CN111749873A - Dust filter for pre-stage vacuum pump of laminating machine - Google Patents
Dust filter for pre-stage vacuum pump of laminating machine Download PDFInfo
- Publication number
- CN111749873A CN111749873A CN202010666282.4A CN202010666282A CN111749873A CN 111749873 A CN111749873 A CN 111749873A CN 202010666282 A CN202010666282 A CN 202010666282A CN 111749873 A CN111749873 A CN 111749873A
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- filter
- air inlet
- filter box
- pipe
- oil
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/16—Filtration; Moisture separation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
- Y02A50/2351—Atmospheric particulate matter [PM], e.g. carbon smoke microparticles, smog, aerosol particles, dust
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The invention discloses a dust filter for a pre-stage vacuum pump of a laminator, which comprises a sealed filter box, wherein vacuum oil is filled in the filter box, one side of the top of the filter box is provided with an air inlet, the other side of the top of the filter box is provided with an air outlet, the air inlet is provided with an air inlet pipe, the distance between the end surface of the air inlet pipe, positioned in the filter box, in the air inlet pipe and the liquid level of the vacuum oil is 5-10mm, one side of the air inlet pipe, positioned outside the filter box, is connected with an aerator pipe, one end, far away from the air inlet pipe, of the aerator pipe horizontally extends into the filter box from the lower part of the filter box, the top of the aerator pipe, extending into the filter box, is uniformly provided with a plurality of aeration holes, the air outlet is arranged at the air outlet, one end of. The invention relates to an air inlet pretreatment device of a vacuum pump, which can effectively filter dust and particles in inlet air and effectively prolong the service life of the vacuum pump.
Description
Technical Field
The invention belongs to the technical field of air inlet filtration of vacuum pumps, and particularly relates to a dust filter for a backing vacuum pump of a laminating machine.
Background
The laminator is widely applied in the solar photovoltaic industry, and is indispensable as a vacuum pump of preceding-stage equipment of the laminator. In the working process of the solar photovoltaic industry, due to the fact that more dust particles exist, the vacuum pump can accelerate abrasion of parts in the pump cavity after suction, the phenomena of vacuum degree reduction, vacuum pump oil pollution and the like occur, and even the extreme phenomenon of locking of the vacuum pump can occur in severe conditions, so that the service life of the vacuum pump used in the solar photovoltaic industry is short, the replacement frequency of the vacuum pump is high, and the cost of the whole industry is high. Therefore, a scheme for dust removal and filtration of the air inlet end of the vacuum pump in the solar photovoltaic industry is provided.
Disclosure of Invention
The technical problem to be solved by the invention is to provide a dust filter for a backing vacuum pump of a laminating machine, which can effectively filter dust particles in sucked gas and prolong the service life of the vacuum pump, aiming at the defects of the prior art.
The technical scheme adopted by the invention is as follows: a dust filter for a backing vacuum pump of a laminator comprises a sealed filter box, vacuum oil is filled in the filter box, an air inlet is arranged on one side of the top of the filter box, an air outlet is arranged on the other side of the top of the filter box, an air inlet pipe is arranged at the air inlet, one end of the air inlet pipe is positioned outside the filter box, the other end of the air inlet pipe is positioned in the filter box, the distance between the end surface of the air inlet pipe positioned in the filter box and the liquid level of the vacuum oil is 5-10mm, one side of the air inlet pipe positioned outside the filter box is, one end of the aeration pipe, which is far away from the air inlet pipe, horizontally extends into the filter tank from the lower part of the filter tank, a plurality of aeration holes are uniformly formed at the top of the aeration pipe extending into the filter tank, and the air outlet is provided with an air outlet pipe, one end of the air outlet pipe is positioned outside the filter box and is connected with a filter device, the other end of the air outlet pipe is positioned in the filter box, and the distance between the end surface of the air outlet pipe positioned in the filter box and the liquid level of the vacuum oil is 45-50 mm.
Preferably, the air inlet area of the air inlet pipe is 10 times of the air inlet area of the aeration pipe.
As preferred, filter equipment includes the filter chamber and is cylindric and inlayer filter screen, middle level filter screen and the outer filter screen that the filtration pore aperture reduces in proper order, the both ends of filter chamber are conical uncovered, and wherein one end and outlet duct intercommunication, the other end are connected with the inlet end of vacuum pump, the inlayer filter screen is located the inlet end of filter chamber, and the one end of inlayer filter screen covers the inlet end of filter chamber completely, middle filter screen and outer filter screen suit are outside the inlayer filter screen in proper order.
Preferably, the air inlet caliber of the filter cavity, the air inlet caliber of the inner filter screen, the air inlet caliber of the middle filter screen and the air inlet caliber of the outer filter screen are sequentially increased by 1.2-1.5 times.
Preferably, the aperture of the filter holes of the inner filter screen, the middle filter screen and the outer filter screen is sequentially reduced by 1.2 to 1.5 times.
Preferably, the bottom of the filter box is inclined, an oil drain port is arranged at the lower end of the bottom of the filter box, and an oil drain valve is arranged at the oil drain port.
Preferably, the filter box is further provided with an observation window and an oil filling port.
The invention has the beneficial effects that:
(1) the air inlet pipe is connected with an aeration pipe, and the separated part of air is introduced into the vacuum oil at the bottom in the filter box and discharged, so that the vacuum oil is bubbled and is in a boiling state, the contact area between the air entering the air inlet pipe and the vacuum oil is increased, and the dust and particles in the air are collected through the viscosity of the vacuum oil, so that the air inlet dedusting effect is realized;
(2) the distance between the end surface of the air inlet pipe and the liquid level of the vacuum oil is controlled to be 5-10mm, so that the gas fed by the air inlet pipe can be fully contacted with the bubbling vacuum oil, and the adhesion and collection effects of dust and particles are improved;
(3) the distance between the end face of the air outlet pipe and the liquid level of the vacuum oil is controlled to be 45-50mm, and the distance between the end face of the air inlet pipe and the liquid level of the vacuum oil is matched, so that the contact and mixing probability of air inlet and oil bubbles is increased, the air outlet efficiency is improved, and the air outlet smoothness is ensured;
(4) the gas outlet pipe is externally connected with a filtering device, the filtered gas discharged by the gas outlet pipe can be subjected to oil-gas filtering, after the oil gas is filtered, the gas enters a vacuum pump for use, and the oil collected by the filtering device flows back into the filtering box under the action of gravity;
(5) two ends of a filter cavity of the filter device are arranged in a conical tight opening mode, so that the entering oil gas can be fully filtered;
(6) the filtering device adopts three layers of cylindrical filter screens for filtering, and limits the relation of air inlet area and the relation of filter hole aperture between each layer of filter screens, thereby ensuring the smoothness of gas filtration on the premise of full filtration of oil gas;
(7) the observation window is arranged, so that the use condition of the vacuum oil in the filter box can be observed conveniently;
(8) the oil filling port is arranged, so that vacuum oil can be conveniently added, and the distance between the liquid level of the vacuum oil and the end faces of the air inlet pipe and the air outlet pipe is ensured;
(9) the bottom of the filter box is inclined and is provided with an oil discharge port and an oil discharge valve, so that waste oil after dust and particles are adsorbed can be conveniently discharged.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
In the figure: 1. a filter box; 2. vacuum oil; 3. an air inlet pipe; 4. an aeration pipe; 5. an aeration hole; 6. an air outlet pipe; 7. a filtration device; 8. an oil discharge port; 9. an oil discharge valve; 10. an observation window; 11. an oil filler; 71. a filter chamber; 72. an inner layer filter screen; 73. a middle layer filter screen; 74. and (4) an outer-layer filter screen.
Detailed Description
The invention will be described in further detail with reference to the following drawings and specific embodiments.
Examples
As shown in fig. 1, the dust filter for the backing vacuum pump of the laminator provided by this embodiment includes a sealed filter box 1, vacuum oil 2 is filled in the filter box 1, the liquid level of the vacuum oil 2 exceeds the middle of the filter box 1, one side of the top of the filter box 1 is provided with an air inlet, the other side is provided with an air outlet, the outer wall of the filter box 1 at the air inlet is provided with a fixing flange, the air inlet pipe 3 is sleeved with a connecting flange, after the connecting flange is fixedly connected with the fixing flange, the air inlet pipe 3 is fixed at the air inlet, and a sealing ring is installed at the connection position of the filter box 1 and the air inlet pipe 3, so as to ensure the;
after the air inlet pipe 3 is fixed at the air inlet, one end of the air inlet pipe 3 is positioned in the filter tank 1, the distance between the end part of the air inlet pipe 3 positioned in the filter tank 1 and the liquid level of the vacuum oil 2 is controlled to be 5-10mm, the other end of the air inlet pipe 3 is positioned outside the filter tank 1 and is connected with the air outlet end of the air extractor set, the air inlet pipe 3 positioned outside the filter tank 1 is connected with an aeration pipe 4, the air inlet area of the aeration pipe 4 is one tenth of the air inlet area of the air inlet pipe 3, namely the air extractor set provides stable airflow for the air inlet pipe 3, one tenth of the airflow enters the aeration pipe 4 at the position where the air inlet pipe 3 is connected with the aeration pipe 4, the ten tenth of the airflow continues to enter the filter tank 1 through the air inlet pipe 3, one end of the aeration pipe 4 far away from the air inlet pipe 3 horizontally extends into the filter tank 1 from the, and the top of the aeration pipe 4 extending into the filter tank 1 is uniformly provided with a plurality of aeration holes 5 along the extending direction; one tenth of the gas enters the vacuum oil 2 in the filter tank 1 through the aeration pipe 4, nine tenth of the gas enters the filter tank 1 through the air inlet pipe 3, after the gas in the aeration pipe 4 is discharged from the aeration holes 5, namely, gas is introduced into the vacuum oil 2, bubbles are generated on the surface of the vacuum oil 2, so that the surface of the vacuum oil 2 presents a boiling state with continuous bubbles, at the moment, the gas entering the gas inlet pipe 3 directly contacts with oil bubbles on the surface of the vacuum oil 2, compared with the static liquid surface of the vacuum oil 2, the liquid surface of the boiling vacuum oil 2 improves the contact area of the gas inlet and the vacuum oil 2, so that the introduced gas is directly mixed with the oil bubbles, and the impurities such as dust, particles and the like in the gas are adhered and gathered in the vacuum oil 2 by utilizing the viscosity of the vacuum oil 2, the distance between the end part of the air inlet pipe 3 and the liquid level of the vacuum oil 2 is 5-10mm, so that the entering gas and the oil bubbles are mixed to the maximum extent; if the distance between the air inlet pipe 3 and the liquid level of the vacuum oil 2 is higher than 10mm, the stroke of the air entering the filter box 1 is lengthened, the introduced air is easy to lose downward inertia without contacting with oil bubbles, and then the air starts to rise, so that impurities such as dust, particles and the like in the air are not adhered and filtered by the vacuum oil 2, and if the distance between the air inlet pipe 3 and the liquid level of the vacuum oil 2 is lower than 5mm, the entering air is too short after entering the filter box 1, and the air is easy to cause insufficient contact with the oil bubbles, and then the air is extruded by the following air to disperse and rise all around, so that the mixing time of the air and the oil bubbles is short, and the impurities such as the dust, the particles and the like in the air are incompletely filtered;
the outer wall of the filter box 1 at the air outlet is provided with a fixed flange, the air outlet pipe 6 is sleeved with a connecting flange, the connecting flange is fixedly connected with the fixed flange, the air outlet pipe 6 is fixed at the air outlet, a sealing ring is arranged at the joint of the filter box 1 and the air outlet pipe 6, so that the sealing state of the filter box 1 is ensured, one end of the air outlet pipe 6 is positioned in the filter box 1, the distance between the end surface of the air outlet pipe 6 positioned in the filter box 1 and the liquid level of the vacuum oil 2 is 45-50mm, the other end of the air inlet pipe 3 is positioned outside the filter box 1 and is connected with a filter cavity 71, the filter cavity 71 and the air outlet pipe 6 are integrally formed, namely, the air inlet end of the filter cavity 71 extends into the air outlet, the distance between the end surface of the filter cavity 71 and the liquid level of the vacuum oil 2 is 45-50mm, the air inlet end of the filter cavity 71 is matched with the air outlet and is fixed at, the two ends of the filtering cavity 71 are in a conical shape, the filtering cavity 71 is sequentially sleeved with an inner filtering net 72, a middle filtering net 73 and an outer filtering net 74 which are cylindrical from inside to outside, one end of the inner filtering net 72 is arranged on the conical surface of the air inlet end of the filtering cavity 71, the end surface area of the inner filtering net 72 is 1.2-1.5 times of the air outlet end surface area of the air outlet pipe 6, so that the end surface of the inner filtering net 72 completely covers the air outlet end surface of the air outlet pipe 6, the discharged oil gas is enabled to be subjected to oil gas filtering through the inner filtering net 72, one end of the middle filtering net 73 is also arranged on the conical surface of the air inlet end of the filtering cavity 71, the middle filtering net 73 is sleeved outside the inner filtering net 72, the end surface area of the middle filtering net 73 is 1.2-1.5 times of the end surface area of the inner filtering net 72, the middle filtering net 73 wraps the inner filtering net 72, and ensures, all are filtered by the middle layer filter screen 73, one end of the outer layer filter screen 74 is also arranged on the conical surface of the air inlet end of the filter cavity 71, the outer layer filter screen 74 is sleeved outside the middle layer filter screen 73, the end surface area of the outer layer filter screen 74 is 1.2-1.5 times of the end surface area of the middle layer filter screen 73, so that the outer layer filter screen 74 wraps the middle layer filter screen 73, ensuring that the gas is completely filtered by the outer layer filter screen 74 after being filtered by the middle layer filter screen 73, the aperture of the filtering holes of the inner layer filter screen 72 is 1.2 to 1.5 times of the aperture of the filtering holes of the middle layer filter screen 73, the aperture of the filtering holes of the middle layer filter screen 73 is 1.2 to 1.5 times of the aperture of the filtering holes of the outer layer filter screen 74, thereby forming that the aperture of the filter holes of the inner layer filter screen 72, the middle layer filter screen 73 and the outer layer filter screen 74 are reduced in turn from inside to outside, the aperture of the filtering hole of the inner-layer filtering net 72 is controlled to be 5-8mm, and the air outlet end of the filtering cavity 71 is connected with the air inlet end of the vacuum pump; the gas adhered and gathered by the vacuum oil 2 bubbles enters the filter cavity 71 through the air outlet pipe 6 for oil gas filtration, the distance between the end part of the air outlet pipe 6 and the liquid level of the vacuum oil 2 is controlled to be 45-50mm, the air outlet quantity at the air inlet end of the air outlet pipe 6 is ensured, if the distance is close to the liquid level of the vacuum oil 2, the gas accumulation above the air inlet end port of the air outlet pipe 6 is increased, the air outlet quantity is reduced, the oil-containing gas enters the filter cavity 71 through the air outlet pipe 6, the vacuum oil 2 gathered in the gas is firstly filtered through the inner layer filter screen 72, then the gathered gas is sequentially filtered through the middle layer filter screen 73 and the outer layer filter screen 74, the gas after being filtered and gathered is directly sent to the vacuum pump for use, and the oil after being filtered and gathered flows back to the filter box 1 under the action of gravity.
In the above embodiment, the filter tank 1 is further provided with an observation window 10 and an oil filler 11, the observation window 10 is used for observing the change condition of the vacuum oil 2 in the filter tank 1, the oil filler 11 is used for supplementing the vacuum oil 2 in the filter tank 1, the bottom of the filter tank 1 is inclined, an oil drain port 8 is arranged at the lower end of the bottom of the filter tank 1, and an oil drain valve 9 is arranged at the oil drain port 8.
The above description is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any modification and replacement based on the technical solution and inventive concept provided by the present invention should be covered within the scope of the present invention.
Claims (8)
1. The utility model provides a dust filter for laminator preceding stage vacuum pump which characterized in that: the device comprises a sealed filter box (1), vacuum oil (2) is arranged in the filter box (1), an air inlet is formed in one side of the top of the filter box (1), an air outlet is formed in the other side of the top of the filter box (1), an air inlet pipe (3) is installed at the air inlet, one end of the air inlet pipe (3) is positioned outside the filter box (1), the other end of the air inlet pipe is positioned in the filter box (1), the distance between the end surface of the air inlet pipe (3) positioned in the filter box (1) and the liquid level of the vacuum oil (2) is 5-10mm, an aeration pipe (4) is connected to one side of the air inlet pipe (3) positioned outside the filter box (1), one end, far away from the air inlet pipe (3), of the aeration pipe (4 horizontally extends into the filter box (1) from the lower part of the filter box (1), a plurality of aeration holes (5) are uniformly formed in, one end of the air outlet pipe (6) is positioned outside the filter box (1) and is connected with the filter device (7), the other end of the air outlet pipe is positioned in the filter box (1), and the distance between the end surface of the air outlet pipe (6) positioned in the filter box (1) and the liquid level of the vacuum oil (2) is 45-50 mm.
2. The dust filter for a backing vacuum pump of a laminator according to claim 1, wherein: the air inlet area of the air inlet pipe (3) is 10 times of the air inlet area of the aeration pipe (4).
3. A dust filter for a backing vacuum pump of a laminator according to claim 1 or 2, wherein: filter equipment (7) include filter chamber (71) and be cylindric and inner filter screen (72), middle level filter screen (73) and outer filter screen (74) that the filtration pore aperture reduces in proper order, the both ends of filter chamber (71) are conical uncovered, and wherein one end and outlet duct (6) intercommunication, the other end are connected with the inlet end of vacuum pump, inner filter screen (72) are located the inlet end of filter chamber (71), and the one end of inner filter screen (72) covers the inlet end of filter chamber (71) completely, middle filter screen and outer filter screen (74) suit are outside inner filter screen (72) in proper order.
4. The dust filter for a backing vacuum pump of a laminator according to claim 3, wherein: the air inlet caliber of the filter cavity (71), the air inlet caliber of the inner layer filter screen (72), the air inlet caliber of the middle layer filter screen (73) and the air inlet caliber of the outer layer filter screen (74) are sequentially increased by 1.2-1.5 times.
5. The dust filter for a backing vacuum pump of a laminator according to claim 4, wherein: the aperture of the filtering holes of the inner layer filtering net (72), the middle layer filtering net (73) and the outer layer filtering net (74) is reduced by 1.2-1.5 times in sequence.
6. The dust filter for a backing pump of a laminator according to any of claims 1, 2, 4, and 5, wherein: the bottom of the filter box (1) is inclined, an oil discharge port (8) is arranged at the lower end of the bottom of the filter box (1), and an oil discharge valve (9) is arranged at the oil discharge port (8).
7. The dust filter for a backing vacuum pump of a laminator according to claim 6, wherein: the filter box (1) is also provided with an observation window (10) and an oil filling port (11).
8. The dust filter for a backing pump of a laminator according to any of claims 1, 2, 4, and 5, wherein: the filter box (1) is also provided with an observation window (10) and an oil filling port (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010666282.4A CN111749873B (en) | 2020-07-09 | 2020-07-09 | Dust filter for pre-stage vacuum pump of laminating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010666282.4A CN111749873B (en) | 2020-07-09 | 2020-07-09 | Dust filter for pre-stage vacuum pump of laminating machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111749873A true CN111749873A (en) | 2020-10-09 |
| CN111749873B CN111749873B (en) | 2022-07-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010666282.4A Active CN111749873B (en) | 2020-07-09 | 2020-07-09 | Dust filter for pre-stage vacuum pump of laminating machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113389706A (en) * | 2021-07-09 | 2021-09-14 | 长鑫存储技术有限公司 | Vacuum system, low-pressure vacuum process equipment and stop piece |
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| US4874404A (en) * | 1989-03-01 | 1989-10-17 | Boswell Jerald O | Vacuum cleaner |
| US5873930A (en) * | 1997-08-29 | 1999-02-23 | Sanchez; Angelo | Water-air baffle filter |
| US6391093B1 (en) * | 2000-01-24 | 2002-05-21 | Delphi Technologies, Inc. | Welding filtration system |
| US20050235832A1 (en) * | 2004-04-22 | 2005-10-27 | Anderson Albin L | Dust vacuum system, and methods of constructing and utilizing same |
| CN201684510U (en) * | 2009-12-29 | 2010-12-29 | 成都知本科技开发有限责任公司 | Gas purifying device |
| CN203944283U (en) * | 2014-05-19 | 2014-11-19 | 陈聪健 | Waste gas filter |
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| CN108035760A (en) * | 2017-11-17 | 2018-05-15 | 中国矿业大学 | A kind of air cleaning unit |
| CN209771672U (en) * | 2019-03-05 | 2019-12-13 | 郑琼 | dust treatment and purification equipment for coating equipment |
| CN210814145U (en) * | 2019-07-29 | 2020-06-23 | 无锡市鸿亿机械制造有限公司 | Filter with long service life |
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2020
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| US4874404A (en) * | 1989-03-01 | 1989-10-17 | Boswell Jerald O | Vacuum cleaner |
| US5873930A (en) * | 1997-08-29 | 1999-02-23 | Sanchez; Angelo | Water-air baffle filter |
| US6391093B1 (en) * | 2000-01-24 | 2002-05-21 | Delphi Technologies, Inc. | Welding filtration system |
| US20050235832A1 (en) * | 2004-04-22 | 2005-10-27 | Anderson Albin L | Dust vacuum system, and methods of constructing and utilizing same |
| CN201684510U (en) * | 2009-12-29 | 2010-12-29 | 成都知本科技开发有限责任公司 | Gas purifying device |
| CN203944283U (en) * | 2014-05-19 | 2014-11-19 | 陈聪健 | Waste gas filter |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113389706A (en) * | 2021-07-09 | 2021-09-14 | 长鑫存储技术有限公司 | Vacuum system, low-pressure vacuum process equipment and stop piece |
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| CN111749873B (en) | 2022-07-12 |
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