CN204702804U - A kind of graphite boat piece of stuck point easy accessibility - Google Patents
A kind of graphite boat piece of stuck point easy accessibility Download PDFInfo
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- CN204702804U CN204702804U CN201520273906.0U CN201520273906U CN204702804U CN 204702804 U CN204702804 U CN 204702804U CN 201520273906 U CN201520273906 U CN 201520273906U CN 204702804 U CN204702804 U CN 204702804U
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- graphite boat
- stuck point
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- boat piece
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Abstract
The utility model discloses a kind of graphite boat piece of stuck point easy accessibility, comprise: graphite boat piece body, be positioned at silicon chip positioning cavity in the middle part of graphite boat piece body, be located at the technique draw-in groove of silicon chip positioning cavity periphery and be inserted into the stuck point of technique draw-in groove, described technique draw-in groove is long strip shape waist hole, and the two ends in waist hole are the unequal arc of radius, described stuck point correspondence inserts solid one end less at technique draw-in groove.The technique draw-in groove of graphite boat piece is designed to waist pore structure, dismounting stuck point is very convenient, operation easier is low, and not easy to wear or damage technique draw-in groove and stuck point connecting portion, thus reach the convenient object splitting cleaning graphite boat, the working efficiency of cleaning graphite boat can be improved, cleaning also more clean, and save production cost.
Description
Technical field
The utility model relates to a kind of graphite boat piece, particularly relates to a kind of graphite boat piece of stuck point easy accessibility.
Background technology
PECVD plated film is the procedure in solar battery sheet production process, and its effect is the plated surface last layer antireflective coating at silicon chip, thus improves the efficiency of conversion of battery.In plated film reaction process, graphite boat, as the carrier of silicon chip, is instrument indispensable in tubular type PECVD plated film.The clean level of graphite boat directly affects the quality of silicon chip film quality, color, thus the good article rate that impact is produced.In current industry, after general requirement PECVD plated film, fraction defective is less than 1%, but due to graphite boat less cleaning position, fraction defective is often about 5%.Graphite boat is spaced formation primarily of multiple graphite boat piece, and each graphite boat piece is provided with silicon chip positioning cavity, and the periphery of silicon chip positioning cavity is provided with the stuck point of fixing silicon chip.Wherein, it is the main factor causing fraction defective too high that the stuck point in graphite boat piece does not wash clean clearly.
Because the stuck point dismounting in graphite boat piece is inconvenient and easily cause heavy wear to the connecting portion of stuck point in disassembly process, so mainly graphite boat is carried out Integral cleaning in current industry, the connecting portion of stuck point is so just caused not easily to clean up, so just have to consume the costs such as more times, acid, pure water and carry out Integral cleaning, be nonetheless also difficult to the stuck point in graphite boat piece to clean up.So if graphite boat piece and stuck point can be split cleaning, the problem such as will solve cleaning interval long, consumption acid and pure water amount is large, what the most important thing is stuck point to be cleaned is cleaner.
Therefore, for the ease of cleaning graphite boat, how designing a kind of graphite boat piece of stuck point easy accessibility, is industry problem demanding prompt solution.
Utility model content
The utility model is for above deficiency and defect, and to be solved is the problem that graphite boat piece operation easier when dismounting stuck point is large, easily wear and tear in the position that is connected, and proposes a kind of graphite boat piece of stuck point easy accessibility.
The technical scheme in the invention for solving the above technical problem is: a kind of graphite boat piece of stuck point easy accessibility, comprise: graphite boat piece body, be positioned at silicon chip positioning cavity in the middle part of graphite boat piece body, be located at the technique draw-in groove of silicon chip positioning cavity periphery and be inserted into the stuck point of technique draw-in groove, described technique draw-in groove is long strip shape waist hole, and the two ends in waist hole are the unequal arc of radius, described stuck point correspondence inserts solid one end less at technique draw-in groove.
Described technique draw-in groove is provided with three, and is parallelly respectively along its length located on three edges of silicon chip positioning cavity periphery.
Wherein two described technique draw-in grooves are close to the same corner of silicon chip positioning cavity, and another technique draw-in groove is close to the diagonal angle of described corner.
Described silicon chip positioning cavity is rectangular shape, and the length direction of the long limit of described rectangle and graphite boat piece body forms the angle of 5 ~ 10 degree.
Described stuck point comprises for the cylindricality installation portion be arranged in technique draw-in groove and the fixture block be symmetrically set in installation portion both ends of the surface, is formed with the screens for fixing silicon chip between described fixture block and installation portion.
Compared with prior art, the beneficial effects of the utility model: the technique draw-in groove of graphite boat piece is designed to waist pore structure, and dismounting stuck point is very convenient.Detect according to graphite boat piece of the present utility model, can draw: graphite boat piece dismounting stuck point is very easy to, operation easier is low, the connecting portion of not easy to wear or damage technique draw-in groove and stuck point, thus the object reaching convenient separately cleaning graphite boat, can improve the working efficiency of cleaning graphite boat, that cleans is also cleaner, and save production cost, for batch production provides condition, there is very high practical value.
Accompanying drawing explanation
Fig. 1 is the one-piece construction schematic diagram of the utility model preferred embodiment;
Fig. 2 is the local structure schematic diagram of the utility model preferred embodiment;
Fig. 3 is the principle of work schematic diagram of the utility model preferred embodiment.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the utility model is described further.
Refer to Fig. 1 to 3, the utility model relates to a kind of graphite boat piece of stuck point easy accessibility, comprising: graphite boat piece body 1, be positioned at silicon chip positioning cavity 2 in the middle part of graphite boat piece body 1, be located at the technique draw-in groove 3 of each silicon chip positioning cavity 2 periphery and be inserted into the stuck point 4 of technique draw-in groove 3.Graphite boat piece body 1 is long strip-board shape structure, two ends extension is along its length provided with Electrode connection dististyle 5, Electrode connection dististyle 5 is connected and fixed for conducting electricity with upper or lower electrode block, graphite boat piece body 1 offers multiple circular graphitic open holes 6, and graphite open holes 6 connects graphite rod and graphite nut for installing.The plate face of graphite boat piece body 1 is evenly provided with six silicon chip positioning cavity 2, according to needs of production, silicon chip positioning cavity 2 also can be provided with other different numbers, silicon chip positioning cavity 2 inwardly concaves and runs through the plate face of graphite boat piece body 1, whole silicon chip positioning cavity 2 is rectangular shape, and the length direction of the long limit of this rectangle and graphite boat piece body 1 forms the angle of 5 ~ 10 degree, be convenient to silicon chip with this and better install and extract.Technique draw-in groove 3 is opened in the periphery of each silicon chip positioning cavity 2, and technique draw-in groove 3 is preferably provided with three.
Design bright spot of the present utility model is, technique draw-in groove 3 is designed to waist pore structure, this waist hole is long strip shape, and the two ends in long strip shape waist hole are the unequal arc of radius, and the length direction of technique draw-in groove 3 is parallel to the periphery edge of the silicon chip positioning cavity 2 close with it.Three technique draw-in grooves 3 are located on three edges of silicon chip positioning cavity 2 periphery respectively, and wherein two technique draw-in grooves are near the same corner of silicon chip positioning cavity 2, and another technique draw-in groove is then near the diagonal angle of above-mentioned silicon chip positioning cavity corner.
Stuck point 4 correspondence is inserted into the less one end of technique draw-in groove 3, stuck point 4 is primarily of fixture block with for being arranged on the cylindricality installation portion composition in technique draw-in groove 3, fixture block is two, is symmetrically distributed in the both ends of the surface of installation portion, is formed with the screens for fixing silicon chip between fixture block and installation portion.Three stuck points 4 comprise the larger large stuck point 41 of two installation portion diameter of sections and the less little stuck point 42 of an installation portion diameter, and wherein, a large stuck point 41 and little stuck point 42 are near the same corner of silicon chip positioning cavity 2.The size of technique draw-in groove 3 is corresponding with the size of stuck point 4.When installing stuck point 4, the installation portion of stuck point 4 is encased in the larger one end of technique draw-in groove 3 by prime minister, is then sliding into the less one end of technique draw-in groove 3, simultaneously the fixture block correspondence clamping silicon chip of stuck point 4; When dismantling stuck point 4, by said process reverse operating.Operation is very simple, time saving and energy saving, and does not allow rapid wear or damage graphite boat piece body and stuck point.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.
Claims (5)
1. the graphite boat piece of a stuck point easy accessibility, comprise: graphite boat piece body (1), be positioned at silicon chip positioning cavity (2) in the middle part of graphite boat piece body, be located at the technique draw-in groove (3) of silicon chip positioning cavity periphery and be inserted into the stuck point (4) of technique draw-in groove, it is characterized in that, described technique draw-in groove is long strip shape waist hole, and the two ends in waist hole are the unequal arc of radius, described stuck point correspondence inserts solid one end less at technique draw-in groove.
2. the graphite boat piece of stuck point easy accessibility according to claim 1, is characterized in that, described technique draw-in groove (3) is provided with three, and is parallelly respectively along its length located on three edges of silicon chip positioning cavity (2) periphery.
3. the graphite boat piece of stuck point easy accessibility according to claim 2, is characterized in that, wherein two described technique draw-in grooves (3) are close to the same corner of silicon chip positioning cavity (2), and another technique draw-in groove is close to the diagonal angle of described corner.
4. the graphite boat piece of the stuck point easy accessibility according to claims 1 to 3 any one, it is characterized in that, described silicon chip positioning cavity (2) is rectangular shape, and the length direction of the long limit of described rectangle and graphite boat piece body (1) forms the angle of 5 ~ 10 degree.
5. the graphite boat piece of the stuck point easy accessibility according to claims 1 to 3 any one, it is characterized in that, described stuck point (4) comprises for the cylindricality installation portion be arranged in technique draw-in groove (3) and the fixture block be symmetrically set in installation portion both ends of the surface, is formed with the screens for fixing silicon chip between described fixture block and installation portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520273906.0U CN204702804U (en) | 2015-04-30 | 2015-04-30 | A kind of graphite boat piece of stuck point easy accessibility |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520273906.0U CN204702804U (en) | 2015-04-30 | 2015-04-30 | A kind of graphite boat piece of stuck point easy accessibility |
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| Publication Number | Publication Date |
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| CN204702804U true CN204702804U (en) | 2015-10-14 |
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| CN201520273906.0U Active CN204702804U (en) | 2015-04-30 | 2015-04-30 | A kind of graphite boat piece of stuck point easy accessibility |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106191817A (en) * | 2016-09-23 | 2016-12-07 | 国家电投集团西安太阳能电力有限公司 | Solar silicon wafers plated film graphite boat piece and graphite boat |
| CN109161872A (en) * | 2018-09-13 | 2019-01-08 | 江苏润阳悦达光伏科技有限公司 | Automate graphite boat stuck point changing machine mold |
-
2015
- 2015-04-30 CN CN201520273906.0U patent/CN204702804U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106191817A (en) * | 2016-09-23 | 2016-12-07 | 国家电投集团西安太阳能电力有限公司 | Solar silicon wafers plated film graphite boat piece and graphite boat |
| CN106191817B (en) * | 2016-09-23 | 2018-10-16 | 国家电投集团西安太阳能电力有限公司 | Graphite boat piece and graphite boat for solar silicon wafer coating |
| CN109161872A (en) * | 2018-09-13 | 2019-01-08 | 江苏润阳悦达光伏科技有限公司 | Automate graphite boat stuck point changing machine mold |
| CN109161872B (en) * | 2018-09-13 | 2023-11-28 | 江苏润阳悦达光伏科技有限公司 | Automatic change quick-witted mould is changed to graphite boat stuck point |
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