CN204633636U - A kind of Miniature ultrasonic motor of static-electronic driving - Google Patents
A kind of Miniature ultrasonic motor of static-electronic driving Download PDFInfo
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- CN204633636U CN204633636U CN201520265228.3U CN201520265228U CN204633636U CN 204633636 U CN204633636 U CN 204633636U CN 201520265228 U CN201520265228 U CN 201520265228U CN 204633636 U CN204633636 U CN 204633636U
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Abstract
The utility model discloses a kind of Miniature ultrasonic motor of static-electronic driving, comprising: silica-based stator, rotor, bearing and elastic forepressure device, described silica-based stator upper surface is provided with a detent projection; One end of described rotor is sheathed in bearing and rotates, and described rotor contacts with the detent projection of described silica-based stator; Described elastic forepressure device applies precompression vertically in rotor, makes to produce normal pressure between rotor and silica-based stator, and described silica-based stator produces ultrasonic vibration under driving voltage effect, and the detent projection of silica-based stator is rotated by frictional force drives rotor.The features such as the utility model meets that volume is little, structure is simple, material and mature preparation process.
Description
Technical field
The utility model belongs to Ultrasonic Motor Techniques field, especially a kind of Miniature ultrasonic motor of the ultrasonic vibration based on electrostatic force excitation structure body.
Background technology
Compared with traditional electromagnetic machine, especially in small size (millimeter-centimetre) scope, ultrasound electric machine has shown the advantage of many uniquenesses, such as relatively high power density, large actuating force, with relative high efficiency.Traditional electromagnetic machine has become very difficult at the manufacture view of several millimeters of magnitude sizes, and its efficiency is only left a few percent (<8%) when several mm size, because it lacks enough strong magnetic field.Ultrasound electric machine utilizes ultrasonic vibration and interface friction-driven rotor (mover) motion of structure (stator), and its efficiency is basic and size is irrelevant, does not also have magnetic field problem.Even if ultrasound electric machine is at mm size, the feature of low speed and high-torque also can be maintained.As precision actuation element, ultrasound electric machine is applied to some new high-tech products such as mobile phone, the key element of medical image system and other micro medical equipment.Many new Driving technique, such as voice coil motor, piezoelectric actuator, ultrasound electric machine etc., there has been fast development, and in a lot of fields in succeed application.In these micro drives technology, ultrasound electric machine has demonstrated obvious superiority in movement travel, actuating force, driving precision and power consumption etc.
The thought utilizing the dither of structure and interface friction to export motion and power was suggested in the sixties in last century.The Toshiiku Sashida of Japan proposes rotary type travelling wave ultrasonic motor (US Patent No. 4562374A) the beginning of the eighties in last century, this type of ultrasound electric machine has larger moment and lower rotating speed, is widely used in camera and drives camera motion to realize automatic focus.NSK company (Seiko) developed the rotary-type standing-wave ultrasonic motor that a kind of diameter is 8mm in 1996, and for the vibrating time-telling (A.Iino of wrist-watch, K.Suzuki, M.Kasuga, M.Suzuki, T.Yamanaka.Development of a self-oscillating ultrasonic micro-motor and its application to a watch.Ultrasonics 38,54-59,2000.).Seiko company is by further modified node method minification, and developing diameter is 4.5mm, and thickness is the ultrasound electric machine of 2.5mm, and is applied to drive calendar in wrist-watch, makes mechanism simplifying.These ultrasound electric machines are all the ultrasonic vibrations utilizing piezoelectric ceramic to excite stator above, need in preparation process with epoxy resin, piezoelectric ceramic and metal structure bonded together and form stator, be difficult to further microminiaturization, and be difficult to ensure bonding quality conformance.
Utilizing micro-machined method on silicon chip, prepare Miniature ultrasonic motor likely makes motor microminiaturized further.The people such as G.-A.Racine utilize the method for silicon micromachined to prepare ultrasound micro-motor [G.-A.Racine, R.Luthier, and N.F.de Rooij, Hybrid ultrasonic micromachined motors, Proceedings of Micro Electro Mechanical Systems, 1993.], at silicon diaphragm (Si, thickness 9.2 μm) side deposited Zinc oxide film material (ZnO film, thickness 4.5 μm), ZnO/Si compound film sheet produces flexural vibrations under voltage effect, silicon diaphragm contacts with flex rotor (flexible tooth tilted having prepared by rotor) and exports unidirectional rotary motion.Make use of method for manufacturing thin film and silicon etching method in this motor stator preparation process, the motor size of preparation is 6 × 6 × 2mm3, and rotating speed is 600rpm, and moment is 50nNm.P.Muralt and M.-A.Dubois has prepared ultrasound micro-motor [the M.-A.Dubois and P.Muralt of similar operation principle, PZT thin film actuated elastic fin micromotor, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 45, 1169-1177, 1998.], utilize the PZT piezoelectric film material (Pb (Zr with more strong piezoelectricity energy, Ti) O3 is abbreviated as PZT, thickness 1 μm) replace ZnO material, silicon diaphragm is of a size of diameter 5.2mm, thickness 34 μm, test result shows that the vibration of PZT/Si compound film sheet is stronger than ZnO/Si compound film sheet, motor performance is obviously promoted, output torque 0.94 μ Nm, rotating speed 1020rpm.The people such as G.L.Smith and R.Q.Rudy have prepared the rotary type travelling wave ultrasonic electrical micro-machine [G.L.Smith based on PZT/Si compound film sheet, R.Q.Rudy, R.G.Polcawich, and D.L.DeVoe, Integrated thin-film piezoelectric traveling wave ultrasonic motors, Sensors and Actuators A 188, 305-311, 2012.R.Q.Rudy, G.L.Smith, D.L.DeVoe, and G.Polcawich, Millimeter-scale traveling wave rotary ultrasonic motors, Journal of Microelectromechanical Systems 24, 108-114, 2015.], experiment confirms produce the uniform row ripple of amplitude in stator, maximum (top) speed can reach 2300rpm.Although above research work demonstrates the Miniature ultrasonic motor based on PZT/Si compound film sheet, but (need in the preparation process of pzt thin film to carry out high-temperature heat treatment under an oxygen-containing atmosphere because high-quality PZT piezoelectric membrane is difficult to obtain, incompatible with Si semiconductor technique, and PZT causes film performance and consistency to be difficult to control due to the volatility of complicated component and lead element, in addition, the etching technics of pzt thin film also requires study), the performance of ultrasound electric machine and consistency are difficult to ensure.
Summary of the invention
Not enough for prior art, the purpose of this utility model is the Miniature ultrasonic motor providing a kind of static-electronic driving, silicon chip is prepared the stator of silicon diaphragm-cavity-silicon base capacity plate antenna structure, the interelectrode electrostatic attraction of capacity plate antenna two is utilized to excite the ultrasonic resonance of motor stator silicon diaphragm, and by the friction output torque between fixed/rotor, do not need to utilize piezoelectric, the consistency of performance of ultrasound micro-motor can be improved.
For achieving the above object, the Miniature ultrasonic motor of a kind of static-electronic driving of the present utility model, comprising: silica-based stator, rotor, bearing and elastic forepressure device, and described silica-based stator upper surface is provided with a detent projection; One end of described rotor is sheathed in bearing and rotates, and described rotor contacts with the detent projection of described silica-based stator; Described elastic forepressure device applies precompression vertically in rotor, makes to produce normal pressure between rotor and silica-based stator, and described silica-based stator produces ultrasonic vibration under driving voltage effect, and the detent projection of silica-based stator is rotated by frictional force drives rotor.
Preferably, described silica-based stator is a complex structure body, its substrate is low-resistivity silicon chip, the upper surface of substrate etches an annular groove, the upper surface of substrate and annular groove inner surface cover silicon dioxide insulating layer, the upper surface bonding of a high resistivity silicon diaphragm and substrate closed pockets forms vacuum cavity, described high resistivity silicon diaphragm upper surface is provided with the first metal electrode and described detent projection.
Preferably, form parallel plate capacitor between the substrate of described silica-based stator, vacuum cavity, the first metal electrode, under alternating voltage effect, the electrostatic force changed between the first metal electrode and substrate causes the vibration of silicon diaphragm.
Preferably, there is the flexural vibrations row ripple along the circumferential direction propagated in the annular silicon diaphragm on the vacuum cavity of described silica-based stator, drive described rotor to rotate by contact friction.
The beneficial effects of the utility model:
The utility model adopts silicon chip to prepare the stator of Miniature ultrasonic motor as base material, the interelectrode electrostatic force of parallel plate capacitor two is utilized to excite the ultrasonic vibration of stator structure body, the materials and process of the present art maturation is utilized in the preparation process of stator, the size of motor can be reduced further, and the consistency of performance of motor can be ensured.
Accompanying drawing explanation
Fig. 1 illustrates the structural representation of the Miniature ultrasonic motor of static-electronic driving of the present utility model.
Fig. 2 illustrates the shaft side figure of silica-based stator structure in the utility model.
Fig. 3 illustrates the profile of silica-based stator structure in the utility model.
Fig. 4 illustrates the malformation figure of the 3rd rank flexural vibration mode of the free annular section of silicon diaphragm in the utility model.
Fig. 5 illustrates the 3rd rank flexural vibration mode Z-direction displacement cloud atlas of the free annular section of silicon diaphragm in the utility model.
Embodiment
For the ease of the understanding of those skilled in the art, be further described the utility model below in conjunction with embodiment and accompanying drawing, the content that execution mode is mentioned is not to restriction of the present utility model.
With reference to shown in Fig. 1, the Miniature ultrasonic motor 1 of a kind of static-electronic driving of the present utility model, comprising: silica-based stator 2, rotor 3, bearing 4 and elastic forepressure device 5, and described silica-based stator 2 upper surface is provided with the equally distributed detent projection 24 of a circle; One end of described rotor 3 is sheathed in bearing 4 and rotates, and described rotor 3 contacts with the detent projection 24 of described silica-based stator 2; Described elastic forepressure device 5 applies precompression F vertically in rotor 3, make to produce normal pressure between rotor 3 and silica-based stator 2, described silica-based stator 2 produces ultrasonic vibration under driving voltage effect, and the detent projection 24 of silica-based stator 2 is rotated by frictional force drives rotor 3.
Shown in Fig. 2-Fig. 3, described silica-based stator 2 is a complex structure body, its substrate 21 is low-resistivity silicon chip, and the upper surface of substrate 21 etches an annular groove, utilizes oxidizing process to prepare layer of silicon dioxide (SiO at the upper surface of substrate and annular groove inner surface
2) insulating barrier 22, the upper surface bonding of high resistivity silicon diaphragm 23 and substrate 21 closed pockets forms vacuum cavity, described high resistivity silicon diaphragm 23 upper surface is provided with described detent projection 24 and the first metal electrode 25, is provided with the second metal electrode 26 for welding lead at the lower surface of low-resistivity silicon base 21.Form parallel plate capacitor between described low-resistivity silicon base 21, vacuum cavity, the first metal electrode 25, under alternating voltage effect, the electrostatic force changed between the first metal electrode 25 and substrate 21 causes the vibration of the free part of high resistivity silicon diaphragm 23.The first described metal electrode 25 is divided into 12 circumferentially equally distributed sector electrode 25a, 25b, 25c, 25d, 25e, 25f, 25g, 25h, 25i, 25j, 25k, 25l, and is connected to 12 pads of periphery by lead-in wire.The shape setting of described first metal electrode 25 is the 3rd rank flexural vibration modes (as shown in Figure 4, Figure 5) in order to excite the free part (vacuum cavity upper annular area) of high resistivity silicon diaphragm 23.The AC drive voltage frequency f that described ultrasound electric machine 1 applies when working equals or close to the 3rd rank flexural vibration mode natural frequency of high resistivity silicon diaphragm 23
the applying mode of driving voltage is: the second metal electrode 26 ground connection, and electrode 25a, 25b, 25c, 25d25l upper applying progressive phase or the alternating voltage of 90 ° of successively decreasing (namely apply voltage V respectively
acsin (2 π ft)+V
bias, V
accos (2 π ft)+V
bias,-V
acsin (2 π ft)+V
bias,-V
accos (2 π ft)+V
bias...-V
accos (2 π ft)+V
bias, or V
acsin (2 π ft)+V
bias,-V
accos (2 π ft)+V
bias,-V
acsin (2 π ft)+V
bias, V
accos (2 π ft)+V
bias... V
accos (2 π ft)+V
bias, wherein V
biasfor bias voltage), the flexural vibrations row ripple that will have clockwise in the free annular section of high resistivity silicon diaphragm 23 or counterclockwise propagate, silica-based stator 2 is counterclockwise or turn clockwise by drivings rotor 3 by contact friction.
The utility model embody rule approach is a lot; the above is only preferred implementation of the present utility model; should be understood that; for those skilled in the art; under the prerequisite not departing from the utility model principle; can also make some improvement, these improvement also should be considered as protection range of the present utility model.
Claims (4)
1. a Miniature ultrasonic motor for static-electronic driving, is characterized in that, comprising: silica-based stator, rotor, bearing and elastic forepressure device, and described silica-based stator upper surface is provided with a detent projection; One end of described rotor is sheathed in bearing and rotates, and described rotor contacts with the detent projection of described silica-based stator; Described elastic forepressure device applies precompression vertically in rotor, makes to produce normal pressure between rotor and silica-based stator, and described silica-based stator produces ultrasonic vibration under driving voltage effect, and the detent projection of silica-based stator is rotated by frictional force drives rotor.
2. the Miniature ultrasonic motor of static-electronic driving according to claim 1, it is characterized in that, described silica-based stator is a complex structure body, its substrate is low-resistivity silicon chip, the upper surface of substrate etches an annular groove, the upper surface of substrate and annular groove inner surface cover silicon dioxide insulating layer, the upper surface bonding of a high resistivity silicon diaphragm and substrate closed pockets forms vacuum cavity, described high resistivity silicon diaphragm upper surface is provided with the first metal electrode and described detent projection.
3. the Miniature ultrasonic motor of static-electronic driving according to claim 2, it is characterized in that, parallel plate capacitor is formed between the substrate of described silica-based stator, vacuum cavity, the first metal electrode, under alternating voltage effect, the electrostatic force changed between the first metal electrode and substrate causes the vibration of silicon diaphragm.
4. the Miniature ultrasonic motor of static-electronic driving according to claim 2, is characterized in that, has the flexural vibrations row ripple along the circumferential direction propagated, drive described rotor to rotate by contact friction in the annular silicon diaphragm on the vacuum cavity of described silica-based stator.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104883089A (en) * | 2015-04-28 | 2015-09-02 | 南京航空航天大学 | Electrostatic force-driven miniature ultrasonic motor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104883089A (en) * | 2015-04-28 | 2015-09-02 | 南京航空航天大学 | Electrostatic force-driven miniature ultrasonic motor |
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