CN204720772U - A kind of laser coherence length conditioning equipment based on spectral dispersion principle - Google Patents
A kind of laser coherence length conditioning equipment based on spectral dispersion principle Download PDFInfo
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- CN204720772U CN204720772U CN201520220144.8U CN201520220144U CN204720772U CN 204720772 U CN204720772 U CN 204720772U CN 201520220144 U CN201520220144 U CN 201520220144U CN 204720772 U CN204720772 U CN 204720772U
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- 239000006185 dispersion Substances 0.000 title claims abstract description 41
- 230000003595 spectral effect Effects 0.000 title claims abstract description 41
- 230000003750 conditioning effect Effects 0.000 title claims abstract description 18
- 238000001228 spectrum Methods 0.000 claims abstract description 19
- 238000001514 detection method Methods 0.000 claims abstract description 11
- 230000001105 regulatory effect Effects 0.000 claims abstract description 7
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- 230000001427 coherent effect Effects 0.000 description 3
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Abstract
The utility model discloses a kind of laser coherence length conditioning equipment based on spectral dispersion principle, equipment comprises LASER Light Source unit (1), spectral dispersion unit (2) and spectrum control unit (3), also can comprise spectroscopic detection unit (4), the laser (S1) that LASER Light Source unit (1) sends incides spectral dispersion unit (2), spectral dispersion unit (2) makes it after carrying out dispersion light splitting to laser (S1) to incide described spectrum control unit (3), spectrum control unit (3) is for regulating the spectral component of the laser after described dispersion light splitting, thus control the coherence length of Output of laser.The utility model regulates laser coherence length to carry out outside laser cavity, simple to operation, can not have an impact to the own stability of laser system etc., simple, convenient, reliability is high, can be advantageously applied to the association areas such as various interferometries.
Description
Technical field
The utility model relates to laser technology field, is specifically related to a kind of laser coherence length conditioning equipment based on spectral dispersion principle.
Background technology
Coherence length defines for the temporal coherence of light source, and it is the physical quantity weighing light source time coherence performance, is defined as the maximum optical path difference that light source light can realize being concerned with; The temporal coherence of light source is presented as again its monochromaticjty, and concrete numerical indication is breadth of spectrum line (abbreviation live width).Visible, laser coherence length (L
c) be two physical quantitys be closely connected with laser linewidth (Δ λ), the two is approximate meets following formula: L
c≈ λ
2/ Δ λ.So, regulate laser coherence length to be also that inversely proportional regulates laser linewidth.
Ruby crystal is used to achieve in the world since First laser from nineteen sixty American scientist T.H.Maiman, laser is widely used in various optical measuring technique with its good coherence, as the field such as coherent optical-fiber communication, laser radar, quantum frequency standards, holography known by people.On the other hand, the higher source luminance of wide range, Low coherence also has very large application space, as Technology of Precision Measurement application such as coherent tomographic, rainbow measurement, small items scannings.
Normally used laser, its coherence length is changeless, realizes the continuous adjustment of laser coherence length according to some measure, can greatly expand its range of application, improves certainty of measurement and conveniently debugs.Be detected as example with high-precision surface type, when utilizing point-diffraction interferometer to carry out the error-detecting of reflecting element face type, increase the coherence length of laser (as ~ cm magnitude) at coarse tuning stage, be convenient to determining roughly of aplanatism position; Reduce the coherence length of laser (as ~ mm magnitude) in the accurate adjustment stage, be convenient to determine aplanatism position more accurately, reduce environmental factor and light source frequency stability to the impact of measurement result, eliminate coherent noise, improve certainty of measurement.
Mostly the technology of existing adjustment laser coherence length is parameter (as: chamber length, loss etc.) by adjusting laser cavity itself thus realizes the adjustment of Output of laser coherence length, belongs to adjustment in chamber.Such as: regulate resonator long technology, this technology is by controlling the longitudinal mode number that vibrates in laser chamber thus regulate the coherence length of laser simultaneously.This method, in the long drawing process in chamber, easily causes laser cavity off resonance, and the long long system bulk that will cause in chamber is excessive.
Utility model content
(1) technical problem that will solve
The technology that the utility model is intended to solve existing adjustment laser coherence length easily causes laser cavity off resonance and the excessive problem of system bulk.
(2) technical scheme
For solving the problems of the technologies described above, the utility model proposes a kind of laser coherence length conditioning equipment, comprising LASER Light Source unit, spectral dispersion unit and spectrum control unit, wherein, the laser that described LASER Light Source unit sends incides spectral dispersion unit; Described spectral dispersion unit makes it after carrying out dispersion light splitting to described laser to incide described spectrum control unit; Described spectrum control unit for regulating the spectral component of the laser after described dispersion light splitting, thus controls the coherence length of Output of laser.
According to embodiment of the present utility model, described equipment also comprises spectroscopic detection unit, and it is for measuring the coherence length through regulating the Output of laser after spectral component.
According to embodiment of the present utility model, described spectral dispersion unit comprises grating, prism, F-P etalon.
According to embodiment of the present utility model, described spectrum control unit is the combination of light beam concentrating element and slit, or the combination of light beam concentrating element and diaphragm.
According to embodiment of the present utility model, described slit and diaphragm are fixing logical light sizes, or adjustable logical light size.
According to embodiment of the present utility model, described spectroscopic detection unit comprises Michelson's interferometer, Fabry-Perot interferometer, spectrometer etc.
(3) beneficial effect
The utility model utilizes spectral dispersion principle to regulate laser coherence length, all regulation and control are all carried out outside laser cavity, simple to operation, can not have an impact to the own stability of laser system etc., simple, convenient, reliability is high, can be advantageously applied to the association areas such as various interferometries.
Accompanying drawing explanation
Fig. 1 is the light channel structure schematic diagram based on spectral dispersion principle laser coherence length conditioning equipment of the present utility model;
Fig. 2 is the light path schematic diagram of the first embodiment of the laser coherence length conditioning equipment based on spectral dispersion principle of the present utility model;
Fig. 3 is the light path schematic diagram of the second embodiment of the laser coherence length conditioning equipment based on spectral dispersion principle of the present utility model.
Embodiment
Fig. 1 is the light channel structure schematic diagram of the laser coherence length conditioning equipment based on spectral dispersion principle of the present utility model.As shown in Figure 1, described equipment comprises LASER Light Source unit 1, spectral dispersion unit 2, spectrum control unit 3.
Wherein, the laser S1 sent by LASER Light Source unit 1 incides spectral dispersion unit 2, after its dispersion light splitting, reenters and is mapped to spectrum control unit 3.Spectrum control unit 3 can regulate the spectral component of Output of laser after dispersion light splitting, thus controls the coherence length of Output of laser.
Described equipment can also comprise spectroscopic detection unit 4, and the laser S2 after regulating, as Output of laser, enters spectroscopic detection unit 4 to measure its coherence length.
Described LASER Light Source unit 1 can comprise the LASER Light Source of any wavelength, also can comprise pulse laser or continuous laser source.Described spectral dispersion unit 2 can comprise grating, prism, F-P etalon etc. or their various combinations.Described spectrum control unit 3 can be the combination of various light beam concentrating element and slit, diaphragm etc.Described slit, diaphragm can be fixing logical light size or adjustable logical light size.Described spectroscopic detection unit 4 can comprise the spectral detection instruments such as spectrometer, Michelson's interferometer, Fabry-Perot interferometer.
For making the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with specific embodiment, the utility model is described in further detail.
Fig. 2 is the light path schematic diagram of the first embodiment of the laser coherence length conditioning equipment based on spectral dispersion principle of the present utility model.As shown in Figure 2, the equipment of this embodiment includes: LASER Light Source 11, collimating mirror 12, diffraction grating 21, focus lamp 31, exit slit 32, Michelson's interferometer 41.Wherein, LASER Light Source 11 and collimating mirror 12 form LASER Light Source unit 1, and diffraction grating 21 is spectral dispersion element, and form spectral dispersion unit 2, focus lamp 31 and exit slit 32 form spectrum control unit 3, and Michelson's interferometer 41 forms spectroscopic detection unit 4.
The laser that described lasing light emitter 11 sends incides at a certain angle on diffraction grating 21 after collimating mirror 12 collimates.Incident laser can be carried out dispersion light splitting, according to grating equation (d (sin θ by diffraction grating 21
i± sin θ
o)=m λ, m=0, ± 1, ± 2 ...), the shoot laser of a lot of order of diffraction time can be formed, and the laser of the respective wavelength of all corresponding a series of different shooting angle in each order of diffraction time (m ≠ 0) laser.Get the higher diffraction of energy point lighting level time, make it to incide condenser lens 31, due to all corresponding different incident angle of each incident wavelength laser, so at condenser lens 31 focal plane place, each wavelength laser is spatially by spaced apart.The logical light size of exit slit 32 can regulate mechanically continuously, and be placed on the focal plane of condenser lens 31, slit is centrally located at the center of focal beam spot.The spectral component that can be controlled Output of laser by the size of adjustment exit slit 32 is how many, thus controls live width and the coherence length of Output of laser.Michelson's interferometer 41 is finally utilized to measure the coherence length of the rear laser of regulation and control.
The laser wavelength of described diffraction grating to respective sources has higher diffraction efficiency.
Below by with regard to the situation of directional light after grating beam splitting, focus lamp focus in detail, the Principles of Regulation of laser linewidth and coherence length are described in detail.
From any light inciding lens centre of geometric optics knowledge: a., after lens, the direction of propagation is constant; B., after the directional light of a branch of specific wavelength incides lens, focus point is positioned on the focal plane after lens.So if the identical a branch of directional light of wavelength incides lens, then namely the light through lens centre and the intersection point of lens focal plane correspond to this and restraint the convergent point of incident parallel light after lens.
As shown in Figure 2, suppose that a branch of live width is Δ λ=λ
1-λ
2directional light S1 incide grating 21, after the light splitting of grating 21 diffraction, the multi beam directional light that shooting angle is different can be divided into.According to grating formula, each shooting angle corresponds to corresponding stage time λ
1to λ
2interior specific wavelength.Get m=1 order diffraction light to calculate wavelength for λ
1and λ
2the distance, delta h of the two bundle two corresponding convergent points of directional lights on focal plane.
Suppose that the incidence angle of collimated light beam on grating is θ
i, wavelength X
1light is θ in the angle of diffraction of m=1 order diffraction light
o1, wavelength X
2light is θ in the angle of diffraction of m=1 order diffraction light
o2; Grating and focus lamp 31 spacing are L
1, focus lamp 31 and focal plane spacing are L
2=f; Grating constant is d, then by grating equation:
d(sinθ
i-sinθ
o1)＝λ
1(1)
d(sinθ
i-sinθ
o2)＝λ
2(2)
Then two wavelength laser shooting angle differences are:
Δθ＝θ
o2-θ
o1(3)
＝arc sin[sinθ
i-(λ
1-Δλ)/d]-arcsin[sinθ
i-λ
1/d]
So at lens focal plane place, the distance of two wavelength laser focus points is:
Δh≈Δθ·L
2(4)
＝[arc sin(sinη
i-(λ
1-Δλ)/d)-arcsin(sinθ
i-λ
1/d)]·f
Above formula is visible, on the focal plane of focus lamp 31, and two wavelength X
1and λ
2laser be spatially sufficiently separated by distance, delta h, and along with the difference of incident laser live width Δ λ, distance, delta h is also different.So by adding the adjustable slit of size 32 at the focus place of focus lamp 31, the spectral component that can control to pass through slit 32 is how many, thus regulation output laser linewidth and coherence length.
Fig. 3 is the light path schematic diagram of the second embodiment of the laser coherence length conditioning equipment based on spectral dispersion principle of the present utility model.As shown in Figure 3, the equipment of this embodiment comprises collimation laser source 13, prism 22, focus lamp 31, exit slit 32, Michelson's interferometer 41.Wherein, prism 22 is spectral dispersion element, and focus lamp 31 and exit slit 32 form spectrum control element, and Michelson's interferometer 41 is spectral detection element.It is Δ λ=λ that described collimation laser source 13 sends live width
1-λ
2collimation laser, laser incides on prism 22, and after its dispersion light splitting, can form the descending series of parallel light of wavelength at the exit facet of prism 22 on drift angle to the direction at base angle, these directional lights incide focus lamp 31.According to analyzing above, due to the incident angle that each wavelength laser is corresponding different, so at the focal plane place of focus lamp 31, each wavelength components will spatially by spaced apart.The logical light size of exit slit 32 is fixed, and be placed on the focal plane of condenser lens 31, slit is centrally located on the optical axis of focused beam, and can move forward or backward continuously along optical axis.By regulating the spectral component that can control to pass through slit before and after the position of exit slit 32 on optical axis how many, thus control live width and the coherence length of Output of laser.Michelson's interferometer 41 is finally utilized to measure the coherence length of the rear laser of regulation and control.
More than analyze as desirable adjustment situation of the present utility model, the factor much affecting Output of laser coherence length may be introduced in actual experiment, such as: the beam quality of lasing light emitter itself and collimation situation, the aberration of lens itself and aberration, fabrication error that grating, prism or etalon are introduced in the course of processing etc.
In sum, the laser coherence length conditioning equipment based on spectral dispersion principle that the utility model proposes utilizes dispersion element and the control of control element realization to light source light spectrum based on spectral dispersion principle, any impact is not produced on laser cavity itself, all operations all carries out outside laser cavity, simple, convenient, be applicable to most Output of laser.
Above-described specific embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiment of the utility model; be not limited to the utility model; all within spirit of the present utility model and principle, any amendment made, equivalent replacement, improvement etc., all should be included within protection range of the present utility model.
Claims (6)
1. a laser coherence length conditioning equipment, comprises LASER Light Source unit (1), spectral dispersion unit (2) and spectrum control unit (3), wherein,
The laser (S1) that described LASER Light Source unit (1) sends incides spectral dispersion unit (2);
Described spectral dispersion unit (2) makes it after carrying out dispersion light splitting to described laser (S1) to incide described spectrum control unit (3);
Described spectrum control unit (3) for regulating the spectral component of the laser after described dispersion light splitting, thus controls the coherence length of Output of laser.
2. laser coherence length conditioning equipment as claimed in claim 1, is characterized in that, also comprise spectroscopic detection unit (4), and it is for measuring the coherence length through regulating the Output of laser after spectral component.
3. laser coherence length conditioning equipment as claimed in claim 1 or 2, it is characterized in that, described spectral dispersion unit (2) comprises grating, prism or F-P etalon.
4. laser coherence length conditioning equipment as claimed in claim 1 or 2, it is characterized in that, described spectrum control unit (3) is the combination of light beam concentrating element and slit, or the combination of light beam concentrating element and diaphragm.
5. laser coherence length conditioning equipment as claimed in claim 4, is characterized in that, described slit and diaphragm are fixing logical light sizes, or adjustable logical light size.
6. laser coherence length conditioning equipment as claimed in claim 2, it is characterized in that, described spectroscopic detection unit (4) comprises Michelson's interferometer, Fabry-Perot interferometer, spectrometer.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104752947A (en) * | 2015-04-13 | 2015-07-01 | 中国科学院光电研究院 | Spectral dispersion principle-based method and device for adjusting laser coherence length |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104752947A (en) * | 2015-04-13 | 2015-07-01 | 中国科学院光电研究院 | Spectral dispersion principle-based method and device for adjusting laser coherence length |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200825 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics of the Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Aerospace Information Research Institute,Chinese Academy of Sciences Effective date of registration: 20200825 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Aerospace Information Research Institute,Chinese Academy of Sciences Address before: 9 Dengzhuang South Road, Haidian District, Beijing 100094 Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210309 Address after: 100176 building 10, 156 Jinghai 4th Road, Daxing Economic and Technological Development Zone, Beijing Patentee after: BEIJING RSLASER OPTO-ELECTRONICS TECHNOLOGY Co.,Ltd. Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee before: Institute of Microelectronics of the Chinese Academy of Sciences |