thorough.
As depicted in figs. 1 and 2, the laser spot positioner 10 of an embodiment comprises detector 110, microscope carrier 120, position adjusting mechanism 130, optical attenuator 140 and IMAQ and analysis module 150.Detector 110 is for the pulse that receives laser and send and imaging.When detector 110 receives laser facula, the diameter information of laser facula is sent to IMAQ and analysis module 150, when IMAQ and analysis module 150 obtain the minimum diameter information of hot spot, the position now residing for detector 110 is focal position.In the present embodiment, that detector 110 adopts is flat inductive element detectors (Charge-coupled Device, CCD).
In the present embodiment, laser spot positioner 10 is also provided with base 100, and base 100 plays the effect of support, and its shape both can be regular shape, also can be irregularly shaped.In the present embodiment, base 100 is rectangular shape.Further, base 100 is design in matrix, that is, offer groove on the surface of base 100, optical attenuator 140, detector 110 and microscope carrier 120 are all positioned at groove, and optical attenuator 140, detector 110, microscope carrier 120 are in order arrangement.As shown in Figure 1, optical attenuator 140, detector 110 and microscope carrier 120 are arranged in groove from top to bottom successively.Offer groove on the surface of base 100, the center of gravity of detector 110 can be reduced, and then the height of the guiding mechanism 130 that dips, make the structure of laser spot positioner 10 compacter.Be understandable that, in other embodiments, the surface of base 100 also can not start groove, is directly arranged on by detector 110 on the surface of base 100.
Microscope carrier 120 is positioned at the below of detector 110 for support detector 110, is positioned at microscope carrier 120 both sides and is connected with microscope carrier 120.In the present embodiment, position adjusting mechanism 130 is connected with base 100.Be understandable that, the quantity of position adjusting mechanism 130 is that 2, two position adjusting mechanisms 130 distribute the both sides of microscope carrier 120.Position adjusting mechanism 130 can control the lifting of microscope carrier 120, and then regulates the height of detector 110.Such as, in figure 3, when being in A position after laser out of focus, spot diameter is bigger than normal, and now, adjusting position guiding mechanism 130, reduces the height of microscope carrier 120, when the spot diameter on detector 110 reaches minimum, be focal position O.Similarly, when being in B position after laser out of focus, spot diameter is bigger than normal, and now, adjusting position guiding mechanism 130, raises the height of microscope carrier 120, when the spot diameter on detector 110 reaches minimum, namely arrives focal position O.
In the present embodiment, position adjusting mechanism 130 comprises micrometer knob, and detector 110 is raised by micrometer knob or reduces.When detector 110 arrives focal position, focal length value can be gone out by the numerical computations of micrometer knob, without the need to the size of focal length measurement again.Further, in the present embodiment, position adjusting mechanism 130 also comprises driver, and driver is connected with micrometer knob.Micrometer knob can sliding up and down by driver control detector 110, and wherein, driver can be motor or cylinder.Meanwhile, the movement of micrometer knob can also mechanically be driven.Adopt driver to move micrometer knob, the distance of movement can be made more accurate, improve the accuracy of focal position.
Please again consult Fig. 2, optical attenuator 140 is positioned at above detector 110, for carrying out large multiplying power decay to laser pulse.Before laser pulse is mapped to detector 110, first carries out large multiplying power decay through optical attenuator 140, the effect of protection detector 110 can be played.In the present embodiment, optical attenuator 140 can be attenuator or the combination of optical attenuation sheet, alternate manner also can be adopted to carry out light intensity attenuation, to reach the acceptable range of light intensity of detector 110.
IMAQ and analysis module 150 communicate to connect with detector 110.IMAQ and analysis module 150 constantly receive and analyze the spot diameter size on detector 110, and when spot diameter reaches minimum, the position residing for detector 110 is focal position.IMAQ can adopt data wire 152 to be connected with analysis module 150 and detector 110, and wireless mode also can be adopted to carry out data transmission, such as, adopts the modes such as bluetooth, infrared or WIFI.
As shown in Figure 2, in the present embodiment, also comprise the level monitoring mechanism 160 be embedded on base 100, the quantity of level monitoring mechanism 160 is the both sides that 2, Liang Ge level monitoring mechanism 160 is distributed in groove symmetrically.Level monitoring mechanism 160 can monitor base 100 and whether be in level, and then ensures the accuracy of spot diameter test.Further, level monitoring mechanism 160 comprises the first level meter 162 and the second level meter 164, first level meter 162 and the second level meter 164 and is rectangular shape, and the first level meter 162 is vertical with the second level meter 164.First level meter 162 is for the horizontal checkout of base 100 transverse direction, and the second level meter 164 is for the horizontal checkout of base 100 longitudinal direction.Adopt simultaneously the first level meter 162 and the second level meter 164 can improve the standard test accuracy.Be understandable that, the first level meter 162 and the second level meter 164 are for convenience of description, and in other embodiments, the first level meter 162 and the second level meter 164 can be exchanged.In other embodiments, the shape of level meter can be cylindrical.
Above-mentioned laser spot positioner 10, in use, first observes the position of bubble in the first level meter 162 and the second level meter 164, ensures that base 100 is in level.Then before laser pulse arrives CCD detector, first carry out large multiplying power decay through optical attenuator 140, adopt micrometer knob to raise or reduce the height of microscope carrier 120, when on IMAQ and analysis module 150, the spot diameter shown on CCD detector reaches minimum, the position now residing for detector 110 is focal position.Read the numerical value on micrometer knob, calculate focal length numerical value.Above-mentioned laser spot positioner 10 passive type receives the pulse imaging that laser sends, and by analyzing its circle spot diameter variation tendency, finding focal position, decreasing the energy loss causing out of focus to be brought because of focal position deviation.Adopt said apparatus to reduce human factor impact simultaneously, improve the accuracy that focus is found.
Each technical characteristic of the above embodiment can combine arbitrarily, for making description succinct, the all possible combination of each technical characteristic in above-described embodiment is not all described, but, as long as the combination of these technical characteristics does not exist contradiction, be all considered to be the scope that this description is recorded.
The above embodiment only have expressed several embodiment of the present utility model, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to utility model patent scope.It should be pointed out that for the person of ordinary skill of the art, without departing from the concept of the premise utility, can also make some distortion and improvement, these all belong to protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be as the criterion with claims.
Claims (9)
1. a laser spot positioner, is characterized in that, comprising:
Detector, for receiving the pulse imaging that laser sends;
Microscope carrier, is positioned at below described detector, for detector described in support;
Position adjusting mechanism, is positioned at described microscope carrier both sides and is connected with described microscope carrier, and described position adjusting mechanism is for regulating the lifting of described microscope carrier;
Optical attenuator, is positioned at above described detector, for decaying to laser pulse; And
IMAQ and analysis module, communicate to connect with described detector.
2. laser spot positioner according to claim 1, it is characterized in that, be also provided with base, the surface of described base offers groove, described optical attenuator, detector, microscope carrier are all positioned at described groove, and described optical attenuator, detector, microscope carrier are in order arrangement.
3. laser spot positioner according to claim 2, it is characterized in that, also comprise level monitoring mechanism, described level monitoring mechanism is embedded on described base, the quantity of described level monitoring mechanism is two, and two described level monitoring mechanisms are distributed in the both sides of described groove symmetrically.
4. laser spot positioner according to claim 3, it is characterized in that, described level monitoring mechanism comprises the first level meter and the second level meter, and described first level meter and described second level meter are rectangular shape, and described first level meter is vertical with described second level meter.
5. laser spot positioner according to claim 1, is characterized in that, described position adjusting mechanism comprises micrometer knob, and described detector is raised by described micrometer knob or reduces.
6. laser spot positioner according to claim 5, is characterized in that, described position adjusting mechanism also comprises driver, and described driver is connected with described micrometer knob.
7. laser spot positioner according to claim 6, is characterized in that, described driver is motor or cylinder.
8. laser spot positioner according to claim 1, is characterized in that, described detector is flat inductive element detectors.
9. the laser spot positioner according to any one of claim 1-8, is characterized in that, described IMAQ is connected with described detector by data wire or wireless mode with analysis module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520352488.4U CN204725003U (en) | 2015-05-27 | 2015-05-27 | Laser spot positioner |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520352488.4U CN204725003U (en) | 2015-05-27 | 2015-05-27 | Laser spot positioner |
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| CN204725003U true CN204725003U (en) | 2015-10-28 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104907690A (en) * | 2015-05-27 | 2015-09-16 | 上海大族新能源科技有限公司 | Laser focus point locating device and method |
| CN108080783A (en) * | 2017-11-20 | 2018-05-29 | 温州大学激光与光电智能制造研究院 | A kind of focusing mechanism and laser-processing system |
| CN108367385A (en) * | 2015-12-11 | 2018-08-03 | 通快机床两合公司 | Method for the reference focal position for determining laser beam |
| CN113751860A (en) * | 2020-06-02 | 2021-12-07 | 贵州振华群英电器有限公司（国营第八九一厂） | Method for confirming focus coordinate by laser section dotting |
-
2015
- 2015-05-27 CN CN201520352488.4U patent/CN204725003U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104907690A (en) * | 2015-05-27 | 2015-09-16 | 上海大族新能源科技有限公司 | Laser focus point locating device and method |
| CN108367385A (en) * | 2015-12-11 | 2018-08-03 | 通快机床两合公司 | Method for the reference focal position for determining laser beam |
| US11065721B2 (en) | 2015-12-11 | 2021-07-20 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Method for determining the reference focal position of a laser beam |
| CN108080783A (en) * | 2017-11-20 | 2018-05-29 | 温州大学激光与光电智能制造研究院 | A kind of focusing mechanism and laser-processing system |
| CN108080783B (en) * | 2017-11-20 | 2024-05-24 | 温州大学激光与光电智能制造研究院 | Focusing device and laser processing system |
| CN113751860A (en) * | 2020-06-02 | 2021-12-07 | 贵州振华群英电器有限公司（国营第八九一厂） | Method for confirming focus coordinate by laser section dotting |
| CN113751860B (en) * | 2020-06-02 | 2024-01-02 | 贵州振华群英电器有限公司（国营第八九一厂） | Method for confirming focal coordinates by laser tangent plane dotting |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
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| TR01 | Transfer of patent right |
Effective date of registration: 20220119 Address after: 518000 No. 9988 Shennan Road, Nanshan District, Shenzhen, Guangdong Patentee after: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. Patentee after: Shenzhen Han's photovoltaic equipment Co.,Ltd. Address before: 201615 No. nine, Jing Jing Road, Songjiang District, Shanghai, 1000 Patentee before: SHANGHAI HAN'S NEW ENERGY TECHNOLOGY CO.,LTD. |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151028 |