CN204702800U - Be applicable to the magnetic control sputtering device of face glass - Google Patents
Be applicable to the magnetic control sputtering device of face glass Download PDFInfo
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- CN204702800U CN204702800U CN201520376338.7U CN201520376338U CN204702800U CN 204702800 U CN204702800 U CN 204702800U CN 201520376338 U CN201520376338 U CN 201520376338U CN 204702800 U CN204702800 U CN 204702800U
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Abstract
The utility model discloses a kind of magnetic control sputtering device being applicable to face glass, it includes sputtering technology room, and both sides, sputtering technology room are respectively arranged with one piece of magnetic end block; Each block magnetic end block is all connected with mobile screw mandrel, and described mobile screw mandrel, between sputtering technology room front end face and aft end face place plane, extends in the horizontal direction, and its axis being parallel is in the end face of magnetic end block; Adopt the magnetic control sputtering device being applicable to face glass of technique scheme, its magnetic end block that rotarily drives by screw mandrel carries out horizontal shift in real time in process treatment process, thus make to keep relative movement between the target in sputtering technology room and magnetic field on the one hand, to make the position real-time change occurring in target to sputter, and then the utilization ratio of target is made to be able to remarkable improvement; On the other hand, the raising of the utilization ratio of target causes its overall processing efficiency for face glass also can be improved.
Description
Technical field
The utility model relates to a kind of processing equipment of optical element, especially a kind of magnetic control sputtering device being applicable to face glass.
Background technology
When face glass uses as the associated materials of electronic component, magnetron sputtering process need being carried out to face glass, namely by applying herein target, making target material surface ion reverse precipitation to face glass surface.But, in the process of existing magnetron sputtering, the position in magnetic field is relatively fixing, it causes target material surface only to have regional area to sputter, after the ion of target regional area precipitates completely, it cannot continue to carry out processing treatment to face glass, thus causes all being difficult in the utilization ratio of target and work-ing life thereof be protected.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of magnetic control sputtering device, and it can carry out to face glass the utilization ratio improving target in the process of magnetron sputtering.
For solving the problems of the technologies described above, the utility model relates to a kind of magnetic control sputtering device being applicable to face glass, and it includes sputtering technology room, and both sides, sputtering technology room are respectively arranged with one piece of magnetic end block; Each block magnetic end block is all connected with mobile screw mandrel, and described mobile screw mandrel, between sputtering technology room front end face and aft end face place plane, extends in the horizontal direction, and its axis being parallel is in the end face of magnetic end block.
Improve as one of the present utility model, both sides, described sputtering technology room are provided with control motor, and the main shaft controlling motor is connected with mobile screw mandrel by belt pulley.Adopt above-mentioned design, it controls screw mandrel voluntarily by control motor and rotates, thus drives its connection magnetic end block to carry out automatic horizontal shift, also automatically changes in real time with magnetic field to make the sputtering position of the target of sputtering technology indoor.
Improve as one of the present utility model, the side end face of described sputtering technology room is provided with the arrangement cell body vertically extended, and described magnetic end block is arranged at settles cell body inner; Described control motor is fixed on fixing pole, and the two ends of described mobile screw mandrel and fixing pole are individually fixed on two side ends of arrangement cell body.Adopt above-mentioned design, its by settle cell body be arranged so that mobile screw mandrel with control motor all can better be supported and fixed effect, thus make magnetic end block its drive under can be more stable carry out displacement.
Improve as one of the present utility model, be fixedly installed support end block on described magnetic end block, the axial location supporting end block is provided with supporting rod, and the two ends of supporting rod are individually fixed on two side ends of arrangement cell body.Adopt above-mentioned design, its by supporting rod with support end block magnetic end block also can be supported by it moving horizontally in process, thus guarantee that magnetic end block keeps stable, while also can share gravity that mobile screw mandrel bears, to improve its working life.
Improve as one of the present utility model, the bottom of the side end face of described sputtering technology room is provided with support cell body, support cell body inside and be provided with multiple supporting-point roller, the axis of each supporting-point roller is all perpendicular to the end face of magnetic end block, and it is all tangent with the bottom face of magnetic end block.Adopt above-mentioned design, it can to move horizontally in process at magnetic end block by the supporting-point roller supported in cell body and together roll with it, thus while improving its support effect further, avoids impacting the movement of magnetic end block.
Adopt the magnetic control sputtering device being applicable to face glass of technique scheme, its magnetic end block that rotarily drives by screw mandrel carries out horizontal shift in real time in process treatment process, thus make to keep relative movement between the target in sputtering technology room and magnetic field on the one hand, to make the position real-time change occurring in target to sputter, and then the utilization ratio of target is made to be able to remarkable improvement; On the other hand, the raising of the utilization ratio of target causes its overall processing efficiency for face glass also can be improved.
Accompanying drawing explanation
Fig. 1 is the utility model schematic diagram;
Fig. 2 is the utility model vertical view;
Reference numerals list:
1-sputtering technology room, 2-magnetic end block, 3-mobile screw mandrel, 4-control motor, 5-belt pulley, 6-arrangement cell body, 7-fixing pole, 8-support end block, 9-supporting rod, 10-support cell body, 11-supporting-point roller.
Embodiment
Below in conjunction with embodiment, illustrate the utility model further, following embodiment should be understood and be only not used in restriction scope of the present utility model for illustration of the utility model.It should be noted that, the word "front", "rear" of use is described below, "left", "right", "up" and "down" refer to direction in accompanying drawing, word " interior " and " outward " refer to the direction towards or away from particular elements geometric centre respectively.
Embodiment 1
A kind of magnetic control sputtering device being applicable to face glass as shown in Figures 1 and 2, it includes sputtering technology room 1, and both sides, sputtering technology room 1 are respectively arranged with one piece of magnetic end block 2; Each block magnetic end block 2 is all connected with mobile screw mandrel 3, and described mobile screw mandrel 3, between sputtering technology room 1 front end face and aft end face place plane, extend in the horizontal direction, and its axis being parallel is in the end face of magnetic end block 2.
Improve as one of the present utility model, both sides, described sputtering technology room 1 are provided with and control motor 4, and the main shaft controlling motor 4 is connected with mobile screw mandrel 3 by belt pulley 5.Adopt above-mentioned design, it controls screw mandrel voluntarily by control motor and rotates, thus drives its connection magnetic end block to carry out automatic horizontal shift, also automatically changes in real time with magnetic field to make the sputtering position of the target of sputtering technology indoor.
Adopt the magnetic control sputtering device being applicable to face glass of technique scheme, its magnetic end block that rotarily drives by screw mandrel carries out horizontal shift in real time in process treatment process, thus make to keep relative movement between the target in sputtering technology room and magnetic field on the one hand, to make the position real-time change occurring in target to sputter, and then the utilization ratio of target is made to be able to remarkable improvement; On the other hand, the raising of the utilization ratio of target causes its overall processing efficiency for face glass also can be improved.
Embodiment 2
Improve as one of the present utility model, the side end face of described sputtering technology room 1 is provided with the arrangement cell body 6 vertically extended, and described magnetic end block 2 is arranged at settles cell body 6 inner; Described control motor 4 is fixed on fixing pole 7, and the two ends of described mobile screw mandrel 3 and fixing pole 7 are individually fixed on two side ends of arrangement cell body 6.Adopt above-mentioned design, its by settle cell body be arranged so that mobile screw mandrel with control motor all can better be supported and fixed effect, thus make magnetic end block its drive under can be more stable carry out displacement.
All the other feature & benefits of the present embodiment are all identical with embodiment 1.
Embodiment 3
Improve as one of the present utility model, be fixedly installed and support end block 8 on described magnetic end block 2, the axial location supporting end block 8 is provided with supporting rod 9, and the two ends of supporting rod 9 are individually fixed on two side ends of arrangement cell body 6.Adopt above-mentioned design, its by supporting rod with support end block magnetic end block also can be supported by it moving horizontally in process, thus guarantee that magnetic end block keeps stable, while also can share gravity that mobile screw mandrel bears, to improve its working life.
All the other feature & benefits of the present embodiment are all identical with embodiment 2.
Embodiment 4
Improve as one of the present utility model, the bottom of the side end face of described sputtering technology room 1 is provided with and supports cell body 10, support cell body 10 inside and be provided with three supporting-point roller 11, the axis of each supporting-point roller 11 is all perpendicular to the end face of magnetic end block 2, and it is all tangent with the bottom face of magnetic end block 2.Adopt above-mentioned design, it can to move horizontally in process at magnetic end block by the supporting-point roller supported in cell body and together roll with it, thus while improving its support effect further, avoids impacting the movement of magnetic end block.
All the other feature & benefits of the present embodiment are all identical with embodiment 3.
Claims (5)
1. be applicable to a magnetic control sputtering device for face glass, it is characterized in that, described in be applicable to face glass magnetic control sputtering device include sputtering technology room, both sides, sputtering technology room are respectively arranged with one piece of magnetic end block; Each block magnetic end block is all connected with mobile screw mandrel, and described mobile screw mandrel, between sputtering technology room front end face and aft end face place plane, extends in the horizontal direction, and its axis being parallel is in the end face of magnetic end block.
2. according to the magnetic control sputtering device being applicable to face glass according to claim 1, it is characterized in that, both sides, described sputtering technology room are provided with control motor, and the main shaft controlling motor is connected with mobile screw mandrel by belt pulley.
3. according to the magnetic control sputtering device being applicable to face glass according to claim 2, it is characterized in that, the side end face of described sputtering technology room is provided with the arrangement cell body vertically extended, and described magnetic end block is arranged at settles cell body inner; Described control motor is fixed on fixing pole, and the two ends of described mobile screw mandrel and fixing pole are individually fixed on two side ends of arrangement cell body.
4. according to the magnetic control sputtering device being applicable to face glass according to claim 3, it is characterized in that, be fixedly installed support end block on described magnetic end block, the axial location supporting end block is provided with supporting rod, and the two ends of supporting rod are individually fixed on two side ends of arrangement cell body.
5. according to the magnetic control sputtering device being applicable to face glass according to claim 4, it is characterized in that, the bottom of the side end face of described sputtering technology room is provided with support cell body, support cell body inside and be provided with multiple supporting-point roller, the axis of each supporting-point roller is all perpendicular to the end face of magnetic end block, and it is all tangent with the bottom face of magnetic end block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520376338.7U CN204702800U (en) | 2015-06-03 | 2015-06-03 | Be applicable to the magnetic control sputtering device of face glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520376338.7U CN204702800U (en) | 2015-06-03 | 2015-06-03 | Be applicable to the magnetic control sputtering device of face glass |
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| CN204702800U true CN204702800U (en) | 2015-10-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201520376338.7U Active CN204702800U (en) | 2015-06-03 | 2015-06-03 | Be applicable to the magnetic control sputtering device of face glass |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019184109A1 (en) * | 2018-03-29 | 2019-10-03 | 北京铂阳顶荣光伏科技有限公司 | Magnetron sputtering equipment and cathode device thereof |
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2015
- 2015-06-03 CN CN201520376338.7U patent/CN204702800U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019184109A1 (en) * | 2018-03-29 | 2019-10-03 | 北京铂阳顶荣光伏科技有限公司 | Magnetron sputtering equipment and cathode device thereof |
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