CN204668333U - A kind of production equipment of anti-potential induction attenuation solar cell - Google Patents
A kind of production equipment of anti-potential induction attenuation solar cell Download PDFInfo
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- CN204668333U CN204668333U CN201520284830.1U CN201520284830U CN204668333U CN 204668333 U CN204668333 U CN 204668333U CN 201520284830 U CN201520284830 U CN 201520284830U CN 204668333 U CN204668333 U CN 204668333U
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- tank
- shower nozzle
- ozone
- drying box
- solar cell
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model discloses a kind of production equipment of anti-potential induction attenuation solar cell, comprise be arranged in order connection feeding area, etching groove, the first tank, alkali groove, the second tank, HF acid tank, the 3rd tank, drying tank and discharging area; Ozone machine is provided with between described drying tank and discharging area, described ozone machine comprises steam purge case, drying box, ozone oxidation case, annelaing pot, conveyer belt and blast pipe, described steam purge case, drying box, ozone oxidation case are arranged in order with annelaing pot and are connected and are connected with blast pipe, and conveyer belt is arranged on below described ozone machine.The utility model not only increases the yields of anti-PID battery, also improves the anti-PID performance of battery, and in addition, the passivation of fine and close silicon dioxide layer excellence can also improve the conversion efficiency of battery.
Description
Technical field
The utility model relates to technical field of solar batteries, relates to a kind of production equipment of anti-potential induction attenuation solar cell more specifically.
Background technology
Potential induction attenuation (PID) refers under high temperature, high humidity and high-tension effect, the phenomenon that solar module emergent power declines.Solar module there will be potential induction attenuation phenomenon in various degree for about 5 years under generating state, and this becomes the significant problem that current field of photovoltaic power generation faces.
The anti-PID technology of current battery end mainly concentrates on silicon dioxide/silicon nitride stack technology, and the anti-PID performance of this composite membrane has obtained the height accreditation of industry.In the preparation of silicon dioxide/silicon nitride lamination, silicon dioxide layer is emphasis, and it directly has influence on the anti-PID performance of assembly, battery outward appearance and conversion efficiency.The preparation of silicon dioxide layer has two kinds of methods: one utilizes PECVD technology, deposit silicon dioxide layer, but the silicon dioxide layer compactness of this technology is poor to N2O/SiH4 ionization, damages serious, also can reduce the conversion efficiency of battery to graphite boat and boiler tube; One is being gone to increase ozone-oxidizing device in PSG equipment, is being oxidized silicon chip surface, and form silicon dioxide layer, this technical costs is low, and technique is simple, and can also improve the conversion efficiency of battery, be the most important thing of current anti-PID technology.
Also there are some drawbacks in the anti-PID technology of ozone, as high in battery bad order ratio, and the compactness of silicon dioxide layer has much room for improvement, and also govern the wider popularization of this technology, therefore, is badly in need of improveing the anti-PID technology of ozone.
Utility model content
The purpose of this utility model is exactly deficiency in order to solve prior art and the production equipment of a kind of anti-potential induction attenuation solar cell provided.
In order to solve the problems of the technologies described above, the utility model is achieved through the following technical solutions: a kind of production equipment manufacturing anti-potential induction attenuation solar cell, comprise be arranged in order connection feeding area, etching groove, the first tank, alkali groove, the second tank, HF acid tank, the 3rd tank, drying tank and discharging area; Ozone machine is provided with between described drying tank and discharging area, described ozone machine comprises steam purge case, drying box, ozone oxidation case and annelaing pot, described steam purge case, drying box, ozone oxidation case and annelaing pot are arranged in order connection, below described ozone machine, be provided with conveyer belt, described steam purge case, drying box and ozone oxidation case are connected with blast pipe.
Preferably, described conveyer belt is that many rollers are formed, and roller is stainless steel.
Preferably, described steam purge case comprises water vapor generator, steam shower nozzle and cleaning casing; Described water vapor generator is arranged in cleaning casing, and described steam shower nozzle is communicated with described water vapor generator and the delivery outlet direction that casing is cleaned on the edge of steam shower nozzle is sprayed.
Preferably, described drying box is made up of hot blast generator, hot blast shower nozzle and drying box; Described hot blast generator is arranged in drying box, and described hot blast shower nozzle is communicated with described hot blast generator and the delivery outlet direction along drying box of hot blast shower nozzle is sprayed.
Preferably, described ozone oxidation case comprises ozone generation device, gas mixer, primary heater, mist shower nozzle and ozone oxidation casing; Described ozone generation device is connected with gas mixer and exports mist, and mist flows to the ejection of mist shower nozzle through primary heater and circulates in drying box delivery outlet direction and sprays.
Preferably, described mist shower nozzle is rotary mist shower nozzle.
Preferably, described annelaing pot comprises secondary heater and annealing casing, and described secondary heater is arranged in annealing casing, and secondary heater is to the direction thermal radiation of annealing casing delivery outlet.
Preferably, the below of described conveyer belt is also provided with tail gas recycle pipe.
Compared with prior art, the beneficial effect of the preparation method of a kind of anti-potential induction attenuation solar cell described in the utility model is: the utility model is by adding ozone machine, described ozone machine comprises steam purge case, drying box, ozone oxidation case and annelaing pot, described steam purge case, drying box, ozone oxidation case and annelaing pot are arranged in order connection, below described ozone machine, be provided with conveyer belt, described steam purge case, drying box and ozone oxidation case are connected with blast pipe.Rational in infrastructure, the stable performance of this ozone machine, silicon chip completes preparation technology successively on same production line, not only can improve the yields of anti-PID battery, the anti-PID performance of battery can also be improved, in addition, the passivation of fine and close silicon dioxide layer excellence can also improve the conversion efficiency of battery.
Accompanying drawing explanation
Fig. 1 be prior art remove PSG apparatus sketch;
Fig. 2 be the utility model execution mode remove PSG and ozone machine integrated equipment sketch;
Fig. 3 is the ozone machine structure chart of the utility model execution mode;
Fig. 4 is the steam purge box structure figure of the utility model execution mode;
Fig. 5 is the drying box structure chart of the utility model execution mode;
Fig. 6 is the ozone oxidation box structure figure of the utility model execution mode;
Fig. 7 is the annelaing pot structure chart of the utility model execution mode.
Embodiment
Be described below in detail embodiment of the present utility model, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Be exemplary below by the embodiment be described with reference to the drawings, be intended to for explaining the utility model, and can not be interpreted as restriction of the present utility model.
The production equipment according to the anti-potential induction attenuation solar cell of the utility model embodiment is specifically described below in conjunction with accompanying drawing.
Prior art remove PSG equipment as shown in Figure 1, silicon chip 3 experience is arranged in order the feeding area of connection, etching groove, the first tank, alkali groove, the second tank, HF acid tank, the 3rd tank, drying tank and discharging area, the PSG at positive for silicon chip 3 back side is removed, the p-n junction layer of silicon chip 3 periphery is removed.
The utility model is provided with ozone machine 100 between described drying tank and discharging area, it is integrated in described drying tank device therefor, apparatus sketch after integrated as shown in Figures 2 and 3, namely on the basis of existing technology, installs ozone machine 100 in the middle of drying tank and discharging area.
The utility model adds ozone machine 100 between described drying tank and discharging area, described ozone machine 100 comprises steam purge case 4, drying box 5, ozone oxidation case 6 and annelaing pot 7, described steam purge case 4, drying box 5, ozone oxidation case 6 and annelaing pot 7 are arranged in order connection, conveyer belt 2 is provided with below described ozone machine 100, described steam purge case 4, drying box 5 and ozone oxidation case 6 are connected with blast pipe, blast pipe (depending on not going out in figure) is steam purge case 4, drying box 5 and ozone oxidation case 6 supplement or increase certain gas, make silicon chip 3 through above-mentioned steam purge case 4, when drying box 5 and ozone oxidation case 6, can spray fast and effectively and shine on silicon chip 3 surface and make ozone Oxidation Treatment.Rational in infrastructure, the stable performance of this ozone machine 100, silicon chip 3 completes preparation technology successively on same production line, not only can improve the yields of anti-PID battery, the anti-PID performance of battery can also be promoted, in addition, the passivation of fine and close silicon dioxide layer excellence can also improve the conversion efficiency of battery.
The job step of the production equipment of anti-potential induction attenuation solar cell: a) making herbs into wool: form matte on silicon chip 3 surface, reduce sun light reflectance; B) p-n junction is prepared in thermal diffusion: utilize POCl3 that silicon chip 3 thermal diffusion is formed p-n junction; C) dephosphorization silex glass: by the silicon chip 3 dephosphorization silex glass after diffusion; D) ozone oxidation: prepare silicon dioxide layer on silicon chip 3 surface; E) antireflective film is prepared: prepare silicon nitride anti-reflection film in silicon chip 3 front; F) preparation of positive back metal electrode: utilize screen printing technique and sintering to form the positive back metal electrode with fine ohmic contact.
The constructive embodiment of concrete ozone machine 100 is as follows:
As shown in Figure 3, ozone machine 100 is made up of steam purge case 4, drying box 5, ozone oxidation case 6, annelaing pot 7, conveyer belt 2 and blast pipe the structure of ozone machine 100; Steam purge case 4, drying box 5, ozone oxidation case 6 are connected according to silicon chip 3 flow direction successively with annelaing pot 7, clean respectively, dry, oxidation and annealing in process to the silicon chip 3 flow through; Blast pipe is connected with ozone oxidation case 6 with described steam purge case 4, drying box 5; Conveyer belt 2, in the below of described steam purge case 4, drying box 5, ozone oxidation case 6, annelaing pot 7, is the transmission device of silicon chip 3.
Ozone machine 100 job step is as follows: 1) silicon chip 3 after dephosphorization silex glass is carried out steam purge; 2) the silicon chip 3 drying process after cleaning; 3) ozone Oxidation Treatment is carried out on dried silicon chip 3 surface; 4) finally by silicon chip 3 annealing in process.The utility model prepares silicon dioxide layer by ozone machine 100 integrated on PSG equipment, the method of preparation add the silicon chip 3 flow through is cleaned, dry, oxidation and annealing in process, silicon chip 3 is placed on conveyer belt 2, the dirty of silicon chip 3 surface is removed through steam purge, then carry out drying, for ozone oxidation provides a very clean substrate, the silicon chip 3 that can prevent direct oxidation from causing like this surface is dirty, the problem such as the marking and scuffing, can improve the yields of battery greatly; The oxidation reaction of ozone at high temperature completes, and the silicon dioxide layer compactness formed is improved greatly; Annelaing pot 7 is annealed further to silicon dioxide, and the compactness of silicon dioxide improves further, and the anti-PID performance of battery improves greatly.
Described conveyer belt 2 is that many rollers are formed, and roller is stainless steel, is the high temperature in order to mate in ozone machine 100 like this.
Steam purge case 4 is made up of water vapor generator 403, steam shower nozzle 402 and cleaning casing 401, as shown in Figure 4; The steam 404 that steam shower nozzle 402 sprays vertically is sprayed on silicon chip 3, carries out HIGH TEMPERATURE PURGE to silicon chip 3 surface, and unnecessary steam is drained by described tail gas recycle pipe 1; Steam purge silicon chip 3 time is 10-40s.
Drying box 5 is made up of hot blast generator 502, hot blast shower nozzle 503 and drying box 501 body, as shown in Figure 5; Hot blast 504 adopts nitrogen or filtered air; The hot blast of hot blast shower nozzle ejection is vertically sprayed on silicon chip 3, and by silicon chip 3 rapid draing, unnecessary hot blast is drained by described tail gas recycle pipe 1; Hot air temperature is 80-150 DEG C, and silicon chip 3 fast drying time is 5-10s.
Ozone oxidation case 6 is made up of ozone generation device 602, gas mixer 603, primary heater 604, rotary mist shower nozzle 605 and ozone oxidation casing 601, as shown in Figure 6; Ozone generation device forms ozone, ozone and nitrogen mix by gas mixer, primary heater heats ozone and nitrogen mixed gas, and the ozone after heating and nitrogen mixed gas 606 are sprayed on silicon chip 3 on the surface by rotary mist shower nozzle, and silicon chip 3 surface is oxidized; Unnecessary gas is drained by tail gas recycle pipe 1; Heater heating-up temperature is 100-150 DEG C, and the silicon chip 3 surface oxidized time is 20-80s; Rotary mist shower nozzle can 360 ° of rotations.
Annelaing pot 7 is made up of secondary heater 702 and annealing casing 701, as shown in Figure 7; Carry out thermal radiation 703 to the silicon chip 3 flowing through described annelaing pot 7 to process; The time of thermal radiation process is 20-100s, and annealing temperature is 150-250 DEG C.
Above-described is only preferred implementation of the present utility model; it should be pointed out that for the person of ordinary skill of the art, under the prerequisite not departing from the utility model creation design; can also make some distortion and improvement, these all belong to protection range of the present utility model.
Claims (8)
1. manufacture the production equipment of anti-potential induction attenuation solar cell, comprise be arranged in order connection feeding area, etching groove, the first tank, alkali groove, the second tank, HF acid tank, the 3rd tank, drying tank and discharging area; Its feature exists, ozone machine is provided with between described drying tank and discharging area, described ozone machine comprises steam purge case, drying box, ozone oxidation case and annelaing pot, described steam purge case, drying box, ozone oxidation case and annelaing pot are arranged in order connection, below described ozone machine, be provided with conveyer belt, described steam purge case, drying box and ozone oxidation case are connected with blast pipe.
2. a kind of production equipment manufacturing anti-potential induction attenuation solar cell according to claim 1, is characterized in that, described conveyer belt is that many rollers are formed, and roller is stainless steel.
3. a kind of production equipment manufacturing anti-potential induction attenuation solar cell according to claim 1, is characterized in that, described steam purge case comprises water vapor generator, steam shower nozzle and cleaning casing; Described water vapor generator is arranged in cleaning casing, and described steam shower nozzle is communicated with described water vapor generator and the delivery outlet direction that casing is cleaned on the edge of steam shower nozzle is sprayed.
4. a kind of production equipment manufacturing anti-potential induction attenuation solar cell according to claim 1, it is characterized in that, described drying box is made up of hot blast generator, hot blast shower nozzle and drying box; Described hot blast generator is arranged in drying box, and described hot blast shower nozzle is communicated with described hot blast generator and the delivery outlet direction along drying box of hot blast shower nozzle is sprayed.
5. a kind of production equipment manufacturing anti-potential induction attenuation solar cell according to claim 1, it is characterized in that, described ozone oxidation case comprises ozone generation device, gas mixer, primary heater, mist shower nozzle and ozone oxidation casing; Described ozone generation device is connected with gas mixer and exports mist, and mist flows to the ejection of mist shower nozzle through primary heater and circulates in drying box delivery outlet direction and sprays.
6. a kind of production equipment manufacturing anti-potential induction attenuation solar cell according to claim 5, is characterized in that, described mist shower nozzle is rotary mist shower nozzle.
7. a kind of production equipment manufacturing anti-potential induction attenuation solar cell according to claim 1, it is characterized in that, described annelaing pot comprises secondary heater and annealing casing, and described secondary heater is arranged in annealing casing, and secondary heater is to the direction thermal radiation of annealing casing delivery outlet.
8. a kind of production equipment manufacturing anti-potential induction attenuation solar cell according to claim 1, it is characterized in that, the below of described conveyer belt is also provided with tail gas recycle pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520284830.1U CN204668333U (en) | 2015-05-05 | 2015-05-05 | A kind of production equipment of anti-potential induction attenuation solar cell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520284830.1U CN204668333U (en) | 2015-05-05 | 2015-05-05 | A kind of production equipment of anti-potential induction attenuation solar cell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204668333U true CN204668333U (en) | 2015-09-23 |
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ID=54138688
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520284830.1U Withdrawn - After Issue CN204668333U (en) | 2015-05-05 | 2015-05-05 | A kind of production equipment of anti-potential induction attenuation solar cell |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105483832A (en) * | 2015-12-29 | 2016-04-13 | 辛煜 | Crystalline silicon surface oxidation device with anti-potential-induced degradation (PID) effect and method thereof |
| CN105990468A (en) * | 2015-02-11 | 2016-10-05 | 英利集团有限公司 | Silicon wafer production system |
| WO2021088836A1 (en) * | 2019-11-04 | 2021-05-14 | 苏州南北深科智能科技有限公司 | Solar cell curing and hydrogen passivation integrated machine |
-
2015
- 2015-05-05 CN CN201520284830.1U patent/CN204668333U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105990468A (en) * | 2015-02-11 | 2016-10-05 | 英利集团有限公司 | Silicon wafer production system |
| CN105483832A (en) * | 2015-12-29 | 2016-04-13 | 辛煜 | Crystalline silicon surface oxidation device with anti-potential-induced degradation (PID) effect and method thereof |
| CN105483832B (en) * | 2015-12-29 | 2018-01-19 | 辛煜 | The crystal silicon surface oxygenation device and its method of a kind of resisting potential induced degradation effect |
| WO2021088836A1 (en) * | 2019-11-04 | 2021-05-14 | 苏州南北深科智能科技有限公司 | Solar cell curing and hydrogen passivation integrated machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20150923 Effective date of abandoning: 20180109 |