CN204714532U - A kind of trichlorosilane synthetic furnace - Google Patents
A kind of trichlorosilane synthetic furnace Download PDFInfo
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- CN204714532U CN204714532U CN201520404926.7U CN201520404926U CN204714532U CN 204714532 U CN204714532 U CN 204714532U CN 201520404926 U CN201520404926 U CN 201520404926U CN 204714532 U CN204714532 U CN 204714532U
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- heater
- lower cover
- trichlorosilane
- synthetic furnace
- blast cap
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Abstract
A kind of trichlorosilane synthetic furnace, belong to technical field of chemical production equipment, for solving the problem of existing synthetic furnace reactant distribution inequality, its technical scheme is, it comprise with lower cover tubulose body of heater and be installed on the heat transfer tube of furnace chamber inside and multiple blast cap, the sidewall of described body of heater upper end is provided with charging opening, multiple blast cap is distributed on the horizontal plane on body of heater lower cover top, described heat transfer tube is fixed on above blast cap, the both sides of described body of heater lower cover are equipped with inlet mouth, in lower cover, middle part is provided with vertical air flap, described air flap is positioned on the plane of symmetry of lower cover two side-inlet.The utility model utilizes the method for setting up inlet mouth and baffle plate that the reactant of synthesizing trichlorosilane is uniformly distributed in synthetic furnace, ensure that silica flour fully contacts with hydrogen chloride gas, guarantee that building-up reactions is stable to carry out, thus improve the production efficiency of trichlorosilane and the rate of capacity utilization of equipment.
Description
Technical field
The utility model relates to a kind of device utilizing silica flour and hydrogen chloride synthesis trichlorosilane, belongs to technical field of chemical production equipment.
Background technology
Trichlorosilane is the important source material of producing polysilicon, along with polysilicon is in the widespread use in the fields such as modern science and technology, national defence, industry, the production of trichlorosilane have also been obtained fast development, improves the quality of products, reduces production cost, guarantee safety in production becomes the target that each manufacturer competitively chases.Utilize the process of silica flour and hydrogen chloride synthesis trichlorosilane to be: silica flour enters body of heater from synthetic furnace top feeding mouth, hydrogenchloride enters body of heater from synthetic furnace lower cover, and the two reacts under optimal temperature in stove, generate trichlorosilane and by-product silicon tetrachloride.Existing trichlorosilane synthetic furnace generally adopts one-sided feed way, namely hydrogenchloride and silica flour are all enter body of heater from the side of synthetic furnace, this charging process easily causes hydrogen chloride gas and silica flour skewness in synthetic furnace, form bias current, and then cause occurring the larger temperature difference between different zones in synthetic furnace, when local temperature is too high, the by-product silicon tetrachloride of generation is more, but also likely damages furnace wall; And temperature too low time, easily generate byproduct dichlorosilane, and react insufficient, unreacted hydrogen chloride gas is known from experience and is entered follow-up workshop section, affects the rate of capacity utilization.Therefore, carrying out for guaranteeing that the building-up reactions of trichlorosilane is stable, being necessary to improve trichlorosilane synthetic furnace.
Utility model content
The purpose of this utility model is the drawback for prior art, provides a kind of trichlorosilane synthetic furnace that silicon powder particle and hydrogen chloride gas can be made fully to contact, and ensures that the building-up reactions of trichlorosilane is stable and carries out.
Problem described in the utility model realizes with following technical proposals:
A kind of trichlorosilane synthetic furnace, formation comprise with lower cover tubulose body of heater and be installed on the heat transfer tube of furnace chamber inside and multiple blast cap, the sidewall of described body of heater upper end is provided with charging opening, multiple blast cap is distributed on the horizontal plane on body of heater lower cover top, described heat transfer tube is fixed on above blast cap, the both sides of described body of heater lower cover are equipped with inlet mouth, and in lower cover, middle part is provided with vertical air flap, and described air flap is positioned on the plane of symmetry of lower cover two side-inlet.
Above-mentioned trichlorosilane synthetic furnace, the inside of described body of heater is provided with silica flour baffle plate, and described silica flour baffle plate is positioned at the below of body of heater charging opening and is fixedly connected with heat transfer tube.
Above-mentioned trichlorosilane synthetic furnace, described body of heater charging opening is connected with charging line by reinforced valve; The inlet mouth of described body of heater lower cover is connected with hydrogenchloride pipeline by air intake valve.
The utility model utilizes the method for setting up inlet mouth and baffle plate that the reactant of synthesizing trichlorosilane is uniformly distributed in synthetic furnace, ensure that silica flour fully contacts with hydrogen chloride gas, guarantee that building-up reactions is stable to carry out, thus improve the production efficiency of trichlorosilane and the rate of capacity utilization of equipment.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the utility model is described in further detail.
Fig. 1 is structural representation of the present utility model.
In figure, mark is as follows: 1, air intake valve, and 2, inlet mouth, 3, air flap, 4, lower cover, 5, blast cap, 6, body of heater, 7, heat transfer tube, 8, feed in raw material valve, 9, silica flour baffle plate, 10, charging opening.
Embodiment
Referring to Fig. 1, the utility model mainly comprises air intake valve 1, air flap 3, lower cover 4, blast cap 5, body of heater 6, heat transfer tube 7, reinforced valve 8 and silica flour baffle plate 9.Lower cover 4 is spherical cap shape, is provided with inlet mouth 2, body of heater 6 is provided with charging opening 10.
Inlet mouth 2 arranges two, lays respectively at the both sides of lower cover 4, and air flap 3 is installed in lower cover 4 bosom position, and air flap 3 is positioned on the plane of symmetry of two inlet mouths 2.The effect arranging air flap 3 and two inlet mouths 2 is that the hydrogen chloride gas entering lower cover 4 is disperseed more, prevents bias current.Ensure that hydrogen chloride gas evenly enters body of heater 6 by blast cap 5.
Charging opening 10 is positioned at the upper end of body of heater 6, and be connected with charging line by reinforced valve 8, silica flour baffle plate 9 is positioned at body of heater 6, and its position is lower than charging opening 10, and silica flour baffle plate 9 is welded on heat transfer tube 7.The effect of silica flour baffle plate 9 is by stopping that collision makes the silicon powder particle entered in body of heater 6 spread out, preventing non-uniform phenomenon.
Principle of work of the present utility model is as follows:
Hydrogen chloride gas enters in lower cover 4 by two air intake valves 1 and inlet mouth 2, and the air flap 3 pairs of hydrogen chloride gas in the middle of lower cover 4 play shock absorption, and the hydrogen chloride gas after buffering is entered in body of heater 6 by blast cap 5.The silicon powder particle being entered body of heater 6 by reinforced valve 8 disperses to decline after the stop of silica flour baffle plate 9, reacts with after hydrogen chloride gas Homogeneous phase mixing.The reaction of synthesizing trichlorosilane is thermopositive reaction, and in order to make temperature-stable in synthetic furnace at set(ting)value (about 300 degree), the utility model is provided with heat transfer tube 7 in body of heater 6, takes away by heat transfer tube 7 waste heat that building-up reactions releases in time.
The utility model can make hydrogen chloride gas and silicon powder particle be uniformly distributed in Reaktionsofen, fully reacts, substantially increases the rate of capacity utilization, and provides guarantee for safety in production.The utility model structure is simple, easy to operate, can ensure that production safety is carried out smoothly.
Claims (3)
1. a trichlorosilane synthetic furnace, it is characterized in that, it comprise with lower cover (4) tubulose body of heater (6) and be installed on heat transfer tube (7) and multiple blast cap (5) of furnace chamber inside, the sidewall of described body of heater (6) upper end is provided with charging opening (10), multiple blast cap (5) is distributed on the horizontal plane on body of heater lower cover (4) top, described heat transfer tube (7) is fixed on blast cap (5) top, the both sides of described body of heater lower cover (4) are equipped with inlet mouth (2), in lower cover (4), middle part is provided with vertical air flap (3), described air flap (3) is positioned on the plane of symmetry of lower cover (4) two side-inlet (2).
2. a kind of trichlorosilane synthetic furnace according to claim 1, is characterized in that, the inside of described body of heater (6) is provided with silica flour baffle plate (9), and described silica flour baffle plate (9) is positioned at the below of body of heater charging opening (10) and is fixedly connected with heat transfer tube (7).
3. a kind of trichlorosilane synthetic furnace according to claim 1 and 2, is characterized in that, described body of heater charging opening (10) is connected with charging line by reinforced valve (8); The inlet mouth (2) of described body of heater lower cover (4) is connected with hydrogenchloride pipeline by air intake valve (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520404926.7U CN204714532U (en) | 2015-06-12 | 2015-06-12 | A kind of trichlorosilane synthetic furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520404926.7U CN204714532U (en) | 2015-06-12 | 2015-06-12 | A kind of trichlorosilane synthetic furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204714532U true CN204714532U (en) | 2015-10-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201520404926.7U Active CN204714532U (en) | 2015-06-12 | 2015-06-12 | A kind of trichlorosilane synthetic furnace |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106006647A (en) * | 2016-05-17 | 2016-10-12 | 山东瑞川硅业有限公司 | Trichlorosilane synthesis furnace |
| CN107619051A (en) * | 2017-09-20 | 2018-01-23 | 河南尚宇新能源股份有限公司 | A kind of method of trichlorosilane synthetic furnace and its volume increase consumption reduction |
| CN112225178A (en) * | 2020-11-10 | 2021-01-15 | 内蒙古乌海化工有限公司 | Synthetic furnace door structure |
-
2015
- 2015-06-12 CN CN201520404926.7U patent/CN204714532U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106006647A (en) * | 2016-05-17 | 2016-10-12 | 山东瑞川硅业有限公司 | Trichlorosilane synthesis furnace |
| CN106006647B (en) * | 2016-05-17 | 2018-03-13 | 山东瑞川硅业有限公司 | Trichlorosilane synthetic furnace |
| CN107619051A (en) * | 2017-09-20 | 2018-01-23 | 河南尚宇新能源股份有限公司 | A kind of method of trichlorosilane synthetic furnace and its volume increase consumption reduction |
| CN112225178A (en) * | 2020-11-10 | 2021-01-15 | 内蒙古乌海化工有限公司 | Synthetic furnace door structure |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |