CN204679170U - Interference optical detection system - Google Patents
Interference optical detection system Download PDFInfo
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- CN204679170U CN204679170U CN201520204083.6U CN201520204083U CN204679170U CN 204679170 U CN204679170 U CN 204679170U CN 201520204083 U CN201520204083 U CN 201520204083U CN 204679170 U CN204679170 U CN 204679170U
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- detection system
- spectroscope
- optical detection
- interference optical
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Abstract
The utility model relates to a kind of interference optical detection system, mainly comprise light source (1), first diaphragm (2), first lens (3), spectroscope (4), second lens (5), second diaphragm (6), charge-coupled image sensor (7) and catoptron (8), described first lens (3) are arranged on the beam projecting direction of light source (1), spectroscope (4) is arranged on the first lens (3) rear, the normal direction of the second lens (5) is mutually vertical with the normal direction of the first lens (3), described charge-coupled image sensor (7) is arranged on the rear side of the second lens (5), described catoptron (8) is arranged on the rear side of spectroscope (4).The interference optical detection system that the utility model provides is interfered light by arranging structure, face place will be detected and place focal plane arrays (FPA), realize the detection of infrared image, the rotation size achieving micro-cantilever is relevant with the distribution of interference fringe, thus improves precision.
Description
Technical field
The utility model relates to a kind of interference optical detection system, belongs to infrared optics detection field.
Background technology
Before a century, people just detect infrared, and heat-sensitive eye receives much concern because of of many uses.Infrared detection technique militarily serves very important effect, all military targets, and as aerial aircraft, guided missile, the warship in ocean, land army and armored vehicle, all launch a large amount of infrared radiations.Utilize infrared detection technique can scout, follow the tracks of and monitor these targets.The fifties in last century, infrared ground-to-air missile of seeking drops under battle conditions.Bring into use infrared early-warning satellite in order to obtain military information in the seventies.Subsequently, thermal imaging night-vision devices start to appear on military equipment in a large number.Militarily, the technology such as infrared imaging, infrared guidance, infrared early warning, infrared reconnaissance plays more and more important role.Active demand militarily facilitates the development carrying out the infrared system of imaging to target object simultaneously.Along with the development of technology and the continuous reduction of infrared eye price, infrared detection technique have also been obtained at civil area and applies widely.As thermal source detection, medical treatment detection, maritime search and rescue, automobile monitoring, electric power monitoring etc.
At present, the research of optical read-out mode only has the more than ten years.Research illustrates and bi-material microcantilevel is used as the feasibility of infrared eye, but current method still exists a series of problem, such as system architecture is too complicated, accuracy of detection is lower, stability and robustness poor etc.
Utility model content
In order to overcome the deficiencies in the prior art, resolving the problem of prior art, making up the deficiency of existing existing product in the market.
The utility model provides a kind of interference optical detection system, mainly comprise light source, the first diaphragm, the first lens, spectroscope, the second lens, the second diaphragm, charge-coupled image sensor and catoptron, described first lens are arranged on the beam projecting direction of light source, spectroscope is arranged on the first lens rear, the normal direction of the second lens is mutually vertical with the normal direction of the first lens, described charge-coupled image sensor is arranged on the rear side of the second lens, and described catoptron is arranged on spectroscopical rear side.
Preferably, above-mentioned first diaphragm is arranged between light source and the first lens.
Preferably, above-mentioned second diaphragm is arranged between the second lens and charge-coupled image sensor.
Preferably, said system also comprises detecting device, is arranged on the opposite side that spectroscope is relative with the second lens.
Preferably, the light that above-mentioned light source sends is divided into two parts by spectroscope after the first lens, and a part arrives catoptron, and another part arrives detecting device.
Preferably, after the interference of light that above-mentioned catoptron and detecting device reflect by the second lens after arrive charge-coupled image sensor.
The interference optical detection system that the utility model provides is interfered light by arranging structure, face place will be detected and place focal plane arrays (FPA), realize the detection of infrared image, the rotation size achieving micro-cantilever is relevant with the distribution of interference fringe, thus improves precision.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation.
Reference numeral: 1-light source; 2-first diaphragm; 3-first lens; 4-spectroscope; 5-second lens; 6-second diaphragm; 7-charge-coupled image sensor; 8-catoptron; 9-detecting device.
Embodiment
Understand for the ease of those of ordinary skill in the art and implement the utility model, below in conjunction with the drawings and the specific embodiments, the utility model being described in further detail.
The interference optical detection system that the utility model provides, mainly comprise light source 1, first diaphragm 2, first lens 3, spectroscope 4, second lens 5, second diaphragm 6, charge-coupled image sensor 7 and catoptron 8, described first lens 3 are arranged on the beam projecting direction of light source 1, spectroscope 4 is arranged on the first lens 3 rear, the normal direction of the second lens 5 is mutually vertical with the normal direction of the first lens 3, described charge-coupled image sensor 7 is arranged on the rear side of the second lens 5, and described catoptron 8 is arranged on the rear side of spectroscope 4.
First diaphragm 2 is arranged between light source 1 and the first lens 3.Second diaphragm 6 is arranged between the second lens 5 and charge-coupled image sensor 7.System also comprises detecting device 9, is arranged on the opposite side that spectroscope 4 is relative with the second lens 5.The light that light source 1 sends is divided into two parts by spectroscope 4 after the first lens 3, and a part arrives catoptron 8, and another part arrives detecting device 9.After the interference of light that catoptron 8 and detecting device 9 reflect by the second lens 5 after arrive charge-coupled image sensor 7.
Its principle of work is: micro-cantilever, when absorption surface absorbs infrared radiation, can produce deformation.The light that light source 1 sends becomes directional light injection through the effect of the first diaphragm 2 and the first lens 3, and be radiated on spectroscope 4, this Shu Guang is divided into two parts by spectroscope 4, a part of directive catoptron 8, and another part vertically downward directive is detected the detecting device 9 in face.The light that catoptron 8 and detecting device 9 reflect interferes when again meeting, and is imaged on charge-coupled image sensor 7 by the second lens 5.In this system, focal plane arrays (FPA) can also be placed by by detecting device 9 place, realize the detection of infrared image.The rotation size of its micro-cantilever is relevant with the distribution of interference fringe.
The interference optical detection system that the utility model provides is interfered light by arranging structure, face place will be detected and place focal plane arrays (FPA), realize the detection of infrared image, the rotation size achieving micro-cantilever is relevant with the distribution of interference fringe, thus improves precision.
The embodiment of the above is better embodiment of the present utility model; not limit concrete practical range of the present utility model with this; scope of the present utility model comprises and is not limited to this embodiment, and the equivalence change that all shapes according to the utility model, structure are done is all in protection domain of the present utility model.
Claims (6)
1. an interference optical detection system, it is characterized in that: described interference optical detection system mainly comprises light source (1), first diaphragm (2), first lens (3), spectroscope (4), second lens (5), second diaphragm (6), charge-coupled image sensor (7) and catoptron (8), described first lens (3) are arranged on the beam projecting direction of light source (1), spectroscope (4) is arranged on the first lens (3) rear, the normal direction of the second lens (5) is mutually vertical with the normal direction of the first lens (3), described charge-coupled image sensor (7) is arranged on the rear side of the second lens (5), described catoptron (8) is arranged on the rear side of spectroscope (4).
2. interference optical detection system according to claim 1, is characterized in that: described first diaphragm (2) is arranged between light source (1) and the first lens (3).
3. interference optical detection system according to claim 2, is characterized in that: described second diaphragm (6) is arranged between the second lens (5) and charge-coupled image sensor (7).
4. interference optical detection system according to claim 1, is characterized in that: described system also comprises detecting device (9), is arranged on the opposite side that spectroscope (4) is relative with the second lens (5).
5. according to the interference optical detection system one of claim 1-4 Suo Shu, it is characterized in that: the light that described light source (1) sends is divided into two parts by spectroscope (4) after the first lens (3), a part arrives catoptron (8), and another part arrives detecting device (9).
6. interference optical detection system according to claim 5, is characterized in that: after the interference of light that described catoptron (8) and detecting device (9) reflect, arrive charge-coupled image sensor (7) afterwards by the second lens (5).
Priority Applications (1)
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CN201520204083.6U CN204679170U (en) | 2015-03-30 | 2015-03-30 | Interference optical detection system |
Applications Claiming Priority (1)
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CN201520204083.6U CN204679170U (en) | 2015-03-30 | 2015-03-30 | Interference optical detection system |
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CN204679170U true CN204679170U (en) | 2015-09-30 |
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CN201520204083.6U Expired - Fee Related CN204679170U (en) | 2015-03-30 | 2015-03-30 | Interference optical detection system |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109470152A (en) * | 2018-12-18 | 2019-03-15 | 华中科技大学 | A kind of cantilever beam microdisplacement measurement method and system |
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2015
- 2015-03-30 CN CN201520204083.6U patent/CN204679170U/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109470152A (en) * | 2018-12-18 | 2019-03-15 | 华中科技大学 | A kind of cantilever beam microdisplacement measurement method and system |
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C14 | Grant of patent or utility model | ||
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150930 Termination date: 20160330 |