CN204613594U - Stripper changes system - Google Patents
Stripper changes system Download PDFInfo
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- CN204613594U CN204613594U CN201520311377.9U CN201520311377U CN204613594U CN 204613594 U CN204613594 U CN 204613594U CN 201520311377 U CN201520311377 U CN 201520311377U CN 204613594 U CN204613594 U CN 204613594U
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Abstract
The utility model discloses a kind of stripper and change system, belong to display technology field.Stripper is changed system and is comprised: acquisition module, detection module and replacing module, and described detection module is connected with described replacing module, and described acquisition module is for obtaining the stripper in peel container; Whether described detection module meets preset standard for the quality detecting described stripper; Described replacing module is used for when the quality of described stripper does not meet preset standard, changes the stripper in described peel container.The utility model solves the lower problem of the service efficiency of stripper, achieves the effect of the service efficiency that improve stripper, and the utility model is used for the replacing of stripper.
Description
Technical field
The utility model relates to field of display, and particularly a kind of stripper changes system.
Background technology
TFT is (English: Thin Film Transistor; Chinese: thin film transistor (TFT))-LCD (English: LiquidCrystal Display; Chinese: liquid crystal display) comprise substrate and be formed at the TFT-LCD array on substrate, the technique that substrate is formed this TFT-LCD array comprises: coating photoresist, exposure, development, etching and stripping photoresist.
When stripping photoresist, the substrate this being coated with photoresist is needed to be placed in the peel container that stripper is housed, under the effect of stripper, photoresist on this substrate and stripper generation chemical reaction, and be dissolved in this stripper, this photoresist is come off from substrate, completes photoresist from the stripping substrate.In the production run of TFT-LCD, need stripping photoresist repeatedly, after photoresist and stripper generation chemical reaction, the concentration of stripper can reduce, and the stripping ability of stripper is declined.When the stripper stripping photoresist using this stripping ability to decline, only by part photoresist lift off, namely substrate can remain photoresist, after formation TFT-LCD array, the performance of TFT-LCD device can be affected.So, need the stripper by stripping ability declines to be replaced by the standard compliant standard stripper of stripping ability, in prior art, usually termly stripper is replaced by standard stripper.
Due to every day, the consumption of this stripper is different, and uses the number of times of this photoresist different, if termly stripper is replaced by standard stripper, then can cause the problem that the frequency of failing to change stripper in time or change stripper is higher; Change this stripper in time if fail, the stripping ability decline of stripper can affect the stripping of photoresist, affects the performance of TFT-LCD device; If the frequency changing stripper is higher, then cause the waste of stripper.Therefore, the service efficiency of stripper is lower.
Utility model content
In order to the problem that the service efficiency solving stripper is lower, the utility model provides a kind of stripper and changes system.Described technical scheme is as follows:
On the one hand, provide a kind of stripper and change system, described stripper is changed system and is comprised: acquisition module, detection module and replacing module, and described detection module is connected with described replacing module,
Described acquisition module is for obtaining the stripper in peel container;
Whether described detection module meets preset standard for the quality detecting described stripper;
Described replacing module is used for when the quality of described stripper does not meet preset standard, changes the stripper in described peel container.
Optionally, described acquisition module comprises: lead-out unit and detection groove, and described detection groove is communicated with described peel container,
Described lead-out unit is used for the stripper in described peel container to export in described detection groove;
The stripper that described detection groove is derived for containing described lead-out unit.
Optionally, the quality of described stripper comprises: the cleanliness factor of described stripper,
Described detection module is used for:
Whether the cleanliness factor detecting described stripper meets cleanliness factor standard;
If the cleanliness factor of described stripper does not meet described cleanliness factor standard, then determine that the quality of described stripper does not meet preset standard.
Optionally, the quality of described stripper also comprises: the viscosity of described stripper,
Described detection module also for:
Whether the viscosity detecting described stripper meets viscosity criterion;
If the viscosity of described stripper does not meet described viscosity criterion, and the cleanliness factor of described stripper does not meet described cleanliness factor standard, then determine that the quality of described stripper does not meet preset standard.
Optionally, described detection module comprises: the first controller, light signal send instrument and light signal receiving instrument, described light signal transmission instrument and described light signal receiving instrument are separately positioned on the both sides of described detection groove, described first controller sends instrument with described light signal respectively and described light signal receiving instrument is connected
Described light signal sends instrument for generating light signal, and makes described light signal be sent to described light signal receiving instrument through described detection groove;
Described light signal receiving instrument sends the described light signal of instrument transmission for receiving described light signal;
The intensity of the light signal that described first controller receives for the intensity and described light signal receiving instrument obtaining the light signal of described light signal transmission instrument transmission;
The intensity of the light signal that described first controller also receives with described light signal receiving instrument for the intensity sending the light signal that instrument sends according to described light signal, the intensity difference of calculating light signal;
Described first controller is also for intensity difference and the preset strength extent of more described light signal;
Described first controller is also for judging according to intensity difference comparative result whether the cleanliness factor of described stripper meets described cleanliness factor standard.
Optionally, described first controller is specifically for being greater than described preset strength difference during at the intensity difference of described light signal, judge that the cleanliness factor of described stripper does not meet described cleanliness factor standard;
Described replacing module specifically for the difference of the intensity difference and described preset strength difference that calculate described light signal, and changes the stripper in described peel container according to the intensity difference of described light signal and the difference of described preset strength difference.
Optionally, described detection module comprises: second controller,
Described second controller to flow to the flowing time of the second place from the primary importance of described detection groove for obtaining described stripper;
Described second controller is also for the length of more described flowing time and Preset Time;
Described second controller is also for judging according to time comparative result whether the viscosity of described stripper meets viscosity criterion.
Optionally, described detection module also comprises: first sensor and the second sensor, described first sensor is arranged on the described primary importance corresponding position outside described detection groove, the described second place corresponding position of described second sensor setting outside described detection groove, described second controller is connected with described first sensor and described second sensor respectively
Described second controller specifically for:
Obtain described first sensor and sense that described stripper flows through the time of described primary importance;
Obtain described second sensor sensing flows through described second place time to described stripper;
Described second sensor sensing is flow through time of the described second place to described stripper and described first sensor senses that described stripper flows through the difference of the time of described primary importance as described flowing time.
Optionally, if described second controller is also greater than described Preset Time for described flowing time, then judge that the viscosity of described stripper does not meet described viscosity criterion;
Described replacing module is not also for meeting described viscosity criterion in the viscosity of described stripper, and the cleanliness factor of described stripper is not when meeting described cleanliness factor standard, calculate the mistiming of described flowing time and described Preset Time, and according to mistiming of described flowing time and described Preset Time, change the stripper in described peel container.
Optionally, described system also comprises:
Alarm module, for not meeting described viscosity criterion in the viscosity of described stripper, and when the cleanliness factor of described stripper meets described cleanliness factor standard, carries out warning instruction.
Optionally, described replacing module comprises tapping valve and liquid feed valve, described tapping valve and described liquid feed valve are all arranged on described peel container, when described tapping valve is opened, stripper in described peel container can be discharged, when described liquid feed valve is opened, the stripper meeting preset standard can flow into described peel container;
Described replacing module, specifically for when the quality of described stripper does not meet preset standard, is opened described tapping valve and described liquid feed valve, is carried out the replacing of the stripper in described peel container.
The utility model provides a kind of stripper and changes system, the quality of stripper in peel container is detected by detection module, change the replacing that module carries out stripper in peel container, if the quality of stripper meets preset standard, then do not carry out replacing stripper, if the quality of stripper does not meet preset standard, then the stripper in peel container is changed.Avoid in the standard compliant situation of the quality of this stripper, stripper is changed to the waste of the stripper caused, with in the non-compliant situation of the quality of stripper, the problem that the peeling effect not changing the stripper that stripper causes reduces, improves the service efficiency of stripper.
Should be understood that, it is only exemplary and explanatory that above general description and details hereinafter describe, and can not limit the utility model.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme in the utility model embodiment, below the accompanying drawing used required in describing embodiment is briefly described, apparently, accompanying drawing in the following describes is only embodiments more of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the application scenarios figure of a kind of peel container that the utility model embodiment provides;
Fig. 2 is the structural representation of a kind of stripper replacing system that the utility model embodiment provides;
Fig. 3 is the structural representation of a kind of acquisition module that the utility model embodiment provides;
Fig. 4 is the structural representation of the another kind of stripper replacing system that the utility model embodiment provides;
Fig. 5 is the structural representation of another stripper replacing system that the utility model embodiment provides.
By above-mentioned accompanying drawing, illustrate the embodiment that the utility model is clear and definite more detailed description will be had hereinafter.These accompanying drawings and text description be not in order to limited by any mode the utility model design scope, but by reference to specific embodiment for those skilled in the art illustrate concept of the present utility model.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearly, below in conjunction with accompanying drawing, the utility model embodiment is described in further detail.
As shown in Figure 1, the utility model embodiment provides a kind of application scenarios figure of peel container 0, stripper 1 is arranged in peel container 0, when peeling off the photoresist in substrate (not shown in figure 1), need the substrate being coated with photoresist to be placed in the peel container 0 that stripper 1 is housed, under the effect of stripper 1, there is chemical reaction in the photoresist on substrate and stripper 1, and be dissolved in stripper 1, photoresist is come off from substrate, completes photoresist from the stripping substrate.
The utility model embodiment provides a kind of stripper and changes system 00, and as shown in Figure 2, this stripper is changed system 00 and can be comprised: acquisition module 001, detection module 002 and replacing module 003, detection module 002 is connected with replacing module 003.
This acquisition module 001 is for obtaining the stripper in peel container.Whether detection module 002 meets preset standard for the quality detecting stripper.Change module 003 for when the quality of stripper does not meet preset standard, change the stripper in peel container.
In sum, due in the stripper replacing system that the utility model embodiment provides, the quality of stripper in peel container is detected by detection module, change the replacing that module carries out stripper in peel container, if the quality of stripper meets preset standard, then do not carry out replacing stripper, if the quality of stripper does not meet preset standard, then the stripper in peel container is changed.Avoid in the standard compliant situation of the quality of this stripper, stripper is changed to the waste of the stripper caused, with in the non-compliant situation of the quality of stripper, the problem that the peeling effect not changing the stripper that stripper causes reduces, improves the service efficiency of stripper.
As shown in Figure 3, this acquisition module 001 can comprise: lead-out unit 0011 and detection groove 0012, this lead-out unit 0011 detects in groove 0012 for being exported to by the stripper in peel container.Detect the stripper that groove 0012 is derived for containing lead-out unit 0011.Example, this lead-out unit 0011 can be motor, stripper in peel container can be urged to when the motor is energized and detect in groove 0012, the material of this detection groove 0012 can be transparent material, and the two ends of this detection groove 0012 can connect peel container respectively.
Concrete, the quality of stripper can comprise: the cleanliness factor of stripper.Due in the process of stripping photoresist, photoresist is dissolved in stripper, make in stripper, to be mingled with photoresist, the cleanliness factor of stripper be less than stripping photoresist before the cleanliness factor of stripper, namely more impurity is mingled with in stripper, after the cleanliness factor of stripper diminishes, when using stripper to peel off the photoresist on substrate again, the peeling effect of stripper is poor.When the quality of stripper comprises the cleanliness factor of stripper, detection module 002 may be used for: whether the cleanliness factor detecting stripper meets cleanliness factor standard, if the cleanliness factor of stripper does not meet cleanliness factor standard, then determine that the quality of stripper does not meet preset standard.
The quality of this stripper can also comprise: the viscosity of stripper.Due in the process of stripping photoresist, if the viscosity of stripper does not meet viscosity criterion, then, when using stripper to peel off the photoresist on substrate, peeling effect is poor.When the quality of stripper comprises the viscosity of stripper, detection module 002 can also be used for: whether the viscosity detecting stripper meets viscosity criterion, if the viscosity of stripper does not meet viscosity criterion, and the cleanliness factor of stripper does not meet cleanliness factor standard, then determine that the quality of stripper does not meet preset standard.
In sum, due in the stripper replacing system that the utility model embodiment provides, the quality of stripper in peel container is detected by detection module, change the replacing that module carries out stripper in peel container, if the quality of stripper meets preset standard, then do not carry out replacing stripper, if the quality of stripper does not meet preset standard, then the stripper in peel container is changed.Avoid in the standard compliant situation of the quality of this stripper, stripper is changed to the waste of the stripper caused, with in the non-compliant situation of the quality of stripper, the problem that the peeling effect not changing the stripper that stripper causes reduces, improves the service efficiency of stripper.
As shown in Figure 4, the utility model embodiment provides another kind of stripper and changes system 00, and this stripper is changed system 00 and can be comprised: acquisition module 001, detection module 002 and replacing module 003, detection module 002 is connected with replacing module 003.This acquisition module 001 can comprise: lead-out unit 0011 and detection groove 0012.This detection module 002 can comprise: the first controller 0021, light signal send instrument 0022 and light signal receiving instrument 0023, light signal sends instrument 0022 and light signal receiving instrument 0023 can be separately positioned on the both sides detecting groove 0012, and the first controller 0021 sends instrument 0022 with light signal respectively and is connected with light signal receiving instrument 0023.The material detecting groove 0012 can be transparent material, and two ends a with b of this detection groove 0012 can be connected peel container respectively.This first controller 0021 can be that programmable logic controller (PLC) is (English: Programmable Logic Controller; Be called for short: PLC).
Light signal sends instrument 0022 for generating light signal, and light signal is sent to light signal receiving instrument 0023 through detecting groove 0012.Light signal receiving instrument 0023 sends the light signal of instrument 0022 transmission for receiving optical signals.Light signal is being sent in the process of this light signal receiving instrument 0023 because light signal sends instrument 0022, light signal can through detecting groove 0012, stripper is positioned at this detection groove 0012, light signal is when through this detection groove 0012, the stripper detected in groove 0012 stops this light signal, and the intensity making light signal send the light signal that instrument 0022 sends is more than or equal to the intensity of the light signal that this light signal receiving instrument 0023 receives.Example, if the intensity that this light signal sends the light signal that instrument 0022 generates is 100%, when light signal is sent to this light signal receiving instrument 0023 through this detection groove 0012, the intensity of the light signal that this light signal receiving instrument 0023 receives can be 50%.
The intensity of the light signal that the first controller 0021 receives for the intensity and light signal receiving instrument 0023 obtaining the light signal of light signal transmission instrument 0022 transmission.The intensity of the light signal that the first controller 0021 also receives for the intensity and the light signal receiving instrument 0023 that send the light signal that instrument 0022 sends according to light signal, the intensity difference of calculating light signal.Preset strength difference is provided with in this first controller 0021, when the quality detecting the stripper in groove 0012 meets preset standard, the intensity difference of the light signal that the intensitometer that the first controller 0021 sends according to the light signal obtained the light signal that the intensity of the light signal that instrument 0022 sends and light signal receiving instrument 0023 receive calculates equals preset strength difference.After the intensity difference determining light signal, first controller 0021 is also for comparing intensity difference and the preset strength extent of light signal, example, intensity difference and the preset strength difference of the light signal that the first controller 0021 can be calculated do difference, if the difference of the intensity difference of light signal and preset strength difference is greater than zero, then judge that the intensity difference of light signal is greater than preset strength difference; If the difference of the intensity difference of light signal and preset strength difference is less than zero, then judge that the intensity difference of light signal is less than preset strength difference; If the difference of the intensity difference of light signal and preset strength difference equals zero, then judge that the intensity difference of light signal equals preset strength difference.
After the intensity difference and preset strength extent of relatively light signal, this first controller 0021 can also be used for judging whether the cleanliness factor of stripper meets cleanliness factor standard according to intensity difference comparative result.Concrete, when the intensity difference of light signal is greater than preset strength difference, the first controller 0021 specifically may be used for judging that the cleanliness factor of stripper does not meet cleanliness factor standard.Now, change module 003 and specifically may be used for calculating the intensity difference of light signal and the difference of preset strength difference, and change the stripper in peel container according to the intensity difference of light signal and the difference of preset strength difference.
In sum, due in the stripper replacing system that the utility model embodiment provides, the quality of stripper in peel container is detected by detection module, change the replacing that module carries out stripper in peel container, if the quality of stripper meets preset standard, then do not carry out replacing stripper, if the quality of stripper does not meet preset standard, then the stripper in peel container is changed.Avoid in the standard compliant situation of the quality of this stripper, stripper is changed to the waste of the stripper caused, with in the non-compliant situation of the quality of stripper, the problem that the peeling effect not changing the stripper that stripper causes reduces, improves the service efficiency of stripper.
As shown in Figure 5, the utility model embodiment provides another stripper and changes system 00, this stripper is changed system 00 and can be comprised: acquisition module 001, detection module 002, replacing module 003 and alarm module 004, detection module 002 is connected with replacing module 003, and this alarm module 004 is connected with this detection module 002.
This acquisition module 001 can comprise: lead-out unit 0011 and detection groove 0012, two ends a with b of this detection groove 0012 can be connected peel container respectively.This detection module 002 can comprise: the first controller 0021, light signal send instrument 0022 and light signal receiving instrument 0023, light signal sends instrument 0022 and light signal receiving instrument 0023 can be separately positioned on the both sides detecting groove 0012, and the first controller 0021 sends instrument 0022 with light signal respectively and is connected with light signal receiving instrument 0023.This detection module 002 can also comprise: second controller 0024, first sensor 0025 and the second sensor 0026, first sensor 0025 is arranged on the primary importance A corresponding position detected outside groove 0012, second sensor 0026 is arranged on the second place B corresponding position detected outside groove 0012, and second controller 0024 is connected with first sensor 0025 and the second sensor 0026 respectively.This second controller 0024 can be programmable logic controller (PLC).
It should be noted that, this first controller 0021, light signal send the detailed process whether cleanliness factor that instrument 0022 and light signal receiving instrument 0023 detect stripper meets cleanliness factor standard, can send with reference to the first controller 0021 in a upper embodiment, light signal the detailed process whether cleanliness factor that instrument 0022 and light signal receiving instrument 0023 detect stripper meet cleanliness factor standard, the utility model embodiment does not repeat at this.
This second controller 0024 is for obtaining stripper from the flowing time detecting the primary importance A of groove 0012 and flow to second place B.Concrete, stripper can flow detecting the direction along primary importance A to second place B in groove 0012, when stripper appears at the primary importance A detecting groove 0012, this first sensor 0025 can generate the first heat transfer agent, when stripper appears at the second place B detecting groove 0012, this second sensor 0026 can generate the second heat transfer agent.This second controller 0024 can detect the time that this first sensor 0025 and this second sensor 0026 generate first sensor information and the second heat transfer agent respectively, and determine that this first sensor 0025 generates the mistiming that the first heat transfer agent and the second sensor 0026 generate the second heat transfer agent, using the flowing time of this mistiming as this stripper.Sense that stripper flows through time of second place B and first sensor 0025 senses that stripper flows through the difference of the time of primary importance as flowing time by the second sensor 0026.Be provided with Preset Time in this second controller 0024, the stripper mistiming flow through between this first sensor 0025 and this second sensor 0026 that quality meets preset standard is Preset Time.
After this second controller 0024 obtains the flowing time of this stripper, this second controller 0024 is also for comparing the length of flowing time and Preset Time.Second controller 0024 is also for judging according to time comparative result whether the viscosity of stripper meets viscosity criterion.If second controller 0024 is also greater than Preset Time for flowing time, then judge that the viscosity of stripper does not meet viscosity criterion.Change module 003 and also do not meet viscosity criterion for the viscosity at stripper, and the cleanliness factor of stripper is not when meeting cleanliness factor standard, calculate the mistiming of flowing time and Preset Time, and according to mistiming of flowing time and Preset Time, the stripper in replacing peel container.In practical application, this first controller 0021 and this second controller 0024 can be same controller, and this same controller has the function of the first controller 0021 and this second controller 0024 simultaneously.
This alarm module 004 does not meet viscosity criterion for the viscosity at stripper, and when the cleanliness factor of stripper meets cleanliness factor standard, carries out warning instruction.
Further, this replacing module 003 can comprise tapping valve (not shown in Fig. 5) and liquid feed valve (not shown in Fig. 5), this tapping valve and liquid feed valve all can be arranged on peel container, when tapping valve is opened, stripper in peel container can be discharged, when liquid feed valve is opened, the stripper meeting preset standard can flow into peel container.Change module 003 specifically to may be used for, when the quality of stripper does not meet preset standard, opening tapping valve and liquid feed valve, carry out the replacing of the stripper in peel container.
This stripper is changed system and can effectively be changed the stripper in peel container.
Concrete, the stripper in this peel container can export in this detection groove by lead-out unit.Light signal sends instrument can generate light signal, and light signal is sent to light signal receiving instrument through this detection groove.Because stripper is positioned at this detection groove, light signal is passing through this detection groove, the stripper detected in groove can stop light signal, and the intensity of the light signal that light signal receiving instrument is received is less than or equal to the intensity that light signal sends the light signal that instrument sends.The intensity of the light signal that the intensity that the first controller can obtain the light signal that this light signal transmission instrument sends receives with this light signal receiving instrument, and the intensity of the light signal received according to intensity and light signal receiving instrument that light signal sends the light signal that instrument sends, the intensity difference of calculating light signal.After the intensity difference determining light signal, the first controller can compare intensity difference and the preset strength extent of light signal, if the intensity difference of light signal is greater than preset strength difference, then the first controller can judge that the cleanliness factor of stripper does not meet cleanliness factor standard.If the intensity difference of light signal is less than or equal to preset strength difference, then the first controller can judge that the cleanliness factor of stripper meets cleanliness factor standard.
After the first controller judges that the cleanliness factor of stripper does not meet cleanliness factor standard, this replacing module can calculate the intensity difference of light signal and the difference of preset strength difference, and changes the stripper in peel container according to the intensity difference of light signal and the difference of preset strength difference.Concrete, this replacing module can open tapping valve and liquid feed valve, carries out the replacing of the stripper in peel container, when tapping valve is opened, stripper in peel container can be discharged, and when liquid feed valve is opened, the stripper meeting preset standard can flow into peel container.If the cleanliness factor of stripper meets cleanliness factor standard, then do not carry out the replacing of stripper in peel container.
When stripper flows to the first position detected in groove, first sensor can generate the first heat transfer agent, when stripper flows to the second position detected in groove, second sensor can generate the second heat transfer agent, this second controller can obtain the time that this first sensor and this second sensor generate the first heat transfer agent and the second heat transfer agent respectively, and the second sensor is generated time of the second heat transfer agent and first sensor generates the difference of the time of the first heat transfer agent as flowing time.After this second controller obtains the flowing time of this stripper, this second controller can compare the length of flowing time and Preset Time, and judges whether the viscosity of stripper meets viscosity criterion according to time comparative result.Concrete, if flowing time is greater than Preset Time, then this second controller judges that the viscosity of stripper does not meet viscosity criterion; If flowing time is less than or equal to Preset Time, then this second controller judges that the viscosity of stripper meets viscosity criterion.
If testing result is the viscosity of stripper do not meet viscosity criterion, and the cleanliness factor of stripper does not meet cleanliness factor standard, then this replacing module can calculate the mistiming of flowing time and Preset Time, and according to mistiming of flowing time and Preset Time, changes the stripper in peel container.Concrete, this replacing module can open tapping valve and liquid feed valve, carries out the replacing of the stripper in peel container, when tapping valve is opened, stripper in peel container can be discharged, and when liquid feed valve is opened, the stripper meeting preset standard can flow into peel container.If testing result is the viscosity of stripper do not meet viscosity criterion, and the cleanliness factor of stripper meets cleanliness factor standard, then alarm module can carry out warning instruction, and the viscosity of prompting stripper does not meet viscosity criterion.If testing result is the viscosity of stripper meet viscosity criterion, and the cleanliness factor of stripper meets cleanliness factor standard, then do not carry out the replacing of stripper in peel container.
In sum, due in the stripper replacing system that the utility model embodiment provides, the quality of stripper in peel container is detected by detection module, change the replacing that module carries out stripper in peel container, if the quality of stripper meets preset standard, then do not carry out replacing stripper, if the quality of stripper does not meet preset standard, then the stripper in peel container is changed.Avoid in the standard compliant situation of the quality of this stripper, stripper is changed to the waste of the stripper caused, with in the non-compliant situation of the quality of stripper, the problem that the peeling effect not changing the stripper that stripper causes reduces, improves the service efficiency of stripper.
Above-mentioned all alternatives, can adopt and combine arbitrarily formation embodiment of the present utility model, this is no longer going to repeat them.
The foregoing is only preferred embodiment of the present utility model, not in order to limit the utility model, all within spirit of the present utility model and principle, any amendment done, equivalent replacement, improvement etc., all should be included within protection domain of the present utility model.
Claims (6)
1. stripper changes a system, it is characterized in that, described stripper is changed system and comprised: acquisition module, detection module and replacing module, and described detection module is connected with described replacing module,
Described acquisition module is for obtaining the stripper in peel container;
Whether described detection module meets preset standard for the quality detecting described stripper;
Described replacing module is used for when the quality of described stripper does not meet preset standard, changes the stripper in described peel container.
2. system according to claim 1, is characterized in that, described acquisition module comprises: lead-out unit and detection groove, and described detection groove is communicated with described peel container,
Described lead-out unit is used for the stripper in described peel container to export in described detection groove;
The stripper that described detection groove is derived for containing described lead-out unit.
3. system according to claim 2, is characterized in that,
Described detection module comprises: the first controller, light signal send instrument and light signal receiving instrument, described light signal transmission instrument and described light signal receiving instrument are separately positioned on the both sides of described detection groove, described first controller sends instrument with described light signal respectively and described light signal receiving instrument is connected
Described light signal sends instrument for generating light signal, and makes described light signal be sent to described light signal receiving instrument through described detection groove;
Described light signal receiving instrument sends the described light signal of instrument transmission for receiving described light signal;
The intensity of the light signal that described first controller receives for the intensity and described light signal receiving instrument obtaining the light signal of described light signal transmission instrument transmission.
4. system according to claim 3, is characterized in that,
Described detection module comprises: second controller, first sensor and the second sensor,
Described first sensor is arranged on the described primary importance corresponding position outside described detection groove, the described second place corresponding position of described second sensor setting outside described detection groove, described second controller is connected with described first sensor and described second sensor respectively.
5. system according to claim 4, is characterized in that, described system also comprises:
Alarm module, for carrying out warning instruction.
6. the system according to the arbitrary claim of claim 1 to 5, is characterized in that,
Described replacing module comprises tapping valve and liquid feed valve, described tapping valve and described liquid feed valve are all arranged on described peel container, when described tapping valve is opened, stripper in described peel container can be discharged, when described liquid feed valve is opened, the stripper meeting preset standard can flow into described peel container;
Described replacing module, specifically for opening described tapping valve and described liquid feed valve, carries out the replacing of the stripper in described peel container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520311377.9U CN204613594U (en) | 2015-05-14 | 2015-05-14 | Stripper changes system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520311377.9U CN204613594U (en) | 2015-05-14 | 2015-05-14 | Stripper changes system |
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| CN204613594U true CN204613594U (en) | 2015-09-02 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106681107A (en) * | 2017-02-23 | 2017-05-17 | 武汉华星光电技术有限公司 | System and method for controlling concentration of photoresist |
| CN107526193A (en) * | 2017-07-26 | 2017-12-29 | 武汉华星光电技术有限公司 | The control device and control method of photoresistance concentration |
-
2015
- 2015-05-14 CN CN201520311377.9U patent/CN204613594U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106681107A (en) * | 2017-02-23 | 2017-05-17 | 武汉华星光电技术有限公司 | System and method for controlling concentration of photoresist |
| CN107526193A (en) * | 2017-07-26 | 2017-12-29 | 武汉华星光电技术有限公司 | The control device and control method of photoresistance concentration |
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