CN204589299U - Connect the contact device of heating member and contact plate and there is the heating installation of this device - Google Patents
Connect the contact device of heating member and contact plate and there is the heating installation of this device Download PDFInfo
- Publication number
- CN204589299U CN204589299U CN201420716860.0U CN201420716860U CN204589299U CN 204589299 U CN204589299 U CN 204589299U CN 201420716860 U CN201420716860 U CN 201420716860U CN 204589299 U CN204589299 U CN 204589299U
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- head
- heating member
- bar portion
- leg
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 98
- 238000009434 installation Methods 0.000 title claims abstract description 32
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 26
- 238000004804 winding Methods 0.000 claims description 12
- 238000003780 insertion Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims description 4
- 230000004323 axial length Effects 0.000 claims description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 13
- 238000005520 cutting process Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 210000002105 tongue Anatomy 0.000 description 8
- 239000007789 gas Substances 0.000 description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000008236 heating water Substances 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/02—Details
- H05B3/06—Heater elements structurally combined with coupling elements or holders
- H05B3/08—Heater elements structurally combined with coupling elements or holders having electric connections specially adapted for high temperatures
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/16—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor the conductor being mounted on an insulating base
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Resistance Heating (AREA)
Abstract
The utility model relate to a kind of for electrically and mechanical connection be used for adding the heating member (10) of the heating installation (6) of the pedestal (5) of hot CVD reactor (1) and the device of power supply component (36), described device has head (12) for being connected with described heating member (10), for the leg (24) be connected with contact element (36) and the bar portion (21) be arranged between described head (12) and leg (24).In order to reduce thermograde suggestion, described bar portion (21) at least local has the cross section less than described head (12), thus makes the resistance of the unit length in described bar portion (21) be greater than the resistance of the unit length in described head (1).The utility model also relates to a kind of heating installation of the pedestal for adding hot CVD reactor, and its heating member is connected with power supply component (36) by least one junctor.
Description
Technical field
The utility model relate to a kind of for electrically or mechanical connection be used for the heating member of heating installation of the pedestal adding hot CVD (chemical vapour deposition) reactor and the device of power supply component, described device has head for being connected with described heating member, for the leg be connected with contact element and the bar portion be arranged between described head and leg.
The utility model also relates to a kind of heating installation of the pedestal for adding hot CVD reactor, and the heating member of described heating installation is connected with power supply component by least one junctor.
Background technology
By document US 4,292,504, the junctor of US 5,759,281 or the known a kind of heating member for connecting heating installation of US 7,645,342, described heating installation is for adding the pedestal of hot CVD reactor.
By document US 2,625,635 known a kind of hair fastener shape well heaters, heating water whereby.In protective tube, spiral heater strip embeds ground and extends in isolated body, and this heater strip is connected with terminal contact by the threaded contact plug of tool.Terminal contact has screw thread, and nut is on this screw thread, so that the connecting contact locking to annular.The portion's section abutted against on thread segment of terminal contact has embossed portion and flattening portion, to stop locking rotationally in casting matrix internal resistance.
CVD reacting appliance responds device housing, the admission gear be arranged in reactor shell, utilizes described admission gear will process gas and imports in treatment chamber.Treatment chamber has pedestal, and substrate to be coated is placed on pedestal.In order to make substrate reach application temperature, pedestal is heated from lower by thermal radiation.Use according to heating installation of the present utility model to produce thermal radiation.Have the power supply component of power supply component, such as contact plate form according to heating installation of the present utility model, junctor stretches out from contact plate.Each junctor is connected with at least one heating member.The two ends of each heating member are connected by the power supply component that junctor is different from two, thus make current lead-through through heating member by power supply component.At this, heating member generates heat, and is carried to pedestal with thermal-radiating form by its heat.At this, heating member is heated to white heat always.Extremely resistant to elevated temperatures heating member is made up of tungsten filament.Junctor equally also can be made up of tungsten, but also can be made up of stainless steel or molybdenum.Because junctor has larger diameter more obvious than heating member, junctor has the ohmic resistance of unit length more significantly lower than heating member.This makes to occur high temperature head (thermograde) on the link position of the head of heating member and junctor.
Utility model content
Technical problem to be solved in the utility model is, provides a kind of measure for reducing described temperature head.
Described technical problem by a kind of according to of the present utility model for electrically or mechanical connection be used for the heating member of heating installation of the pedestal adding hot CVD reactor and the device of power supply component and solve, described device has head for being connected with described heating member, for the leg be connected with contact element and the bar portion be arranged between described head and leg, wherein, described bar portion at least local has the cross section less than described head, thus makes the resistance of the unit length in described bar portion be greater than the resistance of the unit length in described head.Described technical problem also by another kind of according to of the present utility model for electrically or mechanical connection be used for the heating member of heating installation of the pedestal adding hot CVD reactor and the device of power supply component and solve, wherein, described head forms contact element, and the heating member be made up of spiral winding with described head machinery and can be electrically connected by described contact element.Described technical problem also by another kind of according to of the present utility model for electrically or mechanical connection be used for the heating member of heating installation of the pedestal adding hot CVD reactor and the device of power supply component and solve, wherein, described leg has truncated cone portion section, and described truncated cone portion section transits to external thread part section by its truncated cone end.Described technical problem is also solved by a kind of heating installation according to the pedestal for adding hot CVD reactor of the present utility model, described heating installation has power supply component and at least one heating member, wherein, described heating member is connected with described power supply component by the coupling device of aforementioned type.
First and mainly specify, the bar portion of junctor at least has the cross section less than head in local.Make wanting greatly in the resistance ratio head of the unit length of the bearing of trend along contact in bar portion thus, thus produce than unit length thermal value larger in head in bar portion.Preferably, the head of junctor has the cross section larger than the cross section of the screw thread of the wound skein product forming heating member.The wire rod forming heating member is preferably tungsten filament.Two strands of heater strips can extend side by side and form double helix structure.The cross section of head is preferably gone back greatly than the double of cross section in bar portion.Junctor preferably has linear extension.An end of junctor forms head.Another end of junctor forms leg.Bar portion extends between head and leg.The length in bar portion is preferably greater than the diameter in bar portion.Bar portion, head and leg can have circular cross section respectively, and wherein, the cross section of leg is greater than the cross section in bar portion.The cross section of leg can equal the cross section of head.Cylindrical head can transit to the bar portion that diameter reduces when forming tapered portion section substantially.Bar portion can carry out transition when forming the tapered portion section of leg again.Head and leg integrally can be formed with bar portion.Junctor can be designed as milling part thus.Specify in a kind of variant of the present utility model, head has the passage possessing rounded cross section substantially.Opening can open wide towards the end face of head.The axis of opening preferably extends transverse to the bearing of trend in bar portion.The heater strip can place heating member in the channels, especially reeling.Be provided with fastening piece, utilize described fastening can by fixing for heating member in the channel.Fastening piece can be flush bolt, and described flush bolt is threaded through the threaded hole of the wall of access portal.In another kind of variant, head can form contact arm.Contact arm can transversely stretch out in the bearing of trend of the axis in bar portion from head.Contact arm can be designed as insert, and utilizes inserting paragraph to inject in the socket of head.Contact arm is connected with heating member.When heating member is the heater strip of winding, heater strip can be tightened on contact arm to a certain extent.At this, the often circle screw thread of heater strip is all arranged in the thread groove of contact arm.Can on heater strip upper sleeve sleeve pipe.Contact arm preferably inserts in sleeve pipe subsequently.Abut on the coil of heating member the contact internal walls of sleeve pipe.Specify in the design variant mode of another kind about junctor leg, leg has tapered portion section.Described tapered portion section refers to truncated cone portion section at this, described truncated cone portion section preferred adjacent cylindrical portion section.The leg of junctor inserts in the tapered hole of contact plate by described truncated cone portion section.Desirable contact surface is defined thus between junctor and contact plate.The end that the diameter of tapered portion section diminishes is connected with external thread part section, and set screw nut can be tightened in this external thread part section.By inserting pad, make nut support on the bottom side of contact plate.Be provided with retainer, during to avoid in heating installation heating or to cool, nut got loose from outside screw.Retainer can be shaped engagement member, and it runs through in the opening inserting external thread part section.Retainer can have the tongue that can bend, so that on the polygon facet abutting in nut or insert in the axial groove of outer wall of nut, thus avoids the rotation of nut.
The special design (i.e. passage and contact arm) of head and the special design (namely abutting in the conical contact face in the conical wall of contact hole) of leg are the creative Curve guide impeller relative to prior art.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, embodiment of the present utility model is set forth.In the accompanying drawings:
Fig. 1 only illustrates the sectional view of the main element of CVD reactor;
Fig. 2 illustrates the side-view of the heating installation with three heating zone altogether;
Fig. 3 illustrates the vertical view of described heating installation;
Fig. 4 illustrates the sectional view of the cutting line IV-IV cutting gained along Fig. 3;
Fig. 5 illustrates the view of the first embodiment of junctor;
Fig. 6 illustrates the stereographic map of junctor shown in Fig. 5;
Fig. 7 illustrates the second side-view of the junctor shown in Fig. 5;
Fig. 8 illustrates the stereographic map of the second embodiment of junctor;
Fig. 9 illustrates the sectional view of the cutting line IX-IX cutting gained along Fig. 8;
Figure 10 illustrates the sectional view of the cutting line X-X cutting gained along Fig. 8;
Figure 11 illustrates the partial enlarged drawing of Figure 10;
Figure 12 illustrates the upward view that the arrow XII along Figure 10 observes;
Figure 13 illustrates in fig. 8 with the exploded view of the embodiment shown in stereographic map mode;
Figure 14 illustrates the stereographic map of the 3rd embodiment, and
Figure 15 illustrates the sectional view of the cutting line XV-XV cutting gained along Figure 14.
Embodiment
Fig. 1 illustrates the major constituents of CVD reactor, wherein, for simplicity's sake, in a large number for the assembly run needed for CVD reactor is not illustrated.In airtight housing 1, have admission gear 2, described admission gear utilizes unshowned supply air line input processing gas, carrier gases and rinsing gas.These gases enter in treatment chamber 3 by air outlet, and the bottom for the treatment of chamber is made up of pedestal 5, and coated substrate 4 is placed on pedestal.At this, substrate can be silicon substrate or III-V main group element substrate, and semiconductor layer, insulation layer or conductor layer can deposit on the substrate.Heat from the lower pedestal 5 to being made up of graphite by heating installation 6.
The admission gear 2 be arranged in above treatment chamber 3 can active cooling.Steeper thermograde is constituted thus between heating installation 6 and admission gear 2.Heating installation 6 must transmit enough calorific values, so that the surface towards treatment chamber 3 of pedestal 5 is heated to more than 1000 DEG C.
At such a temperature, the gaseous state process gas entering treatment chamber reacts, and wherein relates to III or the organometallics of II main group element and the hydride of IV, V or VI main group element.
Fig. 2 to Fig. 4 shows general heating installation, as its in figure 6 schematically show.Heating installation 6 is made up of three well heaters 7,8,9.Middle well heater is made up of discoidal well heater 7, described discoidal well heater by two ring heaters 8,9 around.Each in these three coaxial mutually nested well heaters 7,8,9 can be powered separately independent of other well heater.
Each in described well heater 7,8,9 all has one or more heating member 10, and described heating member is wound in spiral-line around the common center of heating installation.Spiral-line is provided with multiple heating member 10 in succession, and described heating member is connected with contact plate 36 respectively by junctor 11.Contact plate 36 is used as electric supply installation, thus makes electric current can flow through heating member 10.Be not shown specifically heating member 10 for simplicity's sake.
Fig. 5 to 7 shows the first embodiment of the present utility model, is connected with contact plate 36 for making heating member 10.
Heating member 10 is the bifilar heater strips be made up of the tungsten filament of two strands of screw windings.Heating member 10 extends on the parallel surface relative to contact plate 36 plane.The end of heating member 10, also namely last a few circle of heater strip is connected with contact plate 36 by junctor 11.
Junctor 11 has head 12, and described head has the passage 14 possessing circular cross section.Passage axis extends transverse to the longitudinal axis of junctor 11.The spiral winding of heater strip 10 is arranged in passage.The end face of passage 14 headward 12 is open.Can be fixed in passage 14 by heating member 10 by flush bolt 15, described flush bolt is tightened in the threaded hole of the wall of passage 14.
Head 12 has substantially rounded cross section.Passage 14 is arranged in the cylindrical portion section of the end belonging to junctor 11.Form head cylindrical portion section when form tapered portion section 22 to cylindrical stem 21 transition.The axis in bar portion 21 defines the longitudinal center line of junctor 21.The diameter in bar portion 21 is less than the diameter of head 12.The cross section in bar portion 21 is less than the cross section of head 12 by 50%.
Adjacent in bar portion 21 have another tapered portion section 23, portion's section 25 transition that described tapered portion section 23 increases to diameter.At this, portion's section that this diameter increases is cylindrical portion section 25, and its diameter equals the diameter of head 12.Cylindrical portion section 25 also has circular profile.
Cylindrical portion section 25 belongs to the leg of junctor 11, utilizes described leg that junctor 11 is connected with contact plate 36.Contact in order to ensure as far as possible large-area between junctor 11 with contact plate 36, leg 24 has tapered contacts section 26, and it inserts in the tapered hole 37 of contact plate 36.
The end opposed with head 12 of junctor 11 is made up of external thread part section 27, and nut 25 is screwed in described external thread part section.By settling pad 34 (tapered portion section 26 can stretch in described pad) in centre, nut 25 is bearing on the bottom side of contact plate 36, to form tensile stress in tapered portion section 26.
Junctor 11 is rotationally symmetric body substantially, and its head 12, bar portion 21 and leg 24 form common extension axis.Junctor 11 can be designed as milling part.Columniform blank can be used, wherein, form bar portion 21 and tapered portion section 22,23,26 and external thread part section 27 by machining.
Thermodynamic motion is defined in heating and cooling process.At this, get loose from external thread part section 27 in order to avoid nut 35 and be provided with retainer 31.Retainer 31 is the platelets with tongue 32.Tongue forms the long limit of the T-shaped of T-shaped body.The side 33 of two T-shaped forms fixed tabs.Tongue 32 is inserted through external thread part section 27 in narrower transverse holes 29.The end of tongue 32 is then bent upwards towards the direction of nut, to abut in the polygon facet of nut 35.
Gap 29 is opened wide by the end face 28 of gap portion section 30 towards external thread part section 27.Thus, the gap for the tongue 32 inserting retainer 31 has T-shaped cross section.
Embodiment shown in Fig. 8 to 13 is main only different from the first embodiment in the design and heater strip 10 electrical contact on head 12 of nut 35.At this, nut 35 is designed to knurled nut.Described knurled nut has the groove extended vertically, and described groove and the linkage section extended vertically are alternately.The tongue 32 be bent upwards of retainer 31 can be embedded in groove.The head 12 of junctor 11 has hole 17, and the insertion end of contact arm 16 is inserted in described hole.Contact arm 16 extends transverse to the bearing of trend in the bar portion 21 of junctor 11 or junctor 11 thus.The free end of the contact arm 16 stretched out transverse to head 12 has internal thread 18.Portion's section of the carrying internal thread 18 of contact arm 16 is designed to slightly conically.Head 12 is configured with ladder 19, and described ladder is made up of recess.Wall transverse to ladder 19 extension has the opening in hole 17, and the threaded portion section 18 of contact arm 16 is stretched out from described opening.
Contact arm 16 utilizes its screw thread 18 to screw in spiral heater strip 10, thus heater strip is fitted together in the screw thread ditch of screw thread.
These two embodiments are not only used to be fixed heater strip from machinery, but also power to heater strip 10.
Because the diameter of heater strip 10 is starkly lower than the diameter of junctor 11, heater strip 10 has the resistance of the unit length obviously larger than junctor 11, and the volts lost which results in the length of junctor 11 is significantly less than the volts lost in the length of heater strip 10.Therefore, heater strip 10 is also obviously heated more tempestuously than junctor 10.Heater strip is heated to more than 1000 DEG C.In view of portion's section that the diameter be made up of bar portion 21 reduces, the resistance of the unit length in the region of junctor 11 increases.Which results in junctor 11 also obviously to be heated in the region in bar portion.The thermograde which results in head 12 is less than the thermograde in the less bar portion 21 of diameter.
In the embodiment shown in Figure 14 and 15, sleeve pipe 20 sleeve is on contact arm 16.Sleeve pipe extends on whole contact arm 16, and abuts on contact position on the side of formation opening 17 of ladder 19.Sleeve pipe 20 extends along the horizontal direction of the bearing of trend of junctor 11.Heater strip 10 abuts on the inwall of sleeve pipe 20, and is mechanically anchored in thus in pitch 18.
Contact arm 16 is preferably same to be made up of tungsten.The insertion end of contact arm 16 can utilize unshowned bolt or split pin to be fixed in opening 17.Insertion end can also be designed to slightly conically, thus the conical surface on inwall is reclined mutually with the same opening 17 being designed to taper.
Above-mentioned embodiment is for setting forth the utility model be contained entirely in the application, and the utility model at least makes creationary improvement to prior art respectively by following technical characteristic combination, that is:
A kind of device, is characterized in that, described bar portion 21 at least local has the cross section less than described head 12;
A kind of device, it is characterized in that, the cross section in described bar portion 21 is less by 50% than the cross section of described head 12;
A kind of device, is characterized in that, described head 12 transits to the bar portion 21 especially with circular cross section when forming tapered portion section 22, and wherein, the length in described bar portion 21 is greater than the diameter in described bar portion 21;
A kind of device, it is characterized in that, the cross section of described leg 24 is greater than the cross section in described bar portion, and approximates especially greatly the cross section of described head 12;
A kind of device, it is characterized in that, the axial length of described head 12 approximates greatly the diameter of described head 12;
A kind of device, is characterized in that, described heating member 10 is made up of wire rod of at least one winding;
A kind of device, is characterized in that, described head 12 have especially extend transverse to the bearing of trend in described bar portion 21, for holding the passage 14 of described heating member 10, described heating member 10 is especially fixed in described passage 14 by bolt 15;
A kind of device, it is characterized in that, described head 12 has the contact arm 16 supporting described heating member 10, wherein, described heating member 10 is designed to the wire rod extending side by side winding, described wire rod is placed in the thread groove 18 of described contact arm 16, wherein especially specifies, waits that the spiral winding portion section inserted in described thread groove 18 is inserted in sleeve pipe 20;
A kind of device, it is characterized in that, described leg 24 has truncated cone portion section 26, described truncated cone portion section is inserted in the tapered hole 37 of the contact plate forming described power supply component 36, wherein especially specify, adjacent in the end portion section that the diameter of described truncated cone portion section 26 reduces have outside screw 27, and nut 35 can be screwed on described outside screw 27, wherein especially specify, described nut 35 is rotated locking by retainer 31.
A kind of device, it is characterized in that, described head 12 forms contact devices 14,16, and the heating member 10 be made up of spiral winding with described head 12 machinery and can be electrically connected by described contact devices 14,16;
A kind of device, it is characterized in that, described leg 24 has truncated cone portion section 26, and described truncated cone portion section 26 transits to external thread part section 27 by its truncated cone end.
All disclosed features (itself and combination mutually thereof) have utility model meaning or value.In the open file of the application, in the disclosure of affiliated/attached priority text (earlier application file) is also entirely included, also the feature in this priority text is included in claims of the application for this reason.Those selectable designs arranged side by side in dependent claims are all Curve guide impeller prior art being had to the novel meaning of separate utility or value, especially can propose divisional application based on these dependent claims.
List of numerals
1 CVD reactor
2 inlet mouths
3 treatment chambers
4 substrates
5 pedestals
6 heating installations
7 well heaters
8 well heaters
9 well heaters
10 heater strips
11 junctors
12 heads
13 end faces
14 passages
15 bolts
16 contact arms
17 holes
18 screw threads
19 recesses
20 sleeve pipes
21 bar portions
22 tapered portion sections
23 tapered portion sections
24 legs
25 cylindrical portion sections
26 tapered portion sections
27 external thread part sections
28 end faces
29 gaps
30 gap portion sections
31 retainers
32 tongues
33 fixing contact pin
34 pads
35 nuts
36 contact plates
37 contact holes.
Claims (18)
1. one kind for electrically and mechanical connection be used for the heating member (10) of heating installation (6) of the pedestal (5) adding hot CVD reactor (1) and the device of power supply component (36), described device has the head (12) for being connected with described heating member (10), for the leg (24) be connected with contact element (36) and the bar portion (21) be arranged between described head (12) and leg (24), it is characterized in that, described bar portion (21) at least local has the cross section less than described head (12), thus make the resistance of the unit length in described bar portion (21) be greater than the resistance of the unit length in described head (1).
2. device according to claim 1, is characterized in that, the cross section of described bar portion (21) is less by 50% than the cross section of described head (12).
3. device according to claim 1 and 2, it is characterized in that, described head (12) transits to the bar portion (21) with circular cross section when forming tapered portion section (22), wherein, the length of described bar portion (21) is greater than the diameter of described bar portion (21).
4. device according to claim 3, is characterized in that, described head has circular cross section.
5. device according to claim 1, is characterized in that, the cross section of described leg (24) is greater than the cross section in described bar portion.
6. device according to claim 5, is characterized in that, the cross section of described leg (24) equals the cross section of described head (12).
7. device according to claim 1, is characterized in that, the axial length of described head (12) equals the diameter of described head (12).
8. device according to claim 1, is characterized in that, described heating member (10) by least one winding wire rod form.
9. device according to claim 1, it is characterized in that, described head (12) has the passage (14) for holding described heating member (10), and described heating member (10) is fixed in described passage (14).
10. device according to claim 9, is characterized in that, described passage (14) extends transverse to the bearing of trend of described bar portion (21).
11. devices according to claim 9, is characterized in that, described heating member (10) is fixed in described passage (14) by bolt (15).
12. devices according to claim 1, it is characterized in that, described head (12) has the contact arm (16) of the described heating member of supporting (10), wherein, described heating member (10) is designed to the wire rod extending side by side winding, and described wire rod is placed in the thread groove (18) of described contact arm (16).
13. devices according to claim 12, is characterized in that, wait that the spiral winding portion section inserted in described thread groove (18) is inserted in sleeve pipe (20).
14. devices according to claim 1, it is characterized in that, described leg (24) has truncated cone portion section (26), and the insertion of described truncated cone portion section (26) is formed in the tapered hole (37) of the contact plate of described power supply component (36).
15. devices according to claim 14, it is characterized in that, adjacent in the end portion section that the diameter of described truncated cone portion section (26) reduces have outside screw (27), nut (35) can be screwed on described outside screw (27), wherein, described nut (35) is rotated locking by retainer (31).
16. 1 kinds for electrically and mechanical connection be used for the heating member (10) of heating installation (6) of the pedestal (5) adding hot CVD reactor (1) and the device of power supply component (36), described device has the head (12) for being connected with described heating member (10), for the leg (24) be connected with contact element (36) and the bar portion (21) be arranged between described head (12) and leg (24), it is characterized in that, described head (12) forms contact devices (14, 16), the heating member (10) be made up of spiral winding is by described contact devices (14, 16) with described head (12) machinery and can be electrically connected.
17. 1 kinds for electrically and mechanical connection be used for the heating member (10) of heating installation (6) of the pedestal (5) adding hot CVD reactor (1) and the device of power supply component (36), described device has the head (12) for being connected with described heating member (10), for the leg (24) be connected with contact element (36) and the bar portion (21) be arranged between described head (12) and leg (24), it is characterized in that, described leg (24) has truncated cone portion section (26), described truncated cone portion section (26) transits to external thread part section (27) by its truncated cone end.
18. 1 kinds for adding the heating installation of the pedestal (5) of hot CVD reactor (1), described heating installation has power supply component (36) and at least one heating member (10), it is characterized in that, described heating member (10) by as device in any one of the preceding claims wherein with as described in power supply component (36) be connected.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102013113049.6A DE102013113049A1 (en) | 2013-11-26 | 2013-11-26 | Contact device for connecting a heating element with a contact plate and heating device with such a contact device |
| DE102013113049.6 | 2013-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204589299U true CN204589299U (en) | 2015-08-26 |
Family
ID=53045292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420716860.0U Expired - Fee Related CN204589299U (en) | 2013-11-26 | 2014-11-25 | Connect the contact device of heating member and contact plate and there is the heating installation of this device |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN204589299U (en) |
| DE (1) | DE102013113049A1 (en) |
| TW (1) | TWM516811U (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014112645A1 (en) | 2014-09-03 | 2016-03-03 | Aixtron Se | heater |
| DE102019107857A1 (en) | 2019-03-27 | 2020-10-01 | Aixtron Se | Heating device for a susceptor of a CVD reactor |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2625634A (en) * | 1950-08-30 | 1953-01-13 | Wiegand Co Edwin L | Electric heating |
| US4292504A (en) | 1979-10-02 | 1981-09-29 | Tutco, Inc. | Expanded metal electric heating element with edge support |
| US5759281A (en) | 1997-06-30 | 1998-06-02 | Emcore Corporation | CVD reactor for uniform heating with radiant heating filaments |
| WO2006060134A2 (en) | 2004-11-15 | 2006-06-08 | Cree, Inc. | Restricted radiated heating assembly for high temperature processing |
-
2013
- 2013-11-26 DE DE102013113049.6A patent/DE102013113049A1/en not_active Withdrawn
-
2014
- 2014-11-25 CN CN201420716860.0U patent/CN204589299U/en not_active Expired - Fee Related
- 2014-11-26 TW TW103220998U patent/TWM516811U/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE102013113049A1 (en) | 2015-05-28 |
| TWM516811U (en) | 2016-02-01 |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150826 Termination date: 20211125 |