CN204610201U - A kind of Chalk-dust filtering impurity filtering tank - Google Patents
A kind of Chalk-dust filtering impurity filtering tank Download PDFInfo
- Publication number
- CN204610201U CN204610201U CN201520214034.0U CN201520214034U CN204610201U CN 204610201 U CN204610201 U CN 204610201U CN 201520214034 U CN201520214034 U CN 201520214034U CN 204610201 U CN204610201 U CN 204610201U
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- CN
- China
- Prior art keywords
- tank body
- pipe
- fixed
- orifice plate
- steam outlet
- Prior art date
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Links
- 238000001914 filtration Methods 0.000 title claims abstract description 29
- 239000012535 impurity Substances 0.000 title claims abstract description 16
- 239000000428 dust Substances 0.000 title claims abstract description 10
- 235000004443 Ricinus communis Nutrition 0.000 claims abstract description 8
- 239000007788 liquid Substances 0.000 claims abstract description 5
- 230000000630 rising effect Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 239000003921 oil Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 2
- 240000000528 Ricinus communis Species 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 235000015927 pasta Nutrition 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
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- Applications Or Details Of Rotary Compressors (AREA)
Abstract
The utility model relates to a kind of Chalk-dust filtering impurity filtering tank, comprise tank body, cover, lifting handle, castor, suction tude, orifice plate, steam outlet pipe, drain pipe, bypass tube, bypass valve, blowdown valve, handle revolving joint, tank body bottom end fixes several castor, cover by lifting handle and tank body link together also can rise after leave tank body by the translation of handle revolving joint, suction tude is that the side wall upper part that right-angle elbow pipe is fixed on tank body makes its one end outside tank body, one end is in tank body, in tank body, mouth of pipe place in one end is fixed with orifice plate, the sidewall of tank body is also fixed with steam outlet pipe, suction tude is communicated with steam outlet pipe bypass tube, bypass tube internal fixtion has bypass valve, tank body bottom end is fixed with drain pipe, drain pipe internal fixtion has blowdown valve, filling filter oil in tank body, orifice plate and filter oil liquid level distance are 30 ~ 50mm, beneficial effect extends service life of vacuum pump, reduce and unpick and wash number of times, reduce manual labor amount, reduce cost of production.
Description
Technical field
The utility model relates to a kind of device for filtering impurities, particularly a kind of Chalk-dust filtering impurity filtering tank.
Background technique
Along with the development in market, vertical pulling method heavy doping monocrystalline becomes the main product in semi-conductor market, but this specification list crystal silicon can produce a large amount of volatile gas and pressed powder impurity in furnace chamber in process of production, vacuum pump is caused to bring in the pump housing by a large amount of impurity in vacuum, the pump housing is caused to damage, have a strong impact on pump housing working life, add maintenance and unpick and wash the frequency, greatly affect manufacturing efficiency and then improve cost of production.And the filter screen type filtering tank that we used in the past, in tank, the Use Limitation of filter screen is not enough to the production time of a satisfied stove monocrystalline, causes to produce the middle and later periods, affects find time speed and filtering effect, finally have impact on the quality of product.
Summary of the invention
In view of prior art Problems existing, the utility model, can effectively filtering gas volatile matter and powder impurity by installing filtering tank device between Czochralski furnace and vacuum pump additional, and concrete technological scheme is a kind of Chalk-dust filtering impurity filtering tank, comprises tank body, cover, lifting handle, castor, suction tude, orifice plate, steam outlet pipe, drain pipe, bypass tube, bypass valve, blowdown valve, handle revolving joint, it is characterized in that: tank body bottom end fixes several castor, cover by lifting handle and tank body link together also can rise after leave tank body by the translation of handle revolving joint, suction tude is that the side wall upper part that right-angle elbow pipe is fixed on tank body makes its one end outside tank body, one end is in tank body, in tank body, mouth of pipe place in one end is fixed with orifice plate, the sidewall of tank body is also fixed with steam outlet pipe, suction tude is communicated with steam outlet pipe bypass tube, bypass tube internal fixtion has bypass valve, and tank body bottom end is fixed with drain pipe, and drain pipe internal fixtion has blowdown valve, filling filter oil in tank body, orifice plate and filter oil liquid level distance are 30 ~ 50mm.
The beneficial effects of the utility model are the reduction of the pump housing wearing and tearing because impurity causes, and extend service life of vacuum pump, reduce and unpick and wash number of times, reduce manual labor amount, reduce cost of production.
Accompanying drawing explanation
Fig. 1 is structure front view of the present utility model.
Fig. 2 is structure plan view of the present utility model.
Embodiment
As Fig. 1, shown in 2, a kind of Chalk-dust filtering impurity filtering tank, comprises tank body 1, cover 2, lifting handle 3, castor 4, suction tude 5, orifice plate 6, steam outlet pipe 7, drain pipe 8, bypass tube 9, bypass valve 10, blowdown valve 11, handle revolving joint 12, tank body 1 bottom end fixes three castors 4, cover 2 to be linked together with tank body 1 by lifting handle 3 and leaves tank body 1 by handle revolving joint 12 translation after can rising, suction tude 5 is connected with body of heater, and the side wall upper part that suction tude 5 is welded in tank body 1 for right-angle elbow pipe makes its one end outside tank body 1, one end is in tank body 1, in tank body 1, mouth of pipe place in one end is welded with orifice plate 6, the filter oil caused to prevent the air-flow of exhaust body is splashed, the sidewall of tank body 1 is also welded with steam outlet pipe 7, suction tude 5 is communicated with steam outlet pipe 7 bypass tube 9, can prevent because impurity in oil strain is too much, and the pasta caused increases to over orifice plate 6, pumping speed declines, and reduce the impact on product quality when cannot discharge impurity, bypass tube 9 internal fixtion has bypass valve 10, and tank body 1 bottom end is welded with drain pipe 8, and drain pipe 8 internal fixtion has blowdown 11, facilitates the cleaning of draining the oil of filtering tank, filling filter oil in tank body 1, orifice plate 6 and filter oil liquid level distance are 30 ~ 50mm, can more effective impurity in gas be wrapped in oil, gas after filtration can prolong above tank body with in vacuum pump connection mouth place's suction pump housing, the pump oil that filter oil uses vacuum pump to change completely, refuse reclamation, reduces operating cost, improves pump oil price value.
Control principle
Filtering tank rear class vacuum pump is found time to filtering tank after starting working, and namely filtering tank inside become negative pressure, filtering tank will be found time to prime, along with finding time of gas, volatile matter can enter filtering tank with gas with pressed powder impurity, is driven in the oil strain in filtering tank.Because gas pole is not easy to be dissolved in oil, and dust granules can merge with oil and forms suspension, therefore by after this step, then reach being separated of volatile matter and gas, achieve the object removing dust.
When in oil strain, dust deposit is too much, liquid level can rise, and when reaching a certain height, then can affect the degree of vacuum of filtering tank prime, now, just can carry out preiodic type maintenance, replace the discarded oil strain in filtering tank.
Claims (1)
1. a Chalk-dust filtering impurity filtering tank, comprises tank body (1), cover (2), lifting handle (3), castor (4), suction tude (5), orifice plate (6), steam outlet pipe (7), drain pipe (8), bypass tube (9), bypass valve (10), blowdown valve (11), handle revolving joint (12), it is characterized in that: tank body (1) bottom end fixes several castor (4), cover (2) is linked together by lifting handle (3) and tank body (1) and leaves tank body (1) by handle revolving joint (12) translation after can rising, and the side wall upper part that suction tude (5) is fixed on tank body (1) for right-angle elbow pipe makes its one end at tank body (1) outward, one end is in tank body (1), in tank body (1), mouth of pipe place, one end is fixed with orifice plate (6), the sidewall of tank body (1) is also fixed with steam outlet pipe (7), suction tude (5) is communicated with steam outlet pipe (7) bypass tube (9), bypass tube (9) internal fixtion has bypass valve (10), and tank body (1) bottom end is fixed with drain pipe (8), and drain pipe (8) internal fixtion has blowdown valve (11), filling filter oil in tank body (1), orifice plate (6) and filter oil liquid level distance are 30 ~ 50mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520214034.0U CN204610201U (en) | 2015-04-10 | 2015-04-10 | A kind of Chalk-dust filtering impurity filtering tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520214034.0U CN204610201U (en) | 2015-04-10 | 2015-04-10 | A kind of Chalk-dust filtering impurity filtering tank |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204610201U true CN204610201U (en) | 2015-09-02 |
Family
ID=53962771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520214034.0U Active CN204610201U (en) | 2015-04-10 | 2015-04-10 | A kind of Chalk-dust filtering impurity filtering tank |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204610201U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107684795A (en) * | 2016-08-03 | 2018-02-13 | 隆基绿能科技股份有限公司 | Tail gas filter and vacuum system of single-crystal furnace |
| CN111749873A (en) * | 2020-07-09 | 2020-10-09 | 四川巴斯迪科新技术发展有限公司 | Dust filter for pre-stage vacuum pump of laminating machine |
-
2015
- 2015-04-10 CN CN201520214034.0U patent/CN204610201U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107684795A (en) * | 2016-08-03 | 2018-02-13 | 隆基绿能科技股份有限公司 | Tail gas filter and vacuum system of single-crystal furnace |
| CN111749873A (en) * | 2020-07-09 | 2020-10-09 | 四川巴斯迪科新技术发展有限公司 | Dust filter for pre-stage vacuum pump of laminating machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20181106 Address after: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 300384 Tianjin Binhai New Area Huayuan Industrial Park Wai Wai Tai Road 12 Patentee before: TIANJIN HUANOU SEMICONDUCTOR MATERIAL TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191218 Address after: 214200 Dongfen Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Co-patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Patentee after: Zhonghuan leading semiconductor materials Co.,Ltd. Address before: 300384 in Tianjin Binhai high tech Zone Huayuan Industrial Zone (outer ring) Haitai Road No. 12 Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| CP03 | Change of name, title or address |
Address after: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Country or region after: China Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. Country or region before: China Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
|
| CP03 | Change of name, title or address |